• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.11-11
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• 2010

Thin-film-transistors (TFTs) that can be deposited at low temperature have recently attracted lots of applications such as sensors, solar cell and displays, because of the great flexible electronics and transparent. Transparent and flexible transistors are being required that high mobility and large-area uniformity at low temperature [1]. But, unfortunately most of TFT structures are used to be $SiO_2$ as gate dielectric layer. The $SiO_2$ has disadvantaged that it is required to high driving voltage to achieve the same operating efficiency compared with other high-k materials and its thickness is thicker than high-k materials [2]. To solve this problem, we find lots of high-k materials as $HfO_2$, $ZrO_2$, $SiN_x$, $TiO_2$, $Al_2O_3$. Among the High-k materials, $Al_2O_3$ is one of the outstanding materials due to its properties are high dielectric constant ( ~9 ), relatively low leakage current, wide bandgap ( 8.7 eV ) and good device stability. For the realization of flexible displays, all processes should be performed at very low temperatures, but low temperature $Al_2O_3$ grown by sputtering showed deteriorated electrical performance. Further decrease in growth temperature induces a high density of charge traps in the gate oxide/channel. This study investigated the effect of growth temperatures of ALD grown $Al_2O_3$ layers on the TFT device performance. The ALD deposition showed high conformal and defect-free dielectric layers at low temperature compared with other deposition equipments [2]. After ITO was wet-chemically etched with HCl : $HNO_3$ = 3:1, $Al_2O_3$ layer was deposited by ALD at various growth temperatures or lift-off process. Amorphous InGaZnO channel layers were deposited by rf magnetron sputtering at a working pressure of 3 mTorr and $O_2$/Ar (1/29 sccm). The electrodes were formed with electron-beam evaporated Ti (30 nm) and Au (70 nm) bilayer. The TFT devices were heat-treated in a furnace at $300^{\circ}C$ and nitrogen atmosphere for 1 hour by rapid thermal treatment. The electrical properties of the oxide TFTs were measured using semiconductor parameter analyzer (4145B), and LCR meter.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.58-58
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• 1999

The diamond films which can be applied to SOD (silicon-on-diamond) structure were deposited on Si(100) substrate using CO/H2 CH4/H2 source gases by microwave plasma chemical vapor deposition(MPCVD), and SOD structure have been fabricated by poly-silicon film deposited on the diamond/Si(100) structure y low pressure chemical vapor deposition(LPCVD). The phase of the diamond film, surface morpholog, and diamond/Si(100) interface were confirmed by X-ray diffraction(XRD), scanning electron microscopy(SEM), atomic force microscopy(AFM), and Raman spectroscopy. The dielectric constant, leakage current and resistivity as a function of temperature in films are investigated by C-V and I-V characteristics and four-point probe method. The high quality diamond films without amorphous carbon and non-diamond elements were formed on a Si(100), which could be obtained by CO/H2 and CH4/H2 concentration ratio of 15.3% and 1.5%, respectively. The (111) plane of diamond films was preferentially grown on the Si(100) substrate. The grain size of the films deposited by CO/H2 are gradually increased from 26nm to 36 nm as deposition times increased. The well developed cubo-octahedron 100 structure nd triangle shape 111 are mixed together and make smooth and even film surface. The surface roughness of the diamond films deposited by under the condition of CO/H2 and CH4/H2 concentration ratio of 15.3% and 1.5% were 1.86nm and 3.7 nm, respectively, and the diamond/Si(100) interface was uniform resistivity of the films deposited by CO/H2 concentration ratio of 15.3% are obtained 5.3, 1$\times$10-9 A/cm, 1 MV/cm2, and 7.2$\times$106 $\Omega$cm, respectively. In the case of the films deposited by CH4/H2 resistivity are 5.8, 1$\times$10-9 A/cm, 1 MV/cm, and 8.5$\times$106 $\Omega$cm, respectively. In this study, it is known that the diamond films deposited by using CO/H2 gas mixture as a carbon source are better thane these of CH4/H2 one.

• Journal of Korean Society of Environmental Engineers
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• v.33 no.5
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• pp.332-339
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• 2011

Effects of powdered activated carbon impregnated by iron oxide nano particle (Impregnated PAC) on the microfiltration (MF) membrane system performance in NOM removal from water were investigated in this study. A fluidized bed column was employed as a pretreatment of MF membrane process. The Impregnated PAC bed was stably maintained at an upflow rate of 63 m/d without leakage of the Impregnated PAC particles, which provided a contact time of 29 minutes. A magnetic ring at the upper part of the column could effectively hold the overflowing discrete particles. The Impregnated PAC column demonstrated a significant enhancement in the MF membrane performance in terms of fouling prevention and natural organic matter (NOM) removal. Trans-membrane pressure of the MF membrane increased to 41 kPa in 98 hours of operation, while it could be maintained at 12 kPa with the Impregnated PAC pretreatment. Removal of NOM determined by dissolved organic carbon and UV254 was also enhanced from 46% and 51% to 75% and 84%, respectively, by the pretreatment. It was found that the Impregnated PAC effectively removed a wide range of different molecular-sized organic compounds from size exclusion analysis.

• Proceedings of the KACD Conference
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• 2001.05a
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• pp.235-237
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• 2001

;Dentistry has benefited from tremendous advances in technology with the introduction of new techniques and materials, and patients are aware that esthetic approaches in dentistry can change one's appearance. Increasingly. tooth-colored restorative materials have been used for restoration of posterior teeth. Tooth-colored restoration for posterior teeth can be divided into three categories: 1) the direct techniques that can be made in a single appointment and are an intraoral procedure utilizing composites: 2) the semidirect techniques that require both an intraoral and an extraoral procedure and are luted chairside utilizing composites: and 3) the indirect techniques that require several appointments and the expertise of a dental technician working with either composites or ceramics. But, resin restoration has inherent drawbacks of microleakage. polymerization shrinkage, thermal cycling problems. and wear in stress-bearing areas. On the other hand, Ceramic restorations have many advantages over resin restorations. Ceramic inlays are reported to have less leakage than resin restoration and to fit better. although marginal fidelity depends on technique and is laboratory dependent. Adhesion of luting resin is more reliable and durable to etched ceramic material than to treated resin composite. In view of color matching, periodontal health. resistance to abrasion, ceramic restoration is superior to resin restorationl. Materials which have been used for the fabrication of ceramic restorations are various. Conventional powder slurry ceramics are also available. Castable ceramics are produced by centrifugal casting of heat-treated glass ceramics. and machinable ceramics are feldspathic porcelains or cast glass ceramics which are milled using a CAD/CAM apparatus to produce inlays (for example, Cered. They may also be copy milled using the Celay apparatus. Pressable ceramics are produced from feldspathic porcelain which is supplied in ingot form and heated and moulded under pressure to produce a restoration. Infiltrated ceramics are another class of material which are available for use as ceramic inlays. An example is $In-Ceram^{\circledR}$(Vident. California, USA) which consists of a porous aluminum oxide or spinell core infiltrated with glass and subsequently veneered with feldspathic porcelain. In the 1980s. the development of compatible refractory materials made fabrication easier. and the development of adhesive resin cements greatly improved clinical success rates. This case report presents esthetic ceramic inlays for posterior teeth.teeth.

• KIPS Transactions on Computer and Communication Systems
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• v.7 no.7
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• pp.183-194
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• 2018

With the rapid development of IoT(Internet of Things) technology, various convenient services such as smart home and smart city have been realized. However, IoT devices in unmanned environments are exposed to various security threats including eavesdropping and data forgery, information leakage due to unauthorized access. To build a secure IoT environment, it is necessary to use proper cryptographic technologies to IoT devices. But, it is impossible to apply the technologies applied in the existing IT environment, due to the limited resources of the IoT devices. In this paper, we survey the classification of IoT devices according to the performance and analyze the security requirements for IoT devices. Also we survey and analyze the use of cryptographic technologies in the current status of IoT open standard platform such as AllJoyn, oneM2M, IoTivity. Based on the research of cryptographic usage, we examine whether each platform satisfies security requirements. Each IoT open platform provides cryptographic technology for supporting security services such as confidentiality, integrity, authentication an authorization. However, resource constrained IoT devices such as blood pressure monitoring sensors are difficult to apply existing cryptographic techniques. Thus, it is necessary to study cryptographic technologies for power-limited and resource constrained IoT devices in unattended environments.

• Journal of Korean Neurosurgical Society
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• v.48 no.6
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• pp.490-495
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• 2010

Objective : Bone cement augmentation procedures such as percutaneous vertebroplasty and balloon kyphoplasty have been shown to be effective treatment for acute or subacute osteoporotic vertebral compression fractures. The purpose of this study was to determine the efficacy of bone cement augmentation procedures for long standing osteoporotic vertebral compression fracture with late vertebral collapse and persistent back pain. Methods : Among 278 single level osteoporotic vertebral compression fractures that were treated by vertebral augmentation procedures at our institute, 18 consecutive patients were included in this study. Study inclusion was limited to initially, minimal compression fractures, but showing a poor prognosis due to late vertebral collapse, intravertebral vacuum clefts and continuous back pain despite conservative treatment for more than one year. The subjects included three men and 15 women. The mean age was 70.7 with a range from 64 to 85 years of age. After postural reduction for two days, bone cement augmentation procedures following intraoperative pressure reduction were performed. Imaging and clinical findings, including the level of the vertebra involved, vertebral height restoration, injected cement volume, local kyphosis, clinical outcome and complications were analyzed. Results : The mean follow-up period after bone cement augmentation procedures was 14.3 months (range 12-27 months). The mean injected cement volume was 4.1 mL (range 2.4-5.9 mL). The unipedicular approach was possible in 15 patients. The mean pain score (visual analogue scale) prior to surgery was 7.1, which decreased to 3.1 at 7 days after the procedure. The pain relief was maintained at the final follow up. The kyphotic angle improved significantly from $21.2{\pm}4.9^{\circ}$ before surgery to $10.4{\pm}3.8^{\circ}$ after surgery. The fraction of vertebral height increased from 30% to 60% after bone cement augmentation, and the restored vertebral height was maintained at the final follow up. There were no serious complications related to cement leakage. Conclusion : In the management of even long-standing osteoporotic vertebral compression fracture for over one year, bone cement augmentation procedures following postural reduction were considered safe and effective treatment in cases of non-healing evidence.

• Journal of Veterinary Clinics
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• v.29 no.5
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• pp.368-371
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• 2012

The present study evaluated the outcome of use of thoracostomy tube tunneling technique under the latissimus dorsi muscle for the evacuation of postoperative pneumothorax induced by thoracotomy in 11 dogs. A stab incision was made through the skin and the latissimus dorsi muscle over the rib in the fifth intercostal space caudal to a surgical window. The thoracostomy tube with a Kelly hemostat was advanced into the thoracic cavity in a cranioventral direction through the sublatissimal tunnel. After tube placement, a # 1 nylon horizontal mattress suture was placed around the skin incision. The thoracostomy tube was removed after creating a negative pressure in the thoracic cavity. Dogs were monitored after surgery for pneumothorax, subcutaneous emphysema, clinical signs including dyspnea, and tube kinking in a muscle tunnel using physical examination and postoperative radiography. There was no tube kinking in the sublatissimal tunnel in 11 dogs on introducing the tubes into the thoracic cavity. The mean (${\pm}SD$) follow-up period was $19{\pm}10$ months. On postoperative radiography, there was no evidence of pneumothorax in 11 dogs. Subcutaneous emphysema was identified around the stab incision in a dog postoperatively. The subcutaneous emphysema disappeared spontaneously within 3 days. On postoperative physical examination, there was no evidence of dyspnea in 11 dogs. Our results suggest that the sublatissimal tunneling technique for thoracostomy tube placement is effective to prevent air leakage around the thoracostomy tube while the tube remains in the thoracic cavity and along the thoracostomy tunnel after tube removal. Tunneling under the latissimus dorsi muscle should be considered the thoracostomy tube placement technique to prevent iatrogenic pneumothorax with first priority.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.477-477
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• 2008

For more than three decades, the gate dielectrics in CMOS devices are $SiO_2$ because of its blocking properties of current in insulated gate FET channels. As the dimensions of feature size have been scaled down (width and the thickness is reduced down to 50 urn and 2 urn or less), gate leakage current is increased and reliability of $SiO_2$ is reduced. Many metal oxides such as $TiO_2$, $Ta_2O_4$, $SrTiO_3$, $Al_2O_3$, $HfO_2$ and $ZrO_2$ have been challenged for memory devices. These materials posses relatively high dielectric constant, but $HfO_2$ and $Al_2O_3$ did not provide sufficient advantages over $SiO_2$ or $Si_3N_4$ because of reaction with Si substrate. Recently, $HfO_2$ have been attracted attention because Hf forms the most stable oxide with the highest heat of formation. In addition, Hf can reduce the native oxide layer by creating $HfO_2$. However, new gate oxide candidates must satisfy a standard CMOS process. In order to fabricate high density memories with small feature size, the plasma etch process should be developed by well understanding and optimizing plasma behaviors. Therefore, it is necessary that the etch behavior of $HfO_2$ and plasma parameters are systematically investigated as functions of process parameters including gas mixing ratio, rf power, pressure and temperature to determine the mechanism of plasma induced damage. However, there is few studies on the the etch mechanism and the surface reactions in $BCl_3$ based plasma to etch $HfO_2$ thin films. In this work, the samples of $HfO_2$ were prepared on Si wafer with using atomic layer deposition. In our previous work, the maximum etch rate of $BCl_3$/Ar were obtained 20% $BCl_3$/ 80% Ar. Over 20% $BCl_3$ addition, the etch rate of $HfO_2$ decreased. The etching rate of $HfO_2$ and selectivity of $HfO_2$ to Si were investigated with using in inductively coupled plasma etching system (ICP) and $BCl_3/Cl_2$/Ar plasma. The change of volume densities of radical and atoms were monitored with using optical emission spectroscopy analysis (OES). The variations of components of etched surfaces for $HfO_2$ was investigated with using x-ray photo electron spectroscopy (XPS). In order to investigate the accumulation of etch by products during etch process, the exposed surface of $HfO_2$ in $BCl_3/Cl_2$/Ar plasma was compared with surface of as-doped $HfO_2$ and all the surfaces of samples were examined with field emission scanning electron microscopy and atomic force microscope (AFM).

• Journal of Korean Tunnelling and Underground Space Association
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• v.19 no.2
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• pp.283-299
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• 2017

The leakage of tunnel causes the long-term durability of the structures such as concrete lining to deteriorate. The cause of durability degradation can be various substances contained in groundwater such as chloride, sulphate, water, and gas. In this study, a series of test were carried out to determine the watertightness performance and the resistance to salt water of the spray-applied membrane used as non-structural rock support or as a waterproof material for tunnels. As a result, it was found that the penetration of water could occur in a specimen, and the reason was that the internal pores generated by the mixing of the liquid polymer and the powder material and the internal pores were connected by the water pressure. The tensile strength of the test specimens immersed in distilled water and saline water was found to be reduced to less than half of the tensile strength in normal condition. In addition, The elongation was measured to be higher in distilled water than in salt water. However, this result will require further investigation.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.28 no.5
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• pp.535-542
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• 2015

A reactor containment acts as a final barrier to prevent leakage of radioactive material due to the possible reactor accidents into external environment. Because of the functional importance of the containment building, the SIT(Structural Integrity Test) for containments shall be performed to evaluate the structural acceptability and demonstrate the quality of construction. In this paper, numerical analyses are presented, which simulate the results obtained from the SIT for a prestressed concrete(PSC) structure. A sophisticate structural analysis model is developed to simulate the structural behavior during the SIT properly based on various preliminary analysis results considering contact condition among structural elements. From the comparison of the analysis and test results based on the acceptance criteria of ASME CC-6000, it can be concluded that the construction quality of the containment has been well maintained and the acceptable performance of new design features has been verified.