• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.424-427
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• 2002

Pneumatic control systems have the potential to provide high output power to weight and size ratios at a relatively low cost. However, they are mainly employed in open-loop control applications where positioning repeatability is not of great importance. This paper presents precision positioning control of pneumatic servo cylinder with on-off valve, Pneumatic low-friction cylinder with servo valve and DC servo motor under parameter variations. Basically positioning control uses PID controller, where needs a linearized model. A neural network is added to a PID controller to compensator nonlinearity of the system and an influence of friction force is consider as disturbance. The performances of the proposed algorithms were compared by experiments with them of PID controller. From those experiments is was shown that the proposed algorithms are more efficient about settling time, steady 7tate error and overshoot than PID control algorithm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.9
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• pp.1011-1017
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• 2011

Servo control loops are a core part in the control architecture of machine tools. Servo control loops manage acceleration, velocity and position of all the axes in a machine tool based on commands. The performance of servo control loops sets the basis for quality of production paris and cycle time reduction. First, this paper presents a general control architecture of machine tools and several control schemes in literature, which can be applicable to machine tools control; including Zero Phase Error Tracking Control (ZPETC) and Cross Coupling Control (CCC). After that, modem control strategies to mitigate the problem of high speed machining are reviewed. In high speed machining, high accelerations excite the machine structure up to high frequencies, thereby exciting the structure's modes of vibration. These structural vibrations need to be damped if accurate positioning or trajectory following is required. Input shaping is an attractive option in dealing with structural vibrations. The advantages and drawbacks of using input shaping technique for machine tools are discussed in detail.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.741-744
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• 2002

The closed circuit pump is applied to control rotating speed and direction of hydraulic motor in hydrostatic transmission. To development of this pump, first of all the servo control regulator has to be designed. Mechanical-hydraulic type servo control mechanism is excellent to be compared with electronic-hydraulic type servo control valve to reliability and economy. In this paper to development positive and negative variable displacement type servo regulator, the hydro-mechanical servo control mechanism is calculated and designed with force balance of pilot piston and position feedback of servo piston.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.12
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• pp.45-56
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• 2002

A pneumatic servo system requiring a fine gap control in a photo-electric sensor which is used for a LCD array detection device is introduced. The gap controlled by the pneumatic servo system remains within around 50~80 ${\mu}{\textrm}{m}$, and the system possesses an effect to eliminate undesirable particles on the LCD plate by blowing air out. The air flow rate is initially controlled by a servo valve and expanded by a booster valve, thus the controlled air pressure contributes to maintaining an appropriate gap between the LCD plate and photo-electric sensor An air floating plate of two degrees of freedom is designed and fabricated, and a fine tilting motion control is also implemented by assigning different gap commands. The pressure control and direct gap control are proposed, and each performance is verified experimentally.

• Proceedings of the KIPE Conference
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• 1998.10a
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• pp.91-96
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• 1998

This study aims to realize high precision repetitive positioning control of the linear servo motor. The authors have previously improved the repeatability positioning precision by employing a two-degree-of-freedom PID controller in the positioning control, rather than equal distance positioning, and investigates the repeatability positioning precision.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.2
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• pp.168-175
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• 2011

Contouring accuracy of CNC machine tools is very important for high-speed and high-precision machining. In particular, large contour error may occur during corner tracking. In order to reduce the corner contouring error, acceleration and deceleration control or tool-path planning methods have been suggested. However, they do not directly control the corner contouring error. In the meantime, network servo systems are widely used because of their easiness of building and cost effectiveness. Communication latency between the master controller and servo drives, however, may deteriorate contouring accuracy especially during corner tracking. This paper proposes a control strategy that can accurately calculate and directly control the corner contouring error. A prediction control is combined with the above control to cope with communication latency. The proposed control method is evaluated through computer simulation and experiments. The results show its validity and usefulness.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.10a
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• pp.77-78
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.577-578
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• 2010