• International Journal of Precision Engineering and Manufacturing
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• v.2 no.4
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• pp.75-80
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• 2001

An error analysis is very important to estimate performance of a precision machine. This study proposes an error analysis for a new parallel device, a cubic parallel device. The cubic parallel manipulator has error sources including upper and lower universal joint errors due to the directional changes in the link and actuation errors. The maximum errors of the end effector are affected by the axial direction changes of each links and the clearances of the universal joints when the parallel manipulator is moving along a path. It is found that the changes of errors mostly occur at the positions where the directions of exerting link forces shift. The error analysis is based on an error model formed from the relation between the universal point errors and the end-effector accuracy. The analysis method can be also used in predicting the accuracy of other parallel devices.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.12
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• pp.14-23
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• 1999

This paper proposes a method to generate the velocity trajectory which guarantees user specified contour errors at corners for high speed and high precision motion control of CNC machines. The relation among the desired trajectory, system bandwidth and corner contour error are derived. Experiments show that the corner contour error specified by users can be guaranteed with the proposed velocity trajectory.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.10a
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• pp.187-192
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• 1993

Thermal deformation causes large amount of machine tool errors. In order to compensate for thermal and geometric errors of the machine tool an off-line geometric adaptive control (GAC) scheme was developed. THe GAC method was realized by using a measuring plate made of precision spheres. Error vectors and volumetric errors were measured by the measuring plate. Error compensation models were obtained from error vectors and a kinematic chain of machine tools. Reliability of the GAC system of thermal and geometric errors were confrimed by large amount of experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.10a
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• pp.577-578
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1992.04a
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• pp.237-241
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• 1992

Error calibration and frequent reverification of coordinate measuring machines(CMMs) and machine tools are currently acknowledge as essential processes in order to maintain high performance of the machines and high quality of products. This paper shows a micro computer integrated circular error calibration system, which is fast and efficient error calibration system

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.515-516
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.12
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• pp.115-120
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• 2000

Increasing demands on precision machining of free-form surface have necessitated that the tool to move not only position error as small as possible, but also with smoothly varying feedrates. This paper presents new algorithm for high precision 3D(3-dimensional) NURBS(Non-Uniform Rational B-Spline) interpolation in the reference-pulse technique. Based o the minimum path error strategy, interpolation algorithm was designed to follow the NURBS curve. Using this algorithm a real-time 3D NURBS interpolator was developed in software. The algorithm implemented in a PC showed promising results in interpolation error and speed performance. It is expected that this can be applied to the CNC systems for the high precision machining of complex shapes.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.465-468
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• 2001

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into positioning characteristics. A one-dimensional aerostatic ceramic stage with ballscrew driven and laser scale feedback system is manufactured, aiming at investigating positioning characteristic of ultra-precision stage. We confirm, this ceramic aerostatic stage has a 10nm micro resolution, and can be reduced mean of position error by compensation of numeric control command. By means of analyzing relationship of position error and change of temperature, we build a on-line compensation algorithm of position error from the measured temperature data. So we can improve repeatability of ultra-precision stage up to 34%($0.095{\mu}$) of the normal condition.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.66.6-66
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• 2001

In this paper, we studied the error compensation using an error budget method for repeatability improvement of the precision positioning system. The precision positioning system is developed for micro-pressing machine. We performed the force and displacement analysis about parts of the system. Proposed system determines the position and orientation of the materials manufactured by micro-pressing machine. It is consisted of x-y-z linear stages setting the position, and the gripper system setting the orientation. We executed kinematic and dynamic modeling of the whole precision positioning system. By generalizing the design variables, precision positioning system has the flexibility of material dimension. As we tried an error compensation using ...