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PECVD와 고상결정화 방법을 이용한 poly-SiGe 박막의 제조

  • 이정근;이재진
    • Proceedings of the Korean Vacuum Society Conference
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    • 1998.02a
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    • pp.55.2-55
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    • 1998
  • 다견정 심리판-거l르마늄(JXlly-SiGe)은 TFT(thin-film transistor)와 갇븐 소자 응용에 있어서 중요한 불칠이다 .. LPCVD (low pressure chemical vapor deposition) 방법으로 비정칠 SiGc (a-SiGe) 박막올 증 착시키고 고상결정화(SPC: solid-phase crystallization)시켜 poly-SiGc옹 얻는 것은 잘 알려져 있다. 그러 나 그러나 PF'||'&'||'pound;VD-SPC 방법올 이용한 poly-SiGc의 제조에 대해서는 아직 두드러지게 연구된 바 없다. 우리단 PF'||'&'||'pound;VD 방법으로 a-SiGc 박막올 증착시키고 고상캘정화시켜 poly-SiGc올 얻었 R며, :~ 결정성, G Gc 농도, 결정핍의 평끌 크기 눔올 XRD (x-ray diffraction) 방법으호 조사하였다. 특히 pr'||'&'||'pound;VD 증착시 가판온도,Gc 함유량 등이 고상화에 미치는 영향에 대해서 조사하였다. P PECVD 장치는 터보펌프콸 사용하여 71저진공이 2xlOlongleftarrow5 Torr에 이르렀다. 가판윤 SiOOO) 웨이퍼륜 사용하고 기판 온도는 약 150- 35()"C 사이에서 변화되었다. 증착가스는 SiH4, GcH4, 112 등흘 썼다. 증착 압력과 r.f 전력용 각각 O.25ToIT와 3W로 일정하게 하였다 .. Gc 함유량(x)은 x x=O.O-O.5 사이에서 변화되었다 .. PECVD모 증착된 SiGc 박막들은 고상결정화를 위해 $\theta$X)"(:: Nz 분위기에서 24시간동안, 혹은 5OO'C에서 4열간 가열되었다. 고상결정화 후 poly-SiGc 박막은 SiGc(Ill), (220), (311) XRD 피크들올 보여주었으며, 각 피 크들은 poly-Si에 비하여 왼쪽으로 Bragg 각이 이동되었고, Vegard’slaw에 의해서 x의 값올 확 인할 수 있었다. 이것온 RBS 결과와 열치하였다. 약 150-350'C 사이에서 변화된 기판온도의 범위 에서 증착온도가 낮올수콕 견정립의 크기는 대체로 증가하는 것으로 나타났다 .. XHD로 추정된 형 균 결정립의 크기는 최대 약 3$\alpha$1m 정도였다. 또한 같끈 샘플뜰에 대해서 기판온도가 낮올수록 증착속도가 증가함옴 확인하였다 .. Gc 함유량이 x=O.1에서 x=O.5로 증가함에 따라서도 결정립의 크기와 SiGc 증착속도는 증가하는 것으로 나타났다 .. Hwang [1] , Kim[2] 둥의 연구자들은 Gc 함유 량이 증가함에 따라 결정 립 크기가 캄소하는 것올 보고하였으냐, Tsai [3] 둥은 반대의 결과플 보 고하고 Ge 힘유량의 증가시 결정립 크기의 증가에 대해 Gc의 Si보다 낮은 융점 (melting point) 올 강조한 바 있다. 결정립 크기의 증가는 대체로 SiGe 중착속도의 증가와도 관련이 있음올 볼 때, poly-SiGc의 경우에도 polv-Si의 고상화에서와 같이 증착속도가 빠를수록 최종적언 결정럽의 크기가 커지는 것으로 이해될 수도 있다 .. PECVD 증착시 증착속도의 증가는 증착된 박딱에서의 무켈서도를 증 가시킬 수 있음올 고려하면, 이라한 결파플온 p이y-SiGc의 고상결정화에서도 ploy-Si의 고상결정 화에서와 마찬가지로 초기 박막에서의 구조직 무절서도가 클수록, 고상결정화 후 결정 립의 크기 가 커칠 수 있음올 보여준다고 생각휠 수 있다,

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Comparison of Seed Germinating Vigor, Early Germination Speed and Germination Peak Time in Perennial Ryegrass Cultivars under Different Germination Conditions (발아환경에 따른 퍼레니얼 라이그래스 품종간 발아력, 기발아속도 및 발아피크기간 비교)

  • Kim, Kyoung-Nam
    • Weed & Turfgrass Science
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    • v.2 no.3
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    • pp.274-282
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    • 2013
  • Research was initiated to investigate early germination and establishment characteristics of perennial ryegrass (PR, Lolium perenne L.). An alternative condition was applied in Experiment I with 8-hr light at $25^{\circ}C$ and 16-hr dark at $15^{\circ}C$ (ISTA condition). Experiment II was conducted under $5^{\circ}C$ to $25^{\circ}C$ (natural condition). Significant differences were observed in germination percentage, germination speed and germination peak time. Seed germinating vigor was 66.00 to 93.75% under ISTA and 66.25 to 93.50% under natural conditions. Germination speed, measured as days to germination of 50% through 90%, was much faster with 'Pennant II', 'Brightstar II', 'Sonata' and 'Accent II' under ISTA conditions. But it was faster only with 'Pennant II' and 'Brightstar II' under natural conditions. Germination peak time ranged 1.48 to 5.65 days under ISTA, while 2.17 to 10.63 days under natural conditions. Regardless of growing conditions, the shortest cultivars in peak time were 'Sonata', 'Pennant II', and 'Brightstar II' and the longest one 'Revenge GLX'. Considering germinating vigor, early germination speed and germination peak time, 'Pennant II', 'Brightstar II', 'Sonata' and 'Accent II' were regarded as excellent cultivars under ISTA conditions, while 'Pennant II' and 'Brightstar II' under natural conditions.

Physicochemical Quality Characteristics of Several Chinese Cabbage (Brassica pekinensis RuPR) Cultivars (몇가지 배추 품종의 이화학적 품질 특성)

  • Kim, Jae-Young;Lee, Eun-Ji;Park, Seung-Kook;Choi, Geun-Won;Baek, Nam-Kwon
    • Horticultural Science & Technology
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    • v.18 no.3
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    • pp.348-352
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    • 2000
  • Four different Chinese cabbage cultivars were compared for their physicochemical quality characteristics including crude fiber, chlorophyll, firmness, hardness, sugar, and flavor at different parts of the cabbages. No significant difference in crude fiber content was observed among cultivars. Chlorophyll content in midrib was not significantly different among cultivars, however Chlorophyll content in leaf of 'Golden House' and 'Golden Spring' were greater than that of 'Alpine Summer' Firmness was the highest in 'Golden House' and 'Golden Spring' but hardness was not significantly different among cultivars. Sugar content was higher in midrib than in leaf. 'Golden Spring' a showed the highest sugar content in midrib. Glucose content was higher than the fructose content in leaf, but was opposite in midrib. Sensory evaluation showed that 'Golden House' and 'Golden Spring' were the best in yellowness, and 'Golden House' and 'Alpine Summer' were the best for their taste and aroma in midrib, however, no significant difference in texture was observed among cultivars.

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Isolation of CONSTANS as a TGA4/OBF4 Interacting Protein

  • Song, Young Hun;Song, Na Young;Shin, Su Young;Kim, Hye Jin;Yun, Dae-Jin;Lim, Chae Oh;Lee, Sang Yeol;Kang, Kyu Young;Hong, Jong Chan
    • Molecules and Cells
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    • v.25 no.4
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    • pp.559-565
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    • 2008
  • Members of the TGA family of basic domain/leucine zipper transcription factors regulate defense genes through physical interaction with NON-EXPRESSOR OF PR1 (NPR1). Of the seven TGA family members, TGA4/octopine synthase (ocs)-element-binding factor 4 (OBF4) is the least understood. Here we present evidence for a novel function of OBF4 as a regulator of flowering. We identified CONSTANS (CO), a positive regulator of floral induction, as an OBF4-interacting protein, in a yeast two-hybrid library screen. OBF4 interacts with the B-box region of CO. The abundance of OBF4 mRNA cycles with a 24 h rhythm under both long-day (LD) and short-day (SD) conditions, with significantly higher levels during the night than during the day. Electrophoretic mobility shift assays revealed that OBF4 binds to the promoter of the FLOWERING LOCUS T (FT) gene, a direct target of CO. We also found that, like CO and FT, an OBF4:GUS construct was prominently expressed in the vascular tissues of leaf, indicating that OBF4 can regulate FT expression through the formation of a protein complex with CO. Taken together, our results suggest that OBF4 may act as a link between defense responses and flowering.

Climatological variability of surface particulate organic carbon (POC) and physical processes based on ocean color data in the Gulf of Mexico

  • Son, Young-Baek;Gardner, Wilford D.
    • Korean Journal of Remote Sensing
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    • v.27 no.3
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    • pp.235-258
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    • 2011
  • The purpose of this study is to investigate climatological variations from the temporal and spatial surface particulate organic carbon (POC) estimates based on SeaWiFS spectral radiance, and to determine the physical mechanisms that affect the distribution of pac in the Gulf of Mexico. 7-year monthly mean values of surface pac concentration (Sept. 1997 - Dec. 2004) were estimated from Maximum Normalized Difference Carbon Index (MNDCI) algorithm using SeaWiFS data. Synchronous 7-year monthly mean values of remote sensing data (sea surface temperature (SST), sea surface wind (SSW), sea surface height anomaly (SSHA), precipitation rate (PR)) and recorded river discharge data were used to determine physical forcing factors. The spatial pattern of POC was related to one or more factors such as river runoff, wind-derived current, and stratification of the water column, the energetic Loop Current/Eddies, and buoyancy forcing. The observed seasonal change in the POC plume's response to wind speed in the western delta region resulted from seasonal changes in the upper ocean stratification. During late spring and summer, the low-density river water is heated rapidly at the surface by incoming solar radiation. This lowers the density of the fresh-water plume and increases the near-surface stratification of the water column. In the absence of significant wind forcing, the plume undergoes buoyant spreading and the sediment is maintained at the surface by the shallow pycnocline. However, when the wind speed increases substantially, wind-wave action increases vertical motion, reducing stratification, and the sediment were mixed downward rather than spreading laterally. Maximum particle concentrations over the outer shelf and the upper slope during lower runoff seasons were related to the Loop Current/eddies and buoyancy forcing. Inter-annual differences of POC concentration were related to ENSO cycles. During the El Nino events (1997-1998 and 2002-2004), the higher pac concentrations existed and were related to high runoffs in the eastern Gulf of Mexico, but the opposite conditions in the western Gulf of Mexico. During La Nina conditions (1999-2001), low Poe concentration was related to normal or low river discharge, and low PM/nutrient waters in the eastern Gulf of Mexico, but the opposite conditions in the western Gulf of Mexico.

Non-Adrenergic Non-Cholinergic Responses of Gu mea- Pig Tracheal Smooth Muscle (기니피그 기도 평활근의 비아드레날린성 비꼴린성 반응에 관한 연구)

  • Jo, Eun-Yong;Choe, Hyeong-Ho;Jeon, Je-Yeol
    • Journal of Chest Surgery
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    • v.29 no.5
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    • pp.487-494
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    • 1996
  • The neurogenic responses of tracheal smooth muscles to electrical field stimulation (EFS) is biphasic, consisting firstly of cholinergic contraction followed by a slow and sustained relaxation. It is well known that a sustained relaxation involves the inhibitory non-adrenergic non-cholinergic systems. This study was done to Investigate the relaxing agents and their action mechanisms by use of an organ bath with plati- ilum . The tracheal smooth muscle relaxation due to EFS was suppressed by L-NAME, the WO (Nitric Oxide) synthase inhibitor, and these effects were reversed by L-arginine, the precursor of NO. Also, L-WAME (HG-nitro-L-arginine methyl ester) increased the basal tension. Nitroprusside, the NO-donor, suppressed the tracheal basal tension greatly. Methylene blue, the inhibitor of guanylate cyclase, decreased EFS-induced relaxations and increa ed basal tension. Forskolin and isoprenaline, which are activators of adenylate cyclase, suppressed tracheal basal tension in the same way as nitroprusside. TEA (tetraethylammonium), the non-specific K'channel blocker, and apamin, the Ca"-activated K'channel blocker, increased tracheal basal tension and EFS-induced relaxations. Our results indicate that Pr3 Is released upon stimulation of the NANC (Won Adrenergic Won Cholinergic) nerves in guinea-pig tracheal smooth muscle and that the release of NO related with the K+ channel, as well as the release of other inhibitory agents< e. g.)VIP (Vasoactive Intestinal Polypeptide), PHI (Peptide Histidine Isoleusine) > mediated via CAMP (cyclic Adenosine Monophosphate) may be Involved In sustained relaxation.

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Verification of Soil Volumetric Water Content Measured by TDR, FDR Sensors (TDR, FDR 센서로 측정한 토양수분 함량의 정확성 검정)

  • Hur, Seung-Oh;Jung, Kang-Ho;Park, Chan-Won;Ha, Sang-Keon;Kim, Jeong-Gyu
    • Proceedings of the Korea Water Resources Association Conference
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    • 2007.05a
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    • pp.229-235
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    • 2007
  • 관개나 수분수지 규명을 위한 기본적인 자료는 토양수분 함량이다. 그러나, 포장상태에서의 토양수분 함량은 직접 측정하는 것이 쉽지 않기 때문에 많은 경우 건조기를 이용한 중량수분 함량측정 방법을 이용하거나 토양수분 포텐셜 측정용인 텐시오미터를 이용한 토양수분의 에너지 특성을 관개에 활용하는 것이 현실이었다. 중량수분 함량은 시료를 채취해서 건조하기 때문에 시료채취 당시의 토양수분 함량을 아는 것이 어렵고, 토양수분 포텐셜은 에너지를 측정하는 것이기 때문에 이 역시 토양의 수분함량을 얻는 것이 불가능 하다. 따라서, 최근에 이런 측정상의 어려움을 극복하기 위해 여러 나라에서 포장에서의 토양수분 함량을 직접 측정하는 다양한 센서를 개발하고 있고 있다. 그 중 몇 가지는 현재 우리나라에 공급되고 있는데, 가격 등의 문제로 별로 알려져 있지는 않다. 센서는 현장에서 수분함량을 파악할 수 있는 장점이 있기 때문에 관개에 직접 적용이 가능하며 자동화시설이나 수분수지 모형 산정에도 활용할 수 있다. 본 시험은 우리나라에 소개되어 있는 몇 가지의 토양수분 측정용 센서를 현장에서 코어를 이용해 측정한 용적수분 함량과 비교하여 센서의 정확도나 이용 가능성을 검정하고자 하였다. 코어를 이용해 실측한 토양 용적수분 함량과 비교하고자 7종의 센서를 선택해 실험에 이용하였다. 가격이 비싼 것으로 알려진 TDR 형태의 센서가 2종이었으며, 나머지 5종은 FDR 형태의 센서였다. TDR 센서는 Soilmoisture사에서 제작한 MiniTrase와 Imko 사의 Trime이고, FDR은 Sentek사에서 개발한 EasyAG, EnviroSCAN과 Delta-T사에서 제작한 PR-1과 WET-2 및 Decagon사에서 제작한 $ECH_2O$ 센서였다. 실헙방법은 본량사양토인 포장에서 건조한 상태인 시험구와 물이 포화된 시험구를 만들어 놓고, 그곳에서 센서 종류별로, 측정 깊이별로 토양의 용적수분 함량을 측정하고, 센서로 측정한 위치 바로 옆에서 코어를 이용해 토양시료를 채취하고 이를 건조기에 건조해 용적수분 함량을 측정하였다. 비교결과 TDR인 MiniTrase가 결정계수$(r^2)$가 0.964이고 표준오차(SE)가 0.01로 좋은 결과를 보여줬고 WET-2가 $r^2$와 SE가 0.932와 0.013이였으며 EasyAG는 0.877과 0.0211, EnviroSCAN은 0.803과 0.0259의 값을 보였다. 일반적으로 토양수분 함량 측정오차가 1% 미만인 센서가 정확한 수분함량 해석을 유도할 것이지만 위의 센서 중 MiniTrase를 비롯한 4개의 센서 정도가 토양의 수분 함량을 측정하는데 유용할 것이라는 결론을 얻었다.

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$La_2O_3/HfO_2$ 나노 층상구조를 이용한 MIM capacitor의 특성 향상

  • O, Il-Gwon;Kim, Min-Gyu;Park, Ju-Sang;Kim, Hyeong-Jun
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2012.05a
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    • pp.82.1-82.1
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    • 2012
  • 란타늄 산화물 ($La_2O_3$) 박막은 하프늄 산화물 ($HfO_2$) 박막보다 높은 유전 상수와 높은 밴드 오프셋으로 인해 dynamic random access memory(DRAM)에서 유전체 재료로써 연구되어 왔다. 그리고 Lanthanum이 도핑된 HfO2이 더 높은 유전 상수와 낮은 누설 전류 밀도를 갖는 다는 사실이 이전에 보고 된 바 있다. 본 연구에서 우리는 ALD를 이용하여, TiN 하부 전극 위에 $La_2O_3$의 위치를 달리하는 $La_2O_3/HfO_2$의 나노 층상조직 구조(두께 10 nm)를 금속 - 절연체 - 금속 (MIM) 구조로 제작 하였다. ALD는 좋은 comformality와 넓은 지역 균일성을 가지며, 원자수준의 두께를 조절할 수 있다는 장점을 갖고 있다. 또한, 다양한 화학 물질들을 이용한 복합적 계층구조를 만들 수 있는 점과 $HfO_2$$La_2O_3$ 계층의 수직 위치를 정확하게 조절할 수 있는 점으로 본 연구에 적합한 증착 방법이다. HfO2 속에 $La_2O_3$ 층을 깊이에 따라 삽입함으로써 $HfO_2$ 계층에 La 도핑의 효과와 더불어 TiN 하부 전극 위의 $La_2O_3$$HfO_2$의 차이점을 확인 하였다. $HfO_2$$250^{\circ}C$에서 TDMAH와 물을 사용하여, $La_2O_3$은 동일한 온도에서 $La(iPrCp)_3$와 물을 사용하여 제작되었다. 화학적 구성 및 binding 구조는 X선 광전자 분광법 (XPS)을 통해 분석하였다. 전기적 특성(유전 상수 및 누설 전류)은 Capacitance-Voltage (CV)와 Current-Voltage (IV) 측정으로 확인하였다. 결과적으로, $La_2O_3$ 또는 $HfO_2$을 한 종류만 사용한 절연층의 전기적 특성보다, $La_2O_3/HfO_2$의 나노 층상조직 구조가 더 나은 특성 (누설 전류 밀도 : $5.5{\times}10^{-7}\;A/cm^2$ @-1MV/cm, EOT : 14.6)을 갖는다는 것을 확인했고, 더불어 $La_2O_3$의 흡습 성질로 인한 화학 구조와 전기적 특성의 일부 차이를 확인하였다. 본 연구에서는 $HfO_2$ 속에 $La_2O_3$층이 TiN 하부 전극 바로 위에 위치할 때, 즉, 공기 중에 노출되지 않은 $La_2O_3/HfO_2$ 구조에서 가장 좋은 특성의 MIM capacitor를 얻을 수 있었다.

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Sintering Mixtures in the Stage of Establishing Chemical Equilibrium

  • Savitskii, A.P.
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 1999.04a
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    • pp.5-5
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    • 1999
  • The Principal deficiency of the existing notion about the sintering-mixtures consists in the fact that almost no attention is focused on the Phenomenon of alloy formation during sintering, its connection with dimensional changes of powder bodies, and no correct ideas on the driving force for the sintering process in the stage of establishing chemical equilibrium in a system are available as well. Another disadvantage of the classical sintering theory is an erroneous conception on the dissolution mechanism of solid in liquid. The two-particle model widely used in the literature to describe the sintering phenomenon in solid state disregards the nature of the neighbouring surrounding particles, the presence of pores between them, and the rise of so called arch effect. In this presentation, new basic scientific principles of the driving forces for the sintering process of a two-component powder body, of a diffusion mechanism of the interaction between solid and liquid phases, of stresses and deformation arising in the diffusion zone have been developed. The major driving force for sintering the mixture from components capable of forming solid solutions and intermetallic compounds is attributed to the alloy formation rather than the reduction of the free surface area until the chemical equilibrium is achieved in a system. The lecture considers a multiparticle model of the mixed powder-body and the nature of its volume changes during solid-state and liquid-phase sintering. It explains the discovered S-and V-type concentration dependencies of the change in the compact volume during solid-state sintering. It is supposed in the literature that the dissolution of solid in liquid is realised due to the removal of atoms from the surface of the solid phase into the melt and then their diffusicn transfer from the solid-liquid interface into the bulk of liquid. It has been shown in our experimental studies that the mechanism of the interaction between two components, one of them being liquid, consist in diffusion of the solvent atoms from the liquid into the solid phase until the concentration of solid solutions or an intermetallic compound in the surface layer enables them to pass into the liquid by means of melting. The lecture discusses peculimities of liquid phase formation in systems with intermediate compounds and the role of the liquid phase in bringing about the exothermic effect. At the frist stage of liquid phase sintering the diffusion of atoms from the melt into the solid causes the powder body to grow. At the second stage the diminution of particles in size as a result of their dissolution in the liquid draws their centres closer to each other and makes the compact to shrink Analytical equations were derived to describe quantitatively the porosity and volume changes of compacts as a result of alloy formation during liquid phase sinteIing. Selection criteria for an additive, its concentration and the temperature regime of sintering to control the density the structure of sintered alloys are given.

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A Study of Differently-Abled Users' Perception of Public Relations Services in Libraries (도서관장애인서비스 이용자의 홍보에 대한 인식조사 연구)

  • Noh, Young-Hee;Ahn, In-Ja;Park, Mi-Young
    • Journal of the Korean Society for Library and Information Science
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    • v.45 no.4
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    • pp.179-207
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    • 2011
  • This study was conducted by surveying users' perception about the public libraries' current public relations, which can contribute to developing the most appropriate public relations strategies for persons with disabilities(PWDs). This study concluded, first, PWDs' experience with the PR of the library services was a very low 32.4%. Intellectual disabilities, especially, were reported to have no experience in public relations. Second, the library public relations media which PWDs utilized the most were the Internet, library bulletin boards, banners, ARS services, and podcasting, in that order. However, satisfaction with promotions appeared below average(3 points or less). On the other hand, interest in public relations media was very high. Third, it appeared that library users with disabilities most frequently use the websites of their school library, the National Library of Korea, and public libraries in that order. However, the usage rate of services and users' satisfaction with them were very low. Finally, a high demand for facilities with accessibility to PWD users emerged as a result of this study. Therefore, this study recommends greater accessibility, convenience, and ease of facility use for persons with disabilities.