• Korean Journal of Materials Research
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• v.15 no.3
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• pp.161-165
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• 2005

We investigated selective dry etching of GaAs over AlGaAs and InGaP in high density planar inductively coupled $BCl_3/SF_6$ plasmas. The process parameters were ICP source power (0-500 W), RE chuck power (0-30W) and gas composition $(60-100\%\;BCl_3\;in\;BCl_3/SF_6)$. The process results were characterized in terms of etch rate, selectivities of GaAs over AlGaAs and InGaP, surface morphology, surface roughness and residues after etching. $BCl_3/SF_6$ selective etching of GaAs showed quite good results in this study. Selectivities of GaAs $(GaAs:AlGaAs\~36:1,\;GaAs:InGaP\~45:1)$ were superior at $18BCl_3/2SF_6$, 20 W RF chuck power, 300 W ICP source power and 7.5 mTorr. Addition of $(5-15\%)SF_6\;to\;BCl_3$ produced relatively high selectivities of GaAs over AlGaAs and InGaP during etching due to decrease of etch rates of AlGaAs and InGaP (boiling points of etch products: $AlF_3\~1300^{\circ}C,\;InF_3>1200^{\circ}C$ at atmosphere) at the condition. SEM and AFM data showed slightly sloped sidewall and somewhat rough surface$(RMS\~9nm)$. XPS study on the surface of processed GaAs proved a very clean surface after dry etching. It shows that planar inductively coupled $BCl_3/SF_6$ plasmas could be a good candidate for selective dry etching of GaAs over AlGaAs and InGaP.

• Clean Technology
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• v.17 no.4
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• pp.306-313
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• 2011

Flux or solder is used in soldering process for manufacturing electronic parts such as printed circuit boards (PCB). After soldering process, residual flux and solder paste on the parts should be removed since their residuals could cause performance degradation or failure of parts due to their corrosion and electric leakage. Ozone depletion substances such as 1,1,1- trichloroethane (TCE) and HCFC-141b have widely been using for removal of residual flux and solder paste after soldering process In manufacturing of electronic parts until now. In this study, non-aqueous cleaning agents without flash point were developed and applied to industrial field for replacement of cleaning agents with ozone depletion. In order to develop non-aqueous cleaning agents without ethers, esters, fluoride- type solvents. And their physical properties and cleaning abilities were evaluated, and they were applied to industrial fields for cleaning of flux and solder on the PCB. And vacuum distillation apparatus were operated to determine their operating conditions and recycling yields for recycling of used cleaning agents formulated in this study. As a result of physical properties measurement of our formulated cleaning agents, they were expected to have good wetting and penetrating power since their surface tensions were relatively low as 18.0~20.4 dyne/$cm^2$ and their wetting indices are relatively large. And some cleaning agents holding fluoride-type solvents as their components did not have any flash point and they seemed to be safe in their handling and storage. The cleaning experimental results showed that some cleaning agents were better in their cleaning of flux and solder paste than 1,1,1-TCE and HCFC-141b. And industrial application results of the formulated cleaning agents for cleaning PCB indicated that they can be applicable to industry due to their good cleaning capability in comparison with HCFC-141b. The recycling experiments of the used formulated cleaning agents through a vacuum distillation apparatus also showed that their 91.9~97.5% could be recycled with its proper operating conditions.

• Clean Technology
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• v.18 no.3
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• pp.272-279
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• 2012

In this study, an environmental-friendly cleaning agent utilizing organic acids and various additives has been developed and applied to the field for removal of scale deposited on the cleaning beds or distribution reservoirs of the waterworks. As an analytical result of scale on the cleaning beds, we found that it consists of mainly metallic oxides such as $SiO_2$, $Al_2O_3$, $Fe_2O_3$, and MnO. Malic acid, malonic acid, and citric acid showed relatively better solvency on $Al_2O_3$, $Fe_2O_3$, and MnO except $SiO_2$ among various organic acids. Mixed organic acid solutions of malic acid, malonic acid, and citric acid were prepared with certain weight ratios and their solvencies on mixed metal oxides of $Al_2O_3$, $Fe_2O_3$, and MnO were investigated. The experimental results showed that an 10% mixed organic acid solution prepared with weight ratio of malic acid : malonic acid : citric acid = 6 : 2 : 2 were found to have best scale solvency power of about 29%. The formulated cleaning agents with a small amount of nonionic surfactant showed much better solvency on mixed oxides than mixed organic solution alone. Especially, the formulated cleaning agent with 0.2 wt% LA-7 surfactant appeared to have best scale removal efficiency of about 35%. However, the formulated cleaning agent with disinfectants such as NaClO, $H_2O_2$ and $Ca(ClO)_2$ showed poor solvency on mixed oxides. It is inferred that surfactants are able to improve scale removal efficiency due to their capability of emulsification, and disinfectants cause to degrade scale solvency in water because of their oxidation. Based on these basic experimental results, formulated cleaning agents have been prepared with mixed organic acid solution, nonionic surfactants, and disinfectants and successfully applied to removal of scales on the cleaning beds and distribution reservoir at city D waterworks.

• Clean Technology
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• v.24 no.3
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• pp.212-220
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• 2018

Oxy-fuel combustion is considered as a promising greenhouse gas reduction technology in power plant. In this study, the behaviors of NO and $SO_2$ were investigated under the condition that in-furnace $deNO_x$ and $deSO_x$ methods are applied in oxy-fuel circulating fluidized bed combustion condition. In addition, the generation trends of $SO_3$, $NH_3$ and $N_2O$ were observed. For the purpose, limestone and urea solution were directly injected into the circulating fluidized bed combustor. The in-furnace $deSO_x$ method using limestone could reduce the $SO_2$ concentration in exhaust gas from ~403 to ~41 ppm. At the same experimental condition, the $SO_3$ concentration in exhaust gas was also reduced from ~3.9 to ~1.4 ppm. This trend is mainly due to the reduction of $SO_2$. The $SO_2$ is the main source of the formation of $SO_3$. The negative effect of $CaCO_3$ in limestone, however, was also appeared that it promotes the NO generation. The NO concentration in exhaust gas reduced to ~26 - 34 ppm by appling selective non-catalytic reduction method using urea solution. The $NH_3$ concentration in exhaust gas was appeared up to ~1.8 ppm during injection of urea solution. At the same time, the $N_2O$ generation also increased with increase of urea solution injection. It seems that the HNCO generated from pyrolysis of urea converted into $N_2O$ in combustion atmosphere. From the results in this study, the generation of other pollutants should be checked as the in-furnace $deNO_x$ and $deSO_x$ methods are applied.

• Clean Technology
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• v.13 no.1 s.36
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• pp.54-63
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• 2007

Even traces of CO in the hydrogen-rich feed gas to proton exchange membrane fuel cells (PEMFC) poison the platinum anode electrode and dramatically decrease the power output. In this work, a variety of catalytic materials consisting of $Cu/Ce_xZr_{1-x}O_2$, (x = 0.0-1.0) were synthesised, characterized and tested for CO oxidation and preferential oxidation of CO (PROX). These catalysts prepared by hydrothermal and deposition-precipitation methods. The catalysts were characterized by XRD, XRF, SEM, BET, $N_2O$ titration and oxygen storage capacity (OSC) measurement. The effects of composition of the support and degree of excess oxygen were investigated fur activity and $CO_2$ selectivity with different temperatures. The composition of the support markedly influenced the PROX activity. Among the various $Cu/Ce_xZr_{1-x}O_2$ catalysts having different composition, $Cu/Ce_{0.9}Zr_{0.1}O_2$ and $Cu/Ce_{0.7}Zr_{0.3}O_2$ showed the highest activities (>99%) and selectivities (ca.50%) in the temperature range of $150{\sim}160^{\circ}C$. It was found that by using of $Ce_xZr_{1-x}O_2$ mixed oxide support which possesses a high oxygen storage capacity, oxidation-reduction activity of Cu-based catalyst was improved, which resulted in the increase of catalytic activity and selectivity of CO oxidation in excess $H_2$ environments.

• Journal of architectural history
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• v.1 no.1 s.1
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• pp.68-87
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• 1992

This study is the conditions of location according to formed the times in the clan village. The results of this study are as follows ; 1. in the 15th century, the characterestics of the village established residencial place where mountain stream flowed surrounded by the mountain and deep in the mountains with superior quality land. That's because Sa-dae-bu put equal importance on beautiful scenery and practical benefit for living. Stream House provided economical foundation for Sa-dae-bu to be able to keep confucial manners by putting limit their economic status to small medium sized land owner. Topographical condition such as valley or hollow separated from the exterior maintained unification of consanguineous village in self sufficient farming society and held on to independent territory against external to be able to stay away from turbulent days so that they formed residential area of Sa-dae-bu clan. And the valley where flowed clean water was considered as the connection of continuous place where distinctiveness of form in each curve and and factor of calm and dynamic scenery of the clean stream. Scholars in the middle of Chosun Dynasty located in the utopia as place for confucious retirement to study, a place for refinement by combination with the nature or as a way of spacial practice based on Confucious view of nature. 2. in the 16th-l7th century, Most of existing consanguineous villages adopt deep in the mountains for refuge. at that place, upward rank was established by settlement of the ancestor who entered in the village first, the principal was placed in the center of the village and since descendants became numerous, it was serialized as the space of descendants. So, it was arranged in the order of social rank. Most of the villages showed development step by step started from precaution by apperance of the mountain to the lower part. It's because the topography of valley around the village worked as the natural hedge against external force and genealogy of the clan, regularity of social status, order of entrance into the village were reflected into residencial destribution. Also, order of the rank coincided with the one of aspects on geomancy. Genealogical rank within the village represented spacial rank. Houses of descendants and branch families were placed lower than the principal which showed worship to the principal. 3. In 18th century after, as the village was settled nearby cultivated land considering economical loss caused by long distance between residencial area and cultivated land, direction of sect followed by development of village expanded from the front part of the village to the rear part. The principal that was poped out to the front presented frontage over exterior. Therefore, residencial area of branch families expanded to the rear starting from the principal. This represented a slice of social structure at that time. after 18th century, spirit was percieved superior over material, After then, development of cultivation and expantion of land created difference of economic strength within one village. In order to maintain and show off the status of Yang-ban, economic power of indigenous land owner became fundamental, so, sense to worship and to keep the principal became weak eventually. Taking advantage of that situation, residencial area of branch family expanded to the rear part of the principal which showed dual disposition conflicted with each other. However, these clan rules were destroyed and new rules were created after 18th century because of the situation and consciousness at that time.

• Clean Technology
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• v.20 no.4
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• pp.375-382
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• 2014

This work investigated the plasma-catalytic decomposition of isopropyl alcohol (IPA) and the behavior of the byproduct compounds over monolith-supported metal oxide catalysts. Iron oxide ($Fe_2O_3$) or copper oxide (CuO) was loaded on a monolithic porous ${\alpha}-Al_2O_3$ support, which was placed inside the coaxial electrodes of plasma reactor. The IPA decomposition efficiency itself hardly depended on the presence and type of metal oxides because the rate of plasma-induced decomposition was so fast, but the behavior of byproduct formation was largely affected by them. The concentrations of the unwanted byproducts, including acetone, formaldehyde, acetaldehyde, methane, carbon monoxide, etc., were in order of $Fe_2O_3/{\alpha}-Al_2O_3$ < $CuO/{\alpha}-Al_2O_3$ < ${\alpha}-Al_2O_3$ from low to high. Under the condition (flow rate: $1L\;min^{-1}$; IPA concentration: 5,000 ppm; $O_2$ content: 10%; discharge power: 47 W), the selectivity towards $CO_2$ was about 40, 80 and 95% for ${\alpha}-Al_2O_3$, $CuO/{\alpha}-Al_2O_3$ and $Fe_2O_3/{\alpha}-Al_2O_3$, respectively, indicating that $Fe_2O_3/{\alpha}-Al_2O_3$ is the most effective for plasma-catalytic oxidation of IPA. Unlike plasma-alone processes in which tar-like products formed from volatile organic compounds are deposited, the present plasma-catalyst hybrid system did not exhibit such a phenomenon, thus retaining the original catalytic activity.

• Clean Technology
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• v.22 no.2
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• pp.132-138
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• 2016

The emission of SO₂ is inevitable in case of combustion of most fossil fuels except LNG in commercial power plant which has a bad effect on the durability of SCR catalyst. To develop a low temperature SCR catalyst which has a high NOx removal performance and excellent durability to SO₂, V₂O₅/TiO₂ catalysts were prepared by coating on the metal foam substrate with the impregnation amount of Sb₂O₃ as promotor. This study has evaluated the NOx removal performance and the durability to SO₂ on a laboratory scale atmospheric reactor and analyzed the properties of the prepared catalysts by means of porosimeter, BET, SEM (scanning electron microscope), EDX (energy dispersive x-ray spectrometer), XPS (X-ray photoelectron spectroscopy). It was found that the surface area of catalyst increased with the impregnation amount of Sb₂O₃ and the NOx removal performance showed the highest value at the 2 wt% impregnation of Sb₂O₃. This results was considered to be due to the optimum active site on the catalyst surface. And also, Sb₂O₃ impregnated catalysts presented that NOx removal performance was maintained despite the exposure to SO₂ for 5 hours. Therefore it was confirmed that metal foam SCR catalyst for low temperature could be manufactured with the optimum control of Sb₂O₃ impregnation according to the SO₂ presence or not.

• Clean Technology
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• v.27 no.4
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• pp.332-340
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• 2021

With the recent reinforcement of emission standards, it is necessary to make efforts to reduce NOx from air pollutant-emitting workplaces. The NOx reduction method mainly used in industrial facilities is selective catalytic reduction (SCR), and the most commercial SCR catalyst is the ceramic honeycomb catalyst. This study was carried out to reduce the NOx emitted from steel plants by applying De-NOx catalyst coated on metallic monolith. The De-NOx catalyst was synthesized through the optimized coating technique, and the coated catalyst was uniformly and strongly adhered onto the surface of the metallic monolith according to the air jet erosion and bending test. Due to the good thermal conductivity of metallic monolith, the De-NOx catalyst coated on metallic monolith showed good De-NOx efficiency at low temperatures (200 ~ 250 ℃). In addition, the optimal amount of catalyst coating on the metallic monolith surface was confirmed for the design of an economical catalyst. Based on these results, the De-NOx catalyst of commercial grade size was tested in a semi-pilot De-NOx performance facility under a simulated gas similar to the exhaust gas emitted from a steel plant. Even at a low temperature (200 ℃), it showed excellent performance satisfying the emission standard (less than 60 ppm). Therefore, the De-NOx catalyst coated metallic monolith has good physical and chemical properties and showed a good De-NOx efficiency even with the minimum amount of catalyst. Additionally, it was possible to compact and downsize the SCR reactor through the application of a high-density cell. Therefore, we suggest that the proposed De-NOx catalyst coated metallic monolith may be a good alternative De-NOx catalyst for industrial uses such as steel plants, thermal power plants, incineration plants ships, and construction machinery.

• Clean Technology
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• v.25 no.3
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• pp.245-255
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• 2019

Pressurized oxy-fuel combustion is a promising technology for $CO_2$ capture with a benefit of improving power plant efficiency compared with atmospheric oxy-fuel combustion. Prior to $CO_2$ compression in this process, a flue gas condenser (FGC) is used to remove $H_2O$ while recovering the latent heat. At the same time, the FGC has a potential for high-efficiency removal of $SO_x$ and $NO_x$ by exploiting their good solubility in water. In this study, experiments were carried out in a lab-scale, direct contact FGC under different pressures varying between 1 and 20 bar to evaluate the removal efficiency of $SO_2$ and $NO_x$ for individual gases and their mixture. In the tests for individual gases, 20% and 76% of $NO_x$ was removed at 1 bar and 10 bar, respectively. Even higher removal efficiencies were achieved for $SO_2$, and also these were maintained for longer as the pressure increased. In the tests for $SO_2$ and $NO_x$ mixture, the removal efficiency of $NO_x$ increased from 13% at 1 bar to 56% at 20 bar because of higher solubility at elevated pressures. $SO_2$ in the mixture was initially dissolved almost completely and then increased by 1,219 ppm at 1 bar and by 165 ppm at 20 bar. Overall, the removal efficiency of $SO_2$ and $NO_x$ was increased at elevated pressures, but it was lower in the mixture compared with individual gases at identical conditions because of a lower pH and associated chemical reactions in water.