• 제목/요약/키워드: Porous thin film

검색결과 200건 처리시간 0.03초

$Sr_{2}FeMoO_{6}$ 소결체와 스퍼터링법으로 제조된 박막의 초거대자기저항현상에 관한 연구 (Colossal magnetoresistance of double-ordered perovskite $Sr_{2}FeMoO_{6}$ ceramics and sputter-deposited films)

  • 이원종;장원위
    • 한국결정성장학회지
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    • 제12권1호
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    • pp.36-41
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    • 2002
  • $H_2$(5%)/Ar의 환원분위기에서 $900^{\circ}C$ 이상의 온도로 소결함으로써 화학양론적인 조성비를 만족하면서 이중 페롭스카이트 구조를 갖는 $Sr_2FeMoO_6$ (SFMO) 소결체를 제조하였다. SFMO 소결체는 우수한 강자성 특성을 나타내었고 8K에서 15%와 상온에서 3% 정도의 자기저항비를 나타내었다. 이 SFMO 소결체를 타겟으로하여 스퍼터링법으로와의 단결정 기판 위에 비정질 SFMO 박막을 증착한 후, 적절한 H$_2$(5%)/Ar의 환원분위기, $680^{\circ}C$ 이상) 열처리 조건의 고상결정법으로 이중 페롭스카이트 구조의 다결정 SFMO 박막을 제조하였다. 이 SFMO 박막은 강자성 특성을 잘 나타내었으나, 자기저항 특성은 상온에서는 나타나지 않았고 8K에서 약 0.3-0.5%의 자기저항비를 나타내었다. 이와같이 박막의 경우 자기저항 특성이 떨어지는 이유는 제조된 SFMO 박막이 화학양론비를 만족하지 못하고 조직의 치밀도가 떨어져서 결정립 사이에서 발생하는 자기스핀 터널링이 제대로 발생하지 못하였기 때문이라 생각되었다.

산화아연-단일벽탄소나노튜브복합체의 일산화질소 감지 특성 (NO Gas Sensing Properties of ZnO-SWCNT Composites)

  • 장동미;안세용;정혁;김도진
    • 한국재료학회지
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    • 제20권11호
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    • pp.623-627
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    • 2010
  • Semiconducting metal oxides have been frequently used as gas sensing materials. While zinc oxide is a popular material for such applications, structures such as nanowires, nanorods and nanotubes, due to their large surface area, are natural candidates for use as gas sensors of higher sensitivity. The compound ZnO has been studied, due to its chemical and thermal stability, for use as an n-type semiconducting gas sensor. ZnO has a large exciton binding energy and a large bandgap energy at room temperature. Also, ZnO is sensitive to toxic and combustible gases. The NO gas properties of zinc oxide-single wall carbon nanotube (ZnO-SWCNT) composites were investigated. Fabrication includes the deposition of porous SWCNTs on thermally oxidized $SiO_2$ substrates followed by sputter deposition of Zn and thermal oxidation at $400^{\circ}C$ in oxygen. The Zn films were controlled to 50 nm thicknesses. The effects of microstructure and gas sensing properties were studied for process optimization through comparison of ZnO-SWCNT composites with ZnO film. The basic sensor response behavior to 10 ppm NO gas were checked at different operation temperatures in the range of $150-300^{\circ}C$. The highest sensor responses were observed at $300^{\circ}C$ in ZnO film and $250^{\circ}C$ in ZnO-SWCNT composites. The ZnO-SWCNT composite sensor showed a sensor response (~1300%) five times higher than that of pure ZnO thin film sensors at an operation temperature of $250^{\circ}C$.

Luminous Characteristics of Transparent Field Emitters Produced by Using Ultra-thin Films of Single Walled Carbon Nanotubes

  • Jang, Eun-Soo;Goak, Jeung-Choon;Lee, Han-Sung;Lee, Seung-Ho;Lee, Nae-Sung
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2009년도 춘계학술발표대회
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    • pp.31.1-31.1
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    • 2009
  • Carbon nanotubes (CNTs) are attractive material because of their superior electrical, mechanical, and chemical properties. Furthermore, their geometric features such as a large aspect ratio and a small radius of curvature at tip make them ideal for low-voltage field emission devices including backlight units of liquid crystal display, lighting lamps, X-ray source, microwave amplifiers, electron microscopes, etc. In field emission devices for display applications, the phosphor anode is positioned against the CNT emitters. In most case, light generated from the phosphor by electron bombardment passes through the anode front plate to reach observers. However, light is produced in a narrow depth of the surface of the phosphor layer because phosphor particles are big as much as several micrometers, which means that it is necessary to transmit through the phosphor layer. Hence, a drop of light intensity is unavoidable during this process. In this study, we fabricated a transparent cathode back plate by depositing an ultra-thin film of single walled CNTs (SWCNTs) on an indium tin oxide (ITO)-coated glass substrate. Two types of phosphor anode plates were employed to our transparent cathode back plate: One is an ITO glass substrate with a phosphor layer and the other is a Cr-coated glass substrate with phosphor layer. For the former case, light was radiated from both the front and the back sides, where luminance on the back was ~30% higher than that on the front in our experiments. For the other case, however, light was emitted only from the cathode back side as the Cr layer on the anode glass rolled as a reflecting mirror, improving the light luminance as much as ~60% compared with that on the front of one. This study seems to be discussed about the morphologies and field emission characteristics of CNT emitters according to the experimental parameters in fabricating the lamps emitting light on the both sides or only on the cathode back side. The experimental procedures are as follows. First, a CNT aqueous solution was prepared by ultrasonically dispersing purified SWCNTs in deionized water with sodium dodecyl sulfate (SDS). A milliliter or even several tens of micro-liters of CNT solution was deposited onto a porous alumina membrane through vacuum filtration. Thereafter, the alumina membrane was solvated with the 3 M NaOH solution and the floating CNT film was easily transferred to an ITO glass substrate. It is required for CNT film to make standing CNTs up to serve as electron emitter through an adhesive roller activation.

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농도 분극이 저감된 정삼투 분리막 제조 (Preparation of Forward Osmosis Membranes with Low Internal Concentration Polarization)

  • 김노원;정보람
    • 멤브레인
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    • 제24권6호
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    • pp.453-462
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    • 2014
  • 폴리에스터(polyester) 부직포 상에 폴리술폰(polysulfone) 고분자 지지체를 만든 후, 그 표면에 폴리아미드 복합 박막을 형성시킴으로써 정삼투(FO) 공정에 적합한 분리막을 제조하였다. PSF 지지체는 19 중량%의 함량으로 디메틸 포름아미드(DMF)에 균일하게 용해된 폴리술폰 용액을 상 전이 공정을 통하여 제조되었으며, 기계적 보강재로 $100{\mu}m$의 두께를 가지는 폴리에스터 부직포를 사용하였다. 19 중량%의 PSF/DMF 용액으로 제조된 PSF 지지층은 sponge-like구조를 가지는 비대칭 내부 구조를 나타내었다. 정삼투(FO) 공정에서 내부의 농도 분극을 줄이기 위하여, $20{\mu}m$의 얇은 부직포 보강층을 가지는 지지체 상에 9~19 중량%의 PSF/DMF 용액으로 PSF 지지체를 제조하였다. 이들 얇은 부직포 보강층에서 제조된 지지층들은 공극률이 향상된 sponge-like구조를 가지는 것을 확인할 수 있었다. 각각의 지지층들 표면에 방향족 폴리아미드 가교 반응을 통하여 복합 박막을 얻을 수 있었다. FO 운전 결과, 12 중량%의 DMF/PSF 용액으로 제조한 지지체를 가지는 복합 박막이 가장 우수한 투과 성능을 보여 주었다. 이 경우 4.5 LMH의 유량과 3.47 GMH의 염의 역확산 속도를 가지는 역삼투 분리막에 사용되는 두꺼운 부직포에 비해 약 2.5배 유량이 많은 24.3 LMH의 유량과 1.5 GMH의 염의 역확산 속도를 보여주고 있다. 부직포의 두께 저하와 이에 적합한 PSF 캐스팅 용액의 최적화를 통하여 부직포와 PSF층의 경계면 공극률을 향상시킬 수 있었다.

Invention of Ultralow - n SiO2 Thin Films

  • Dung, Mai Xuan;Lee, June-Key;Soun, Woo-Sik;Jeong, Hyun-Dam
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.281-281
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    • 2010
  • Very low refractive index (<1.4) materials have been proved to be the key factor improving the performance of various optical components, such as reflectors, filters, photonic crystals, LEDs, and solar cell. Highly porous SiO2 are logically designed for ultralow refractive index materials because of the direct relation between porosity and index of refraction. Among them, ordered macroporous SiO2 is of potential material since their theoretically low refractive index ~1.10. However, in the conventional synthesis of ordered macroporous SiO2, the time required for the crystallization of organic nanoparticles, such as polystyrene (PS), from colloidal solution into well ordered template is typical long (several days for 1 cm substrate) due to the low interaction between particles and particle - substrate. In this study, polystyrene - polyacrylic acid (PS-AA) nanoparticles synthesized by miniemulsion polymerization method have hydrophilic polyacrylic acid tails on the surface of particles which increase the interaction between particle and with substrate giving rise to the formation of PS-AA film by simply spin - coating method. Less ordered with controlled thickness films of PS-AA on silicon wafer were successfully fabricated by changing the spinning speed or concentration of colloidal solution, as confirmed by FE-SEM. Based on these template films, a series of macroporous SiO2 films whose thicknesses varied from 300nm to ~1000nm were fabricated either by conventional sol - gel infiltration or gas phase deposition followed by thermal removal of organic template. Formations of SiO2 films consist of interconnected air balls with size ~100 nm were confirmed by FE-SEM and TEM. These highly porous SiO2 show very low refractive indices (<1.18) over a wide range of wavelength (from 200 to 1000nm) as shown by SE measurement. Refraction indices of SiO2 films at 633nm reported here are of ~1.10 which, to our best knowledge, are among the lowest values having been announced.

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스퍼터 증착된 알루미늄 박막을 이용한 양극산화 알루미늄 나노템플레이트 제조 (Fabrication of anodic aluminum oxide nanotemplate using sputtered aluminum thin film)

  • 이재형
    • 한국정보통신학회논문지
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    • 제14권4호
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    • pp.923-928
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    • 2010
  • 양극산화 알루미늄(anodic aluminum oxide, AAO) 나노템플레이트는 제작이 쉬우며, 저비용, 대면적 제작이 가능하다는 장점으로 인해 이를 나노 전자소자 제작에 응용하려는 많은 연구가 이루어지고 있다. 이러한 나노템플레이트를 이용하면 기공의 직경이나 밀도를 변화킴으로써 나노구조의 물질의 크기나 밀도를 제어할 수 있다. 따라서 본 논문에서는 나노 전자소자 제작에 응용할 수 있는 AAO 나노템플레이트를 2단계 양극산화법에 의해 제조하였다. 이를 위해 기존의 알루미늄 판 대신 실리콘 웨이퍼 상에 DC 마그네트론 스퍼터법으로 $2{\mu}m$ 두께의 알루미늄 박막을 증착하였고, 전해액으로 사용한 옥살산 용액의 온도 및 양극산화 전압에 따른 다공성 알루미나 막의 미세구조를 조사하였다. 전해액 온도가 $8^{\circ}C$에서 $20^{\circ}C$로 높아짐에 따라 다공성 알루미나 막의 성장속도는 86.2 nm/min에서 179.5 nm/min으로 증가하였다. 최적 조건에서 제작된 AAO 나노 템플레이트의 기공 직경 및 깊이는 각각 70 nm와 $1\;{\mu}m$이었다.

Effect of Hydrophobic Coating on Silica for Adsorption and Desorption of Chemical Warfare Agent Simulants Under Humid Condition

  • Park, Eun Ji;Cho, Youn Kyoung;Kim, Dae Han;Jeong, Myung-Geun;Kim, Young Dok
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.148.2-148.2
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    • 2013
  • We prepared hydrophobic PDMS-coated porous silica as pre-concentration adsorbent for chemical warfare agents (CWAs). Since CWAs can be harmful to human even with a small amount, detecting low-concentration CWAs has been attracting attention in defense development. Porous silica is one of the promising candidates for CWAs pre-concentration adsorbent since it is thermally stable and its surface area is sufficiently high. A drawback of silica is that adsorption of CWAs can be significantly reduced due to competitive adsorption with water molecule in air since silica is quite hydrophilic. In order to solve this problem, hydrophobic polydimethylsiloxane (PDMS) thin film was deposited on silica. Adsorption and desorption of chemical warfare agent (CWA) simulants (Dimethylmethylphosphonate, DMMP and Dipropylene Glycol Methyl Ether, DPGEM) on bare and PDMS-coated silica were studied using temperature programed desorption (TPD) with and without co-exposing of water vapor. Without exposure of water vapor, desorbed amount of DMMP from PDMS-coated silica was twice larger than that from bare silica. When the samples were exposed to DMMP and water vapor at the same time, no DMMP was desorbed from bare silica due to competitive adsorption with water. On the other hand, desorbed DMMP was detected from PDMS-coated silica with reduced amount compared to that from the sample without water vapor exposure. Adsorption and desorption of DPGME with and without water vapor exposing was also investigated. In case of bare silica, all the adsorbed DPGME was decomposed during the heating process whereas molecular DPGME was observed on PDMS-coated silica. In summary, we showed that hydrophobic PDMS-coating can enhance the adsorption selectivity toward DMMP under humid condition and PDMS-coating also can have positive effect on molecular desorption of DPGME. Therefore we propose PDMS-coated silica could be an adequate adsorbent for CWAs pre-concentration under practical condition.

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슬롯 형상이 경사충격파 간섭유동의 피동제어에 미치는 영향에 관한 연구 (Effects of Slot Configurations on the Passive Control of Oblique-Shock-Interaction Flows)

  • 장성하;이열
    • 한국항공우주학회지
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    • 제34권12호
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    • pp.18-24
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    • 2006
  • 슬롯과 다공판을 이용한 충격파와 난류 경계층 간섭유동의 피동제어에 관한 연구가 수행되었다. 슬롯의 다양한 형상 변화가 간섭유동에 미치는 영향이 관찰되었으며, 이를 위하여 간섭유동 후방에서 피토/벽압력 분포 및 쉴리렌, 유맥선, 오일막 간섭 줄무늬 형상과 같은 유동가시화 결과 등이 얻어졌다. 유동방향의 슬롯의 경우 간섭유동 후방에서 제어되지 않은 경우와 비교하여 보다 높은 피토압력이 국소적으로 관찰되었으나, 폭방향 슬롯제어는 전체적으로 제어되지 않은 경우에 비하여 피토압력 크기에서 큰 장점을 보이지 않았다.

Metal Oxide Nanocolumns for Extremely Sensitive Gas Sensors

  • Song, Young Geun;Shim, Young-Seok;Han, Soo Deok;Lee, Hae Ryong;Ju, Byeong-Kwon;Kang, Chong Yun
    • 센서학회지
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    • 제25권3호
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    • pp.184-188
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    • 2016
  • Highly ordered $SnO_2$ and NiO nanocolumns have been successfully achieved by glancing-angle deposition (GLAD) using an electron beam evaporator. Nanocolumnar $SnO_2$ and NiO sensors exhibited high performance owing to the porous nanostructural effect with the formation of a double Schottky junction and high surface-to-volume ratios. When all gas sensors were exposed to various gases such as $C_2H_5OH$, $C_6H_6$, and $CH_3COCH_3$, the response of the highly ordered $SnO_2$ nanocolumn were over 50 times higher than that of the $SnO_2$ thin film. This work will bring broad interest and create a strong impact in many different fields owing to its particularly simple and reliable fabrication process.

공비혼합물로 제조된 다공성 센서재료용 실리카 에어로젤 (Silica aerogels for potential sensor material prepared by azeotropic mixture)

  • 안나 쉴랴흐티나;오영제
    • 센서학회지
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    • 제16권6호
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    • pp.395-400
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    • 2007
  • Ambient drying sol-gel processing was used for monolithic silica ambigels in the temperature range of $130-250^{\circ}C$. A new method of mesopore ambigels, which mean the aerogels prepared by ambient pressure drying process synthesis, is suggested at first. This method includes two important approaches. The first point is that $SiO_{2}$ surface modification of wet gel was performed by trimethylchlorosilane in n-butanol solution. This procedure is provided the silica gel mesopore structure formation. The second point is a creation of the ternary azeotropic mixture water/n-butanol/octane as porous liquid, which is effectively provided removing of water such a low temperature by 2 step drying condition under ambient pressure. The silica aerogels, which were prepared by ambient pressure drying from azeotropic mixture of water/n-butanol/octane, are transparent, crack-free and mesoporous (pore size ${\sim}$ 5.6 nm) with surface area of ${\sim}$ $923{\;}m^2/g$, bulk density of $0.4{\;}g/cm^3$ and porosity of 85 %.