Direct deposition technique for poly-SiGe thin film achieving a mobility exceeding 20 $cm^2$ /Vs with ~30 nm thick bottom-gate TFTs
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- 한국정보디스플레이학회:학술대회논문집
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- 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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- pp.1028-1031
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- 2009