• 대한기계학회논문집A
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• 제24권9호
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• pp.2381-2386
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• 2000

Surface replication is playing an important role in the assessment of creep damage and remaining life of high temperature components. As the replication procedures, however, have not been standardized in domestic industry, its standardization is proposed in this study. For this purpose, the 2.25Cr-IMo steel was heat treated(5 min at 1,300 0C and oil quenched) to produce a simulated HAZ microstructure, and crept in air at 575 0C and under 120 MPa to produce artificial cavities. Then, the effect of surface preparation procedures on the quality of replicas was investigated using this sample. As a result, it was demonstrated that the presence of cavities may be observed readily or missed depending on the surface preparation procedures followed. Therefore it is essential to repeat three polishing/etching cycles at least in order to reveal cavitation damage accurately, even though it may be tedious or time-consuming.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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• pp.171-175
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• 2001

Chemical mechanical polishing(CMP) process has been widely used to planarize dielectrics and metal, which can apply to employed in integrated circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of free-defects in inter level dielectrics and metal. Especially, defects like (micro-scratch) lead to severe circuit failure, and affects yield. Current conditioning method - bladder type, orbital pad motion- usually provides unsuitable pad profile during ex-situ conditioning near the end of pad life. Since much of the pad wear occurs by the mechanism of bladder type conditioning and its orbital motion without rotation, we need to implement new ex-situ conditioner which can prevent abnormal regional force on pad caused by bladder-type and also need to rotate the pad during conditioning. Another important study of ADPC is related to the orbital scratch of which source is assumed as diamond grit dropped from the strip during ex-situ conditioning. Scratch from diamond grit damaged wafer severely so usually scraped. Figure 1 shows the typical shape of scratch damaged from diamond. e suspected that intensive forces to the edge area of bladder type stripper accelerated the drop of Diamond grit during conditioning. so new designed Flat stripper was introduced.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2017년도 춘계학술대회 논문집
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• pp.123.1-123.1
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• 2017

Hybrid solar cells have intensively studied in recent years due to their advantages such as cost effectiveness and possibility of applications in flexible and transparent devices. It is critical to fabricate individual layer composed of organic and inorganic materials in the hybrid solar cell at low cost. Therefore, it is required to manufacture cheaply and enhance the photon-to-electricity conversion efficiency of each layer in the flexible solar cell industry. In this research, we fabricated pure Cu metal mesh electrode prepared by using electroplating and/or electroless plating on the Ni mold which was manufacture through photolithography, electroforming, and polishing process. Copper mesh was formed on the surface of nickel metal working master when pulsed electrolytic copper deposition were performed at various plating parameters such as plating time, current density, and so on. After electrodeposition at 2ASD for 5~30seconds, the line/pitch/thickness of copper mesh sheet was $1.8{\sim}2.0/298/0.5{\mu}m$.

• 한국정밀공학회지
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• 제16권4호통권97호
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• pp.148-154
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• 1999

This study was carried out to verify grinding performance of dental diamond bur and investigate the possibility of AE application in dentistry field. Workpieces were made of acryl and bovine respectively for the experiments in this study. Grinding test was conducted to get the data of grinding resistance and specific grinding energy of four different types of diamond bur by using tool dynamometer. AE signal was acquired to verify grinding process in the AE measuring system. Tool wear was observed to find parameters about grinding characteristics of diamond bur by means of SEM picture. It was found that the wear of dental diamond bur could be detected with polishing of grinding material, removal of adhesive parts, wear of particles neighboring cutting nose, loss of material and elevation of temperature. The wear of B, C, D type diamond bur is due to wear and fracture of grain size. Abnormal state can be found through the behavior of AE signal in the grinding working. As a result, it is expected that forecast of abnormal state is possible using AE equipments under real time process.

• 대한치과보철학회지
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• 제39권1호
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• pp.37-48
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• 2001

Ceromers, new indirect resin system, are now being adopted for esthetic restorations. Despite of its translucency and good color matching, color stability after long-term use was unknown till now. This in vitro study was designed to evaluate color stability of some ceromers when subjected to brushing after thermocycling. Three types of ceromers: Scupture, Targis, Artglass and a direct resin system, Z100 were prepared to disks 12 mm in diameter, 2.5 mm in thickness. All specimens were polished, and Sculpture and Targis specimens were divided two groups, respectively. Then, half of them were glazed according to manufacturer's instructions. All specimen were brushed 20,000 times after 10,000 cycle thermocycling. Color was measured with spectrophotometer after 1,000, 3,000, 10,000 times thermocycling and 20,000 time brushing, respectively. Color difference (${\Delta}E$) was calculated according to CIE LAB system. During thermocycling, Sculpture & Targis system with polished surface showed greater color change than any other groups. After brushing, color difference was reduced significantly. Mean values of ${\Delta}E$ ranged 0.98 to 2.98. All Ceromers were considered clinically acceptable after thermocycling and brushing, and color change mechanism was affected by the brands and finishing methods. It might be concluded that color change of ceromer is due to surface alteration.

• 한국전기전자재료학회논문지
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• 제11권7호
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• pp.557-564
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• 1998

A low loss x-cut $LiNbO_3$optical waveguide was fabricated by Yi in-diffusion, and the properties of guided-mode and the total insertion loss of the pigtailed waveguide with polarization maintaining fiber(PMF) were measured at optical wavelength 1550nm. for forming the waveguides, the parameters of diffusion, Ti thickness, waveguide line-width, length, diffusion temperature, time and atmosphere were set $1400{\AA}$, $8{\mu}m$, 3.3cm, $1050^{\circ}C$, 8 hours and wet bubbled oxygen, respectively. And then after the polishing and piatailing, it showed that the total insertion loss was -4.1dB for TM mode, -5.5dB for TE mode, and mode size, that is, the horizontal/ vertical size were $13.8{\mu}m/18{\mu}m$ for TM mode, $9.6{\mu}m/6.5{\mu}m$ for TE mode.

• 대한화학회지
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• 제57권3호
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• pp.322-328
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• 2013

Copper iodide was employed as a modifier for preparation of a new carbon ceramic electrode. For the first time, the catalytic oxidation of amoxicillin (AMX) was demonstrated by cyclic voltammetry, chronoamperometry and amperometry methods at the surface of this modified carbon ceramic electrode. The copper iodide modified sol-gel derived carbon ceramic (CIM-SGD-CC) electrode has very high catalytic ability for electrooxidation of amoxicillin. The catalytic oxidation peak current was linearly dependent on the amoxicillin concentration and the linearity range obtained was 100 to 1000 ${\mu}mol\;L^{-1}$ with a detection limit of 0.53 ${\mu}mol\;L^{-1}$. The diffusion coefficient ($D=(1.67{\pm}0.102){\times}10^{-3}\;cm^2\;s^{-1}$), and the kinetic parameter such as the electron transfer coefficient (${\alpha}$) and exchange current density ($j_0$) for the modified electrode were calculated. The advantages of the modified CCE are its good stability and reproducibility of surface renewal by simple polishing, excellent catalytic activity and simplicity of preparation.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.51-54
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• 2006

본 연구는 CMP 공정 중의 Conditioning 최적화에 관한 내용이다. CMP Pad Conditioner의 역할은 CMP 공정 중 Slurry 및 연마 잔유물에 의해 Pad 표면에 눈막힘 현상(Glazing)이 발생하여 Wafer의 연마속도가 급속히 저하되는 현상을 방지하여 공정의 안정성을 향상시키는 데 있다. 본 연구 중 Conditioning은 In-situ 방식으로 진행되었으며, Conditioning 비율을 Polishing Time 대비 50%만 진행하여도 연마속도 저하현상은 나타나지 않음을 확인하였다. 이로써 Pad 마모랑 감소 및 Conditioner 교체 주기연장이 가능해져, CMP 공정의 Cost를 절감할 수 있다.

• 한국정밀공학회지
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• 제33권12호
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• pp.993-998
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• 2016

In today's manufacturing industries, the demand for light non-ferrous materials is considerable due to the need to improve productivity and manufacturability. Since the surface roughness of a material is important for improving the functionality of machined parts, various techniques for surface treatments have been developed to obtain non-ferrous materials with low roughness. A superfinishing method utilizing polishing films is generally applied to the anodized surface of Al7075 in order to improve its roughness. The objective of this research is to determine through experiment the parameters that facilitate the shortest processing time, using a superfinishing method, for reaching a roughness of Ra $0.2{\mu}m$. This objective is met by applying the Taguchi method in the experiments. Through the experiments of superfinishing, the effectiveness of the parameters adopted for the surface treatment is demonstrated.

• 한국육종학회지
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• 제40권2호
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• pp.101-105
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• 2008

The germplasm of 246 rice cultivars was analysed for iron and zinc contents using a Inductively Coupled Argon Plasma (ICP) at International Rice Research Institute (IRRI) Philippines. Iron contents ranged from 2.0 to 12.0, and zinc ranged from 10.0 to 33.0 (mg/kg), showing with the mean values of 4.3 and 22.8 (mg/kg), respectively. In genotypes tested, there was approximately a two-fold difference in iron and zinc concentrations, suggesting a genetic potential to increase these micronutrients in rice grain. A highly significant positive correlation ($r^2=0.503$) was found between iron and zinc contents. Iron contents decreased drastically as polishing time increased, whereas zinc decreased only slightly. In the interaction between genotype and environment on iron contents, genotype (G), environment (E), and the G ${\times}$ E interactions accounted for 69%, 5% and 26% of the sums of squares, respectively. Indicating that genotype is would be the most significant factor for the to improve iron contents of rice in rice breeding, suggesting that therefore identifying genotypes with relatively stable performance across various environments is important as staple food crops.