• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2000년도 추계학술발표회 초록집
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• pp.3-4
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• 2000

Many researchers are interested in the synthesis and characterization of carbon nitride and diamond-like carbon (DLq because they show excellent mechanical properties such as low friction and high wear resistance and excellent electrical properties such as controllable electical resistivity and good field electron emission. We have deposited amorphous carbon nitride (a-C:N) thin films and DLC thin films by shielded arc ion plating (SAIP) and evaluated the structural and tribological properties. The application of appropriate negative bias on substrates is effective to increase the film hardness and wear resistance. This paper reports on the deposition and tribological OLC films in relation to the substrate bias voltage (Vs). films are compared with those of the OLC films. A high purity sintered graphite target was mounted on a cathode as a carbon source. Nitrogen or argon was introduced into a deposition chamber through each mass flow controller. After the initiation of an arc plasma at 60 A and 1 Pa, the target surface was heated and evaporated by the plasma. Carbon atoms and clusters evaporated from the target were ionized partially and reacted with activated nitrogen species, and a carbon nitride film was deposited onto a Si (100) substrate when we used nitrogen as a reactant gas. The surface of the growing film also reacted with activated nitrogen species. Carbon macropartic1es (0.1 -100 maicro-m) evaporated from the target at the same time were not ionized and did not react fully with nitrogen species. These macroparticles interfered with the formation of the carbon nitride film. Therefore we set a shielding plate made of stainless steel between the target and the substrate to trap the macropartic1es. This shielding method is very effective to prepare smooth a-CN films. We, therefore, call this method "shielded arc ion plating (SAIP)". For the deposition of DLC films we used argon instead of nitrogen. Films of about 150 nm in thickness were deposited onto Si substrates. Their structures, chemical compositions and chemical bonding states were analyzed by using X-ray diffraction, Raman spectroscopy, X-ray photoelectron spectroscopy and infrared spectroscopy. Hardness of the films was measured with a nanointender interfaced with an atomic force microscope (AFM). A Berkovich-type diamond tip whose radius was less than 100 nm was used for the measurement. A force-displacement curve of each film was measured at a peak load force of 250 maicro-N. Load, hold and unload times for each indentation were 2.5, 0 and 2.5 s, respectively. Hardness of each film was determined from five force-displacement curves. Wear resistance of the films was analyzed as follows. First, each film surface was scanned with the diamond tip at a constant load force of 20 maicro-N. The tip scanning was repeated 30 times in a 1 urn-square region with 512 lines at a scanning rate of 2 um/ s. After this tip-scanning, the film surface was observed in the AFM mode at a constant force of 5 maicro-N with the same Berkovich-type tip. The hardness of a-CN films was less dependent on Vs. The hardness of the film deposited at Vs=O V in a nitrogen plasma was about 10 GPa and almost similar to that of Si. It slightly increased to 12 - 15 GPa when a bias voltage of -100 - -500 V was applied to the substrate with showing its maximum at Vs=-300 V. The film deposited at Vs=O V was least wear resistant which was consistent with its lowest hardness. The biased films became more wear resistant. Particularly the film deposited at Vs=-300 V showed remarkable wear resistance. Its wear depth was too shallow to be measured with AFM. On the other hand, the DLC film, deposited at Vs=-l00 V in an argon plasma, whose hardness was 35 GPa was obviously worn under the same wear test conditions. The a-C:N films show higher wear resistance than DLC films and are useful for wear resistant coatings on various mechanical and electronic parts.nic parts.

• 해양환경안전학회지
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• 제29권4호
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• pp.363-371
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• 2023

한 척의 선박을 건조하기 위해서는 다양한 크기의 블록(block)들을 이동 및 탑재해야 한다. 이러한 과정에서 블록의 체결 방법 및 각 조선소 설비 특성에 맞는 다양한 기능에 부합하는 러그를 사용하고 있다. 블록 구조의 중량 및 형태에 따라서 러그의 크기와 형상이 다양하며, 샤클(shackle)이 체결되는 홀 주변에 부족한 강성을 보완하기 위하여 덧판(doubling pad)을 용접하여 구조를 보강한다. 리프팅(lifting) 조건별 러그의 설계를 하는 방법은 보 이론(beam theory)에 의한 수계산 방법과 유한요소해석 모델링을 이용한 구조해석을 수행하고 있다. 해석적 방법의 경우, 요소의 종류와 모델링 방법에 따라서 결과 차이가 발생하여 표준화된 평가법의 정립이 필요한 상황이다. 이러한 모호한 방법론 적용 시 블록의 이동 및 반전(turn-over) 과정 중에서 심각한 안전 문제를 유발할 가능성이 있다. 본 연구에서는 러그의 실제 탑재공정에 따른 구조 응답을 평가할 수 있는 모델링 조건, 평가법을 확정하고자 다양한 변수의 영향을 수치 구조해석을 통하여 비교 및 분석하였다. 러그 홀(hole) 주변 덧판부와 용접 비드(bead)를 표현한 모델링 기법이 가장 실제적인 거동 결과를 주고 있다. 실제 러그와 동일한 조건(용접부 비드만 주재료와 연결)의 모델링에 등가하중을 적용한 결과는 MPC 하중 적용 결과보다 낮은 최종강도를 나타낸다. 더불어 해석 시간 단축을 위해서 2차원 쉘(shell) 요소를 적용한 경우, 덧판 두께를 85% 수준으로 감소시켜서 안전사용하중을 예측할 수 있음을 확인하였다. 논문에서 검토한 다양한 변수의 영향들 결과는 러그 설계 및 안전사용하중 예측에 근거 자료로 활용될 것으로 기대된다.