• Transactions on Electrical and Electronic Materials
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• v.7 no.4
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• pp.184-188
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• 2006

This work describes efforts in the fabrication and testing of robust microelectromechanical systems (MEMS). Robustness is typically achieved by investigating non-silicon substrates and materials for MEMS fabrication. Some of the traditional MEMS fabrication techniques are applicable to robust MEMS, while other techniques are drawn from other technology areas, such as electronic packaging. The fabrication technologies appropriate for robust MEMS are illustrated through laminated polymer membrane based pressure sensor arrays. Each array uses a stainless steel substrate, a laminated polymer film as a suspended movable plate, and a fixed, surface micromachined back electrode of electroplated nickel. Over an applied pressure range from 0 to 34 kPa, the net capacitance change was approximately 0.14 pF. An important attribute of this design is that only the steel substrate and the pressure sensor inlet is exposed to the flow; i.e., the sensor is self-packaged.

• Journal of the Korean Institute of Navigation
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• v.20 no.1
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• pp.47-58
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• 1996

The use of high tensile steel plates is increasing in the fabrication of ship and offshore structures. The main portion of ship structure is usually composed of stiffened plates. In these structures, plate buckling is one of the most important design criteria and buckling load may usually be obtained as an eigenvalue solution of the governing equations for the plate. To use the high tensile steel plate effectively, its thickness may become thin so that the occurrence of buckling is inevitable and design allowing plate buckling may be necessary. When the panel elastic buckling is allowed, it is necessary to get precise understandings about the post-buckling behaviour of thin plates. It is well known that a thin flat plate undergoes secondary buckling after initial buckling took place and the deflection of the initial buckling mode was developed. From this point of view, this paper discusses the post-buckling behaviour of thin plates under thrust including the secondary buckling phenomenon. Series of elastic large deflection analyses were performed on rectangular plates with aspect ratio 3.6 using the analytical method and the FEM.

• Journal of Institute of Control, Robotics and Systems
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• v.14 no.4
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• pp.332-335
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• 2008

PMMA light guiding plate with nano pattern was fabricated by nano imprint lithography method. A silicon mold for electroplating of nickel was fabricated by conventional photolithography process. A nickel stamp for nano imprint lithography was fabricated by electroplating process using silicon mold. The nano imprint lithography was performed on PMMA plate at $140^{\circ}C$ under pressure of 20kN. The nano pattern on PMMA plate was investigated using FE-SEM. It is shown that the patterns were well transferred for several steps and the nano imprint lithography method could be applied for fabricating patterns of light guiding plate.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.463-467
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• 2004

This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated b micro-heater under pulse heating. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, he middle plate, the upper plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The middle plate includes the chamber and diaphragm d the upper plate is the micro-heater. The Micropump is fabricated by bonding process of the three layer. This paper resented the possibility of the PCR chip operation by the fabricated micropump.

• Journal of Korea Foundry Society
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• v.32 no.1
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• pp.16-23
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• 2012

In this study, we develop the lower pressure die casting with rheo-forming process of A356 aluminum alloy and vacuum system which can control the crystal size and obtain the high strengthened-light material. Using this process, we fabricate the thin plate for bipolar plate through the low pressure die casting with electromagnetic stirring and vacuum-evacuation which can control the crystal grain by electromagnetic stirring. Thin plate ($110mm{\times}130mm{\times}1mm$) is fabricated by this process. The average Vickers hardness of thin plate is about 77 HV.

• Journal of Ocean Engineering and Technology
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• v.32 no.2
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• pp.106-115
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• 2018

The forward and afterward parts of ships and offshore structures are designed to improve the fuel consumption performance. These are made of curved plates with a large thickness. If a fabricated curved plate has some dimensional errors, a lot of additional cost is incurred in the assembly process. Thus, an accurate dimensional assessment is very important for fabrication. In this paper, we propose an assessment method for the dimensional quality management of curved plates. This can be applied to data measured using a variety of three-dimensional instruments, with boundary measurement points automatically classified and sorted to create a measurement surface. The assessment is evaluated after matching the CAD surface and the measured surface considering constrained conditions. The fabrication assessment is evaluated as a probability of how much the tolerance is satisfied.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.05a
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• pp.241-244
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• 2004

Microlens patterned micro-mold fabrication method for Light Guiding Plate(LGP), kernel part of LCD-BLU(Back Light Unit), was presented. Instead of erosion dot pattern for LCP optical design, microlens pattern, fabricated by LIGA-reflow process, was applied. Optical pattern design method was also developed not only for negative pattern LGP, but also positive pattern LGP. In order to achieve flow balance during the micro-injection molding process and dimensional accuracy, two LGP pattern was made in one micro-mold.

• Proceedings of the KIEE Conference
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• 1998.07g
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• pp.2556-2558
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• 1998

2-D microwell arrays for micro ELISA (Enzyme-Linked Immuno Solvent Assay) system were fabricated using micromachining technology. The materials for the bottom plate, top plate and sidewall of the microwell were used a #7740 glass, gold and silicon respectively considering bio-compatibility and easy fabrication. Cylindrical or groove shape microwells, which have about $100{\mu}m$ depth and $50{\sim}500{\mu}m$ diameter or width, were arrayed. The fabricated microwell array can be applied to the essential part of a biochip when surface modification is made to immobilize cells or biomolecules on the microwell bottom.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2236-2238
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• 2000

The paper represents the fabrication of an electrostatic micro actuator for optical devices. The micro actuator consists of a plate suspended four p+ silicon cantilevers and an electrode on a glass substrate. The cantilever curls down because of the residual stress gradient in p+ silicon. When input voltage is applied between the p+ cantilevers and the electrode. the cantilevers are pulled toward the electrode by the electrostatic force. The displacement of the plate is measured with a laser displacement meter for various input voltage and frequencies.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.4
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• pp.261-265
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• 2011

This paper describes the fabrication and characteristics of a Au/Ni/Ti/3C-SiC Schottky diode with field plate (FP) edge termination. The Schottky contacts were annealed for 30 min at temperatures ranging from 0 to $800^{\circ}C$. At annealing temperature of $600^{\circ}C$, it showed an inhomogeneous Schottky barrier and had the best electrical characteristics. However, the annealing of $800^{\circ}C$ replaced it with ohmic behaviors because of the formation of many different types of nickel silicides. The fabricated Schottky diode had a breakdown voltage of 200 V, Schottky barrier height of 1.19 eV and worked normally even at $200^{\circ}C$.