• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.140.2-140.2
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• 2013

Strong metal-support interaction effect is an important issue in determining the catalytic activity for heterogeneous catalysis. In this work, we report the catalytic activity of $Au/TiO_2$, $Au/Al_2O_3$, and $Au/Al_2O_3-CeO_2$ nanocatalysts under CO oxidation fabricated by arc plasma deposition (APD), which is a facile dry process with no organic materials involved. These catalytic materials were characterized by transmission electron microscopy (TEM), energy-dispersive X-ray spectroscopy (EDS) and $N_2$-physisorption. Catalytic activity of the materials has measured by CO oxidation using oxygen, as a model reaction, in a micro-flow reactor at atmospheric pressure. Using APD, the catalyst nanoparticles were well dispersed on metal oxide powder with an average particle size (3~10 nm). As for catalytic reactivity, the result shows $Au/Al_2O_3-CeO_2$ nanocatalyst has the highest catalytic activity among three samples in CO oxidation, and $Au/TiO_2$, and $Au/Al_2O_3$ in sequence. We discuss the effects of structure and metal-oxide interactions of the catalysts on catalytic activity.

• 웰빙융합연구
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• 제5권2호
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• pp.21-27
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• 2022

Purpose: This study is about photocatalytic technology and plasma oxidation-reduction technology. To the main cause of exposure to odor pollution, two deodorization techniques were applied to develop a module with higher removal efficiency and ozone reduction effect. Research design, data and methodology: A composite module was constructed by arranging two types of dry deodorization equipment (catalyst, adsorbent) in one module. This method was designed to increase the responsiveness to the components of complex odors and the environment. standard, unity, two types of oxidizing photo-catalyst technology and plasma dry deodorization device installed in one module to increase the potential by reduction to 76% of ozone, 100%, and 82%. Results: The complex odor disposal efficiency was 92%. Ammonia was processed with 50% hydrogen sulfide and 100% hydrogen sulfide, and ozone was 0.01ppm, achieving a target value of 0.07ppm or less. The combined odor showed a disposal efficiency of 93%, ammonia was 82% and hydrogen sulfide was 100% processed, and ozone achieved a target value of 0.07 ppm or less. Conclusions: Ozone removal efficiency was 76% by increasing Oxidation-Reduction Reaction(ORR). The H2S removal efficiency of the deodorizer was higher than that of the biofilter system currently used in sewage disposal plants.

• 한국자기학회지
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• 제12권4호
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• pp.127-131
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• 2002

자성터널접합(magnetic tunnel junction: MTJ)소자의 AlO$_{x}$터널장벽 절연층을 플라즈마 산화법으로 2번에 나누어 금속증착.산화를 반복하여 만들어 보았다. 이중산화I그룹은 10A의 $\AA$의 Al 하부 절연막을 증착하고 산화시간을 10 s로 완성한 후 그 위에 13$\AA$의 Al을성막하고 50, 80, 120s간 산화시켜 완성한 절연막의 특성을 알아보았다. 이중산화II그룹은 10$\AA$봐 Al하부 절연막의 산화시간을 30~120 s간 달리하고 그 위에 13 $\AA$의 Al을 성막하고 210 s간 산화시켜 완성한 절연막의 특성을 알아보았다. 이중산화공정으로 제조된 시편은 전 실험범위에서 자기저항비(magnetoresistance： MR)는 27% 이상으로 우수하였고, 이는 13 $\AA$의 Al을 증착하고 한번만 산화시키는 통상의 단일산화에 비해 MR비가 우수하고 공정범위가 넓었다. 수직단면 투과전자현미경(transmission electron microscope： TEM)으로 미세구조를 확인한 결과 이중산화가 단일산화보다도 더 얇고 균일한 두께를 유지함을 알 수 있었다 X선광전자분석(X-ray photoelectron spectroscopy： XPS)으로 확인한 결과 이중산화는 절연막층 하부 CoFe 자성층의 Fe의 산화를 방지하여, 결과적으로 단일산화법에 비해서 하부자성층의 산화를 방지하여 긴 산화시간 공정 범위에서도 우수한 MR비를 가질 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2004년도 제26회 학술발표회 초록집
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• pp.143-143
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• 2004

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.193.2-193.2
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• 2016

We evaluate the change in defects in the oxidized SiO2 grown on 4H-SiC (0001) by plasma assisted oxidation, by comparing with that of conventional thermal oxide. In order to investigate the changes in the electronic structure and electrical characteristics of the interfacial reaction between the thin SiO2 and SiC, x-ray photoelectron spectroscopy (XPS), X-ray absorption spectroscopy (XAS), DFT calculation and electrical measurements were carried out. We observed that the direct plasma oxide grown at the room temperature and rapid processing time (300 s) has enhanced electrical characteristics (frequency dispersion, hysteresis and interface trap density) than conventional thermal oxide and suppressed interfacial defect state. The decrease in defect state in conduction band edge and stress-induced leakage current (SILC) clearly indicate that plasma oxidation process improves SiO2 quality due to the reduced transition layer and energetically most stable interfacial state between SiO2/SiC controlled by the interstitial C.

• 한국표면공학회지
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• 제38권1호
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• pp.1-6
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• 2005

Ni-15at.% W coatings with film thicknesses of 20-40 ㎛ were electroplated on a steel substrate, and their oxidation behavior was investigated at 700 and 800℃ in air. For comparison, a pure Ni coating and a bulk Ni were also oxidized. The Ni-15at.%W coating displayed the worst oxidation resistance, due to the formation of less-protective NiO, Fe₂O₃, NiFe₂O₄ and NiWO₄. The corrosion behavior Ni-15at.%W coatings electroplated on a steel substrate was similarly investigated at 700 and 800℃ in the Ar-l%SO₂ atmosphere. For comparison, the uncoated steel substrate was also corrosion-tested in the Ar-l %SO₂ atmosphere. Severe scale spallation and the internal corrosion of the steel that occurred in the uncoated substrate were not observed in the coated specimen. However, it seemed that the Ni-15at.%W coating cannot be a potential candidate as a sulfidation-resistant coating, due to the formation of less-protective NiO, NiS, WO₃ and NiWO₄.

• 한국재료학회지
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• 제13권7호
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• pp.420-423
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• 2003

Coatings of TiCrN ion-plated on a steel substrate was oxidized at $800^{\circ}C$ in air, and their oxidation mechanism was presented. During oxidation, substrate elements and Ti and Cr in the coating always diffused outwardly to form the oxide scale. Simultaneously, oxygen from the atmosphere diffused inward1y to react with Ti and Cr to form $TiO_2$and $Cr_2$$O_3$, respectively. Also, the counter-diffusion of cations and oxygen resulted in some oxygen dissolution in the unoxidized TiCrN coating, and Fe dissolution in the oxide scale. When the Ti content in the coating was high, the $TiO_2$-forming tendency was strong, while when the Cr content was high, the $Cr_2$$O_3$-forming tendency was strong.

• 한국표면공학회지
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• 제27권2호
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• pp.91-98
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• 1994

For the plasma sprayed as well as the EB-PVD thermal barrier coatings, the fracture paths within the oxidation products developed at the interface between the partially stabilized zirconia ceramic coating and NiCoCrAlY bond coat during cyclic thermal oxidation has been investigated. It was observed that the fracture in the oxidation products primarily took place within the oxide such as $Ni_{1-x}Co_3(Al_,Cr)_2O_4$ or at the interface between the oxide and $Al_2O_3$. It was found that Al2O3 developed first, followed by the Ni/Co/Cr rich oxides such as ,,$Ni_{1-x}Co_x(Al_,Cr)_2O_4$ $Cr_2O_3$and NiO at the interface between the ceramic coating and the bond coat in a cyclic high temperature environment. It was therfore concluded that the formation of the oxide containing Ni, Cr and Co was a life-limiting event for thermal barrier coatings during cyclic thermal oxidation.

• 한국전기전자재료학회논문지
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• 제19권3호
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• pp.292-300
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• 2006

In order to improve energy efficiency in the dilute trichloroethylene removal using the nonthermal plasma process, the barrier discharge treatment combined with manganese dioxide was experimentally studied. Reaction kinetics in this process was studied on the basis of final byproducts distribution. Decomposition efficiency was improved to about $99\;\%$ at the specific energy of 40 J/L with passing through manganese dioxide. C=C ${\pi}$ bond cleavage of TCE substances gave DCAC, which has the single bond of C-C through oxidation reaction during the barrier discharge plasma treatment. Those DCAC were broken easily in the subsequent catalytic reaction due to the weak bonding energy about $3{\sim}4\;eV$ compared with the double bonding energy in TCE molecules. Oxidation byproducts of DCAC and TCAA from TCE decomposition are generated from the barrier discharge plasma treatment and catalytic surface chemical reaction, respectively. Complete oxidation of TCE into COx is required to about 400 J/L, but $CO_2$ selectivity remains about $60\;\%$.

• 한국주조공학회지
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• 제28권1호
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• pp.20-24
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• 2008

The characteristics, such as roughness, thickness, microhardness and corrosion resistance, of plasma electrolytic oxide coatings on AZ91D alloy were investigated under the processing condition of various coating times. The coatings on AZ91D alloy consisted of MgO, $MgAl_{2}O_{4}$ and $Mg_{2}SiO_{4}$ oxides. The surface roughness and thickness of coatings became larger with increasing the coating time. The microhardness in cross section of coatings was much higher than not only that in surface but that in the conventional anodic oxide coatings, which increased progressively as the coating time increased. After being immersed in 3.5%NaCl solution and methyl alcohol, the corrosion resistance of AZ91D alloy was markedly improved by plasma electrolytic oxidation coating treatment, and the AZ91D alloy coated for 50min revealed excellent corrosion resistance.