• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2013.05a
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• pp.60-60
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• 2013

공정용 플라즈마는 반도체 웨이퍼 가공, 평판형 디스플레이, 자동차 및 산업용 부품 코팅, 장식용 코팅에 널리 사용되고 있다. 이를 위한 장비 개발은 플라즈마에 대한 깊은 이해가 없이는 불가능하여 주로 선진 장비 회사의 모델을 참고하여 유사하게 만드는 수준에서 진행되어 왔는데 2D, 3D modeling이 가능한 전산 유체 모델은 일부 상용화 패키지 S/W까지 등장하였으나 플라즈마와 수치 해석에 대한 기본적인 지식이 없이는 사용이 매우 어렵다는 단점이 있어 국내의 일부소자회사의 장비 관련 연구팀 정도에서만 사용이 가능했다. 이를 중견 장비 업체들에 까지 확대하기 위한 작업의 일환으로 2D-ICP, 2D-CCP model의 기본적인 기능을 갖추고 기하적 크기는 파라미터 방식으로 사용자가 조절할 수 있도록 만든 framework을 개발하려는 시도에 대해서 논의 하고자 한다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.565-565
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• 2013

Free burning arcs where the work piece acts as an anode are frequently used for a number of applications. Our investigation is exclusively concerned with a simplified unified model of arcs and anode under steady state conditions at atmospheric pressure. The model is used to make predictions of arc and anode temperatures and arc voltage for a 200 A arc in argon. The computed temperatures along the axis between the cathode tip and the anode surface compare well the measured data. This knowledge of free burning arcfeatures can play a role in developing the atmospheric plasma systems, however, further investigation should include the modelling of Cu evaporation from anode and non-LTE situation near electrodes for more realistic calculations.

• Journal of The Korean Astronomical Society
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• v.46 no.6
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• pp.261-268
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• 2013

Magnetohydrostatic equilibria, in which the Lorentz force, the plasma pressure force and the gravitational force balance out to zero, are widely adopted as the zeroth order states of many astrophysical plasma structures. A magnetic flux-current surface is a surface, in which both magnetic field lines and current lines lie. We for the first time derive the necessary and sufficient condition for existence of magnetic flux-current surfaces in magnetohydrostatic equilibria. It is also shown that the existence of flux-current surfaces is a necessary (but not sufficient) condition for the ratio of gravity-aligned components of current density and magnetic field to be constant along each field line. However, its necessary and sufficient condition is found to be very restrictive. This finding gives a significant constraint in modeling solar coronal magnetic fields as force-free fields using photospheric magnetic field observations.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.2
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• pp.25-32
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• 1998

In this paper, we report the result of the three-dimensional topography simultor, 3D-SURFILER(SURface proFILER) for the simulation of topographical evalution of the surface, curing a plasma etching process. We employed cell-removal algorithm to represent the topographical evoluation of the surface. The visibility with shadow effect was developed and applied to the spillover algorithm. To demonstrate the capability of 3D-SURFILER, we compared with simulated profiles with the SEM picture for dry and reactive ion etching(RIE) of the Si$_{3}$N$_{4}$ film and Pt film.

• Proceedings of the KIEE Conference
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• 2006.04a
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• pp.102-104
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• 2006

Auto-Correlated time series (ATS) model was constructed by using the backpropagation neural network. The performance of ATS model was evaluated with sensor information collected from a large volume, industrial plasma-enhanced chemical vapor deposition system. A total of 18 sensor information were collected. The effect of inclusion of past and future information were examined. For all but three sensor information with a large data variance demonstrated a prediction error less than 4%. By integrating ATS model into equipment software, process quality can be more stringently monitored while improving device throughput.

• 한국전산유체공학회:학술대회논문집
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• 2011.05a
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• pp.148-155
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• 2011

In this study, numerical analysis was performed for 150kW arc heater and inflow around specimen was studied. Pressure, voltage, etc. were similar to experimental data, however efficiency was over estimated. In order to correct efficiency, swirl effect and modified radiative heat flux using configuration factor were considered. It was shown that Swirl had little effect on efficiency although radiative heat flux played an important role on decreasing the efficiency of arc heater. In addition, non-equilibrium analysis that plasma flows moves from an arc heater's nozzle to a specimen were performed.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.255.2-255.2
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• 2014

Electrode erosion is indispensable for atmospheric plasma systems, as well as for switching devices, due to the high heat flux transferred from arc plasmas to contacts, but experimental and theoretical works have not identified the characteristic phenomena because of the complex physical processes. Our investigation is concerned with argon free-burning arcs with anode erosion at atmospheric pressure by computational fluid dynamics (CFD) analysis. We are also interested in the energy flux and temperature transferring to the anode with a simplified unified model of arcs and their electrodes. In order to determine two thermodynamic quantities such as temperature and pressure and flow characteristics we have modified Navier-Stokes equations to take into account radiation transport, electrical power input and the electromagnetic driving forces with the relevant Maxwell equations. From the simplified self-consistent solution the energy flux to the anode can be derived.

• Journal of Pharmaceutical Investigation
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• v.39 no.5
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• pp.373-379
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• 2009

This study was conducted to develop a pharmacokinetic-pharmacodynamic (PK/PD) model of a direct thrombin inhibitor, argatroban to predict the concentration-effect profiles in rats. Argatroban was i.v. injected to rats at 0. 2, 0.8 and 3.2 mg/kg doses (n = 4-5 per dose), and plasma drug levels were determined by a validated LC/MS/MS assay. The pharmacokinetics of argatroban was linear over the i.v. dose range studied. The thrombin time (TT) and the activated partial thromboplastin time (aPTT) were measured in rat plasma and they were found to linearly increase with increasing the dose. A 2-compartment pharmacokinetic model linked with an indirect response pharmacodynamic model was successfully utilized to evaluate the drug concentration-response relationship.

• Journal of the Korean institute of surface engineering
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• v.48 no.4
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• pp.179-184
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• 2015

Quadrupole Mass Spectrometers (QMS) is a very useful tool in vacuum process diagnosis. Tungsten filament based ion sources are vulnerable to contamination from process gas monitoring. Common symptoms of quadrupole mass spectrometer malfunction is appearance of unwanted contaminant mass peaks or no detection of any ion peaks. We disassembled used quadrupole mass spectrometer and found out black insulating deposits on inside of ion source parts. Five steps of cleaning procedure were applied and almost full restoration of functions were confirmed in two types of closed ion source quadrupole mass spectrometer. By using a numerical modeling (CFD-ACE+) technique, the electric potential profile of ion source with/without insulating deposit was calculated and showed the possibility of quadrupole mass spectrometer malfunction by the deterioration of designed potential profile inside the ion source.

• Journal of the Semiconductor & Display Technology
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• v.10 no.4
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• pp.21-23
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• 2011

Uniformity of plasma etching processes critically depends on the wafer temperature and its distribution. The wafer temperature is affected by plasma, chucking force, He back side pressure and the surface temperature of ESC(electrostatic chuck). In this work, 3D mathematical modeling is used to investigate the influence of the geometry of coolant path and the temperature distribution of the ESC surface. The model that has the coolant path with less change of the cross-sectional area and the curvature shows low standard deviation of the ESC surface temperature distribution than the model with the coolant path of the larger surface area and more geometric change.