• 한국진공학회지
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• 제6권1호
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• pp.85-90
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• 1997

32cm직경의 $AlCu_x$(x=0.5%)음극 타겟과 회전 자석을 이용한 상용 마그네트론 스퍼 터링 장치에서 부가적인 플라즈마 여기 방법으로 스퍼터링된 입자들을 이온화시킨후, 수십 볼트의 직류 기판 바이어스로 이온의 방향성과 에너지를 조절하여 작은 트렌치나 via를 채 울 수 있는 공정을 개발하였다. 여기에서, 반경방향의 이온 플럭스비의 균일도 문제를 개선 하기 위하여, 입자들의 가시광선 영역의 방출선을 이용한 플라즈마 진단과, 패터닝된 웨이 퍼에 대한 직접 채우기로 플라즈마 내의 입자 분포와의 상관 관계를 찾고, RF 코일 설계의 개선을 도모하였다. 가시광 방출 분광에서 $Ar^{\circ},\;Ar^+;Al^+,\;Al^{\circ}$ 입자들의 방출선 세기는 1$\mu\textrm{m}$이 하의 크기를 갖는 트렌치와 via의 바닥과 top 두께비와 밀접한 관련이 있었다. RF코일의 직 경을 29cm에서 32cm로 증가 시키고, RF 입력부에 의한 비대칭을 개선하여 이온 플럭스비 의 척도가 되는 via 채우기의 바닥과 top의 두께비에서 7.5%에서 1.5%로의 균일도 향상을 얻었다.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2009년도 추계학술대회 논문집
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• pp.619-619
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• 2009

Recently, silica nanostructures are widely used in various applicationary areas such as chemical sensors, biosensors, nano-fillers, markers, catalysts, and as a substrate for quantum dots etc, because of their excellent physical, chemical and optical properties. Additionally, these days, semiconductor silica and silicon with high purity is a key challenge because of their metallurgical grade silicon (MG-Si) exhibit purity of about 99% produced by an arc discharge method with high cast. Tremendous efforts are being paid towards this direction to reduce the cast of high purity silicon for generation of photovoltaic power as a solar cell. In this direction, which contains a small amount of impurities, which can be further purified by acid leaching process. In this regard, initially the low cast rice-husk was cultivated from local rice field and washed well with high purity distilled water and were treated with acid leaching process (1:10 HCl and $H_2O$) to remove the atmospheric dirt and impurity. The acid treated rice-husk was again washed with distilled water and dried in an oven at $60^{\circ}C$. The dried rice-husk was further annealed at different temperatures (620 and $900^{\circ}C$) for the formation of silica nanospheres. The confirmation of silica was observed by the X-ray diffraction pattern and X-ray photoelectron spectroscopy. The morphology of obtained nanostructures were analyzed via Field-emission scanning electron microscope(FE-SEM) and Transmission electron microscopy(TEM) and it reveals that the size of each nanosphares is about 50-60nm. Using the Inductively coupled plasma mass spectrometry(ICP-MS), Silica was analyzed for the amount of impurities.

• 한국산업보건학회지
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• 제26권1호
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• pp.48-57
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• 2016

Objectives: This study was conducted to evaluate the accuracy and precision of airborne metal analysis using polyvinyl chloride(PVC) membrane filter by pretreatment methods. Methods: A total of 75 spiked PVC samples for Cr, Fe and Mn ranged from 6 ug/sample to 40 ug/sample were used to evaluate recovery rates for three pretreatment methods: acid extraction, hot plate ashing and microwave digestion. For Mn, an additional 75 spiked mixed cellulose ester(MCE) membrane filters were analysed to compare the recovery rates of PVC samples. All samples were analysed with an inductively coupled plasma optical emission spectrometer(ICP-OES) and manganese samples were additionally analyzed by atomic absorption spectrometer(AAS). Results: The overall mean recovery rates of PVC samples for Cr, Fe and Mn were 90% or higher regardless of pretreatment methods, but there were statistically significant differences in recovery rates for Cr(p<0.05) and Mn(p<0.01) samples by pretreatment methods. The biases and the coefficient variations of PVC samples for three metals pretreated with three kinds of pretreatment methods ranged from 1.7% to 4.7% and from 1.6% to 6.5%, respectively. The manganese PVC samples pretreated by microwave digestion and analyzed with ICP-OES had the lowest bias at 1.9% and also showed lower bias than the bias for MCE samples, 2.7%. Conclusions: In order to accurately analyze the metals sampled with PVC membrane filters, microwave digestion and ICP-OES can be recommended.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.147-147
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• 2011

High crystalline nonpolar a-plane (11-20) nitride light emitting diodes (LEDs) have been fabricated on r-plane (1-102) sapphire substrates by metalorganic chemical-vapor deposition (MOCVD). The multi-quantum wells (MQWs) active region is consists of 4 periods the nonpolar a-plane InGaN/GaN(a-InGaN/GaN) on a high quality a-plane GaN (a-GaN) template grown by using the multibuffer layer technique. The full widths at half maximum (FWHMs) of x-ray rocking curve (XRC) obtained from phiscan of the specimen that was grown up to nonpolar a-plane GaN LED layers with double crystal x-ray diffraction. The FWHM values were decreased down to 477 arc sec for $0^{\circ}$ and 505 arc sec for $-90^{\circ}$, respectively. After fabricating a conventional lateral LED chip which size was $300{\times}600{\mu}m^2$, we measured the optical output power by on-wafer measurements. N-electrode was made with Cr/Au contact, and ITO on p-GaN was formed with Ohmic contact using Ni/Au followed by inductively coupled plasma etching for mesa isolation. The optical output power of 1.08 mW was obtained at drive current of 20 mA with the peak emission wavelength of 502 nm.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.459-459
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• 2012

Recently, the discharge of global warming gases in dry etching process of TFT-LCD display industry is a serious issue because perfluorocarbon compound (PFC) gas causes global warming effects. PFCs including CF4, C2F6, C3F8, CHF3, NF3 and SF6 are widely used as etching and cleaning gases. In particular, the SF6 gas is chemically stable compounds. However, these gases have large global warming potential (GWP100 = 24,900) and lifetime (3,200). In this work, we chose C3F6O gas which has a very low GWP (GWP100 = <100) and lifetime (< 1) as a replacement gas. This study investigated the effects of the gas flow ratio of C3F6O/O2 and process pressure in dual-frequency capacitively coupled plasma (CCP) etcher on global warming effects. Also, we compared global warming effects of C3F6O gas with those of SF6 gas during dry etching of a patterned positive type photo-resist/silicon nitride/glass substrate. The etch rate measurements and emission of by-products were analyzed by scanning electron Microscopy (SEM; HITACI, S-3500H) and Fourier transform infrared spectroscopy (FT-IR; MIDAC, I2000), respectively. Calculation of MMTCE (million metric ton carbon equivalents) based on the emitted by-products were performed during etching by controlling various process parameters. The evaluation procedure and results will be discussed in detail.

• 분석과학
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• 제14권3호
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• pp.253-258
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• 2001

본 연구에서는 우리나라 생활폐기물 대형소각시설(200톤/일 이상) 9개소에서 발생되는 소각재중, 바닥재에 대한 금속류의 용출시험 및 함량시험을 수행하여 유해특성과 유해잠재성을 고찰하였다. 용출시험은 우리나라 폐기물공정시험방법에 따라 수행하였으며, 함량시험은 수은(Hg)의 경우 열분해금아말감원자흡광분광기(TDA-AAS)로 측정하고, 납 등 9개 원소는 US-EPASW-846 3050B방법으로 전처리하고 불꽃원자흡광분광기(FAAS) 또는 유도결합플라스마원자발광분광기(ICP-AES)로 측정하였다. 용출시험 결과, 납과 구리가 주 오염물질이었다. 함량시험결과, 철이 가장 높은 농도로 나타났고 농도는 Fe>Zn>Cu>Mn>Pb>Cr>As>Cd>Hg 순으로 나타났으며, 각 소각시설마다 농도순이 평균적으로는 같았다.

• 화약ㆍ발파
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• 제33권2호
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• pp.1-14
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• 2015

본 연구는 조상들이 천연물인 흙과 재를 이용하여 화약원료인 염초(질산칼륨)를 만든 과정을 알아보기 위하여 역사기록을 근거로 마루밑 흙 등 10종의 흙과 쑥재 등 6종의 재를 채취하여 수행되었다. 흙과 재로부터 추출한 이온성분을 ICP와 IC로 분석한 결과 흙과 재에는 각각 질산이온과 칼륨이온이 주로 함유되어 있었으며, 특히 사람의 생활환경에 노출되고 미세한 유기물질이 축적되는 마루밑 흙에 질산이온이 제일 많이 포함되어 있었다. 재에 포함된 칼륨이온은 식물의 종류와 식물의 성장환경에 큰 영향을 받으며, 쑥 재에 가장 많이 포함되어 있었다. 흙과 재의 1:1 혼합 추출액으로부터 최대 68% 순도의 염초를 얻었으며, 염초의 순도를 높이기 위하여 물질의 용해도 차이(분별결정)를 이용하여 정제한 결과 염초의 순도를 약 14% 향상시킬 수 있었다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.74-74
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• 2018

Ti-6Al-4V alloys have been widely used as orthopedic materials because of their excellent corrosion resistance and mechanical properties. However, it does not bind directly to the bone, so it requires a surface modification. This problem can be solved by nanotube and micropore formation. Plasma electrolytic oxidation (PEO) treatment for micropore, which combines high-voltage spark and electrochemical oxidation, is a new way of forming a ceramic coating on light metals such as titanium and its alloys. This method has excellent reproducibility and can easily control the shape and size of the Ti alloy. In this study, formation of bioactive surface by PEO-treatment after $2^{nd}$ ATO technique of Ti-6Al-4V alloy was invesgated by various instrument. Nanotube oxide surface structure was formed on the surface by anodic oxidation treatment in 0.8 wt.% NaF and 1M $H_3PO_4$ electrolytes. After nanotube formation, nanotube layer was removed by ultrasonic cleaning. PEO-treatment was carried out at 280V for 3 minutes in the electrolytic solution containing the bioactive substance (Mg, Zn, Mn, Sr, and Si). The surface of Ti-6Al-4V alloy was observed by field emission scanning electron microscopy (FE-SEM, S-4800 Hitachi, Japan). An energy dispersive X-ray spectrometer (EDS, Inca program, Oxford, UK) was used to analyze the spectra of physiologically active Si, Mn, Mg, Zn, and Sr ions. The PEO film formed on the Ti-6Al-4V alloy surface was characterized using an X-ray diffractometer (TF-XRD, X'pert Philips, Netherlands). It is confirmed that bioactive ions play an essential role in the normal bone growth and metabolism of the human skeletal tissues.

• 한국축산식품학회지
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• 제23권4호
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• pp.356-360
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• 2003

우유의 셀렌 함량을 측정하기 위하여 ICP-OES를 이용한 분석법을 확립하였다. 시료전처리는 우유의 수분을 제거한 후 질산과 과산화수소를 이용하여 유기성분을 제거하였고, 최종적으로 다시 과산화수소로 미량의 유기성분을 산화시켰다. 셀렌은 휘발성 무기성분이므로 전처리된 용액에 NaBH$_4$와 HCl을 이용하여 셀렌의 수소화(hydride)반응으로 끓는점을 높이고 분석감도를 향상시켰다. 수소화 반응 중 HCl 농도의 최적조건은 2 mol/L에서 최대 cps(counter per sec)로 나타났고, NaBH$_4$와 시료 유속의 최적조건은 각각 1.5%와 1.2mL/min인 것으로 나타났다. 따라서 위의 HG 조건이 시료 메트릭스에 따른 간섭효과를 제거하였으며, 최적의 정량조건임을 알 수 있었다. 이 조건으로 표준물질을 이용한 셀렌의 직선성 상관계수(R)는 0.98로서 우유에 함유된 셀렌 분석에 적용할 수 있었다. Standard addition method를 이용한 회수율은 10 ppb에서 88.0% 이었고, 첨가된 농도가 증가할수록 회수율 및 RSD는 정확성 및 정밀성을 확보할 수 있었다.

• 천문학회보
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• 제36권2호
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• pp.147.2-147.2
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• 2011

We have initiated a long-term identification campaign of supernova remnant candidates in X-ray regime. In the short-listed unidentified sources from the ROSAT All Sky Survey, we have chosen the brightest candidate, G308.3-1.4, as our pilot target for a dedicated investigation with Chandra X-ray Observatory. Our observation has revealed an incomplete shell-like X-ray structure which well-correlated with the radio feature. Together with the spectral properties of a shocked heated plasma, we confirm that G308.3-1.4 is indeed a supernova remnant. A bright X-ray point source which locates close to the remnant center is also uncovered in this observation. Its spectral behavior conform with those observed in a rare class of neutron stars. The properties of its optical/infrared counterpart suggests the evidence for a late-type companion star. Interestingly, possible excesses in B-band and H-alpha have been found which indicate this can be an accretion-powered system. With the further support from the putative periodicity of ~1.4 hrs, this source can possibly provide the direct evidence of a binary system survived in a supernova explosion for the first time.