• Title/Summary/Keyword: Plasma devices

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Corrosion Protection of Plasma-Polymerized Cyclohexane Films Deposited on Copper

  • Park, Z.T.;Lee, J.H.;Choi, Y.S.;Ahn, S.H.;Kim, J.G.;Cho, S.H.;Boo, J.H.
    • Journal of the Korean institute of surface engineering
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    • v.36 no.1
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    • pp.74-78
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    • 2003
  • The corrosion failure of electronic devices has been a major reliability concern lately. This failure is an ongoing concern because of miniaturization of integrated circuits (IC) and the increased use of polymers in electronic packaging. Recently, plasma-polymerized cyclohexane films were considered as a possible candidate for a interlayer dielectric for multilever metallization of ultra large scale integrated (ULSI) semiconductor devices. In this paper the protective ability of above films as a function of deposition temperature and RF power in an 3.5 wt.% NaCl solution were examined by polarization measurement. The film was characterized by FTIR spectroscopy and contact angle measurement. The protective efficiency of the film increased with increasing deposition temperature and RF power, which induced the higher degree of cross-linking and hydrophobicity of the films.

Design of Driving methods of lower power consumption in Plasma AI(plasma adaptive intensifier) driving method (Plasma AI(plasma adaptive intensifier)구동의 전력 소모 개선을 위한 구동방식 설계)

  • Kim, Jun-Hyeong;O, Sun-Taek;Lee, Dong-Ho
    • Proceedings of the KIEE Conference
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    • 2003.11c
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    • pp.844-847
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    • 2003
  • Display devices are becoming increasingly important as an interface between humans and machines in the growing information society. In display devices, PDP (Plasma Display Panel) has many advantages in that it has wide screen, wide viewing angle and is light weight, thin. In PDP driving method, if the brightness of input image is high, applying the fixed sustain pulse to the PDP panel will raise the PDP power consumption and may damages the PDP panel. To overcome these problems, the Plasma AI driving method was introduced by the Matshushita co. in Japan. The Plasma AI driving module calculates the peak value and average value of 1 frame image and adjusts the gradation and sustain pulses for 1 frame sustain. In this paper, the proposed PDP driving module is based on the Plasma AI driving module. The proposed driving module calculates peak value and average value, and the brightness distribution of 1 frame image. Using brightness distribution, the proposed driving module divides 1 frame input image into 15 image patterns. For each image pattern, minimum sustain pulses and sub-frames are used for the brightness of 1 frame image and the sustain weight for 64, 128, 192 gradation is proposed. Therefore, the sustain power consumption can be reduced.

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Roll-to-Roll Barrier Coatings on PET Film by Using a Closed Drift Magnetron Plasma Enhanced Chemical Vapor Deposition

  • Lee, Seunghun;Kim, Jong-Kuk;Kim, Do-Geun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2012.05a
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    • pp.124-125
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    • 2012
  • Korea institute of materials science (KIMS) use a linear deposition source called as a closed drift linear plasma source (CDLPS) as well as dual magnetron sputtering (DMS) to deposit SiOxCyHz films in $HMDSO/O_2$ plasma. The CDLPS generates linear plasma using closed drifting electrons and can reduce device degradations due to energetic ion bombardments on organic devices such as organic photovoltaic and organic light emission diode by controlling an ion energy. The deposited films are investigated by Fourier transform infrared (FT-IR) spectroscopy, X-ray photoelectron spectroscopy (XPS), and atomic force microscopy (AFM). Optical emission spectroscopy (OES) is used to measure relative radical populations of dissociation and recombination products such as H, CH, and CO in plasma. And SiOx film is applied to a barrier film on organic photovoltaic devices.

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Efficiency enhancement of the organic light-emitting diodes by oxygen plasma treatment of the ITO substrate

  • Hong, J.W.;Oh, D.H.;Kim, C.H.;Kim, G.Y.;Kim, T.W.
    • Journal of Ceramic Processing Research
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    • v.13 no.spc2
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    • pp.193-197
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    • 2012
  • Oxygen plasma has been treated on the surface of indium-tin-oxide (ITO) to improve the efficiency of the organic light-emitting diodes (OLEDs) device. The plasma treatment was expected to inject the holes effectively due to the control of an ITO work-function and the reduction of surface roughness. To optimize the treatment condition, a surface resistance and morphology of the ITO surface were investigated. The effect on the electrical properties of the OLEDs was evaluated as a function of oxygen plasma powers (0, 200, 250, 300, and 450 W). The electrical properties of the devices were measured in a device structure of ITO/TPD/Alq3/BCP/LiF/Al. It was found the plasma treatment of the ITO surface affects on the efficiency of the device. The efficiency of the device was optimized at the plasma power of 250 W and decreased at higher power than 250 W. The maximum values of luminance, luminous power efficiency, and external quantum efficiency of the plasma treated devices increase by 1.4 times, 1.4 times, and 1.2 times, respectively, compared to those of the non-treated ones.

Investigation of an Infrared Temperature Measurement System for Thermal Safety Verification of Plasma Skin Treatment Devices

  • Choi, Jong-ryul;Kim, Wookeun;Kang, Bongkeun;Song, Tae-Ha;Baek, Hee Gyu;Han, Yeong Gil;Park, Jungmoon;Seo, Soowon
    • Current Optics and Photonics
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    • v.1 no.5
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    • pp.500-504
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    • 2017
  • In this paper, we developed a temperature measurement system based on an infrared temperature imaging module for thermal safety verification of a plasma skin treatment device (PSTD). We tested a pilot product of the low-temperature PSTD using the system, and the temperature increase of each plasma torch was well-monitored in real-time. Additionally, through the approximation of the temperature increase of the plasma torches, a certain limitation of the plasma treatment time on skin was established with the International Electrotechnical Commission (IEC) guideline. We determined an appropriate plasma treatment time ($T_{Safe}$ < 24 minutes) using the configured temperature measurement system. We believe that the temperature measurement system has a potential to be employed for testing thermal safety and suitability of various medical devices and industrial instruments.

Patterned Arrays of Well-Ordered ZnO Nanorods Assisted with Polystyrene Monolayer By Oxygen Plasma Treatment

  • Choi, Hyun Ji;Lee, Yong-Min;Lee, Yulhee;Seo, Hyeon Jin;Hwang, Ki-Hwan;Kim, Dong In;Yu, Jung-Hoon;Kim, Jee Yun;Nam, Sang Hun;Boo, Jin-Hyo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.146-146
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    • 2016
  • Zinc Oxide (ZnO) was known as a promising material for surface acoustic wave devices, gas sensors, optical devices and solar cells due to piezoelectric material, large band gap of 3.37 eV and large exciton binding energy of 60 meV at room temperature. In particular, the alignment of ZnO nanostructures into ordered nanoarrays can bring about improved sensitivity of devices due to widen the surface area to catch a lot of gas particle. Oxygen plasma treatment is used to specify the nucleation site of round patterned ZnO nanorods growth. Therefore ZnO nanorods were grown on a quartz substrate with patterned polystyrene monolayer by hydrothermal method after oxygen plasma treatment. And then, we carried out nanostructures by adjusting the diameter of the arranged ZnO nanorods according to polystyrene spheres of various sizes. The obtained ZnO nanostructures was characterized by X-ray diffraction (XRD), Field emission scanning electron microscopy (FE-SEM).

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Inductance Characteristics of Tokamak Poroidal Field Coil by the Plasma Current (Plasma Current에 의한 Tokamak Poroidal Field Coil의 Inductance 특성)

  • Chung, Yoon-Do;Lee, Seung-Je;Kim, Tae-Joong;Kim, Kee-Man;Ko, Tae-Kuk
    • Proceedings of the KIEE Conference
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    • 2000.07b
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    • pp.801-803
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    • 2000
  • The large scale magnets like thermalnuclear fusion devices are necessary for superconducting CICC cable, When the Cable In Conduit Conductors(CICC) is occurred by the external turbulence, the CICC occurs to quench, The CICC can be broken because the CICC spends all energy in the quench-happened spot. Therefore, it is necessary to develop measurement systems of the quench detection. The measurement systems of the relative good degree of efficiency are the voltage tap sensors. The weak points of voltage tap sensors are effected by EMF noise and inductance. The thermalnuclear fusion devices easily can't measure inductance value because of plasma current. In the experiment, The value of inductance was estimated by FEM techniques and the decrement of Inductance value measured as long as remaining plasma current.

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Palm-Size-Integrated Microwave Power Module at 1.35-GHz for an Atmospheric Pressure Plasma for biomedical applications

  • Myung, C.W.;Kwon, H.C.;Kim, H.Y.;Won, I.H.;Kang, S.K.;Lee, J.K.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.498-498
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    • 2013
  • Atmospheric Pressure Plasmas have pioneered a new field of plasma for biomedical application bridging plasma physics and biology. Biological and medical applications of plasmas have attracted considerable attention due to promising applications in medicine such as electro-surgery, dentistry, skin care and sterilization of heat-sensitive medical instruments [1]. Traditional approaches using electronic devices have limits in heating, high voltage shock, and high current shock for patients. It is a great demand for plasma medical industrial acceptance that the plasma generation device should be compact, inexpensive, and safe for patients. Microwave-excited micro-plasma has the highest feasibility compared with other types of plasma sources since it has the advantages of low power, low voltage, safety from high-voltage shock, electromagnetic compatibility, and long lifetime due to the low energy of striking ions [2]. Recent experiment [2] shows three-log reduction within 180-s treatment of S. mutans with a low-power palm-size microwave power module for biomedical application. Experiments using microwave plasma are discussed. This low-power palm-size microwave power module board includes a power amplifier (PA) chip, a phase locked loop (PLL) chip, and an impedance matching network. As it has been a success, more compact-size module is needed for the portability of microwave devices and for the various medical applications of microwave plasma source. For the plasma generator, a 1.35-GHz coaxial transmission line resonator (CTLR) [3] is used. The way of reducing the size and enhancing the performances of the module is examined.

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