• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2003년도 춘계학술대회 발표 논문집
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• pp.12-17
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• 2003

본 연구에서는 MICP Etching system 을 이용한 Via contact 및 Deep contact hole etch process 특성을 연구하였다. Langmuir probe 를 이용한 MICP source 의 Plasma density & electron temperature 측정하였고 탄소와 플로우르를 포함하는 혼합 Plasma 를 형성하여 RF frequency, wall temperature, chamber gap, gas chemistry 등의 변화에 따른 식각 특성을 조사하였다. Plasma density 는 1000w 에서 $10^{11}$/$cm^3$ 이상의 high density plasma와 uniform plasma 형성을 확인하였고 $CH_{2}F_{2}$와 CO의 적절한 혼합비를 이용하여 Oxide to PR 선택비가 10 이상인 고선택비 조건을 확보하였다. 고선택비 형성에 따라 Polymer 형성이 많이 되었고 이를 개선하기 위하여 반응 챔버의 온도 조절을 통하여 Polymer 증착 방지에 효과적인 것을 확인하였다. MICP source를 이용하여 탄소와 플로우르의 혼합 가스와 식각 챔버의 온도 조절에 의한 선택비 증가를 확보하여 High Aspect Ratio Contact Hole Etch 가능성을 확보하였다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 1998년도 추계종합학술대회 논문집
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• pp.573-576
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• 1998

In this paper, we analyzed electric field density and plasma condition to ICP reactor geometry structure, to generate plasma, to maintain plasma uniformity of large area LCD panel in ICP reactor also, we simulated electric field density for all kind existence current (antena and plasma current) in ICP reactor to analyze plasma antena structure

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.570-571
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• 2005

In this paper, we introduced a LIF measurement method and summarized the theoretical side. When an altered wavelength of laser and electric power, lamp applied electric power, we measured the relative density of the metastable state in mercury after observing a laser induced fluorescence signal of 404.8nm and 546.2nm, and confirmed the horizontal distribution of plasma density in the discharge lamp. The results confirmed the resonance phenomenon regarding the energy level of atoms along a wavelength change, and also confirmed that the largest fluorescent signal in 436nm, and that the density of atoms in 546.2nm ($6^3S_1\rightarrow6^3P_2$) were larger than 404.8nm ($6^3S_1\rightarrow6^3P_1$). According to the increase of lamp applied electric power, plasma density increased, too. When increased with laser electric power, the L1F signal reached a saturation state in more than 2.6mJ. When partial plasma density distribution along a horizontal axis was measured using the laser induced fluorescence method, the density decreased by recombination away from the center.

• Transactions on Control, Automation and Systems Engineering
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• 제2권4호
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• pp.268-273
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• 2000

Plasma models are crucial to equipment design and process optimization. A radial basis function network(RBFN) in con-junction with statistical experimental design has been used to model a process plasma. A 2$^4$ full factorial experiment was employed to characterized a hemispherical inductively coupled plasma(HICP) in characterizing HICP, the factors that were varied in the design include source power, pressure, position of shuck holder, and Cl$_2$ flow rate. Using a Langmuir probe, plasma attributes were collected, which include typical electron density, electron temperature. and plasma potential as well as their spatial uniformity. Root mean-squared prediction errors of RBEN are 0.409(10(sup)12/㎤), 0.277(eV), and 0.699(V), for electron density, electron temperature, and Plasma potential, respectively. For spatial uniformity data, they are 2.623(10(sup)12/㎤), 5.704(eV) and 3.481(V), for electron density, electron temperature, and plasma potential, respectively. Comparisons with generalized regression neural network(GRNN) revealed an improved prediction accuracy of RBFN as well as a comparable performance between GRNN and statistical response surface model. Both RBEN and GRNN, however, experienced difficulties in generalizing training data with smaller standard deviation.

• 한국우주과학회:학술대회논문집(한국우주과학회보)
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• 한국우주과학회 2011년도 한국우주과학회보 제20권1호
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• pp.26.3-27
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• 2011

Formation of a steep plasma density gradient in the middle-latitude ionosphere during geomagnetic storms and the latitudinal migration of its location depending on the storm phase are suggested to be associated with the ionospheric signature of the plasmapause. We test this idea by using the satellite and ground observation data during the 11 April 2001 storm. The locations of the steep plasma density gradient identified by TOPEX/Poseidon (2001 LT) and DMSP (1800 and 2130 LT) satellites coincide with the ionospheric footprints of the plasmapause identified by the IMAGE satellite. This observation may support the dependence of the middle-latitude plasma density gradient location on the plasmapause motion, but does not explain why the steep density gradient whose morphology is largely different from the morphology of the middle-latitude ionization trough during quiet period is formed in association with the plasmapause. The ionospheric disturbances in the total electron content (TEC) maps shows that the steep TEC gradient is formed at the boundary of the positive ionospheric storm in low-middle latitudes and the negative ionospheric storm in middle-high latitudes. We interpret that the thermospheric neutral composition disturbance in the dayside is confined within the middle-high latitude ionospheric convection zone. The neutral composition latitudes and, therefore, the locations of the steep plasma density gradient coincide with the footprints of the plasmapause. The TEC maps show that the appearance of the steep plasma density gradient in the pre-midnight sector during the recovery phase is related to the co-rotation of the gradient that is created during the main phase.

• Journal of Nutrition and Health
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• 제19권5호
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• pp.296-303
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• 1986

흰쥐의 lipoprotein을 제거한 혈장내의 지질전이 활성도와 지진전이를 저해하는 활성도를 측정하였다. 지질전이 활성도의 측정은 방사성 동위원소가 함유된 cholesteryl ester (CE)와 triglyceride (TG) 로 표지된 인체의 혈장 low density lipoprotein 으로부터 high high density lipoprotein(HDL) 으로 전이되는 방사성 동위원소의 양을 측정하여 계산하였다. 지질전이 저해 활성도는 정제한 인체 혈장 지질전이 단백질에 의한 지질전이를 저해하는 정도로서 측정하였다. 흰쥐의 혈장에는 지질전이 활성도가 거의 없으나, 지질전이를 저해하는 활성도는 존재하였다. 지질전이 저해정도는 측정용액내의 lipoprotein 양이 증가할수록 감소하였다. 일반적으로 흰쥐의 HDL은 인체의 HDL에 비하여 CE 의 함량은 높으며 TG의 함량은 낮다. 흰쥐의 혈장에 인체의 혈장으로부터 정제한 지질전이 단백질을 가하여 37$^{\circ}C$에 24시간 두었을 때, HDL 로부터 very low density lipoprotein (VLDL)으로 CE가 이동하여 VLDL 의 CE 함량이 4배나 증가하였다. 반면에 VLDL로부터 HDL$_2$로TG가 이동하여 $HDL_2$의 함량은 TG함량은 9배나 증가하였다. 이와같은 현상은 흰쥐의 혈장 Lipoportein이 지질전이의 기질로서의 결함은 없음을 보여준다. 따라서 지질대사에 관한 실험에서의 흰쥐에 의한 실험결과의 해석에는 인체 혈장에 비하여 혈장에는 lipoprotein사이의 중성지질의 전이나 교환이 거의 없다는 특성이 고려되어야한다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.194-194
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• 2000

There are difficulties on transport modelling on high density plasma discharge, because of severe restrictions on space grid size and time step size. We present a new unconditionally stable algorithm for fluid simulation of high density process plasma. The origin of the restriction is investigated and a new method to solve the problem is suggested, The simulation result is compared with the other methods previously developed.

• Nuclear Engineering and Technology
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• 제29권6호
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• pp.459-467
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• 1997

The steady-state behavior of recycling neutral atoms in a tokamak edge region has been analyzed through a two-dimensional Monte Carlo simulation. A particle tracking algorithm used in earlier research on the neutral particle transport is applied to this Monte Carlo simulation in order to perform more accurate calculations with the EDGETRAN code which was previously developed for a two-dimensional edge plasma transport in the authors' laboratory. The physical model of neutral recycling includes charge-exchange and ionization interactions between plasmas and neutral atoms. The reflection processes of incident particles on the device wall are described by empirical formulas. Calculations for density, energy, and velocity distributions of neutral deuterium-tritium atoms have been carried out for a medium-sized tokamak with a double-null configuration based on the KT-2 conceptual design. The input plasma parameters such as plasma density, ion and electron temperatures, and ion fluid velocity are provided from the EDGETRAN calculations. As a result of the present numerical analysis, it is noticed that a significant drop of the neutral atom density appears in the region of high plasma density and that the similar distribution of neutral energy to that of plasma ions is present as frequently reported in other studies. Relations between edge plasma conditions and the neutral recycling behavior are discussed from the numerical results obtained herein.

• 한국전기전자재료학회논문지
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• 제24권6호
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• pp.504-509
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• 2011

The conducting current of non-uniform plasma immersed electrode consists of ion current and secondary electron emission current caused by the impinging ion current. The ion current is determined by the ion dose passing through the sheath in front of electrode and the ion distribution in front of the electrode plays an important role in the secondary electron emission. The investigation of the distributed plasma and secondary electron effect on electrode ion current was carried out as the stainless steel electrode plugged with quartz tube was immersed in the inductively coupled Ar plasma using the antenna powered by 1 kw and the density profile was measured. After that, the negative voltage was applied by 1 kV~6 kV to measure the conduction current for the analysis of ion current.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 춘계학술대회 논문집
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• pp.41-45
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• 2005

In this paper, parameters of electron temperature and density for the mercury-free lighting-source were measured to diagnosis and analyze in Xe based inductively coupled plasma(ICP). In results at several dependences of 20~100 mTorr Xenon pressure, 50~200W RF power and horizontal distribution were especially mentioned. When Xe pressure was 20mTorr and RF power was 200W, the electron temperature and density were respectively 3.58eV and $3.56{\times}10^{12}cm^{-3}$. The key parameters of Xe based ICP depended on Xe pressure more than RF power that could be verified. A high electron temperature and low electron density with a suitable Xe pressure are indispensible parameters for Xe based ICP lighting-source.