• Title/Summary/Keyword: Plasma Oxidation

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Support Effect of Catalytic Activity on 3-dimensional Au/Metal Oxide Nanocatalysts Synthesized by Arc Plasma Deposition

  • Jung, Chan Ho;Naik, B.;Kim, Sang Hoon;Park, Jeong Y.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.140.2-140.2
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    • 2013
  • Strong metal-support interaction effect is an important issue in determining the catalytic activity for heterogeneous catalysis. In this work, we report the catalytic activity of $Au/TiO_2$, $Au/Al_2O_3$, and $Au/Al_2O_3-CeO_2$ nanocatalysts under CO oxidation fabricated by arc plasma deposition (APD), which is a facile dry process with no organic materials involved. These catalytic materials were characterized by transmission electron microscopy (TEM), energy-dispersive X-ray spectroscopy (EDS) and $N_2$-physisorption. Catalytic activity of the materials has measured by CO oxidation using oxygen, as a model reaction, in a micro-flow reactor at atmospheric pressure. Using APD, the catalyst nanoparticles were well dispersed on metal oxide powder with an average particle size (3~10 nm). As for catalytic reactivity, the result shows $Au/Al_2O_3-CeO_2$ nanocatalyst has the highest catalytic activity among three samples in CO oxidation, and $Au/TiO_2$, and $Au/Al_2O_3$ in sequence. We discuss the effects of structure and metal-oxide interactions of the catalysts on catalytic activity.

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Analysis on an Oxidation-Reduction Reaction of Photocatalytic Plasma Complex Module

  • KIM, Young-Do;KWON, Woo-Taeg
    • Journal of Wellbeing Management and Applied Psychology
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    • v.5 no.2
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    • pp.21-27
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    • 2022
  • Purpose: This study is about photocatalytic technology and plasma oxidation-reduction technology. To the main cause of exposure to odor pollution, two deodorization techniques were applied to develop a module with higher removal efficiency and ozone reduction effect. Research design, data and methodology: A composite module was constructed by arranging two types of dry deodorization equipment (catalyst, adsorbent) in one module. This method was designed to increase the responsiveness to the components of complex odors and the environment. standard, unity, two types of oxidizing photo-catalyst technology and plasma dry deodorization device installed in one module to increase the potential by reduction to 76% of ozone, 100%, and 82%. Results: The complex odor disposal efficiency was 92%. Ammonia was processed with 50% hydrogen sulfide and 100% hydrogen sulfide, and ozone was 0.01ppm, achieving a target value of 0.07ppm or less. The combined odor showed a disposal efficiency of 93%, ammonia was 82% and hydrogen sulfide was 100% processed, and ozone achieved a target value of 0.07 ppm or less. Conclusions: Ozone removal efficiency was 76% by increasing Oxidation-Reduction Reaction(ORR). The H2S removal efficiency of the deodorizer was higher than that of the biofilter system currently used in sewage disposal plants.

Effect of Doubly Plasma Oxidation Time on TMR Devices (이중절연층 산화공정에서 플라즈마 산화시간에 따른 터널자기저항 효과)

  • Lee, Ki-Yung;Song, Oh-Sung
    • Journal of the Korean Magnetics Society
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    • v.12 no.4
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    • pp.127-131
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    • 2002
  • We fabricated MTJ devices that have doubly oxidized tunnel barrier using plasma oxidation method to from oxidized AlO$\sub$x/ tunnel barrier. Doubly oxidation I, which sputtered 10 ${\AA}$-bottom Al layer and oxidized it with oxidation time of 10 s. Subsequent sputtering of 13 ${\AA}$-Al was performed and the metallic layer was oxidized for 50, 80 and 120 s., respectively. Doubly oxidation II, which sputtered 10 ${\AA}$-bottom Al layer and oxidized it varying oxidation time for 30∼120 s. Subsequent sputtering of 13 ${\AA}$-Al was performed and the metallic layer was oxidized for 210 sec. Double oxidation process specimen showed MR ratio of above 27% in all experiment range. Singly oxidation process. 13 ${\AA}$-Al layer and oxidized up to 210 s, showed less MR ratio and more narrow process window than those of doubly oxidation. Cross-sectional TEM images would that doubly oxidized barrowers were thinner and denser than singly oxidized ones. XPS characterization confirmed that doubly oxidation of Fe with bottom insulating layer. As a result, doubly oxidation could have superior MR ratio in process extent during long oxidation time because of preventing oxidation of bottom magnetic layer than singly oxidation.

Effects of transition layer in SiO2/SiC by the plasma-assisted oxidation

  • Kim, Dae-Gyeong;Gang, Yu-Seon;Gang, Hang-Gyu;Baek, Min;O, Seung-Hun;Jo, Sang-Wan;Jo, Man-Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.193.2-193.2
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    • 2016
  • We evaluate the change in defects in the oxidized SiO2 grown on 4H-SiC (0001) by plasma assisted oxidation, by comparing with that of conventional thermal oxide. In order to investigate the changes in the electronic structure and electrical characteristics of the interfacial reaction between the thin SiO2 and SiC, x-ray photoelectron spectroscopy (XPS), X-ray absorption spectroscopy (XAS), DFT calculation and electrical measurements were carried out. We observed that the direct plasma oxide grown at the room temperature and rapid processing time (300 s) has enhanced electrical characteristics (frequency dispersion, hysteresis and interface trap density) than conventional thermal oxide and suppressed interfacial defect state. The decrease in defect state in conduction band edge and stress-induced leakage current (SILC) clearly indicate that plasma oxidation process improves SiO2 quality due to the reduced transition layer and energetically most stable interfacial state between SiO2/SiC controlled by the interstitial C.

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High Temperature Oxidation and Sulfidation of Ni-15at.%W Coatings

  • Kim Chanwou;You Teayoul;Shapovalov Yuriy;Ko Jaehwang;Lee Dongbok;Lee Kyuhwan;Chang Doyon;Kim Dongsoo;Kwon Sikchol
    • Journal of the Korean institute of surface engineering
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    • v.38 no.1
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    • pp.1-6
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    • 2005
  • Ni-15at.% W coatings with film thicknesses of 20-40 ㎛ were electroplated on a steel substrate, and their oxidation behavior was investigated at 700 and 800℃ in air. For comparison, a pure Ni coating and a bulk Ni were also oxidized. The Ni-15at.%W coating displayed the worst oxidation resistance, due to the formation of less-protective NiO, Fe₂O₃, NiFe₂O₄ and NiWO₄. The corrosion behavior Ni-15at.%W coatings electroplated on a steel substrate was similarly investigated at 700 and 800℃ in the Ar-l%SO₂ atmosphere. For comparison, the uncoated steel substrate was also corrosion-tested in the Ar-l %SO₂ atmosphere. Severe scale spallation and the internal corrosion of the steel that occurred in the uncoated substrate were not observed in the coated specimen. However, it seemed that the Ni-15at.%W coating cannot be a potential candidate as a sulfidation-resistant coating, due to the formation of less-protective NiO, NiS, WO₃ and NiWO₄.

Oxidation Mechanism of TiCrN Coatings Ion-plated on Steel Substrate (강 기판위에 이온 플레이팅된 TiCrN 박막의 산화기구)

  • Lee, Dong-Bok;Kim, Gi-Young
    • Korean Journal of Materials Research
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    • v.13 no.7
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    • pp.420-423
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    • 2003
  • Coatings of TiCrN ion-plated on a steel substrate was oxidized at $800^{\circ}C$ in air, and their oxidation mechanism was presented. During oxidation, substrate elements and Ti and Cr in the coating always diffused outwardly to form the oxide scale. Simultaneously, oxygen from the atmosphere diffused inward1y to react with Ti and Cr to form $TiO_2$and $Cr_2$$O_3$, respectively. Also, the counter-diffusion of cations and oxygen resulted in some oxygen dissolution in the unoxidized TiCrN coating, and Fe dissolution in the oxide scale. When the Ti content in the coating was high, the $TiO_2$-forming tendency was strong, while when the Cr content was high, the $Cr_2$$O_3$-forming tendency was strong.

The Effect of Oxide Formation on the Lifetime of Plasma Sprayed or EB-PVD Thermal Barrier Coatings (플라즈마 용사 및 EB-PVD에 의한 열벽코팅 수명에 대한 산화물 생성의 영향)

  • ;R.D.Sisson;Jr
    • Journal of the Korean institute of surface engineering
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    • v.27 no.2
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    • pp.91-98
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    • 1994
  • For the plasma sprayed as well as the EB-PVD thermal barrier coatings, the fracture paths within the oxidation products developed at the interface between the partially stabilized zirconia ceramic coating and NiCoCrAlY bond coat during cyclic thermal oxidation has been investigated. It was observed that the fracture in the oxidation products primarily took place within the oxide such as $Ni_{1-x}Co_3(Al_,Cr)_2O_4$ or at the interface between the oxide and $Al_2O_3$. It was found that Al2O3 developed first, followed by the Ni/Co/Cr rich oxides such as ,,$Ni_{1-x}Co_x(Al_,Cr)_2O_4$ $Cr_2O_3$and NiO at the interface between the ceramic coating and the bond coat in a cyclic high temperature environment. It was therfore concluded that the formation of the oxide containing Ni, Cr and Co was a life-limiting event for thermal barrier coatings during cyclic thermal oxidation.

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Study on Reactive Non-thermal Plasma Process combined with Metal Oxide Catalyst for Removal of Dilute Trichloroethylene

  • Han Sang-Bo;Oda Tetsuji;Park Jae-Youn;Park Sang-Hyun;Koh Hee-Seok
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.3
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    • pp.292-300
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    • 2006
  • In order to improve energy efficiency in the dilute trichloroethylene removal using the nonthermal plasma process, the barrier discharge treatment combined with manganese dioxide was experimentally studied. Reaction kinetics in this process was studied on the basis of final byproducts distribution. Decomposition efficiency was improved to about $99\;\%$ at the specific energy of 40 J/L with passing through manganese dioxide. C=C ${\pi}$ bond cleavage of TCE substances gave DCAC, which has the single bond of C-C through oxidation reaction during the barrier discharge plasma treatment. Those DCAC were broken easily in the subsequent catalytic reaction due to the weak bonding energy about $3{\sim}4\;eV$ compared with the double bonding energy in TCE molecules. Oxidation byproducts of DCAC and TCAA from TCE decomposition are generated from the barrier discharge plasma treatment and catalytic surface chemical reaction, respectively. Complete oxidation of TCE into COx is required to about 400 J/L, but $CO_2$ selectivity remains about $60\;\%$.

Microstructure and Corrosion Properties of AZ91D Magnesium Alloy treated by Plasma Electrolytic Oxidation (플라즈마 전해 산화 처리한 AZ91D 마그네슘합금 피막의 미세조직 및 부식 특성)

  • Chang, Si-Young;Kim, Ye-Lim;Kim, Yang-Do
    • Journal of Korea Foundry Society
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    • v.28 no.1
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    • pp.20-24
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    • 2008
  • The characteristics, such as roughness, thickness, microhardness and corrosion resistance, of plasma electrolytic oxide coatings on AZ91D alloy were investigated under the processing condition of various coating times. The coatings on AZ91D alloy consisted of MgO, $MgAl_{2}O_{4}$ and $Mg_{2}SiO_{4}$ oxides. The surface roughness and thickness of coatings became larger with increasing the coating time. The microhardness in cross section of coatings was much higher than not only that in surface but that in the conventional anodic oxide coatings, which increased progressively as the coating time increased. After being immersed in 3.5%NaCl solution and methyl alcohol, the corrosion resistance of AZ91D alloy was markedly improved by plasma electrolytic oxidation coating treatment, and the AZ91D alloy coated for 50min revealed excellent corrosion resistance.