• Journal of the Korean Magnetics Society
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• v.6 no.6
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• pp.367-374
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• 1996

The developmement of electronic machine industries requires miniature of size as well as increasement of driving frequency in electronic parts, recently. To realize micro-struture of magnetic devices, in this study, we fabricated thin film inductors by using thin film manufacturing techniques such as photolithography and wet etching process, and these devices are measured at high frequency range of 1 MHz~1 GHz. The results are as follows. The accurate measuring technique by using network analyzer system having microstrip line was established. The manufactured inductors are fabricated with several ten micrometers by means of wet etching process known as easier and more economic than dry etching process. VVhen the device size of two types (spiral, meander) is the same, inductance value L and quality factor Q of spiral type devices are larger than those of meander type, but driving frequency of spiral type is lower than that of meander type due to increasement of inductance L. It is necessary to decrease resistance value R by increasing cross section of the conductor film coil. Thus high frequency measuring method would be a very useful for another measuring fields of the range over several hundreds MHz.

• Electrical & Electronic Materials
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• v.10 no.8
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• pp.813-818
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• 1997

In this study the thin film air core and magnetic core inductors consisting of planar coil and/or CoNbZr amorphous magnetic layers on a Si substrate were fabricated as spiral type by using rf magnetron sputtering and wet etching methods. The etchant solution was achieved by iron chloride solution(17.5 mol%) mixed with HF (20 mol%) during 150 sec which etched Cu films and CoNbZr/Cu/CoNbZr multi-layer films. They were about 10${\mu}{\textrm}{m}$ of thickness and 10$\times$10 mm$^2$of size. The properties of thin film magnetic core inductor were 400 nH of Q value at 10 MHz and the resonance frequency was about 300 MHz.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.55 no.10
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• pp.534-539
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• 2006

An integrated inductor using the low-temperature co-fired ceramics(LTCC) technology for low-power electronics was fabricated. In the inductor NiZn ferrite sheet$({\mu}_r=230)$, was embedded to increase inductance. The inductor has Ag spiral coil with 14 turns$(7turns{\times}2layers)$, a dimension of 0.6mm in width, 10um in thickness, and 0.15mm pitch. To evaluate the inductance, including the parasitic resistance, the fabricated inductor was calculated and measured. It was confirmed that calculated values were very close to the measured values. Finally as an application of the LTCC integrated inductor to low power electronic circuits, a LTCC boost DC/DC converter with 1W output power and up to 0.5MHz switching frequency using the inductor fabricated was developed.

• Proceedings of the KIPE Conference
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• 2015.07a
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• pp.455-456
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• 2015

본 논문에서는 무선전력 전송을 위한 평판 나선형 코일의 최적 형상 선정을 위해 각 코일의 형태에 따른 출력 성능을 비교 및 평가한다. 코일 간 결합계수, 각 코일의 Q-factor 측면에서 송수신 패드의 성능을 비교하며, 이를 위해 송수신 패드가 차지하는 면적을 최대한 활용하여 모델링 한다. 모델링한 코일에 대하여 수신패드의 수직 및 수평이동에 대한 성능 지표를 평가하고 코일의 최적 형상을 선정한다.

• Journal of the Institute of Electronics and Information Engineers
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• v.54 no.4
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• pp.16-21
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• 2017

In this paper, a Small-sized and planer resonator design of Magnetic Resonance - Wireless Power Transfer(MR-WPT) were proposed for practical applications of mobile devices, such as a laptop, a smart-phone and a tablet pc. The proposed MR-WPT system were based on four coil MR-WPT and designed as a transmitter part (Tx) and a receiver part (Rx) both are the same shape with the same loop and resonator. There are four different spiral coil type of resonators with variable of line length, width, gap and turns in $50mm{\times}50mm$ size. The both of top and bottom side of substrate(acrylic; ${\varepsilon}_r=2.56$, tan ${\delta}=0.008$) ere used to generate high inductance and capacitance in limited small volume. Loops were designed on the same plane of resonator to reduce their volume, and there are three different size. The proposed MR-WPT system were fabricated with two acrylic substrate plane of Tx and Rx each, the Rx and Tx loops and resonators were fabricated of copper sheets. There are 12 combinations of 3 loops and 4 resonators, each combination were measured to calculate transfer efficiency and resonance frequency in transfer distance from 1cm to 5cm. The measured results, the highest transfer efficiency was about 70%, and average transfer efficiency was 40%, on the resonance frequency was about 6.78 MHz, which is standard band by A4WP. We proposed small-sized and planer resonator of MR-WPT and showed possibility of mobile applications for small devices.