• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.11a
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• pp.262-267
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• 2000

The flexural vibration of aluminum beams with active and passive constrained-layer damping has been investigated experimentally to design structure with maximum possible damping capacity. Piezoelectric film is used as sensor and piezoceramic as actuator for negative velocity feedback control. This paper shows the effectiveness of active constrained-layer damping treatment through experiment, and we have carried out an experiment to study effect of beam thickness.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.207-210
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• 2002

This paper is concerned with the experiments on the active vibration control of a plate with piezoceramic sensors and actuators. The natural frequencies of the composite plate featured by a piezo-film sensor and piezo-ceramic actuator are calculated by using the modal analysis method. Modal coordinates are introduced to obtain the state equations of the structural system. Six natural frequencies were considered in the modelling, because robust control theory which has inherent robustness to structured uncertainty is adopted to suppress the transients vibrations of a glass fiber reinforced(GFR) composite beam. A robust controller satisfying the nominal performance and robust performance is designed using robust theory based on the structured singular value. Simulations were carried out with the designed controller and effectiveness of the robust control strategy was verified by results.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.7
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• pp.308-314
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• 2005

The 2 GHz film bulk acoustic wave resonator(FBAR), one of the most necessary device of the next generation mobile communication system, consisted of solidly mounted resonator(SMR) structure using Brags reflector, was researched in this paper The FBAR applied SiO$_{2}$ and W had large difference of the acoustic impedance to reflector Al to electrode and ZnO to piezoelectric layer. Specially, the FBAR applied the two-step deposition method to improve the c-axis orientation and increase reproducibility of the fabrication device had good performance. The electrical properties of plasma such as impedance, resistance, reactance, $V_{pp},\;I{pp}$, VSWR and phase difference of voltage and current, was analyzed and measured by RF sensor with the variable experiment process factors such as gas ratio, RF power and base vacuum level about concerning the thickness, c-axis orientation, adhesion and roughness. The FBAR device about the optimum condition resulted reflection loss(S$_{11}$) of -17 dB, resonance frequency of 1.93 GHz, electric-mechanical coefficient(k$_{eff}$) of 2.38 $\%$ and Qualify factor of 580. It was seen better qualify than the common dielectric filter at present and expected on business to the filter device of 2 GHz bandwidth with the MMIC technology.

• Journal of Sensor Science and Technology
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• v.28 no.6
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• pp.366-370
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• 2019

In this study, we have successfully fabricated a highly conductive transparent electrode using Ag nanowires, based on piezoelectric polyvinylidene difluoride (PVDF) film, that can be applied as transparent and flexible speakers. The structural morphology of the Ag nanowires was confirmed by a detailed scanning electron microscopy. Ultraviolet-visible spectroscopy demonstrated that the transparent electrode fabricated by the Ag nanowires exhibited a transmittance of above 70%. The transparent electrode also showed very low sheet resistance with high flexibility. We have further developed an anti-oxidation coating layer by using a tetraethyl orthosilicate-poly trimethyloxyphenylsilane (TEOS-PTMS) slurry technique. It was confirmed that the transmittance and sheet resistance of the antioxidant film depends critically on the humidity of the film surface. We believe such Ag nanowire electrodes are a very promising next-generation transparent electrode technology that can be used in future flexible and transparent devices.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.118-118
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• 2009

Low temperature co-fired ceramic (LTCC) is one of promising materials for MEMS structures because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of 400 um were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of $Pb(ZrTi)O_3$ (PZT) thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The results showed that the fabrication method is very suitable for pressure sensor applications. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• Journal of Sensor Science and Technology
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• v.21 no.2
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• pp.135-143
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• 2012

Arterial stiffness is causing the serious problems for human who is suffered from hypertension and metabolic syndrome. So it is important that measure the arterial stiffness for early prevention. Many researches point out that pulse wave velocity(PWV) is the reliable and simple method to predict arterial stiffness. In this paper, we developed the sensing parts that detect the pulse wave and ECG by using piezoelectric film and conductive textile with elastic band. Our system could detect 3ch pulse wave and ECG. Simultaneously, our algorithm extracts the features for calculating the delays among pulse waves. The delays are the significant parameter to estimate PWV, thus we design the experiment for evaluating the performance of our sensing parts. The reference is PP-1000(HanByul Meditech, Korea) that is good for performance evaluation. As a result, the start point of the pulse wave was the most reliable feature for comparing with PP-1000(r=0.691, P=0.00). The results between two operators showed that there is only a slight difference in the reproducibility of the devices. In conclusion, we assume that the suggested sensor could be more comfortable and faithful method for arterial stiffness.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.03b
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• pp.13-13
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• 2010

Piezoelectric sensors are extensively used to measure force because of their high sensitivity and low cost. however, the development of device with reduced size but with improved sensitivity is highly important. Low-temperature co-fired ceramic (LTCC) is one of promising materials for this application than a silicon substrate because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of PZT thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• The Journal of the Acoustical Society of Korea
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• v.16 no.2
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• pp.89-94
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• 1997

A new type SO$_2$ gas sensor with a particular inorganic thin film on SAW devices was developed. The sensor consisted of twin SAW oscillators of the center frequency of 54 MHz fabricated on the LiTaO$_3$ piezoelectric single crystal. One delay line of the sensor was coated with a CdS thin film that selectively adsorbed and desorbed SO$_2$, while the other was uncoated for use as a stable reference. Deposition of the CdS thin film was carried out by the spray pyrolysis method using an ultrasonic nozzle. The sensor could measure the concentration in air less than 0.25 parts per million of SO$_2$. Stability of the sensor turned out to be as good as less than 20ppm, recovery time after each measurement was as short as 5 minutes. Repeatability of the measurement was confirmed through so many reiterated experiments. Hence, the SAW sensor developed through this work showed promising performance as a microsensing tool of SO$_2$. Further work required to improve the performance of the sensor includes enhancement of the reactivity of the CdS thin film with SO$_2$ through appropriate dopant addition, an increase of the center frequency of the SAW device.

• Journal of the Korean Vacuum Society
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• v.17 no.5
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• pp.448-454
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• 2008

The purpose of this paper is to discuss the fabrication of $\beta$-PVDF($\beta$-Polyvinylidene fluoride, ${\beta}-PVF_2$) organic thin films through the vapor deposition method and to investigate the piezoelectric properties of the organic thin films produced. Vapor deposition was performed under the following conditions : the temperature of evaporator, the applied electric field and the pressure of reaction chamber were $270^{\circ}C$, 142.4 kV/cm and $2.0{\times}10^{-5}Torr$, respectively. The results showed that the amount of $\beta$-form PVDF increased from 72 % to 95.5 % with an increase in the substrate temperature. In the case of a sensor response characteristic by varying the force moment from $1.372{\times}10^{-5}N{\cdot}m$ to $39.2{\times}10^{-5}N{\cdot}m$, the output voltage increased from 1.39V to 7.04V.

• Journal of Sensor Science and Technology
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• v.28 no.6
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• pp.360-365
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• 2019

A polyvinylidene fluoride (PVDF)-based film speaker is successfully fabricated with enhanced bass sound by incorporating buckled nanospring carbon nanotubes (NS-CNTs) as fillers. Various concentrations up to 1-7 wt% of uniformly dispersed buckled NS-CNTs are loaded to increase the beta (β)-phase fraction, crystallinity, and dielectric constant of the speaker, and this results in the bass part enhancement of about 19 dB full scale (dBFS) at 7 wt% filler loading of the piezoelectric film speaker.