• 제목/요약/키워드: Piezoelectric devices

검색결과 337건 처리시간 0.025초

물리적 인간 기계 상호작용을 위한 근육의 기하학적 형상 변화를 이용한 상지부 움직임 예측 (Prediction of the Upper Limb Motion Based on a Geometrical Muscle Changes for Physical Human Machine Interaction)

  • 한효녕;김정
    • 제어로봇시스템학회논문지
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    • 제16권10호
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    • pp.927-932
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    • 2010
  • Estimation methods of motion intention from bio-signal present challenges in man machine interaction(MMI) to offer user's command to machine without control of any devices. Measurements of meaningful bio-signals that contain the motion intention and motion estimation methods from bio-signal are important issues for accurate and safe interaction. This paper proposes a novel motion estimation sensor based on a geometrical muscle changes, and a motion estimation method using the sensor. For estimation of the motion, we measure the circumference change of the muscle which is proportional to muscle activation level using a flexible piezoelectric cable (pMAS, piezo muscle activation sensor), designed in band type. The pMAS measures variations of the cable band that originate from circumference changes of muscle bundles. Moreover, we estimate the elbow motion by applying the sensor to upper limb with least square method. The proposed sensor and prediction method are simple to use so that they can be used to motion prediction device and methods in rehabilitation and sports fields.

3C-SiC 버퍼층이 Si 기판위에 스퍼터링된 AlN 막의 특성에 미치는 영향 (Effect of 3C-SiC buffer layer on the characteristics of AlN films supttered on Si Substrates)

  • 류경일;정귀상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 춘계학술대회 논문집
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    • pp.3-6
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    • 2009
  • Aluminum nitride (AIN) thin films were deposited on a polycrystalline 3C-SiC intermediate layer by a pulsed reactive magnetron sputtering system. Characteristics of the AIN/SiC heterostructures were investigated by field emission scanning electron microscopy (FE-SEM), atomic force microscopy (AFM), X-ray diffraction (XRD), and Fourier transform infrared spectroscopy (FT-IR). The columnar structure of AIN thin films was observed by FE-SEM. The surface roughness of AlN films on the 3C-SiC buffer layer was measured using AFM. The XRD pattern of AlN films on SiC buffer layers was highly oriented at (002). Full width at half maximum (FWHM) of the rocking curve near (002) reflections was $1.3^{\circ}$. The infrared absorbance spectrum indicated that the residual stress of AIN thin films grown on SiC buffer layers was nearly negligible. The 3C-SiC intermediate layers are promising for the realization of nitride based electronic and mechanical devices.

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광대역 표면탄성파 구현을 위한 slanted 및 chirp IDT의 최적화 (Optimization of Slanted and Chirp IDT Configurations for Realizing and Propagating Surface Acoustic Wave with Wide Bandwidth)

  • 이태윤;푸첸;이기근
    • 전기학회논문지
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    • 제62권12호
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    • pp.1730-1736
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    • 2013
  • Slanted and chirp interdigital transducer(IDT) configurations were studied for generating the surface acoustic wave(SAW) with wide bandwidths on a piezoelectric substrate. These devices can be applied to manipulate optical path of light along the waveguide, ultimately used for optical switches and holographic image implementation. Prior to fabrication, the coupling of modes(COM) modeling and simulation were performed to extract optimal design parameters. The optimally designed wideband device showed wide bandwidth of 30MHz, low insertion loss of -25dB, and abrupt side suppression ratio (SSR). Several design conditions were determined during device implementation, such as slanted angle, aperture length, number of fingers, and central frequencies of IDTs. These factors were experimentally analyzed and described in details in this paper.

Nonlinear vibration analysis of MSGT boron-nitride micro ribbon based mass sensor using DQEM

  • Mohammadimehr, M.;Monajemi, Ahmad A.
    • Smart Structures and Systems
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    • 제18권5호
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    • pp.1029-1062
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    • 2016
  • In this research, the nonlinear free vibration analysis of boron-nitride micro ribbon (BNMR) on the Pasternak elastic foundation under electrical, mechanical and thermal loadings using modified strain gradient theory (MSGT) is studied. Employing the von $K{\acute{a}}rm{\acute{a}}n$ nonlinear geometry theory, the nonlinear equations of motion for the graphene micro ribbon (GMR) using Euler-Bernoulli beam model with considering attached mass and size effects based on Hamilton's principle is obtained. These equations are converted into the nonlinear ordinary differential equations by elimination of the time variable using Kantorovich time-averaging method. To determine nonlinear frequency of GMR under various boundary conditions, and considering mass effect, differential quadrature element method (DQEM) is used. Based on modified strain MSGT, the results of the current model are compared with the obtained results by classical and modified couple stress theories (CT and MCST). Furthermore, the effect of various parameters such as material length scale parameter, attached mass, temperature change, piezoelectric coefficient, two parameters of elastic foundations on the natural frequencies of BNMR is investigated. The results show that for all boundary conditions, by increasing the mass intensity in a fixed position, the linear and nonlinear natural frequency of the GMR reduces. In addition, with increasing of material length scale parameter, the frequency ratio decreases. This results can be used to design and control nano/micro devices and nano electronics to avoid resonance phenomenon.

Advances and challenges in impedance-based structural health monitoring

  • Huynh, Thanh-Canh;Dang, Ngoc-Loi;Kim, Jeong-Tae
    • Structural Monitoring and Maintenance
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    • 제4권4호
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    • pp.301-329
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    • 2017
  • Impedance-based damage detection method has been known as an innovative tool with various successful implementations for structural health monitoring of civil structures. To monitor the local critical area of a structure, the impedance-based method utilizes the high-frequency impedance responses sensed by piezoelectric sensors as the local dynamic features. In this paper, current advances and future challenges of the impedance-based structural health monitoring are presented. Firstly, theoretical background of the impedance-based method is outlined. Next, an overview is given to recent advances in the wireless impedance sensor nodes, the interfacial impedance sensing devices, and the temperature-effect compensation algorithms. Various research works on these topics are reviewed to share up-to-date information on research activities and implementations of the impedance-based technique. Finally, future research challenges of the technique are discussed including the applicability of wireless sensing technology, the predetermination of effective frequency bands, the sensing region of impedance responses, the robust compensation of noise and temperature effects, the quantification of damage severity, and long-term durability of sensors.

Experimental investigation of magnetic-mount PZT-interface for impedance-based damage detection in steel girder connection

  • Ryu, Joo-Young;Huynh, Thanh-Canh;Kim, Jeong-Tae
    • Structural Monitoring and Maintenance
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    • 제4권3호
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    • pp.237-253
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    • 2017
  • Among various structural health monitoring technologies, impedance-based damage detection has been recognized as a promising tool for diagnosing critical members of civil structures. Since the piezoelectric transducers used in the impedance-based technique should be bonded to the surface of the structure using bonding layers (e.g., epoxy layer), it is hard to maintain the as-built condition of the bonding layers and to reconfigure the devices if needed. This study presents an experimental investigation by using magnetically attached PZT-interface for the impedance-based damage detection in bolted girder connections. Firstly, the principle of the impedance-based damage detection via the PZT-interface device is outlined. Secondly, a PZT-interface attachment method in which permanent magnets are used to replace the conventional bonding layers is proposed. Finally, the use of the magnetic attraction for the PZT-interface is experimentally evaluated via detecting the bolt-loosening events in a bolted girder connection. Also, the sensitivity of impedance signatures obtained from the PZT-interface is analyzed with regard to the interface's material.

고주파용 세라믹 필터의 제작을 위한 디자인 해석 (The Design Simulation for Manufacture of High Frequence Ceramic Filter)

  • 이수호;석정영;류기홍;사공건;윤광희;류주현;박창엽
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.418-421
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    • 2001
  • The ceramic filters were developed using technology similar to that of quartz crystal and electromechanical filter. However, the key to this development involved the theoretical analysis of vibration modes and material improvements of piezoelectric ceramics. The primary application of ceramic filters has been for consumer-market use. Accordingly, a major emhpasis has involved mass production technology, leading to low-priced devices. A typical ceramic filter includes monolithic resonators and capacitors packaged in unique configurations. Nakazawa developed a double-mode resonator as two acoustically coupled single resonators. And he developed 10.7MHz crystal filters using multi-energy trapping mode of thickness shear vibration. He succeeded in realizing a two-pole band pass filter response without external inductance by splitting a dot electrode to creat coupled symmetric and antisymmetric vibration modes. Accordingly, the simulation for ceramic filter were important. So that, this paper were investigated the pass frequency of filter on the electrode length and thickness of ceramic.

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열에이징에 의한 PZT세라믹스의 내열특성 개선 (Improving Thermal Resisting Property of PZT Ceramics by Thermal Aging)

  • 이개명;김병효
    • 한국전기전자재료학회논문지
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    • 제18권1호
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    • pp.43-49
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    • 2005
  • Temperature stabilities of resonance frequencies of the substrates are very important in piezoelectric ceramics oscillators and fitters. In this study, it was investigated thermal resisting property of the length-extensional vibration mode of PZT ceramics. The mode can be utilized in fabricating ultra-small 55 kHz IF devices. We fabricated the ceramic specimens with x = 0.51, 0.52, 0.53, 0.54, and 0.55 in the Pb(Zr$\sub$x/Ti$\sub$1-x/)O$_3$ system. And their resonance frequencies were measured before 1st thermal aging, after 1st and 2nd thermal aging. In order to investigate the influence of thermal aging on thermal resisting properties, thermally aged specimens were once mote thermally aged. Before 1st thermal aging, the specimens of the compositions with morphotropic phase, x = 0.53 and rhombohedral phase, x = 0.54 have weak thermal resisting property of resonance frequency, while tetragonal phase, x = 0.51 has robust thermal resisting property of resonance frequency. 1st thermal aging improved thermal resisting property of resonance frequency in all specimens.

마이크로파 통신소자용 ZnO 압전 박막의 구조적 전기적 특성 (Structural and Electrical properties of Piezoelectric ZnO Films Grown by Pulsed Laser Deposition for Film Bulk Acoustic Resonator)

  • 김건희;강홍성;안병두;임성훈;장현우;이상렬
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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    • pp.41-42
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    • 2005
  • The characteristics of ZnO films are reported depending on different deposition conditions for film bulk acoustic resonators (FBARs). The ZnO films have been deposited on Al films evaporated on p-type (100) silicon substrate by pulsed laser deposition (PLD) technique using a Nd:YAG laser. These films exhibit an electrical resistivity higher than $10^7$ $\Omega$m. X-ray diffraction measurements have shown that ZnO films are highly c-axis oriented with full width at half maximum (FWHM) below $0.5^{\circ}$. These results show the possibility of FBAR devices using by PLD.

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MOD 공법을 이용한 텅스텐 브론즈구조의 $Sr_x Ba_{1-x}$ $Nb_2O_6$ 압전 박막의 제조 및 특성 연구 (The study on preparation of $Sr_xBa_{1-x}$ $Nb_2O_6$ piezoelectric Thin Film of tungsten-bronze type by Metal Organic Decomposition Process and their properties)

  • 김광식;김경원;장건익;어순철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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    • pp.248-249
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    • 2005
  • The tungsten bronze type of strontium barium niobate(SBN) thin film was synthesized by metal organic decomposion method for SBN stock solution and the SBN thin film process were deposited by spin-coating process on Pt-deposited si-wafer(100) by magnetron sputtering system. The thickness of SBN thin film was 150$\sim$200 nm and were optimized for rpm of spin-coater system. The structural variation of SBN thin film was studied by TG-DTA and XRD. The deposited SBN stock solution on annealing at $400\sim800^{\circ}C$ a pure tungsten bronze SBN phase and the corresponding average grain size about 500$\sim$1000 nm influenced by annealing temperature.

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