• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1275_1276
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• 2009

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein.

• Journal of the Semiconductor & Display Technology
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• v.17 no.4
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• pp.62-65
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• 2018

We will provides a micro-pump infusion injector with the cloud networking for remote control. The existing infusion injector with controlled manually have an uncomfortable to use it inconveniently. The proposed remote control infusion, infusion system enables the identification and control of injected amount through the IOT function on th WEB. The micro-pump used is a piezo electric pump manufactured by using MEMS technology, and the amount of charge is varied depending on the frequency magnitude through the micro-controller. The micro-pump can adjust the speed of the fluid depending on the frequency and can be from 0.1ml / min to 7ml / min when the frequency is from 3 to 110Hz.