• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권10호
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• pp.487-491
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• 2003

The low-cost, simple structured micropump which is actuated by piezoelectric-discs, is fabricated with polydimethylsiloxane (PDMS) and the performances of the micropump, such as pump rate and backpressure, are characterized. The PDMS micropump with diffusers instead of passive check valves as a flow-rectifying element was fabricated. The deflection of glass diaphragm measured by atomic force microscope (AFM) is about 0.4$\mu\textrm{m}$ when applying a 150V square wave voltage at 300Hz across a 300${\mu}\ell$ thick piezoelectric disc. While the square wave driving voltage is applied to the piezoelectric disc of the actuator, the flow rate is measured by fluid displacement variation of the outlet tube. The flow rate of micropump increases with enhancing the applied voltage due to the increase of diaphragm deflection. The flow rate and the backpressure of the micropump with diffusers are about 32.9${\mu}\ell$/min and 173Pa respectively for the above mentioned deflection conditions.

• 대한기계학회논문집B
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• 제30권4호
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• pp.350-357
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• 2006

A new valveless micropump for bi-directional application has been developed and tested. The micropump was fabricated on silicon and glass substrates by micromachining process. The micropump in this study consists of a membrane actuator, a pumping chamber, fluidic channels and two piezoelectric ceramic films. The channels and pumping chamber were etched on a glass wafer and the membrane was made on a silion wafer which is actuated by a piezoelectric ceramic (PZT) film. The geometry of the micropump was optimized by numerical analysis and the performance of the micropump was investigated by the experiments. The maximum flow rate was $323{\mu}L/min$ and the maximum back pressure was 294 Pa when the membrane actuator of $10{\times}10mm^2$ was driven at 130 Hz and 385 V.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 춘계학술대회 논문집
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• pp.229-232
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• 2005

This paper presents the design and fabrication of backflow prevented Micropump using the metal membrane. The Micropump is consisted of the lower plate, metal membrane, upper plate and the piezoelectric-element. The lower plate includes the micro channel and the inlet, outlet of the Micropump. The upper plate includes the micro channel and connects the piezoelectric-element. These plate are fabricated on the Pyrex glass wafer by sandblasting process. The metal membrane does roll of check valve that is prevented backflow of the Micropump. The metal membrane is fabricated on the stainless steel by laser machining. Piezoelectric-element is actuated the Micropump and controlled flowing of fluid. The Micropump is fabricated by bonding process of these multi-layer.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.3104-3109
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• 2007

The present study has been carried out to investigate the pumping characteristics for different figures of inlet and outlet in diffuser/nozzle based on piezoelectric micropump. Piezoelectric micropump system consists of several parts like a pumping chamber, diffuser/nozzle, piezoelectric element and tubes. Parts of the micropump connected with diffuser/nozzle and tubes have been analyzed.. The magnified parts have been classified into two different models based on their resistance. These models have been further classified into six models with each one having three different angles at the magnified parts. Each model has been compared and analyzed using the simulation tool, namely, CFD-ACE depending on their flow rates and characteristics.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.1864-1869
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• 2003

A novel piezoelectric micropump using active check valves in place of conventional passive check valves in inlet and outlet has been proposed and investigated. It actively controls open/close motion of check valves using piezoelectric actuator for expansion/contraction of pump chamber. In this paper, bi-directional flow characteristics and load characteristics are experimentally investigated using an adequate timing control for valve closing motion with a prototype micropump fabricated with the effective size of $17{\times}8{\times}11mm^{3}$. From the experimental results, it is ascertained that optimal values of phase shift against voltage to drive pump chamber for realization of a miniaturized but powerful micropump, are $15^{\circ}$ in inlet check valve and $195^{\circ}$ in outlet. Based on the obtained results, a sheet-type active shuttle valve that has a unified valve-body for inlet and outlet check valves is proposed. A micropump with the effective size of $10{\times}10{\times}10mm^{3}$ is fabricated and basic characteristics are experimentally investigated.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1957-1959
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• 1996

In this paper, a piezoelectric micropump is fabricated and tested. The micropump consists of an actuator and two micronozzles have been made of silicon. It contains a piezoelectric polymer which allows opening and closing of the valves electrically. The actuator and the two micronozzles are fabricated by the anisotropic etch using EPW. Then, the fabricated actuator and the valves are anodically bonded with the pyrex glass which consists of the inlet and the outlet channels. The measured deflection of the piezoelectric polymer is $54\;{\mu}m$ at 1.6 kHz. The maximum pumping flow rate and the backward pressure of the micropump are $22\;{\mu}{{\ell}/min$, 8.7 Pa at 10 Hz, respectively.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1926-1928
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• 2003

The low-cost, simple structured micropump which is actuated by piezoelectricdiscs, is fabricated with polydimethylsiloxane (PDMS) and the performances of the micropump, such as pump rate and backward pressure, are characterized. The PDMS micropump with diffusers instead of passive check valves as a flow-rectifying element was fabricated. While the square wave driving voltage is applied to the piezoelectric disc of the actuator, the flow rate is measured by fluid displacement variation of the outlet tube. The flow rate of micropump increases with enhancing the applied voltage due to the increase of diaphragm deflection. The flow rate and the backward pressure of the micropump with diffusers are about $32.9{\mu}{\el}$/min and 173Pa respectively for the above mentioned deflection conditions.

• 설비공학논문집
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• 제17권1호
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• pp.33-38
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• 2005

This study has been conducted to investigate flow characteristics of a micropump with piezoelectric materials. In this study, the change of flow rates has been investigated for different positions of the inlet and outlet and for different distances between them. The FSI(Fluid Structure Interaction) method has been employed for numerical analysis of the piezoelectric diffuser/nozzle based micropump. It has been found that time averaged flow rate is greater in the case that distance between the inlet and outlet is longer. For the cases where the positions of the inlet are different with the position of the fixed outlet at the center, the flow rate is increased as the inlet is located farther from the center. This study may supply fundamental understandings for the design and analysis of the prototypes of piezoelectric micropumps.

• 한국기계가공학회지
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• 제4권4호
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• pp.39-47
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• 2005

In this paper, a novel high power micropump using active check valves in place of conventional passive check valves employed at the inlet and outlet ports is presented. It actively controls open/close motion of check valves using piezoelectric actuator for expansion/contraction of pump chamber. A prototype micropump having an effective size of $17mm{\times}8mm{\times}11mm$ is fabricated. Frequency-dependent flow rate characteristics, bi-directional flow characteristics and load characteristics are experimentally investigated using a timing control method for valve closing motion. From the obtained experimental results, it is ascertained that optimal values of the phase shift compared to the voltage to drive pump chamber are $15^{\circ}$ for inlet check valve and $195^{\circ}$ for outlet. Based on the obtained results, a sheet-type active shuttle valve that has a unified valve-body for inlet and outlet check valves is proposed. A micropump with an effective size of $10mm{\times}10mm{\times}10mm$ is fabricated and the basic characteristics are experimentally investigated.

• 한국항공우주학회지
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• 제34권6호
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• pp.35-41
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• 2006

본 논문에서는 무밸브 마이크로펌프에 사용되는 압전 다이아프램의 성능을 향상시키는 방법이 연구되었다. 큰 작동 변위와 작동력을 가지는 원형 형태의 경량 압전 복합재료 작동기(LIPCA)를 마이크로 펌프용으로 제작하였다. 유한요소 해석과 실험을 통하여 원형 LIPCA의 성능을 예측하여 최적의 적층 형태를 설계하였다. 최적의 원형 LIPCA를 기반으로 포토리소그라피법과 PDMS 몰딩법을 사용하여 무밸브 마이크로 펌프를 제작하였다. 압전 다이아프램의 작동 변위 및 마이크로 펌프의 유량과 배압을 실험적으로 계측하였고, 반경험식을 사용하여 예측한 유량과 비교하였다. 이상의 연구에서 원형 LIPCA가 마이크로 펌프용으로 사용되는 보통의 압전 작동 다이아프램을 대체할 수 있는 우수한 작동기임을 확인할 수 있었다.