• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.78-78
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• 1999

Experimental studies of laser micromachining on Mo metal using piezo Q-switched Nd:YAG laser have been performed. Miniaturized microcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope application have recently extensively examined. For these purpose, the electro-static electron lens and deflector system called microcolumn has to be assembled. The conventional microcolumn fabrication technique would gave a limitation on the minimization of aberration. The current technique of a 1 $\mu$m misalignment would lead to ~1.3 nm coma. In order to reduce aberration, assembling the microcolumn component followed by laser drilling should be very beneficial. In this report, we will address the preliminary report of laser micromachining on Mo substrate using piezo Q-switched Nd:YAG laser. The geometrical figures, such as the diameter and the depth of the frilled aperture are dependent upon the total energy of the laser pulse train, laser pulsewidth, and the diameter of laser beam in addition to the materials-dependent parameters.

• Structural Engineering and Mechanics
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• 제78권1호
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• pp.15-22
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• 2021

An investigation of the nonlinear thermal buckling behavior of a nano-sized beam constructed from intelligent materials called piezo-magnetic materials has been presented in this article. The nano-sized beam geometry has been considered based on two assumptions: an ideal straight beam and an imperfect beam. For incorporating nano-size impacts, the nano-sized beam formulation has been presented according to nonlocal elasticity. After establishing the governing equations based on classic beam theory and nonlocal elasticity, the nonlinear buckling path has been obtained via Galerkin's method together with an analytical trend. The dependency of buckling path to piezo-magnetic material composition, electro-magnetic fields and geometry imperfectness has been studied in detail.

• 전기전자학회논문지
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• 제14권3호
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• pp.190-198
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• 2010

피에조소자를 구동하여 자동카메라의 초점을 자동으로 제어하는 시스템에서 피에조를 구동하는 집적회로를 설계하였다. 가공된 피에조에 변위를 만들기 위해서는 고전압 DC가 필요하다. 휴대형기기에서 사용하는 3[V]~4.2[V]정도의 낮은 전원전압을 약 80[V]로 승압하여 피에조 구동전압으로 제공하는 한편 입력되는 1[Vp-p]의 제어신호를 -20[V]에서 +80[V]까지 조절되도록 설계하였다. 또한 IC 외부에 적용되는 소자가 최소가 되도록 하여 시스템의 전체 크기를 줄일 수 있도록 하였다. 제어용 프로세서로 IIC(Inter-IC) 인터페이스를 적용하기 위하여 구동회로 내부에 IIC 인터페이스 디지털 로직을 내장하였는데, 이는 제품의 검증, 양산시 양품판정을 쉽게 해주는 장점이 있다. 제작공정은 AMIS 사의 I2T100 2P_3M 공정을 사용하였는데 0.6[um], 100[V]급 BCD공정이며, 6INCH 웨이퍼를 사용하였다. 전원전압 3.6[V], 소비전력은 약 40[mW]정도이다. 칩 사이즈는 1600*1500 [$um^2$]이며, 칩을 소형패키지에 내장하여 조립하였기 때문에 휴대형기기에 적용이 편리하게 되어있다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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• pp.414-417
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• 2001

Recently, developments of device using characteristics of ceramics as a new technical material is in progress. While doing so, Ultrasonic motor which is a part of research & development of piezo-actuator by piezo-effects is being used in the various applications. So, we fabricated a flat-type $L_{1}-B_{8}$ mode Ultrasonic motor and measured the operation characteristics of its. The size of USM is 80*20*1.5[$mm^{3}$](length*width*thickness) and is constructed with stator by piezo-ceramics and stainless elastic body and rotator by bearings. As results of experiments, the fastest speed of revolution(v), the maximum torque(T) and the efficiency( $\eta$ ) were 37.5[cm/sec], 5.0[ $mN{\cdot}m$ ] and 1.17[%] respectively when 27.9[kHz], 150[gf], 50[V] were applied. So, we think this $flat-type_{1}-B_{8}$ mode Ultrasonic motor is able to be used for applications in forwarding device of a paper or electric card and so on.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.245-246
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• 2009

정전용량형 후막 스트레인 게이지(piezocapacitive thick film strain gage)는 세라믹 ($Al_2O_3$)을 주 원료로 하는 지지대(약 5mm)와 다이어프램(약 $300{\mu}m$) 그리고 가드 링으로 구성된다. 전극 판은 도전성 페이스트를 이용하여 지지대와 다이어프램에 형성되었으며 극판 사이에는 유전체 메이스트를 사용하여 스크린 인쇄로 후막을 형성하였다. 극판 사이의 가드 링 두께는 약 $30{\mu}m$정도로 다이어프램의 변위 최대값을 유지시키는 데 필요한 간격이다. 따라서 정전용랑형 후막 스트레인 게이지는 지지대를 중심으로 다이어프램에 압력 (0.5~1.0bar)이 인가될 때 변위를 발생시키면서 커패시터 값이 압력의 크기에 따라 비례 특성을 가지고 변화하는 것을 이용한 것이다. 압력이 없을때 초기값은 35pF~40pF 정도이고 정격압력의 최대치를 인가시켰을 때 약 55pF~55p를 나타내었다.

• 대한의용생체공학회:학술대회논문집
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• 대한의용생체공학회 1995년도 춘계학술대회
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• pp.61-63
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• 1995

The grabber used for the manipulation of single cell is developed by employing the piezo actuator as a source of grabbing force and this system consists of sucking cylinder, XYZ stage and inverted microscopy. With this grabbing system, 2 experiments are performed and they are as follows; 1) the relation between displacement change of piezo actuator and applied voltage was estimated by using sucking cylinder, 2) we grabbed plotoplast of cabbage's leaf-cell with this system. These experiments showed that the proposed grabbing system can be applicable as a single cell handling device in the field of biotechnology and medicine.

• 한국세라믹학회지
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• 제48권6호
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• pp.648-653
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• 2011

Generally the piezo-composites have superior hydrostatic response characteristics than PZT ceramics due to both the stress amplification effect in axial direction and stress reduction effects in radial direction. This paper described material properties of a 1-3 type piezo-composite that fabricated with ceramic injection molding (CIM) technology. The electro-mechanical performances of the composite have been analyzed using FEM and the physical properties of the composite have been measured with the vol% of the PZT ceramics. Based on the results, the $k_t$ increased rapidly as the vol% of the PZT ceramics increased up to 30 vol% and saturated the constant value in the above region. Also the experimental results have good agreement with the simulation values of the composite. Finally we developed the composites having high piezoelectric properties than the PZT ceramics with the CIM technology.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.429-429
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• 2000

Micro positioning mechanism is the key technology in many fields, such as scanning electron microscopy (SEM), x-ray lithography, mask alignment and micro-machining. In the paper, a 3DOF parallel-type micro-positioning mechanism is proposed. This mechanism uses piezo-actuators and Flexure hinge to control x, y and $\theta$ motion. It is shown both analytically and numerically that 2 DOF flexure hinge model was better precision than 1 DOF flexure hinge design.

• International Journal of Aeronautical and Space Sciences
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• 제12권1호
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• pp.69-77
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• 2011

A peristaltic micropump with lightweight piezo-composite actuator (LIPCA) membrane valves is presented. The micropump contained three cylinder chambers that were connected by microchannels and two active membrane valves. A circular miniature LIPCA was developed and manufactured to be used as actuating diaphragms. The LIPCA diaphragm acted as an active membrane valve that alternate between open and closed positions at the inlet and outlet in order to produce high pumping pressure. In this LIPCA, a lead zirconium titanate ceramic with a thickness of 0.1 mm was used as an active layer. The results confirmed that the actuator produced a large out-of-plane deflection. During the design process, a coupled field analysis was conducted in order to predict the actuating behavior of the LIPCA diaphragm; the behavior of the actuator was investigated from both a theoretical and experimental perspective. The active membrane valve concept was introduced as a means for increasing pumping pressure, and microelectromechanical system techniques were used to fabricate the peristaltic micropump. The pumping performance was analyzed experimentally in terms of the flow rate, pumping pressure and power consumption.

• 비파괴검사학회지
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• 제27권1호
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• pp.1-7
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• 2007

섬유강화 복합재료가 항공기, 우주 구조물, 로봇 팔 등에 널리 사용됨에 따라 복합재료의 신뢰도와 안전성을 향상시키기 위하여 이에 대한 비파괴검사법은 매우 중요한 연구분야로 대두되고 있다. AE법은 복합재의 균열, 섬유 또는 수지재의 파손, 층간분리 등의 발생 및 성장과정에서 발생되는 탄성파로 인한 스트레인 에너지를 검출하는 방법이다. 본 논문에서는 $8{\times}8$ 매트릭스형 피에조 센서를 사용하여 인장시험 하에서 발생되는 AE신호를 측정하고 분석하였다. 이를 위하여 AE신호의 전달거리를 제어할 수 있는 전용회로를 설계하고 제작하였다. 또한 64채널의 AE신호를 획득하기 위하여 발광다이오드를 사용한 광학 저장장치를 구성하였다. 실험결과, $8{\times}8$ 매트릭스형 피에조 센서를 이용하여 복합재료에서 발생되는 AE신호의 발생지점과 전파경로를 효과적으로 검출할 수 있었다.