• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.336-340
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• 1997

For optimal design of micro stage, we were measured to displacement of piezo-electric transducer that was based on voltage value. And then researchers were analyzed to microstage through FEM with displacement data including voltage value of piezo-electric transducer. For verification of analyzing results, we were gauged on displacement by using Laser-interferometer. And researchers were confirmed to propriety of micro stage design with FEM, were obtained error rate that are 3.5% between measurement results and analyzing results.