• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.317-318
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• 2011

• 제어로봇시스템학회:학술대회논문집
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• 1996.10a
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• pp.315-318
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• 1996

In this paper a new positioning method for cylindrical work pieces on rotating supports is studied. A work piece on a rotating axis is positioned by an impact drive mechanism (IDM) whose driving parameters are steadily updated by observing the object movement. The application of this actuator and the use of a multi-functional PC board for all necessary input and output operations such as e.g. data acquisition or wave form generation allow an alignment with a precision of less than 1.mu.m in a relatively short time and at low cost compared to conventional methods.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.1
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• pp.101-107
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• 2010

This paper presents motion control of the precision stage composed of the piezoelectric actuator and flexible hinges. The stage shows approximately 27% overshoot when the stage was applied to 30V square wave input voltage. Also, the stage shows nonlinear response characteristics including hysteresis. This paper proposes feedback control technique to suppress the phenomenon of hysteresis and overshoot using the sliding mode control scheme with the integrator. Also, this paper suggests the method that searches important parameters of sliding mode control and observer using Genetic Algorithm. To demonstrate the effectiveness of the proposed control algorithm, experimental validations are performed.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.163-168
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• 2006

In a micro-unit of electronic-machine, vibration can be excited by a small impact, and this vibration acts as a fatigue load. To measure the vibration effect on the micro unit, a micro dynamic tester is needed to test a micro specimen. In this paper, it has confirmed a movement of the PZT(piezo actuator) to use a sine signal. And, it has confirmed a fracture of specimens by using a tension-tension input signal in PZT. A metal-material property in the micro scale has been tested to compare with the macro scale. A fatigue test has been conducted by using PZT actuator to give a bending-tension effect.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1275_1276
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• 2009

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.5
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• pp.65-72
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system(100mm stroke and $\pm$ l0nm positioning accuracy) with single plane X-Y stage are materialized.

• International Journal of Precision Engineering and Manufacturing
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• v.1 no.2
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• pp.76-83
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• 2000

A study on the robust control of a composite beam with a distributed PVDF sensor and piezo-ceramic actuator is presented in this paper. $1^{st}$ and $2^{nd}$ natural frequencies are considered in the modeling, because robust control theory which has robustness to structured uncertainty is adopted to suppress the vibration. If the controllers designed by $H_{\infty}$ theory do not satisfy control performance, it is improved by $\mu$-synthesis method with D-K iteration so that the $\mu$-controller based on the structured singular value satisfies the nominal performance and robust performance. Simulation and experiment were carried out with the designed controller and the verification of the robust control properties was presented by results.

• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.309-312
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• 2002

Precision stage is essential device for semiconductor equipments, fiber optic assembly systems and micro machines. In this paper, we develop a piezo-electric inchworm type actuator for long stroke ultra precision linear stages, and implement a controller to interface with commercial motion controllers. It provides fast implementation of precise position control system substituting for rotary motor. In the future, using a laser interferometer as a position sensor, we plan to implement a nano meter precision stage.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.821-826
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• 2006

This paper presents a novel type of hybrid dispensing head for IC fabrication and surface mount technology. The proposed mechanism consists of solenoid valve and piezoelectric stack as actuators, and provides positive-displacement and jet dispensing. The positive-displacement dispensing can produce desired adhesive amount without viscosity effect, while the jet dispensing can produce high precision adhesive amount. In order to determine the relationship between required voltage of the piezo actuator and needle displacement, both static and dynamic analysis are undertaken, In addition, finite element analysis is performed in order to find optimal design parameters. Dispensing flow rate and pressure in the chamber are evaluated through fluid dynamic model.

• Smart Structures and Systems
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• v.6 no.8
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• pp.975-989
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• 2010

Based on the theory of piezo-elasticity, the paper obtains the exact solutions of functionally graded piezoelectric hollow cylinders with different piezoelectric parameter $g_{31}$. Two kinds of piezoelectric hollow cylinders are considered herein. One is a multi-layered cylinder with different parameter $g_{31}$ in different layers; the other is a continuously graded cylinder with arbitrarily variable $g_{31}$. By using the Airy stress function method with plane strain assumptions, the exact solutions of the mechanic and electrical components of both cylinders are obtained when they are subjected to external voltage (actuator) and pressure (sensor), simultaneously. Furthermore, good agreement is achieved between the theoretical and numerical results, and useful conclusions are given.