• 한국레이저가공학회지
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• 제6권3호
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• pp.29-35
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• 2003

In semiconductor processing, there are two types of particle contaminated onto the wafer, i.e. dry and wet state particles. In order to evaluate the cleaning performance of laser shock wave cleaning method, the removal of 1 m sized alumina particle at different particle conditions from silicon wafer has been carried out by laser-induced shock waves. It was found that the removal efficiency by laser shock cleaning was strongly dependent on the particle condition, i.e. the removal efficiency of dry alumina particle from silicon wafer was around 97％ while the efficiencies of wet alumina particle in DI water and IPA are 35％ and 55％ respectively. From the analysis of adhesion forces between the particle and the silicon substrate, the adhesion force of the wet particle where capillary force is dominant is much larger than that of the dry particle where Van der Waals force is dominant. As a result, it is seen that the particle in wet condition is much more difficult to remove from silicon wafer than the particle in dry condition by using physical cleaning method such as laser shock cleaning.

• Korean Chemical Engineering Research
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• 제40권6호
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• pp.769-777
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• 2002

Nonionic surfactant/water/탄화수소 오일/alcohol의 4성분계 시스템에서 12종의 조성물을 제조하여 물성 평가를 수행한 결과, 30.5-31.1 dyne/cm의 낮은 표면장력의 값과, 1.6-7.2 c.p.의 낮은 점도의 물성을 보여 산업용 세정제로서의 기본 물성을 보여주었다. 이들 조성물들이 안정한 단일상으로 존재하는 온도의 범위는 alcohol/surfactant(A/S)비의 증가에 따라 감소되는 경향을 보이고 있으나, 전체적으로는 계면활성제의 hydrophilic lipophilic balance(HLB) 값에 크게 영향을 받고 있으며, HLB 값이 높을수록 안정하게 존재하는 온도 영역이 증가되는 경향을 보여주고 있다. 그리고 각각의 조성물에 물의 함량을 증가 시켜 안정한 단일상이 유지되는 물의 최대 함유량을 측정한 결과 HLB 값이 낮은 계면활성제를 사용하였을 경우 HLB 값이 6.4인 비이온 계면활성제를 사용할 경우 22.1%까지도 물을 함유할 수 있었고, 물의 양이 증가됨에 따라서 단일상으로 존재하는 온도영역은 좁아졌다. 오염원으로 플럭스 제조에 사용되는 abietic acid에 대한 세정 효율을 UV/Visable Spectrophotometer와 FT-IR Spectrometer와 같은 분석기기를 이용하여 검토하여 본 결과, 비이온 계면활성제의 HLB 값이 낮을수록 높은 세정 효율을 보여주어, W/O microemulsion의 경우 비이온 계면활성제에 따른 세정력의 변화가 매우 큼을 확인 할 수 있었다. 그러나 A/S의 비가 증가에 따른 세정효율의 차이는 별다른 경향을 보이지 않았다. 또한 산업세정에 있어서 중요한 세정 요소로 작용하는 변수인 온도 변화와 초음파 주파수의 변화에 따른 세정효율을 측정한 결과, 온도가 높을수록 그리고 초음파의 주파수가 낮을수록 높은 세정력을 보여주었다. 세정 공정 중 린스조에서의 유분 오염물이 함유된 린스액의 유수분리 효율을 측정한 결과, HLB 값이 6.4인 비이온 계면활성제를 사용한 시스템의 경우 $25^{\circ}C$ 이상에서 85% 이상의 높은 제거 효율을 보여, 효율적인 세정 및 관리가 가능한 것으로 판단되었다.

• 청정기술
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• 제18권1호
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• pp.43-50
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• 2012

태양전지 제조공정 중 잉곳의 절삭공정 후 진행되는 태양광 실리콘 웨이퍼 세정에 관한 연구를 수행하였다. 태양광 실리콘 웨이퍼는 잉곳의 생산방법에 따라 단결정과 다결정 웨이퍼로 분류되고, 절삭 방법에 따라서는 슬러리로 절삭한 웨이퍼와 다이아몬드 와이어로 절삭한 웨이퍼로 구분할 수 있으며, 이의 방법들에 따라 웨이퍼 표면과 오염원이 달라질 수 있다. 본 연구에서는 세정대상물에 따라 오염원과 웨이퍼 표면의 특성을 관찰하였고 적합한 세정제를 개발하여 물성 및 세정성을 평가하여 적용성을 확인하고자 하였다. 개발된 세정제로 세정한 웨이퍼는 XPS 분석결과 잔류 오염물질이 관찰되지 않았으며, 표면조직화 후 균일한 패턴을 형성함을 확인할 수 있었다. 또한, 개발된 세정제를 웨이퍼 생산현장에서 테스트를 진행하여 기존 세정제보다 우수한 세정결과를 확보하였다.

• 상하수도학회지
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• 제31권6호
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• pp.501-510
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• 2017

In this study, it is estimated that ceramic membrane process which can operate stably in harsh conditions replacing existing organic membrane connected with coagulation, sedimentation etc.. Jar-test was conducted by using artificial raw water containing kaolin and humic acid. It was observed that coagulant (A-PAC, 10.6%) 4mg/l is the optimal dose. As a results of evaluation of membrane single filtration process (A), coagulation-membrane filtration process (B) and coagulation-sedimentation-membrane filtration process (C), TMP variation is stable regardless of in Flux $2m^3/m^2{\cdot}day$. But in Flux $5m^3/m^2{\cdot}day$, it show change of 1-89.3 kpa by process. TMP of process (B) and (C) is increased 11.8, 0.6 kpa each. But, the (A) showed the greatest change of TMP. When evaluate (A) and (C) in Flux $10m^3/m^2{\cdot}day$, TMP of (A) stopped operation being exceeded 120 kpa in 20 minutes. On the other hand, TMP of (C) is increased only 3 kpa in 120 minutes. Through this, membrane filtration process can be operated stably by using the linkage between the pretreatment process and the ceramic membrane filtration process. Turbidity of treated water remained under 0.1 NTU regardless of flux condition and DOC and $UV_{254}$ showed a removal rate of 65-85%, 95% more each at process connected with pretreatment. Physical cleaning was carried out using water and air of 500kpa to show the recovery of pollutants formed on membrane surface by filtration. In (A) process, TMP has increased rapidly and decreased the recovery by physical cleaning as the flux rises. This means that contamination on membrane surface is irreversible fouling difficult to recover by using physical cleaning. Process (B) and (C) are observed high recovery rate of 60% more in high flux and especially recovery rate of process (B) is the highest at 95.8%. This can be judged that the coagulation flocs in the raw water formed cake layer with irreversible fouling and are favorable to physical cleaning. As a result of estimation, observe that ceramic membrane filtration connected with pretreatment improves efficiency of filtration and recovery rate of physical cleaning. And ceramic membrane which is possible to operate in the higher flux than organic membrane can be reduce the area of water purification facilities and secure a stable quantity of water by connecting the ceramic membrane with pretreatment process.

• 동력기계공학회지
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• 제18권1호
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• pp.63-68
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• 2014

The numerical analysis of fluid flow in the tube cleaning system is examined. The working flow used in this study is seawater, and the temperature change is not considered as the temperature change of seawater in the tube cleaning system is negligible. Also, the analysis is performed under the assumption of steady state. The screens of complicated morphologies are simplified for the analysis, and only one fourth of the tube cleaning system is modeled as the system has a symmetrical shape. The velocity inlet boundary condition is employed for the seawater inlet, whereas the outflow boundary condition is employed for two seawater outlets. In applying the outflow boundary condition for the system with more than two outlets, the flow rate can be arbitrarily assigned. In the analysis, the finite-volume method based numerical analysis tool, the pressure based solver, the standard k-$\varepsilon$ model are utilized, and the under relaxation factor is modified appropriately. From the analysis, the distribution of velocity vectors, pressure and path lines are obtained, and the physical characteristics of fluid flow in the tube cleaning system is well-examined.

• 한국응용과학기술학회지
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• 제10권2호
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• pp.35-40
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• 1993

Alkaline cleaning agent(ACA) was prepared by blending of POE(4)octadecylmine(S-204), $Na_2CO_3$, sodium orthosilicate(Na-OSi). Tetronix T-701(T-701), and MJU-100A. The physical properties of ACA tested with steel specimen showed the following results. The cleaning powers of ACA-6(S-204 80g/$Na_2CO_3$, 160g/Na-OSi, 80g/T-701, 60g/MJU-100A, 20g mixture) for press-rust preventing oil was 98% and 99% degreasing at 2wt%, $70^{\circ}C$ and $90^{\circ}C$, respectively : for quenching oil, the cleaning power of ACA-6 was 95% degreasing at 2wt% and $70^{\circ}C$. From these results, it was ascertained that ACA-6 exhibited a good cleaning power. Foam heights measured immediately after foaming by Ross & Miles method and Ross & Clark method at 3wt%. $60^{\circ}C$ were 17mm and 40mm, respectively. As the result, ACA-6 was proved a good low foaming cleaning agent.

• 반도체디스플레이기술학회지
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• 제22권2호
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• pp.17-23
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• 2023

In semiconductor manufacturing processes, a cleaning process is important that can remove sub-micron particles. Conventional wet cleaning methods using chemical have limits in removing nano-particles. Thus, physical forces of a mechanical vibration up to 1 MHz frequency, was tried to aid in detaching them from the substrates. In this article, we developed a 1 MHz quartz megasonic for a bare wafer cleaning using finite element analysis. At first, a 1 MHz megasonic prototype was manufactured. Using the results, a main product which can improve a particle removal performance, was analyzed and designed. The maximum impedance frequency was 992 kHz, which agreed well with the experimental value of 986 kHz (0.6% error). Acoustic pressure distributions were measured, and the result showed that maximum / average was 400.0~432.4%, and standard deviation / average was 46.4~47.3%. Finally, submicron particles were deposited and cleaned for the assessment of the system performance. As a result, the particle removal efficiency (PRE) was proved to be 92% with 11 W power. Reflecting these results, the developed product might be used in the semiconductor cleaning process.

• 공업화학
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• 제18권2호
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• pp.188-193
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• 2007

나프텐계 탄화수소, terpene계 천연 용제, 계면활성제 및 물을 이용하여 친환경적 준용매계 세정제를 제조하고 이들의 물리적 특성과 flux 및 grease 오염물에 대한 세정효율을 측정하였다. 준용매계 세정제의 물성은 pH가 6.0~6.7의 약산성으로 중성에 가까운 값을 나타내었으며 표면장력은 27.4~28.4 dyne/cm의 값을 나타내었다. 또한 wetting index는 물이 소량 들어간 경우 8.65~12.46, 물이 들어가지 않은 경우 11.99~17.43의 값을 가졌으며 나프텐계 탄화수소 30 wt%, terpene계 천연 용제 45 wt%, 계면활성제 13 wt%, 보조계면활성제 12 wt%, 물 0 wt%의 조성으로 제조한 세정제가 17.43으로 가장 큰 값을 가졌으며 세정 효율 역시 flux에 대하여 98.64%, grease에 대하여 93.44%로 우수하였다. 전기 전도도는 소량의 물을 첨가한 경우 $0.5{\sim}0.9{\mu}s/cm$의 값을 나타내어 물이 용제 중에 균일하게 분산되어 있는 W/O형의 준용매계 세정제임을 확인하였다

• 한국치위생학회지
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• 제14권6호
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• pp.903-913
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• 2014

Objectives: The purpose of the study was to investigate the content analysis of daily tooth cleaning service records by caregivers in a long-term care facility. Methods: The data were analyzed by qualitative research based on content analysis of the daily records of the processes and results of daily tooth cleaning service. Twenty caregivers provided tooth, gum and denture cleaning service after breakfast, lunch, and dinner to 48 elderly residents. The study lasted about two weeks(from August 4 to August 20, 2014). The researcher reconstructed the language by repeatedly reviewing the caregivers statements in the records. The content categories were derived from the records through a reiterative manual comparative analysis. Using constant comparison method, reconstructed meanings were incorporated into various meanings and reanalyzed by final categories called as analytic coding. In order to validate the reliability, 6 times of discussion made the common meanings through a master's degree student and a dental hygiene professor. Results: The caregivers identified lack of understanding and ability to recognize the functional physical and mental changes in the elderly. The elderly had difficulty in recognizing silent communication and daily tooth cleaning. The caregivers were so strenuous in taking care of the daily tooth cleaning service for the elderly. At last, they gave up the daily tooth cleaning service and took on it to the guardians. They found that there was no social supporting network for oral health of the elderly residents. Conclusions: Caregivers had insufficient understanding of the functional physical and mental changes in the elderly residents, and they had difficulty providing daily tooth cleaning service to the elderly due to poor skill and abilities.

• 청정기술
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• 제16권2호
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• pp.103-116
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• 2010

평면 판넬 디스플레이(FPD)산업 중 액정표시장치(LCD) panel 시장은 계속 성장하고 있으며, 대형화와 생산은 해마다 증가하고 생산기술은 향상되고 있다. FPD의 제조공정은 고도의 청정성이 요구되는 공정으로 제조공정 중 세정공정이 30~40%를 차지할 정도로 기술적 생산성 측면에서 매우 중요하다. 그 중 액정주입 후 잔류하는 액정은 미세갭에 잔류하여 제거하기 매우 어렵다. 본 연구에서는 대체세정제의 원료로 많이 이용되고 있는 glycol ether계 용제, glycol dimethyl ether계 용제, 그리고 비이온계면활성제를 사용하여 우수한 세정력, 린스력, 침투력을 갖고 배선에 영향을 주는 이온함량을 최소화한 수계세정제를 개발하여 액정주입 후에 사용되는 panel의 액정 세척에 적용해 보았다. 이에 따라 배합성분들의 혼합비에 따른 세정제의 물성, 세정 효율 및 헹굼성을 측정하여 보았다. 실험 결과에 따르면, 배합세정제는 기존의 세정제보다 높은 습윤지수와 높은 운점을 보였다. 그리고 세정제의 주용제의 구조변화와 오염물로서 액정의 종류에 따라 세정효율이 영향을 미치고 있음이 확인되었다. 또한 최적의 배합세정제는 기존의 세정제에 비하여 동등이상의 세정력을 보여주었고 헹굼성능도 훨씬 우수하였다.