• Laser Solutions
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• v.6 no.3
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• pp.29-35
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• 2003

In semiconductor processing, there are two types of particle contaminated onto the wafer, i.e. dry and wet state particles. In order to evaluate the cleaning performance of laser shock wave cleaning method, the removal of 1 m sized alumina particle at different particle conditions from silicon wafer has been carried out by laser-induced shock waves. It was found that the removal efficiency by laser shock cleaning was strongly dependent on the particle condition, i.e. the removal efficiency of dry alumina particle from silicon wafer was around 97％ while the efficiencies of wet alumina particle in DI water and IPA are 35％ and 55％ respectively. From the analysis of adhesion forces between the particle and the silicon substrate, the adhesion force of the wet particle where capillary force is dominant is much larger than that of the dry particle where Van der Waals force is dominant. As a result, it is seen that the particle in wet condition is much more difficult to remove from silicon wafer than the particle in dry condition by using physical cleaning method such as laser shock cleaning.

• Korean Chemical Engineering Research
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• v.40 no.6
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• pp.769-777
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• 2002

Using four components - nonionic surfactants, water, hydrocarbon oil and an alcohol as cosurfactant, 12 types of cleaning agents were prepared, and their physical properties such as surface tension, viscosity, electroconductivity and phase stability were measured. As the formulated cleaning agents have low surface tensions(30.5-31.1 dyne/cm) and low viscosities (1.6-7.2 c.p.), they are satisfied with the general physical properties of water-in-oil(W/O) microemulsions for their industrial use. They showed a tendency that their temperature range for stable one-phase microemulsion decreased in accordance with the increase of alcohol/surfactant(A/S) ratio in the formulations. However, the temperature range of one-phase microemulsion was much more affected by hydrophilic lipophillic balance(HLB) value of the nonionic surfactant which increased its temperature range and it increased in accordance with the higher HLB value in the formulations. And the maximum content of water which can keep stable one-phase W/O microemulsion was measured at each sample. In addition, their temperature range for stable one-phase microemulsion was also measured. It was confirmed that the selection of surfactant type was very important for formulating a cleaning agent, since the W/O microemulsion system with the nonionic surfactant of the lower HLB value showed better cleaning efficacy that of the higher HLB value for abietic acid as a soil, which was used for preparing a rosin-type flux. In the formulated cleaning agents with the increase of A/S ratio in the formulations, however, there was no significant difference in cleaning efficacy. It was investigated that the differences of their cleaning efficacy was affected by the change of the condition of temperature and sonicating frequency as important factors in the industrial cleaning. That is, the higher, their cleaning temperature and the lower, their sonicating frequency, the more increased, their cleaning efficacy. Furthermore, using optical instruments like UV/Visable Spectrophotometer and FT-IR Spectrometer, their cleaning efficacy for abietic acid was measured. The removal of soil from the contaminated rinse water was measured by gravity separation method in the rinse bath. As a result, the cleaning agent system having the nonionic surfactant of HLB value 6.4 showed over 85% water-oil separation efficacy at over $25^{\circ}C$. Therefore, it was demonstrated in this work that the formulating cleaning agents were very effective for cleaning and economical in the possible introduction of water recycling system.

• Clean Technology
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• v.18 no.1
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• pp.43-50
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• 2012

Cleaning procedure of solar silicon wafer, following ingot sawing process in solar cell production is studied. Types of solar silicon wafer can be divided into monocrystalline or multicrystalline, and slurry sawn wafer or diamond sawn wafer according to the ingot growing methods and the sawing methods, respectively. Wafer surface and contaminants can vary with these methods. The characterisitics of contaminants and wafer surface are investigated for each cleaning substrate, and appropriate cleaning agents are developed. Physical properties and cleaning ability of the cleaning agents are evaluated in order to verify the application in the industry. The wafers cleaned with the cleaning agents do not show any residual contaminants when analyzed by XPS and regular patterns are formed after texturization. Furthermore, the cleaning agents are applied in the production industry, which shows superior cleaning results compared to the existing cleaning agents.

• Journal of Korean Society of Water and Wastewater
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• v.31 no.6
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• pp.501-510
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• 2017

In this study, it is estimated that ceramic membrane process which can operate stably in harsh conditions replacing existing organic membrane connected with coagulation, sedimentation etc.. Jar-test was conducted by using artificial raw water containing kaolin and humic acid. It was observed that coagulant (A-PAC, 10.6%) 4mg/l is the optimal dose. As a results of evaluation of membrane single filtration process (A), coagulation-membrane filtration process (B) and coagulation-sedimentation-membrane filtration process (C), TMP variation is stable regardless of in Flux $2m^3/m^2{\cdot}day$. But in Flux $5m^3/m^2{\cdot}day$, it show change of 1-89.3 kpa by process. TMP of process (B) and (C) is increased 11.8, 0.6 kpa each. But, the (A) showed the greatest change of TMP. When evaluate (A) and (C) in Flux $10m^3/m^2{\cdot}day$, TMP of (A) stopped operation being exceeded 120 kpa in 20 minutes. On the other hand, TMP of (C) is increased only 3 kpa in 120 minutes. Through this, membrane filtration process can be operated stably by using the linkage between the pretreatment process and the ceramic membrane filtration process. Turbidity of treated water remained under 0.1 NTU regardless of flux condition and DOC and $UV_{254}$ showed a removal rate of 65-85%, 95% more each at process connected with pretreatment. Physical cleaning was carried out using water and air of 500kpa to show the recovery of pollutants formed on membrane surface by filtration. In (A) process, TMP has increased rapidly and decreased the recovery by physical cleaning as the flux rises. This means that contamination on membrane surface is irreversible fouling difficult to recover by using physical cleaning. Process (B) and (C) are observed high recovery rate of 60% more in high flux and especially recovery rate of process (B) is the highest at 95.8%. This can be judged that the coagulation flocs in the raw water formed cake layer with irreversible fouling and are favorable to physical cleaning. As a result of estimation, observe that ceramic membrane filtration connected with pretreatment improves efficiency of filtration and recovery rate of physical cleaning. And ceramic membrane which is possible to operate in the higher flux than organic membrane can be reduce the area of water purification facilities and secure a stable quantity of water by connecting the ceramic membrane with pretreatment process.

• Journal of Power System Engineering
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• v.18 no.1
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• pp.63-68
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• 2014

The numerical analysis of fluid flow in the tube cleaning system is examined. The working flow used in this study is seawater, and the temperature change is not considered as the temperature change of seawater in the tube cleaning system is negligible. Also, the analysis is performed under the assumption of steady state. The screens of complicated morphologies are simplified for the analysis, and only one fourth of the tube cleaning system is modeled as the system has a symmetrical shape. The velocity inlet boundary condition is employed for the seawater inlet, whereas the outflow boundary condition is employed for two seawater outlets. In applying the outflow boundary condition for the system with more than two outlets, the flow rate can be arbitrarily assigned. In the analysis, the finite-volume method based numerical analysis tool, the pressure based solver, the standard k-$\varepsilon$ model are utilized, and the under relaxation factor is modified appropriately. From the analysis, the distribution of velocity vectors, pressure and path lines are obtained, and the physical characteristics of fluid flow in the tube cleaning system is well-examined.

• Journal of the Korean Applied Science and Technology
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• v.10 no.2
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• pp.35-40
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• 1993

Alkaline cleaning agent(ACA) was prepared by blending of POE(4)octadecylmine(S-204), $Na_2CO_3$, sodium orthosilicate(Na-OSi). Tetronix T-701(T-701), and MJU-100A. The physical properties of ACA tested with steel specimen showed the following results. The cleaning powers of ACA-6(S-204 80g/$Na_2CO_3$, 160g/Na-OSi, 80g/T-701, 60g/MJU-100A, 20g mixture) for press-rust preventing oil was 98% and 99% degreasing at 2wt%, $70^{\circ}C$ and $90^{\circ}C$, respectively : for quenching oil, the cleaning power of ACA-6 was 95% degreasing at 2wt% and $70^{\circ}C$. From these results, it was ascertained that ACA-6 exhibited a good cleaning power. Foam heights measured immediately after foaming by Ross & Miles method and Ross & Clark method at 3wt%. $60^{\circ}C$ were 17mm and 40mm, respectively. As the result, ACA-6 was proved a good low foaming cleaning agent.

• Journal of the Semiconductor & Display Technology
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• v.22 no.2
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• pp.17-23
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• 2023

In semiconductor manufacturing processes, a cleaning process is important that can remove sub-micron particles. Conventional wet cleaning methods using chemical have limits in removing nano-particles. Thus, physical forces of a mechanical vibration up to 1 MHz frequency, was tried to aid in detaching them from the substrates. In this article, we developed a 1 MHz quartz megasonic for a bare wafer cleaning using finite element analysis. At first, a 1 MHz megasonic prototype was manufactured. Using the results, a main product which can improve a particle removal performance, was analyzed and designed. The maximum impedance frequency was 992 kHz, which agreed well with the experimental value of 986 kHz (0.6% error). Acoustic pressure distributions were measured, and the result showed that maximum / average was 400.0~432.4%, and standard deviation / average was 46.4~47.3%. Finally, submicron particles were deposited and cleaned for the assessment of the system performance. As a result, the particle removal efficiency (PRE) was proved to be 92% with 11 W power. Reflecting these results, the developed product might be used in the semiconductor cleaning process.

• Applied Chemistry for Engineering
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• v.18 no.2
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• pp.188-193
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• 2007

Semi-solvent type cleaning agents were prepared by mixing naphthenes, natural terpene oil, surfactant and water, and measured their physical properties. And also, cleaning efficiency for flux and grease was measured by gravimetric method. By measuring the physical properties, pH for cleaning agents were 6.0~6.7, surface tension, 27.4~28.4 dyne/cm, and wetting index, 8.65~12.46 (with water), 11.99~17.43 (without water). The cleaning agent composed of naphthene, 30 wt%, natural terpene oil, 45 wt%, surfactant, 13 wt%, co-surfactant, 12 wt%, and water, 0 wt% had the largest wetting index, and shown the most effective cleaning properties for flux (98.66%) and grease (93.44%). The conductivity with $0.5{\sim}0.9{\mu}s/cm$ to the cleaning agent containing small amount of water was found to form W/O type microemulsion.

• Journal of Korean society of Dental Hygiene
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• v.14 no.6
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• pp.903-913
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• 2014

Objectives: The purpose of the study was to investigate the content analysis of daily tooth cleaning service records by caregivers in a long-term care facility. Methods: The data were analyzed by qualitative research based on content analysis of the daily records of the processes and results of daily tooth cleaning service. Twenty caregivers provided tooth, gum and denture cleaning service after breakfast, lunch, and dinner to 48 elderly residents. The study lasted about two weeks(from August 4 to August 20, 2014). The researcher reconstructed the language by repeatedly reviewing the caregivers statements in the records. The content categories were derived from the records through a reiterative manual comparative analysis. Using constant comparison method, reconstructed meanings were incorporated into various meanings and reanalyzed by final categories called as analytic coding. In order to validate the reliability, 6 times of discussion made the common meanings through a master's degree student and a dental hygiene professor. Results: The caregivers identified lack of understanding and ability to recognize the functional physical and mental changes in the elderly. The elderly had difficulty in recognizing silent communication and daily tooth cleaning. The caregivers were so strenuous in taking care of the daily tooth cleaning service for the elderly. At last, they gave up the daily tooth cleaning service and took on it to the guardians. They found that there was no social supporting network for oral health of the elderly residents. Conclusions: Caregivers had insufficient understanding of the functional physical and mental changes in the elderly residents, and they had difficulty providing daily tooth cleaning service to the elderly due to poor skill and abilities.

• Clean Technology
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• v.16 no.2
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• pp.103-116
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• 2010

It has been reported that the LCD panel market in the FPD industry is become growing and its panel size and production capacity are increasing, and its manufacturing technique is improved every year. FPD manufacturing process requires high cleanliness in its overall process. Especially, FPD cleaning process which accounts for 30~40% of total manufacturing process is very important in its technological and productivity aspects. It is difficult to remove residual liquid-crystal in the fine gap after liquid-crystal injection process in the cell. In this study, aqueous cleaning agents with excellent cleaning, rinsing, and penetrating abilities, but minimum ion content for LCD panel were formulated through mixing glycol ether-type and glycol dimethyl ether-type solvents and nonionic surfactants which are widely used as raw materials for alternative cleaning agents because of environmental regulation at home and abroad. And the formulated cleaning agents were applied to clean FPD liquid crystal after its injection in the cell. Physical properties, cleaning efficiencies, and rinsabilities of the formulated cleaning agents with different combination ratios of solvents, surfactants and additives were measured. As experimental results, the formulated cleaning agents showed higher wetting indices and cloud point than the traditional commercial cleaning agent. And it was found that cleaning efficiencies of the formulated cleaning agents were influenced by the structure of main solvents in them and the types of liquid crystal as soil for cleaning. The best cleaning agents among the formulated cleaning agents showed similar cleaning efficiencies and better rinsabilities compared to the conventional cleaning agent.