• Title/Summary/Keyword: Photo-mask

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반도체 세정액 내 용존 수소 가스가 웨이퍼 세정에 미치는 영향

  • Kim, Hyeok-Min;Gang, Bong-Gyun;Lee, Seung-Ho;Park, Jin-Gu;Choe, Eun-Seok;Kim, In-Jeong;Kim, Bong-U
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.05a
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    • pp.26.1-26.1
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    • 2009
  • 최근 반도체 세정에 있어서 지난 40년 동안 지속적으로 사용되고 있는 알칼라인 기반의 RCA 세정법은 많은 초순수 및 화학액 소모량과 세정시 불필요한 박막의 손실, 환경적인 문제로 인하여 이를 대체하고자 하는 새로운 새정액 및 세정 방법에 대한 연구가 활발하게 이루어지고 있다. 특히 초순수에 가스를 혼합하여 메가소닉을 이용한 기능수 세정은 기존 RCA 세정액의 문제점들을 해결하기 위한 세정액으로 최근 반도체 제조 공정 뿐만 아니라 Photo mask, FPD 세정 공정에서 널리 이용되고 있다. 하지만 기능수에 대한 기초적인 특성 연구와 메가소닉에 의한 세정력 변화에 대한 연구는 부족한 상태이다. 본 연구에서는 고순도의 수소가스(99.999%)를 가스 접촉기, pHasorII (Entigris, USA) 와 순환 속도의 조절이 가능한 펌프, BPS-3 (Levitronix, USA) 를 이용하여 지속적으로 초순수와 수소가스를 혼합하는 방법으로 수소수를 제조하였으며, 용존 수소 농도계, DHDI-1 (TOA-DKK, Japan)으로 수소수의 농도를 확인하였다. 0.1 MPa 압력과, 3 LPM의 수소가스 유출속도에서 최대 2.0 ppm의 수소수를 얻을 수 있었으며, 수소수의 기초 특성을 평가하기 위하여 수소 농도 변화에 따른 pH, 표면 에너지를 측정하였다. 또한 압력 변화에 따른 반감기를 측정하여 bath형태의 세정기에서 적용 가능성을 평가하였다. 수소수의 세정력은 $Si_3N_4$ 입자가 임의로 오염된 실리콘 웨이퍼를 이용하여 bath 및 매엽식 세정기에서 수소수 농도와 메가소닉 형태 및 첨가제 변화에 따른 세정효율을 기존의 SC-1 세정액과 각각 비교 평가하였다. 기능수 발생장치에서 압력이 제거된 상태에서는 평균 20분의 반감기를 갖는 것이 관찰되었고, 압력이 유지된 상태에서는 수소수의 농도가 유지되는 것을 확인하였으며, pH의 경우 수소수의 농도가 점차 증가함에 따라 감소하여 2.0 ppm의 농도에서 pH 5.3정도의 값을 나타내었다. 표면 장력은 초순수와 비교했을 때 큰 변화가 없음을 확인할 수 있었다. Bath 형태의 세정기에서 메가소닉을 인가하여 수소수의 세정효율을 측정한 결과, 같은 조건에서 실험한 초순수와는 비슷하며, SC-1보다는 낮은 세정효율이 측정되었다. 반면 매엽식 세정기에서 동등한 조건의 실험을 실시한 결과, 수소수 세정에서 첨가제에 의한 영향으로 SC-1을 대체할 수 있는 높은 입자 제거효율을 가짐을 확인할 수 있었다.

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Image Watermarking for Copyright Protection of Images on Shopping Mall (쇼핑몰 이미지 저작권보호를 위한 영상 워터마킹)

  • Bae, Kyoung-Yul
    • Journal of Intelligence and Information Systems
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    • v.19 no.4
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    • pp.147-157
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    • 2013
  • With the advent of the digital environment that can be accessed anytime, anywhere with the introduction of high-speed network, the free distribution and use of digital content were made possible. Ironically this environment is raising a variety of copyright infringement, and product images used in the online shopping mall are pirated frequently. There are many controversial issues whether shopping mall images are creative works or not. According to Supreme Court's decision in 2001, to ad pictures taken with ham products is simply a clone of the appearance of objects to deliver nothing but the decision was not only creative expression. But for the photographer's losses recognized in the advertising photo shoot takes the typical cost was estimated damages. According to Seoul District Court precedents in 2003, if there are the photographer's personality and creativity in the selection of the subject, the composition of the set, the direction and amount of light control, set the angle of the camera, shutter speed, shutter chance, other shooting methods for capturing, developing and printing process, the works should be protected by copyright law by the Court's sentence. In order to receive copyright protection of the shopping mall images by the law, it is simply not to convey the status of the product, the photographer's personality and creativity can be recognized that it requires effort. Accordingly, the cost of making the mall image increases, and the necessity for copyright protection becomes higher. The product images of the online shopping mall have a very unique configuration unlike the general pictures such as portraits and landscape photos and, therefore, the general image watermarking technique can not satisfy the requirements of the image watermarking. Because background of product images commonly used in shopping malls is white or black, or gray scale (gradient) color, it is difficult to utilize the space to embed a watermark and the area is very sensitive even a slight change. In this paper, the characteristics of images used in shopping malls are analyzed and a watermarking technology which is suitable to the shopping mall images is proposed. The proposed image watermarking technology divide a product image into smaller blocks, and the corresponding blocks are transformed by DCT (Discrete Cosine Transform), and then the watermark information was inserted into images using quantization of DCT coefficients. Because uniform treatment of the DCT coefficients for quantization cause visual blocking artifacts, the proposed algorithm used weighted mask which quantizes finely the coefficients located block boundaries and coarsely the coefficients located center area of the block. This mask improves subjective visual quality as well as the objective quality of the images. In addition, in order to improve the safety of the algorithm, the blocks which is embedded the watermark are randomly selected and the turbo code is used to reduce the BER when extracting the watermark. The PSNR(Peak Signal to Noise Ratio) of the shopping mall image watermarked by the proposed algorithm is 40.7~48.5[dB] and BER(Bit Error Rate) after JPEG with QF = 70 is 0. This means the watermarked image is high quality and the algorithm is robust to JPEG compression that is used generally at the online shopping malls. Also, for 40% change in size and 40 degrees of rotation, the BER is 0. In general, the shopping malls are used compressed images with QF which is higher than 90. Because the pirated image is used to replicate from original image, the proposed algorithm can identify the copyright infringement in the most cases. As shown the experimental results, the proposed algorithm is suitable to the shopping mall images with simple background. However, the future study should be carried out to enhance the robustness of the proposed algorithm because the robustness loss is occurred after mask process.

Development of a Small Gamma Camera Using NaI(T1)-Position Sensitive Photomultiplier Tube for Breast Imaging (NaI (T1) 섬광결정과 위치민감형 광전자증배관을 이용한 유방암 진단용 소형 감마카메라 개발)

  • Kim, Jong-Ho;Choi, Yong;Kwon, Hong-Seong;Kim, Hee-Joung;Kim, Sang-Eun;Choe, Yearn-Seong;Lee, Kyung-Han;Kim, Moon-Hae;Joo, Koan-Sik;Kim, Byuug-Tae
    • The Korean Journal of Nuclear Medicine
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    • v.32 no.4
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    • pp.365-373
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    • 1998
  • Purpose: The conventional gamma camera is not ideal for scintimammography because of its large detector size (${\sim}500mm$ in width) causing high cost and low image quality. We are developing a small gamma camera dedicated for breast imaging. Materials and Methods: The small gamma camera system consists of a NaI (T1) crystal ($60 mm{\times}60 mm{\times}6 mm$) coupled with a Hamamatsu R3941 Position Sensitive Photomultiplier Tube (PSPMT), a resister chain circuit, preamplifiers, nuclear instrument modules, an analog to digital converter and a personal computer for control and display. The PSPMT was read out using a standard resistive charge division which multiplexes the 34 cross wire anode channels into 4 signals ($X^+,\;X^-,\;Y^+,\;Y^-$). Those signals were individually amplified by four preamplifiers and then, shaped and amplified by amplifiers. The signals were discriminated ana digitized via triggering signal and used to localize the position of an event by applying the Anger logic. Results: The intrinsic sensitivity of the system was approximately 8,000 counts/sec/${\mu}Ci$. High quality flood and hole mask images were obtained. Breast phantom containing $2{\sim}7 mm$ diameter spheres was successfully imaged with a parallel hole collimator The image displayed accurate size and activity distribution over the imaging field of view Conclusion: We have succesfully developed a small gamma camera using NaI(T1)-PSPMT and nuclear Instrument modules. The small gamma camera developed in this study might improve the diagnostic accuracy of scintimammography by optimally imaging the breast.

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