• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2002년도 ICCAS
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• pp.55.4-55
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• 2002

In the semiconductor fabrication, particle contamination is wide-spread and one of major causes to yield loss. Extensive testing has revealed that even careful handling of wafers during processing may cause photo-resist materials to flake off wafer edges. So, to remove the photo-resist at the outer 5mm of wafers, UV(Ultraviolet) rays are exposed. WEE (Wafer Edge Exposure) process station is the system that exposes the wafer edge as prespecified by controlling the positioning mechanism and maintaining the light intensity level In this work, WEE process station has been designed so as to significantly lower the amount of particle contamination which occurs even during the most r...

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.193-193
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• 2012

In thin film silicon solar cells, p-i-n structure is adopted instead of p/n junction structure as in wafer-based Si solar cells. PECVD is the most widely used thin film deposition process for a-Si:H or ${\mu}c$-Si:H solar cells. Single-chamber PECVD system for a-Si:H solar cell manufacturing has the advantage of lower initial investment and maintenance cost for the equipment. However, in single-chamber PECVD system, doped and intrinsic layers are deposited in one plasma chamber, which inevitably impedes sharp dopant profiles at the interfaces due to the contamination from previous deposition process. The cross-contamination between layers is a serious drawback of single-chamber PECVD system. In this study, a new plasma process to solve the cross-contamination problem in a single-chamber PECVD system was suggested. In order to remove the deposited B inside of the plasma chamber during p-layer deposition, a high RF power was applied right after p-layer deposition with SiH4 gas off, which is then followed by i-layer, n-layer, and Ag top-electrode deposition without vacuum break. In addition to the p-i interface control, various interface control techniques such as FTO-glass pre-annealing in O2 environment to further reduce sheet resistance of FTO-glass, thin layer of TiO2 deposition to prevent H2 plasma reduction of FTO layer, and hydrogen plasma treatment prior to n-layer deposition, etc. were developed. The best initial solar cell efficiency using single-chamber PECVD system of 10.5% for test cell area of 0.2 $cm^2$ could be achieved by adopting various interface control methods.

• 전력전자학회논문지
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• 제19권6호
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• pp.538-548
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• 2014

This study provides a robust control of a grid-connected three-phase two-level photo voltaic inverter. The introduced control method uses the cascade control strategy to regulate AC-side current and DC-link voltage. A robust controller with integration action is used for the inner-loop AC-side current control, which maximizes the convergence rate using a linear matrix inequality-based optimization design method and eliminates the offset error. The robust controller design method considers the parameter uncertainty set to accommodate parameter mismatch and un-modeled components in the inverter model. An outer-loop proportional-integral controller is used to regulate DC-link voltage with linearization of DC/AC relation. The proposed control strategy is applied to a grid-connected 100 kW photo voltaic inverter.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2006년도 하계종합학술대회
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• pp.1015-1016
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• 2006

The important parameters deciding the fluctuation of Accumulation style surgical operation of ventriculus laser beam are smoothing capacitor, frequency and he characteristics of laser resonator. In this thesis, we control the fluctuation of medical $CO_2C$ laser in realtime by changing Duty-Ratio of IGBT and switching frequency with fixed the smoothing capacitor to improve the fluctuation of laser beam. We detect the light on laser resonator using a CdS photo sensor to improve ripple factor of laser beam and feedback fluctuated signals refined by a band pass filter into the control circuit to stabilize fluctuation actively. There is much to be desired in the realtime controlling technique of the light on Accumulation style surgical operation of ventriculus laser discharge tube in electrical signal. We propose switching control technique with microprocessor and photo sensing technique by controlling switch devices optimum operation and feedback signals detected by a photo sensor into the laser power supply in order to improve ripple factor of the $CO_2$ laser beam.

• 조명전기설비학회논문지
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• 제18권6호
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• pp.14-21
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• 2004

본 논문에서는 평지, 오르막 및 내리막에서 야간 운전할 때에 생기는 눈부심에 대해 헤드라이트를 자동 조절하여 운전자가 안전하게 운전을 할 수 있는 알고리즘을 제안하였다. 먼저 광센서를 이용해 전방에 차량이 접근하는지의 유무를 판단하고 기울기센서로써 차량의 기울어진 정도를 계속적으로 판단하도록 하였다. 이러한 정보를 이용하여 헤드라이트를 조절하는 서보모터를 제어함으로써 현 운행환경조건에 맞도록 조절할 수 있도록 하였다. 본 논문에서 제안한 헤드라이트 자동조절시스템은 평지 및 경사로에서 실제로 측정한 조도량에 대한 데이터를 바탕으로 하여 제작되었고, 테스트 모델에 의해 얻은 실험결과를 통해 환경과 조건에 따라 제대로 작동하고 효과가 있음을 확인하였고, 따라서 본 알고리즘의 유효성을 증명하였다.

• KIEE International Transactions on Electrophysics and Applications
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• 제11C권4호
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• pp.133-137
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• 2001

In this research, we synthesized various photo-crosslinkable polyimide based polymers. The control of pretilt angles for a nematic liquid crystal (NLC) using the photodimerization method on the photopolymers was studied. A good thermal stability of the photopolymers was measured by thermogravimetric analysis (TGA) measurement until 450C. High pretilt angles of the NLC were otained by polarized UV exposure on the photopolymers containing biphenyl (BP), decyl (de), and cholesteryl (chal) groups, respectively. However, low pretilt angles of the NLC were measured by polarized UV exposure on the photopolymers containing fluorine and chalcone groups. The high NLC pretilt angles generated are attributable to the biphenyl and alkyl moieties, and the photodimerized chalocone group of the photopolymers. Additionally, good voltage-transmittance and response time characteristics were observed by UV exposure on the photopolymers.

• 제어로봇시스템학회논문지
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• 제21권2호
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• pp.157-161
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• 2015

For machining systems having a high precision positioning with a long stroke, it is necessary to examine the repeatability of reference position decisions. Though ball-screw driven linear stages equipped with encoders have high precision feed drivers and a long stroke, they have some limitations for reference position decisions if they have not been equipped accurate home sensors. High precision machining technology has become one of the most important aspects of the development of a precision machine. Such a machine requires high precision positioning as well as high speed on a large workspace. This study is performed to experimentally compare the repeatability for home position decisions in the case of photo sensors and hall sensors as a home switch of the ball-screw driven linear stage.

• 한국전기전자재료학회논문지
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• 제14권4호
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• pp.341-344
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• 2001

We synthesized a photo-crosslinkable polymide (polymide (PI)-chalcone-biphenyl (BP)) based polymer and control of pretilt angle for a nematic liquid crystal (NLC) using two kinds of the photodimerization methods by polarized UV exposure the photopolymer surfaces was studied. Pretilt angle of the NLCs using a conventional photodimerization method could be varied between 0$^{\circ}$ and 3$^{\circ}$, by controlling the condition of UV exposure. Pretilt angle of the NLCs using the conventional photodimerization method was higher than a in-situ photodimerization method.

• 대한의용생체공학회:학술대회논문집
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• 대한의용생체공학회 1995년도 추계학술대회
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• pp.18-21
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• 1995

When we inject drugstuffs to a patient for a long time, it is important to control proper injection amount and flow rate. Since inproper injection amount and a flow rate would cause bad a recovery a patient, the relience of sensors which detect injection amount is an important factor for whole injection systems' performance. In this research, we've compared the suitability of three sensors for injection pump monitoring system. The three types of sensors, piezo film sensor, photo transistor made up with three transmitting photodiodes and receving photodiode, and photo array, were selected for comparing. Using suggested data processing technique and photo amy sensors, we could minimize the effect of interference, disturbance, illumanation change, and sensitivity change caused by sensor's position. According to the experiments, the photo amy showed the higher reliance than any other the three types of sensors. The developed systems could be the foundation of beginning home production of infusion pump system and available for the base model of whole monitoring and control systems.

• Journal of Electrical Engineering and Technology
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• 제9권3호
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• pp.1072-1079
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• 2014

This paper introduces a coordinated droop control for the stand-alone DC micro-grid, which is composed of photo-voltaic generator, wind power generator, engine generator, and battery storage with SOC (state of charge) management system. The operation of stand-alone DC micro-grid with the coordinated droop control was analyzed with computer simulation. Based on simulation results, a hardware simulator was built and tested to analyze the performance of proposed system. The developed simulation model and hardware simulator can be utilized to design the actual stand-alone DC micro-grid and to analyze its performance. The coordinated droop control can improve the reliability and efficiency of the stand-alone DC micro-grid.