• 한국재료학회지
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• 제3권1호
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• pp.3-6
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• 1993

Gd박막의 강자성-상자성 상전이 온도(Tc)이동을 조사했다. 강자성-상자성 상전이 온도에서 전기저항이 변화되는 변곡점을 관측하여 Tc를 결졍하였는데, 두께가 6600$\AA$인 Gd박막의 상전이 온도는 bulk상태의 Gd의 전이온도보다 4$\pm$0.$3^{\circ}C$정도 아래로 이동됨을 알았다. 이것은 강자성 Gd박막의 Tc이동에 대한 최초의 측정이며, 실험과 finite-sime scaling이론을 비교 분석했다.

• 한국정밀공학회지
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• 제26권7호
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• pp.65-72
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• 2009

Laser interferometry is widely used as a measuring system in many fields because of its high resolution and its ability to measure a broad area in real-time all at once. In conventional laser interferometry, for example out-of-plane ESPI (Electronic Speckle Pattern Interferometry), in plane ESPI, shearography and holography, it uses PZT or other components as a phase shift instrumentation to extract 3-D deformation data, vibration mode and others. However, in most cases PZT has some disadvantages, which include nonlinear errors and limited time of use. In the present study, a new type of laser interferometry using a laser diode is proposed. Using Laser Diode Sinusoidal Phase Modulating (LD-SPM) interferometry, the phase modulation can be directly modulated by controlling the laser diode injection current thereby eliminating the need for PZT and its components. This makes the interferometry more compact. This paper reports on a new approach to the LD (Laser Diode) Modulating interferometry that involves four-frame phase shift method. This study proposes a four-frame phase mapping algorithm, which was developed to have a guaranteed application, to stabilize the system in the field and to be a user-friendly GUI. In this paper, the theory for LD wavelength modulation and sinusoidal phase modulation of LD modulating interferometry is shown. Using modulating laser and research of measurement algorithm does comparison with existent ESPI measurement algorithm. Algorithm measures using GPIB communication through most LabVIEW 8.2. GPIB communication does alteration through PC. Transformation of measurement object measures through modulating laser algorithm that develops. Comparison of algorithm of modulating laser developed newly with existent PZT algorithm compares transformation price through 3-D. Comparison of 4-frame phase mapping, unwrapping, 3-D is then introduced.

• Current Optics and Photonics
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• 제1권5호
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• pp.505-513
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• 2017

Measuring the thickness of thin films is strongly required in the display industry. In recent years, as the size of a pattern has become smaller, the substrate has become larger. Consequently, measuring the thickness of the thin film over a wide area with low spatial sampling size has become a key technique of manufacturing-yield management. Interferometry is a well-known metrology technique that offers low spatial sampling size and the ability to measure a wide area; however, there are some limitations in measuring the thickness of the thin film. This paper proposes a method to calculate the thickness of the thin film in the following two steps: first, pre-estimation of the thickness with the phase at the peak position of the interferogram at the bottom surface of the thin film, using white-light phase-shift interferometry; second, accurate correction of the measurement by fitting the interferogram with the theoretical pattern through the estimated thickness. Feasibility and accuracy of the method has been verified by comparing measured values of photoresist pattern samples, manufactured with the halftone display process, to those measured by AFM. As a result, an area of $880{\times}640$ pixels could be measured in 3 seconds, with a measurement error of less than 12%.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.277-281
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• 2004

The following paper proposes the new design of digital sine wave generator which allows users to define the phase shift of the out put sinewave according to user's demands. This new sinewave generator will have 2 outputs, cos(${\omega}_0n$) and cos(${\omega}_0n$+${\phi}$) The design of the new system starts from the construction of discrete time system with impulse response as cos(${\omega}_0n$) in a pair of conjugate complex poles and a pair of zeros at the origin and the real axis. If users want to make a phase shift of sign wave, users can change the position of zero at the real axis. The results of the experiment have shown that the new design of sign wave generator has generated sine wave with the correct phase shift according to the theory.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.195.1-195.1
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• 2016

Currently, as Plasma application is expanded to the industrial and medical industrial, low temperature plasma applications became important. Especially in medical and biology, many researchers have studied about generated radical species in atmospheric pressure low temperature plasma directly adapted to human body. Therefore, so measurement their plasma parameter is very important work and is widely studied all around world. One of the plasma parameters is electron density and it is closely relative to radical production through the plasma source. some kinds of method to measuring the electron density are Thomson scattering spectroscopy and Millimeter-wave transmission measurement. But most methods have very expensive cost and complex configuration to composed of experiment system. We selected Michelson interferometer system which is very cheap and simple to setting up, so we tried to measuring electron density by laser interferometer with laser beam chopping module for measurement of temporal phase difference in plasma jet. To measuring electron density at atmospheric pressure Ar plasma jet, we obtained the temporal phase shift signal of interferometer. Phase difference of interferometer can occur because of change by refractive index of electron density in plasma jet. The electron density was able to estimate with this phase difference values by using physical formula about refractive index change of external electromagnetic wave in plasma. Our guiding laser used Helium-Neon laser of the centered wavelength of 632 nm. We installed chopper module which can make a 4kHz pulse laser signal at the laser front side. In this experiment, we obtained more exact synchronized phase difference between with and without plasma jet than reported data at last year. Especially, we found the phase difference between time range of discharge current. Electron density is changed from Townsend discharge's electron bombardment, so we observed the phase difference phenomenon and calculated the temporal electron density by using phase shift. In our result, we suggest that the electron density have approximately range between 1014~ 1015 cm-3 in atmospheric pressure Ar plasma jet.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.140.1-140.1
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• 2015

Currently, As Plasma application is expanded to the industrial and medical industrial, Low temperature plasma characteristics became important. Especially in Medical industrial, Low temperature plasma directly adapted to human skin, so their plasma parameter is important. One of the plasma parameters is electron density, some kinds of method to measuring electron density are Thomson scattering spectroscopy and Millimeter-wave transmission measurement. But most methods is expensive to composed of experiment system. Heterodyne interferometer system is cheap and simple to setting up, So we tried to measuring electron density by Laser heterodyne interferometer. To measuring electron density at atmospheric pressure, we need to obtain the phase shift signal. And we use a heterodyne interferometer. Our guiding laser is Helium-Neon laser which generated 632 nm laser. We set up to chopper which can make a laser signal like a pulse. Chopper can make a 4 kHz chopping. We used Needle jet as Ne plasma sources. Interference pattern is changed by refractive index of electron density. As this refractive index change, phase shift was occurred. Electron density is changed from Townsend discharge's electron bombardment, so we observed phenomena and calculated phase shift. Finally, we measured electron density by refractive index and electron density relationship. The calculated electron density value is approximately 1015~1016 cm-3. And we studied electron density value with voltage.

• ETRI Journal
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• 제35권1호
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• pp.150-153
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• 2013

In this letter, a compact and fully printed composite right- and left-handed (CRLH) dual-band power divider is proposed. The branches of the conventional Wilkinson power divider are replaced by subwavelength CRLH phase-shift lines having $+90^{\circ}$ for one frequency and $-90^{\circ}$ for another frequency for dual-band and miniaturization performance. Equations are derived for the even- and odd-mode analysis combined with the dual-band CRLH circuit. A PCS and a WLAN band are chosen as the test case and the circuit approach agrees with the CAD simulation and the measurement. Additionally, the CRLH property is shown with the dispersion diagram and the eightfold size reduction is noted.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2011년도 제42회 하계학술대회
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• pp.1784-1785
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• 2011

PS(Phase Shift) 방식을 이용하여 3차원 이미지 형상복원 시스템을 구현하였다. PS 방식은 위상을 이동시켜서 얻어진 강도를 arctan 시킴으로써 $-{\pi}{\sim}{\pi}$ 범위의 접혀진(wrapped) 위상을 얻을 수 있으며, 이러한 wrapped 위상을 위상 펼침(unwrapping) 알고리즘을 이용하여 불연속을 제거할 수 있다. 얻어진 위상 정보는 물체의 높이 정보에 비례하기 때문에 위상 분포로써 3차원 형상을 복원할 수 있다. Unwrapping 알고리즘에는 다양한 방식이 있지만 본 연구에서는 LabVIEW 프로그램을 이용하여 Goldstein 알고리즘을 구현하였으며, 감마(Gamma) 효과에 의한 노이즈를 줄이기 위하여 프로젝트와 카메라의 보정(calibration) 프로그램을 개발 및 적용하였다. 이와 같은 실험을 통하여 효과적으로 3차원 형상 정보를 얻을 수 있었다.

• 전기학회논문지
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• 제58권4호
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• pp.795-800
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• 2009

Surface plasmon resonance (SPR) has been widely used for biological and chemical sensing applications. The present study investigates numerically the optical characteristics for the single Au film and bimetallic Ag/Au film SPR configurations by using the multiple beam interference matrix (MBIM) method. We use the prism coupling method, especially Kretschmann configuration for excitation of surface plasmon wave (SPW). The estimated results of reflectance, phase shift and magnetic field intensity enhancement factor are provided for finding out the optimum configuration with high sensitivity for SPR measurement. As a result, the optimum thicknesses are found to be 52 nm for a single Au film and 5 nm to 36 nm for bimetallic Ag-Au film. From the comparison of full width half maximum (FWHM) values for reflectance, phase shift, and enhancement of magnetic field intensity, it is concluded that the highest sensitivity can be obtained when using the phase shift for SPR sensor.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.271-274
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• 2002

The 3-D measurement using interference pattern projection is very attractive because of its high measuring speed and high sensitivity. When a sinusoidal amplitude grating was projected on an object, the surface-height distribution of the object is translated into a phase distribution of the deformed grating image. The patters was generated by a interferometer, and a PZT was used to shift the fringes on the target surface. The phase-acquisition algorithms are so sufficiently simple that high-resolution phase maps using a CCD camera can be generated in a short time. A working system requires a interferometer, a PZT, and a detector array interfaced to a microcomputer. Results of measurements on the diffused test objects are described.