The Study of Silica Surface Reaction with Fluorocarbon Plasma Using Inductively Coupled Plasma (Inductively Coupled Plasma에 의한 fluorocarbon 가스 플라즈마의 실리카 표면 반응 연구)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.11 no.6
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- pp.472-476
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- 1998