• Title/Summary/Keyword: Permalloy

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Dispersion Method of Silica Nanopowders for Permalloy Composite Coating (퍼멀로이 합금도금을 위한 나노실리카 분산방법에 관한 연구)

  • Park, So-Yeon;Jung, Myung-Won;Lee, Jae-Ho
    • Journal of the Microelectronics and Packaging Society
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    • v.18 no.4
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    • pp.39-42
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    • 2011

  • The composite electroplating is accomplished by adding inert materials during the electroplating. Permalloy is the term for Ni-Fe alloy and it is used for industrial applications due to its high magnetic permeability, surface wear resistance, corrosion protection. Microhardness for microdevices is enhanced after composite coating and it increases the life cycle. However, the hydroxyl group on the silica makes their surface susceptible to moisture and it causes the silica nanoparticles to be agglomerated in the aqueous solution. The agglomeration problem causes poor dispersion which eventually interrupts uniform deposition of silica nanoparticles. In this study, the dispersion of silica nanoparticles in the permalloy electroplated layer is reported with variation of additives and current densities. The optimum current density was 20 $mA/cm^2$ and the silica content was 9 at% at $50^{\circ}C$. The amount of silica nanopowder codeposition and surface morphologies were influenced with variation of additives. In the bath, smooth surface morphology and relatively high contents of silica nanopowder codeposition were obtained with addition of sodium lauryl sulfate.

  • https://doi.org/10.6117/kmeps.2011.18.4.039 인용 PDF KSCI