• Title/Summary/Keyword: Patterning method

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Comparison of the Existing Wet Etching and the Dry Etching with the ICP Process Method (새로운 ICP 장치를 이용한 고온 초전도체의 Dry Etching과 기존의 Wet Etching 기술과의 비교)

  • 강형곤;임성훈;임연호;한윤봉;황종선;한병성
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.2
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    • pp.158-162
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    • 2001
  • In this report, a new process for patterning of YBaCuO thin films, ICP(inductively coupled plasma) method, is described by comparing with existing wet etching method. Two 100㎛ wide and 2mm long YBaCuO striplines on LaAlO$_3$ substrates have been fabricated using two patterning techniques. And the properties were compared with the critical temperature and the SEM photography. Then, the critical temperatures of two samples were about 88 K, but the cross section of sample using ICP method was shaper than that using the wet etching method. ICP method can be used as a good etching technique process for patterning of YBaCuO superconductor.

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A Study on the Shape Finding and Patterning Procedures for Membrane Structures (막구조의 초기형상 및 재단도 결정알고리즘에 관한 연구)

  • 한상을;이경수;이상주;유용주
    • Proceedings of the Computational Structural Engineering Institute Conference
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    • 1998.10a
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    • pp.298-305
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    • 1998
  • The purpose of this study is to propose the method of determining the initial fabric membrane structures surface and membrane patterning procedures. Tension structure, such as, fabric membrane structures and cable-net, is stabilized by their initial prestress and boundary condition. The process to find initial structural overall shape of tension structures produced by initial prestress called Shape Finding or Shape Analysis. One of the most important factor for the design of membrane structures is to search initial smooth surface, because unlike steel or concrete building elements which resist loads in bending, all tension structure forces are carried within the surface by membrane stress or cable tension. To obtain initial surface of fabric membrane element in large deformation analysis, the membrane element is idealized as cable using a technique with Force-density method. and that result is compared with well-known nonlinear numerical method, such as Newton-raphson method and Dynamic relaxation method. The shape resulting from Force-density method has been dealt with as the initial membrane shape and used patterning procedures.

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Fabrication of High-Resolution Pixels in Organic Light-Emitting Displays Using Laser-Inscribed Sacrificial Layer

  • Choi, Won-Suk;Kim, Min-Hoi;Na, Yu-Jin;Koo, Kyung-Mo;Lee, Sin-Doo
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.755-757
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    • 2009
  • We developed a novel patterning method of organic light emitting materials using a laser-inscribed sacrificial layer for fabricating high-resolution pixels in organic light emitting displays (OLEDs). Our patterning process is capable of achieving high spatial resolution of about 10 ${\mu}m$. Moreover, it has no detrimental effect on the electrical properties of organic materials. This patterning approach is expected to be applicable for patterning and integrating a wide range of organic materials for organic electronic and optoelectronic devices.

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Geodesic shape finding of membrane structure with geodesic string by the dynamic relaxation method

  • Lee, K.S.;Han, S.E.
    • Structural Engineering and Mechanics
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    • v.39 no.1
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    • pp.93-113
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    • 2011
  • The explicit nonlinear dynamic relaxation method (DRM) is applied to the nonlinear geodesic shape finding analysis by introducing fictional tensioned 'strings' along the desired seams with a three or four-node membrane element. A number of results from the numerical example for the nonlinear geodesic shape finding and patterning analysis are obtained by the proposed method to demonstrate the accuracy and efficiency of the developed method. Therefore, the proposed geodesic shape finding algorithm may improve the applicability of a four-node membrane element to membrane structural engineering and design analysis simultaneously for the shape finding, stress, and patterning analysis.

Soft Lithography of Graphene Sheets Via Surface Energy Modification

  • Kim, Hansun;Jung, Min Wook;Myung, Sung;Jung, Daesung;Lee, Sun Sook;Kong, Ki-Jeong;Lim, Jongsun;Lee, Jong-Heun;Park, Chong Yun;An, Ki-Seok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.144.2-144.2
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    • 2013
  • With the synthesis of graphene sheets as large-scale and high quality, it is essentially important to develop suitable graphene patterning process for future industrial applications. Especially, transfer or patterning method of CVD-grown graphene has been studied. We report simple soft lithographic process to develop easily applicable patterning method of large-scale graphene sheets by using chemically functionalized polymer stamp. Also important applications, the prototype capacitors with graphene electrode and commercial polymer dielectrics for the electrostatic-type touch panel are fabricated using the developed soft lithographic patterning and transfer process.

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Implementation of High Performance Micro Electrode Pattern Using High Viscosity Conductive Ink Patterning Technique (고점도 전도성 잉크 패터닝 기술을 이용한 고성능 미세전극 패턴 구현)

  • Ko, Jeong Beom;Kim, Hyung Chan;Dang, Hyun Woo;Yang, Young Jin;Choi, Kyung Hyun;Doh, Yang Hoi
    • Journal of the Korean Society for Precision Engineering
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    • v.31 no.1
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    • pp.83-90
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    • 2014
  • EHD (electro-hydro-dynamics) patterning was performed under atmospheric pressure at room temperature in a single step. The drop diameter smaller than nozzle diameter and applied high viscosity conductive ink in EHD patterning method provide a clear advantage over the piezo and thermal inkjet printing techniques. The micro electrode pattern was printed by continuous EHD patterning method using 3-type control parameters (input voltage, patterning speed, nozzle pressure). High viscosity (1000cps) conductive ink with 75wt% of silver nanoparticles was used. EHD cone type nozzle having an internal diameter of $50{\mu}m$ was used for experimentation. EHD jetting mode by input voltage and applied 1st order linear regression in stable jet mode was analyzed. The stable jet was achieved at the amplitude of 1.4~1.8 kV. $10{\mu}m$ micro electrode pattern was created at optimized parameters (input voltage 1.6kV, patterning speed 25mm/sec and nozzle pressure -2.3kPa).

Laser Stream Patterning Improvement for Gravure Printing (그라비아 인쇄를 위한 Laser Stream Patterning 개선)

  • Ahn T. Y.;Kim H. G.;Lee D. H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2001.10a
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    • pp.186-189
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    • 2001
  • The main method in micro-etching process, used in manufacturing semiconductors, electronic components, circuits, is Photo Masking method that exposes and develops on the photo-sensitivity solutions or films. This method enables one to process highly precisely, $\pm$0.03 mm in end line location area. But this has limits in a high speed / wide width process, difficulties in endless masking, and the problem of high price. We have developed the direct masking method to make use of Gravure printing, widely used in grocery packing sheet printing. We made cylinder tools to influence the masking quality by laser stream process. We have confirmed that the end line location accuracy in the line width of the product is improved from 0.12 mm to $\pm$0.07 mm level, after etching process.

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The Investigation of Photolithographic Patterning Method for Polymer Light Emitting Diodes

  • Kim, Mi-Kyung;Lee, Jeong-Ik;Kim, Duck-Il;Oh, Ji-Young;Hwang, Chi-Sun;KoPark, Sang-He;Yang, Yong-Suk;Chu, Hye-Yong;Kim, Suk-Kyung;Hwang, Do-Hoon;Lee, Hyung-Jong
    • 한국정보디스플레이학회:학술대회논문집
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    • 2004.08a
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    • pp.592-594
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    • 2004
  • We have investigated the photolithographic patterning method of light emitting polymer film for polymer light emitting diodes (PLEDs). Blue light emitting polymers based on polyfluorene, which can be cured photochemically to yield an insoluble form, have been synthesized using Ni(0) mediated Yamamoto polymerization. The relationship between patterning property and several variables such as the intensity of the exposed UV light, the concentrations of additives, has been studied by using optical microscope analysis, UV/visible spectroscopy, and photoluminescence. We have successfully fabricated PLEDs composed of the patterned emissive layer and their electroluminescence property has been also investigated. In this presentation, the detailed photolithographic patterning method and its application for polymer light emitting display will be discussed.

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Facile Cell Patterning Based on Selectively Patterned Polydimethylsiloxane (PDMS) and Polyelectrolyte Surface (PDMS와 고분자 전해질 표면을 이용한 간편한 세포 패터닝 방법)

  • Jeong, Heon-Ho;Song, Hwan-Moon;Hwang, Ye-Jin;Hwang, Taek-Sung;Lee, Chang-Soo
    • KSBB Journal
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    • v.24 no.6
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    • pp.515-520
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    • 2009
  • This study presented facile method of cell patterning using fabricated PDMS patterns on polyelectrolyte coated surface. This basic principle is the fabrication of functional surface presenting two orthogonal surfaces such as cell adhesive and repellent properties. Cell adhesive surface was firstly fabricated with simple coating of polyelectrolyte multilayer. And then, the desired patterns of PDMS for the prevention of nonspecific binding of cells were transferred onto the previously formed thin film of polyelectrolyte multilayer. Thus, we could prepare novel functional surface simultaneously containing PDMS and polyelectrolyte region. As expected, the PDMS regions showed effective prevention of nonspecific binding of cell and the other region, exposed polyelectrolyte area, provided cell adhesive environment. The height of formed PDMS structure was about 100 nm. Based on this method, cell patterning can be successfully obtained with various pattern shapes and sizes. Therefore, we expect that this simple method will be useful platform technology for the development of cell chip, cell based assay system, and biochip.