• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.108-108
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• 2016

마그네트론 스퍼터링은 박막의 증착에 널리 사용되는 기술로 음극의 설계가 핵심적이다. 영구 자석과 전자석을 겸용하는 경우도 있고 고주파 코일을 추가하여 2차 플라즈마 발생을 유도하여 공정의 유연성을 한층 높인 방법도 오랫동안 사용되어 왔다. 전자의 자기장 하에서의 운동은 Lorentz force를 적분하여 예측할 수 있으며 가장 중요한 전자 - 중성간의 충돌 과정인 탄성 충돌, 여기 충돌, 이온화 충돌을 고려하면 보다 실질적인 마그네트론 플라즈마의 거동을 이해하고 그 결과를 기반으로 자석 배치를 설계할 수 있다. PIC (particle-in-cell) code를 이용하면 플라즈마 내의 전자기장 효과를 상세히 검증해볼 수 있지만 계산 시간의 부담 때문에 고성능 병렬 컴퓨터를 사용하여야 한다. 그 이유는 하전입자(전자, 이온)의 공간적인 분포에 변화가 발생하면 전위가 영향을 받고 전자의 가속이 발생하는 쉬스(sheath)의 두께가 따라서 변화하기 때문이다. 여기서 계산 시간의 단축을 위한 가정, 즉, 쉬스의 두께가 일정하다는 사실을 적용하면 계산시간을 획기적으로 단축 시킬 수 있으며 병렬 계산의 효율성도 향상시킬 수 있다. 본 연구에서는 이와 같은 원리에 입각한 코드를 개발하고 평판 디스플레이용 사각형 음극에 대해서 적용했던 경험을 바탕으로 원형의 스캔형 마그네트론 음극 구조의 이해와 설계에 적용하고자 코드를 개발하였다.

• Journal of the Semiconductor & Display Technology
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• v.17 no.1
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• pp.76-83
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• 2018

The electron energy probability function (EEPF) is of significant importance since the plasma chemistry such as the rate of ionization is determined by the electron energy distribution function. It is usually assumed to be Maxwell distribution for 0-D global model. Meanwhile, it has been observed experimentally that the form of EEPF of Ar plasma changes from being two-temperature to Druyvesteyn like as the gas pressure increases. Thus, to apply the 0-D global model of Maxwellian distribution to the non-Maxwellian plasma, we investigated the relative contribution of two distinct electrons with different temperatures. The contributions of cold/hot electrons to the equilibrium state of the plasma have attracted interest and been researched. The contributions to the power and particle balance of cold/hot electrons were studied by comparing the result of the global model considering all combinations of electron temperatures with that of 1-D Particle-in-Cell and Monte Carlo collision (PIC-MCC) simulation and the results of studies were analyzed physically. Furthermore, comparisons term by term for variations of the contribution of cold/hot electrons at different driving currents are presented.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.310-311
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• 2011

Dual-frequency (DF) capacitively coupled plasmas (CCP) are used to separately control the mean ion energy and flux at the electrodes [1]. This separate control in capacitively coupled radio frequency discharges is one of the most important issues for various applications of plasma processing. For instance, in the Plasma Enhanced Chemical Vapor Deposition processes such as used for solar cell manufacturing, this separate control is most relevant. It principally allows to increase the ion flux for high deposition rates, while the mean ion energy is kept constant at low values to prevent highly energetic ion bombardment of the substrate to avoid unwanted damage of the surface structure. DF CCP can be analyzed in a fashion similar to single-frequency (SF) driven with effective parameters [2]. It means that DF CCP can be converted into SF CCP with effective parameters such as effective frequency and effective current density. In this study, comparison of DF CCP and its converted effective SF CCP is carried out through particle-in-cell/Monte Carlo (PIC-MCC) simulations. The PIC-MCC simulation shows that DF CCP and its converted effective SF CCP have almost the same plasma characteristics. In DF CCP, the negative resistance arises from the competition of the effective current and the effective frequency [2]. As the high-frequency current increases, the square of the effective frequency increases more than the effective current does. As a result, the effective voltage decreases with the effective current and it leads to an increase of the ion flux and a decrease of the mean ion energy. Because of that, the negative resistance regime can be called the preferable regime for solar cell manufacturing. In this preferable regime, comparison of DF (13.56+100 or 200 MHz) CCP and SF (60 MHz) CCP with the same effective current density is carried out. At the lower effective current density (or at the lower plasma density), the mean ion energy of SF CCP is lower than that of DF CCP. At the higher effective current density (or at the higher plasma density), however, the mean ion energy is lower than that of SF CCP. In this case, using DF CCP is better than SF CCP for solar cell manufacturing processes.

• The Bulletin of The Korean Astronomical Society
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• v.37 no.2
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• pp.101.2-101.2
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• 2012

Shocks are ubiquitous in astrophysical plasmas: bow shocks are formed by the interaction of solar wind with planetary magnetic fields, and supernova explosions and jets produce shocks in interstellar and intergalactic spaces. The global morphologies of these shocks are usually described by a set of magnetohydrodynamic (MHD) equations which tacitly assumes local thermal equilibrium, and the resulting Rankine-Hugoniot shock jump conditions are applied to obtain the relationship between the upstream and downstream physical quantities. While thermal equilibrium can be achieved easily in collisional fluids, it is generally believed that collisions are infrequent in astrophysical settings. In fact, shock widths are much smaller than collisional mean free paths and a variety of kinetic phenomena are seen at the shock fronts according to in situ observations of planetary shocks. Hence, both the MHD and kinetic equations have been adopted in theoretical and numerical studies to describe different aspects of the physical phenomena associated with astrophysical shocks. In this paper, we present the results of 3D relativistic particle-in-cell (PIC) simulations for ion-electron plasmas, with focus on the shock structures: when a jet propagates into an unmagnetized ambient plasma, a shock forms in the nonlinear stage of the Weibel instability. As the shock shows the structures that resemble those predicted in MHD systems, we compare the results with those predicted in the MHD shocks. We also discuss the thermalization processes of the upstream flows based on the time evolutions of the phase space and the velocity distribution, as well as the wave spectra analyses.

• Bulletin of the Korean Space Science Society
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• 2007.10a
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• pp.139-143
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• 2007

Electric propulsion has become a cost effective and sound engineering solution for many space applications. The success of SMART-1 and MUSES-C developed by European Space Agency (ESA) and Japan Aerospace Exploration Agency (JAXA) each proved that even small spacecraft could accomplish planetary mission with electric propulsion systems. A small electric propulsion system which is Hall effect thruster like SMART-1 is under development by SaTReC and GDPL (Glow Discharge Plasma Lab.) in KAIST for the next microsatellite, STSAT-3. To achieve optimized propulsion system, it is very necessary to understand plasma motions of Hall effect thruster. In this paper, we try to approach comprehensive plasma model with the particle simulation complementary to Particle In Cell (PIC) simulation. We think these two different approaches will help experimenters to optimize Hall effect thruster performances.

• The Bulletin of The Korean Astronomical Society
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• v.44 no.2
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• pp.55.2-55.2
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• 2019

The firehose instability is driven by a pressure anisotropy in a magnetized plasma when the temperature along the magnetic field is higher than the perpendicular temperature. Such condition occurs commonly in astrophysical and space environments, for instance, when there are beams aligned with the background magnetic field. Recently, it was argued that, in weak quasi-perpendicular shocks in the high-β intracluster medium (ICM), shock-reflected electrons propagating upstream cause the temperature anisotropy. This electron temperature anisotropy can trigger the electron firehose instability (EFI), which excites oblique waves in the shock foot. Scattering of electrons by these waves enables multiple cycles of shock drift acceleration (SDA) in the preshock region, leading to the electron injection to diffusive shock acceleration (DSA). In the study, the kinetic properties of the EFI are examined by the linear stability analysis based on the kinetic Vlasov-Maxwell theory and then further investigated by 2D Particle-in-Cell (PIC) simulations, especially focusing on those in high-β (β~100) plasmas. We then discuss the basic properties of the firehose instability, and the implication of our work on electron acceleration in ICM shock.

• The Bulletin of The Korean Astronomical Society
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• v.37 no.1
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• pp.93.1-93.1
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• 2012

In this study, we investigated the generation of consecutive electrostatic solitary waves (ESWs) using by one-dimensional electrostatic particle-in-cell (PIC) simulation. For a given Gaussian perturbation, it is found that electron two-stream instability occurs in local grids region. Thus because of this instability, the electrostatic potential grows rapidly so as to be separated into electron and ion in perturbation region, and then electrons are trapped with heating during growing instability. It is found that these heated and trapped electrons are caused the generation of ESW, and ions are reflected backward and forward at the boundary of the initial perturbation, then form cold ion beam whereas electrons are confined to inside of the potential. Furthermore backward reflected ion beam forms ion holes by ion two-stream instability. On the other hand, as the confined electrons are released, and then released electrons also form hot electron beam, which play an important role in the generation of consecutive ESWs such as broadband electrostatic noise (BEN) observed frequently in space environment. Therefore the reason of the generation of consecutive ESWs is the existence of heated electrons which can sufficiently support energy to produce ESWs.

• The Bulletin of The Korean Astronomical Society
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• v.46 no.2
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• pp.51.1-51.1
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• 2021

Merger shocks with M_s < ~ 3 - 4 have been detected in galaxy clusters through radio observations of synchrotron radiations emitted from cosmic-ray (CR) electrons. The CR electrons are believed to be produced by the so-called diffusive shock acceleration (DSA) at the merger shocks. To describe the acceleration of electrons, the injection into DSA has to be understood. Recent studies have showed that electrons could be energized through stochastic shock drift acceleration (SSDA), a mechanism mediated by multi-scale plasma waves at shock transition zone. However, such preacceleration process seems to be effective only at the supercritical shocks with M_s > ~ 2.3, implying that further studies should be done to explain radio relics with weaker shocks. In this talk, we present the results obtained by fully kinetic 2D particle-in-cell (PIC) simulations, which include pre-existing suprathermal electrons possibly ejected from active galactic nuclei (AGNs) or produced by previous episodes of turbulence/shocks. The simulations indicate that the pre-existing electrons enhance the upstream plasma waves in shocks with M_s < ~ 2.3. However, the wavelength of such waves is not long enough to scatter off suprathermal electrons and energize them to the injection momentum for DSA. Hence, we conclude that preexciting suprathermal electrons alone would not solve the problem of electron acceleration at radio relic shocks.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1431_1432
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• 2009

본 연구에서는 전자빔에 의해 생성되는 저온 플라즈마의 특성을 시뮬레이션을 통해 알아보았다. 전자빔 소스에서 전자를 생성하여 가속 전압을 인가하여 챔버로 보내고, 챔버 속의 Argon 중성 기체와 전자가 충돌하여 2차 방전을 일으킴으로써 저온 플라즈마가 생성된다. 이 때 중성기체의 압력과 가속전압의 변화에 따라서 플라즈마 밀도와 온도가 변하는데, 어떠한 특성을 가지는지 알아보기 위해 Particle-In-Cell(PIC) 시뮬레이션을 이용하였다. 챔버 내부에서 전자빔과 중성기체에 의한 변화를 관측했고, 이 때 전자빔 소스에서 Negative Acceleration Voltage는 10V~40V, 챔버 내부의 Argon 중성 기체의 압력은 1mTorr~20mTorr 조건하에서 시뮬레이션을 수행하였다. Electron Energy Distribution function (EEDF)을 관찰한 결과, 가속전압이 높을수록 낮은 에너지를 가지는 전자의 수가 증가하여 전자 밀도는 증가하며, 가스 압력이 높을수록 EEDF의 기울기가 커지면서 전자온도는 감소함을 알 수 있었다.

• Journal of the Optical Society of Korea
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• v.13 no.1
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• pp.48-52
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• 2009

Micro-hole targets are studied to generate energetic protons from laser-thin foil targets by using 2-dimensional particle-in-cell simulations. By using a small hole, the maximum energy of the accelerated proton is increased to 4 times higher than that from a simple planar target. The main proton acceleration mechanism of the hole-targets is the electrostatic field created between the fast electrons accelerated by the laser pulse ponderomotive force combined with the vacuum heating and the target rear surface. But in this case, the proton angular distribution shows double-peak shape, which means poor collimation and low current density. By using a small cone-shaped hole, the maximum proton energy is increased 3 times higher than that from a simple planar target. Furthermore, the angular distribution of the accelerated protons shows good collimation.