• Korean Journal of Optics and Photonics
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• v.4 no.1
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• pp.15-21
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• 1993

This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

• Korean Journal of Optics and Photonics
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• v.14 no.2
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• pp.142-145
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• 2003

The nonreciprocal phase shift characteristics of infinite slab optical waveguides with magneto-optic materials in the cladding layer was calculated at 1.55 ${\mu}{\textrm}{m}$ for optical isolators. The infinite slab waveguide structures considered in this paper were as follows. rho magneto-optic materials used as a cladding layer were Ce:YIG and LNB(LuNdBi)$_3$(FeAl)$_{5}$)$_{12}$,). Their specific Faraday rotations Θ$_{F}$ are 4500$^{\circ}$/cm, 500$^{\circ}$/cm at wavelength 1.55 ${\mu}{\textrm}{m}$ respectively. The guiding layer with multi-quantum well structure was used, and it consists of 1.3Q and InGaAs. In order to investigate the effect of evanescent field penetrating the cadding, layer, guiding mode characteristics were calculated for the cases when the substrate is InP and air. We calculated the minimum lengths of 90$^{\circ}$ nonreciprocal phase shifters and their optimum guiding layer thicknesses in various optical waveguide structures.res.s.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.17 no.11 s.114
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• pp.1021-1029
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• 2006

In this paper, we designed and implemented a dual wideband dipole type antenna for the reception of S-DMB (Satellite Digital Multimedia Broadcasting) and 2.4/5 GHz WLAN(Wireless Local Area Network) signals. The proposed antenna based on conventional monopole type dual band antenna was implemented as planar wideband dipole type antenna with the volume of $8{\times}33.8{\times}1.68mm^3$. The proposed antenna is printed type on FR4 substrate of 1.6 mm thick and composed of a dipole type antenna for low frequency band and two symmetric structured resonance elements for high frequency band. We confirmed antenna area with dense surface current for each frequency band with simulation. By varying the length of the antenna area with dense surface current, we could vary resonance frequency of each frequency band separately. Impedance bandwidths$(VSWR{\leq}2)$ are 362 MHz(14.23 %) for 2 GHz band and 1188 MHz(22.13, %) for 5 GHz band which show wideband characteristic. Measured maximum gains were 4.33 dBi for 2 GHz band and 5.48 dBi for 5 GHz band which showed improved performance. And the implemented antenna has a good omni-directional radiation pattern characteristic.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.23 no.12
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• pp.1327-1336
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• 2012

In this paper, the dual-faced monopole antenna, which is arranged by numerous rectangular ring patches in sequence for the multi-bands is proposed. The ring type structure of the patch can be increased the bandwidth. Therefore the bandwidth and beam width are improved by using multiple arrayed patches. When the ring type patches are inserted serially, the resonance frequencies are occurred by the current flow from the first ring patch. It is possible because the gap between the patches is very narrow. In addition, if the patches are composed on the same plane as the feed-line, fabrication could be very difficult because the gap between the patches is extremely narrow. The thickness and permittivity of the antenna, moreover, are very important parameters because both sides of the substrate are used. We finally found the optimal thickness and permittivity to generate the coupling effect by simulation. All patches are consisted of 4-steps which the patch size was decreased 85 % by each step. In conclusion, the resonant frequency bands are 1.75~2.6 GHz(850 MHz), 3.24~3.46 GHz(220 MHz), 3.8~4.0 GHz(200 MHz), and 4.4~4.9 GHz(500 MHz).

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.23 no.5
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• pp.613-623
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• 2012

In this paper, we present an ultra miniaturized voltage tuned oscillator, with HMIC-type amplifier and phase shifter, using LTCC artificial dielectric resonator. ADR which consists of periodic conductor patterns and stacked layers has a smaller size than a dielectric resonator. The design specification of ADR is obtained from the design goal of oscillator. The structure of the ADR with a stacked circular disk type is chosen. The resonance characteristic, physical dimension and stack number are analyzed. For miniaturization of ADRO, the ADR is internally implemented at the upper part of the LTCC substrate and the other circuits, which are amplifier and phase shifter are integrated at the bottom side respectively. The fabricated ADRO has ultra small size of $13{\times}13{\times}3mm^3$ and is a SMT type. The designed ADRO satisfies the open-loop oscillation condition at the design frequency. As a results, the oscillation frequency range is 2.025~2.108 GHz at a tuning voltage of 0~5 V. The phase noise is $-109{\pm}4$ dBc/Hz at 100 kHz offset frequency and the power is $6.8{\pm}0.2$ dBm. The power frequency tuning normalized figure of merit is -30.88 dB.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.27 no.10
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• pp.892-899
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• 2016

In this paper, an X-band 50 W internally matched power amplifier is designed and fabricated using an $80{\times}150{\mu}m$ GaN HEMT that is developed by the $0.25{\mu}m$ GaN HEMT process of ETRI. The optimum source and load impedances are experimentally extracted from the loadpull measurement using impedance-transform-prematching circuits, and the transistor performance is predicted. The power performance of the internally matched power amplifier, whose matching circuits are fabricated on a substrate with ${\varepsilon}_r$ of 10.2, is measured under the pulsed mode of $100{\mu}s$ pulse period and 10 % duty cycle, and the best output power of 47.46 dBm(55.5 W) and the power-added efficiency of 46.6 % are obtained at 9.2 GHz. The output power of 47~47.46 dBm(50~55.7 W) is measured in 9.0~9.5 GHz, and the power-added efficiency is measured to be greater than 43 % in 9.0~9.3 GHz and above 36 % in 9.4~9.5 GHz.

• Journal of the Microelectronics and Packaging Society
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• v.19 no.2
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• pp.17-28
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• 2012

It is known that thermo-mechanical properties of solder material and molding compound in WB-PBGA packages are considerably affected by not only temperature but elapsed time. In this paper, finite element analysis (FEA) taking material nonlinearity into account was performed for more reliable prediction on deformation behavior of a lead-free WB-PBGA package, and the results were compared with experimental results from moire interferometry. Prior to FEA on the WB-PBGA package, it was carried out for two material layers consisting of molding compound and substrate in terms of temperature and time-dependent viscoelastic effects of molding compound. Reliable deformation analysis for temperature change was then accomplished using viscoplastic properties for solder ball and viscoelastic properties for molding compound, and the analysis was also verified with experimental results. The result showed that the deformation of WB-PBGA packages was strongly dependent on material model of molding compound; thus, temperature and time-dependent viscoelastic behavior must be considered for the molding compound analysis. In addition, viscoelastic properties of B-type molding compound having comparatively high glass transition temperature of $135^{\circ}C$ could be recommended for reliable prediction on deformation of SAC lead-free WB-PBGA packages.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.7 no.4
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• pp.188-194
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• 2014

In this paper, an antenna which has quad band in LTE (0.746 ~ 0.798 GHz), GSM(0.824 ~ 0.960 GHz), DCS(1.71 ~ 1.88 GHz), WCDMA(1.91 ~ 2.17 GHz) is proposed. An antenna size is $122mm{\times}50mm{\times}0.8mm$ on FR4(${\epsilon}_r=4.4$) ground substrate. In the proposed antenna, branch line is applied to the conventional PIFA architecture to achieve multi-bandwidth. Coupling power supply is applied for a wide bandwidth. Result of the measurement is as follows. When the low frequency, the antenna presents gain of 0.93 ~ 1.92dBi, and radiation efficiency of 49.60 ~ 76.35 %, and When the high frequency, gain is 2.19 ~ 4.66dBi, and radiation efficiency is 60.40 ~ 80.01 %, and with a VSWR < 2 (${\leq}-10dB$)measurement results for standard satisfies all band. Judging from the result, proposed multiband antenna is expected to be applied. B4G mobile terminals since the antenna shows an outstanding performance.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.38B no.9
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• pp.744-750
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• 2013

In this paper, we proposed new type of an artificial magnetic conductor(AMC) structure, which has a high impedance surface for realizing the meta-material characteristics. The designed AMC structure set a goal of 3.2GHz, and the reflector, which consists of periodically arrayed AMCs is fabricated and measured. The high impedance improves the reflection coefficient, decreases the system size and interference, and increases the antenna performance. The structure has embodied the high impedance by the thickness and relative permitivity of the dielectric substrate and the design configuration without the metallic via hole which connects the AMC to the GND. The bandwidth is 150% broader than the similar AMC structures. Also, the distance between the antenna and the AMC reflector is decreased by ${\lambda}/10$ as working as the metal(PEC) reflectors. The antenna radiation characteristics are 3dB increased at 10mm away from reflector by measurement. The proposed reflector could be inserted in the portable mobile devices, and the antenna's performance has improved by the reflector. The specific absorption rate is dramatically decreased over 94% because the back radiation of the antenna is shielded.

• Journal of Korean Society of Environmental Engineers
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• v.35 no.2
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• pp.109-114
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• 2013

Polyhydroxyalkanoates (PHAs) are synthesized by numerous bacteria as carbon and energy storage compounds and are raw materials for biocompatible plastics. In this paper, the effect of $CO_2$ concentrations on the growth of C. necator and the accumulation of Poly(3-hydroxybutyrate) (P(3HB)) are investigated by increasing the $CO_2$ concentration in the substrate gas mixture. During 6 d cultivation in a nitrogen-present mineral medium, the $CO_2$ concentration did not affect the growth of the cells, while the Poly(3- hydroxybutyrate) (P(3HB)) content decreased with increasing $CO_2$ concentrations from 1% to 20%. During 4 d cultivation in the nitrogen-limited medium, the P(3HB) accumulation was the greatest at 3% $CO_2$; however, the total amount of accumulated P(3HB) was the greatest at 1% $CO_2$, which decreased with increasing $CO_2$ concentrations. The results indicate that the gas mixture with 1% $CO_2$ is the most effective in both growing the cells and accumulating P(3HB) under our experimental conditions.