• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.854-857
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• 2000

Chemical Mechanical Polishing(CMP) has been accepted as one of the essential processes for VLSI fabrication. However, as the polishing process continues, pad pores get to be glazed by polishing residues, which hinder the supply of new slurry. This defect makes removal rate decrease with a number of polished wafer and the desired within-chip planarity, within wafer and wafer-to-wafer nonuniformity are unable to be achieved. So, pad conditioning is essential to overcome this defect. The eletroplated diamond grit disk is used as the conventional conditioner, And alumina long fiber, the .jet power of high pressure deionized water and vacuum compression are under investigation. But, these methods have the defects like scratches on wafer surface by out of diamond grits, subsidences of pad pores by over-conditioning, and the limits of conditioning effect. To improve these conditioning methods. this paper presents the Characteristics of Ultrasonic conditioning aided by cavitation.

• Journal of Industrial Technology
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• v.34
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• pp.67-70
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• 2014

In this paper, we propose a diagnosis algorithm for 25.8kV $N_2$ insulated Pad-mounted Switchgear in oder to improve reliability by preventing of fault in advance. The proposed algorithm can diagnose the problems of Pad-mounted Switchgear such as gas leakage and VI(Vacuum Interrupter) trouble (contact abrasion, coil aging etc.) by using pressure sensor, stroke sensor and coil current sensor.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.358-359
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• 2005

Chemical mechanical polishing(CMP) process depends on a variety of variables. Especially, surface roughness of pad plays a key role in material removal in CMP in terms of transportation ability of pores and real contact area. The surface roughness is deteriorated with polishing time by applied pressure and relative velocity. In this reason, diamond conditioner has been used to maintain the roughness on the pad. The authors try to investigate the correlation between pad roughness and frictional behavior by comparing ex-situ conditioning with in-situ conditioning.

• Transactions of the Korean Society of Automotive Engineers
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• v.9 no.3
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• pp.173-180
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• 2001

In the case of axisymmetric thermal analysis of drum brakes, the distribution of frictional heat produced on the interface and temperature difference between mating frictional faces are very interesting problems to computational researchers. In the first part, the influence of the s-cam load angles and elastic modulus of the pad on the contact pressure distribution between pad and drum was checked by a three dimensional model. In the second part heat conduction from the interface to the pad and the drum was modeled by using a thin interface element, so artificial division of the generated frictional heat between pad and drum is not necessary. Temperature difference between mating frictional faces is successfully modeled by using the interface element. The influence of some parameters on the thermal distribution is checked. The analysis was performed by ABAQUS/Standard code.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.17 no.3
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• pp.622-628
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• 2016

As the suction pad-supporting bike carrier attached to a car may be subject to an excessive dynamic load due to random vibrations and centrifugal forces during driving, its structural safety is of great concern. To examine this, the finite-element method with a fluid-structure interaction should be used because the pressure on the pad bottom is changed in real time according to the fluctuations of the force or the moment applied on the pad. This method, however, has high computing costs in terms of modeling efforts and software expense. Moreover, the accuracy of computation is not easily guaranteed. Therefore, a new method combining the experiment and computation is proposed in this paper: the bottom pressure and contact area of the pad under varying loads was measured in real time and the acquired data are then used in the nonlinear elastic finite-element calculations. The computational and experimental results obtained with the product under development showed that the safety margin of the pad under the axial loading is relatively sufficient, whereas with an excessive rotational loading, the pad is vulnerable to separation or a local surface damage; hence, the safety margin may not be secured. The predicted contact behavior under the variation of the magnitude and type of the loading were in good agreement with the one from the experiment. The proposed analysis method in this study could be used in the design of similar vacuum pad systems.

• Journal of rehabilitation welfare engineering & assistive technology
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• v.11 no.4
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• pp.323-330
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• 2017

Knee sleeve has been used for prevention of sport injuries as well as rehabilitation. To investigate prevention of sport injuries of knee sleeve, it is important to evaluate balance associated with proprioception. The aim of this study was to evaluate the effects of a knee sleeve with a pad that stimulate to golgi tendon organ (GTO_PAD) on proprioception and balance ability. Five healthy males were participated for the study. They were asked to reenact target angle with Biodex and perform one leg standing with knee sleeve and knee sleeve with GTO_PAD. There was no significant difference in %Target angle, but the value of %Target angle was higher in subjects wearing knee sleeve with GTO_PAD than only knee sleeve, except for one subject. During one leg standing, time duration was increased in subjects wearing knee sleeve with GTO_PAD. The length of center of pressure in x-axis (COPx) and COP in y-axis (COPy) were decreased when wearing knee sleeve with GTO_PAD (COPx : $162.06{\pm}58.99mm$ in knee sleeve vs. $149.03{\pm}45.30mm$ in knee sleeve with GTO_PAD, COPy : $310.79{\pm}115.89mm$ in knee sleeve, $291.57{\pm}76.53mm$ in knee sleeve with GTO_PAD). There was significant differences in INI_transition, steady, and LAT_transition phase (all, p < 0.05). These findings support that wearing knee sleeve with GTO_PAD might enhance proprioception and balance.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.47-48
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• 2007

A CMP Process has many factors that affect result of a polished wafer. Dominant factors are velocity, pressure and temperature in process. A pad profile is also considered as affecting factor of CMP. Accoding to variation of a pad profile, the each pan of a wafer is differently pressured. It appears to affect the uniformity of a wafer. A pad profile varies as a swing arm conditioner which have been ordinarily used in industry. A swing arm conditioner has several sectors in its swing path. This study aims that a wafer get a good uniformity as swing arm conditioner's path on pad is analyzed and simulated. Through the simulation, tendency of pad profile after conditioning will be predicted and the result of simulation compared with the result of experiment. The optimized pad profile would be made by to vary swing arm's velocity on each sector. In order to maintain the optimized profile, conditioner design or swing arm's velocity should be changed and designed.

• Journal of the Korea Convergence Society
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• v.9 no.1
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• pp.283-289
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• 2018

In automotive disc brake systems, frictional heat is not uniformly dispersed for reasons such as heat flux and thermal deformation. The thermoelastic deformation due to the frictional heat affects the contact pressure distribution and the contact load may be concentrated on the contact portion on the the disc brake surface, resulting in thermoelastic instability. In this study, thermal analysis and thermal deformation analysis considering the contact between disk and pad occurred during braking through 3D axial symmetry model with reference to the experimental equation and Kao's analysis method of contact pressure of disk and pad. ANSYS is used to analyze the thermal and elastic instability problems occurring at the contact surface between the disk and the pad, considering both the thermal and mechanical loads. A 3D axisymmetric model with direct contact between the disk and the pad was constructed to more accurately observe the thermal behavior of the disk by observing the frictional surface temperature, thermal deformation and contact thermal stress of the disk.

• Korean Journal of Applied Biomechanics
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• v.21 no.4
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• pp.487-494
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• 2011

The purpose of this study was to evaluate the effects of metatarsal pad (MP) compared with barefoot and MP with using different insoles on gait. 15 healthy females who had no history of injury in the lower extremity with an average age of 22.7 year(SD=1.35), height of 160 cm(SD=3.4), weight of 48.8 kg(SD=5.52) and average foot size of 232.5 mm(SD=6.8) participated in this study as the subjects. The subjects walked on a treadmill under four different experimental conditions: 1) walking with barefoot, 2) walking wearing MP 3) walking wearing a soft insole with MP(SIMP), 4) walking wearing a rigid insole with MP(HIMP). During walking, foot pressure data such as force, contacting area, peak pressure, and mean pressure was collected using Pedar-X System(Novel Gmbh, Germany) and EMG activity of lower limb muscles such as tibialis anterior(TA), lateral gastrocnemius(LG), rectus femoris(RF), and musculus biceps femoris(MBF) was gathered using Delsys EMG Work System(Delsys, USA). Collected data was then analyzed using paired t-test in order to investigate the effects of each of experimental conditions. As a result of the analysis, when MP and HIMP were equipped, overall contacting area was increased while the force, peak pressure and the mean pressure were decreased. Especially, when the SIMP was equipped, every data were significantly decreased. In case of EMG, wearing MP, SIMP and HIMP made three muscles(TA, LG, RF)'s activity decrease. A result of the analysis will be able to apply for manufacturing functional shoes, diabetes shoes, senior shoes and lower extremity orthosis. Significance of the study due to a metatarsal pad and the insole is to analyze the changes in muscle strength.

• Journal of Acupuncture Research
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• v.21 no.1
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• pp.33-50
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• 2004

Objective: The aim of this study was to investigate anti-ischemic effect of LR1 HT8 Reduction in Acupuncture Methods: I designed to investigate whether LR1 HT8 Reduction in Acupuncture affects cerebral hemodynamics [regional cerebral blood flow(rCBF), pial arterial diameter(PAD), mean arterial blood pressure(MABP)] in normal rats and to make manifest whether LR1 HT8 Reduction in Acupuncture is mediated by cyclooxygenase or guanylate cyclase. The changes of rCBF and MABP were determinated by laser-doppler flowmetry(LDF), and the change of PAD was de terminated by video microscope and width analyzer. Results: The results were as follows; 1. LR1 Reduction in Acupuncture was increased rCBF and PAD, but decreased MABP. 2. HT8 Reduction in Acupuncture was significantly increased rCBF, but decreased MABP, and increased PAD. 3. LR1 HT8 Reduction in Acupuncture was significantly increased rCBF, PAD, but decreased MABP after withdrawing of the needle. This results suggest that LR1 HT8 Reduction in Acupuncture increased significantly rCBF by dilating PAD. 4. Pretreatment with indomethacin(1mg/kg, i,v.) was significantly inhibited LR1 HT8 Reduction in Acupuncture induced increase of rCBF and PAD, but increased LR1 HT8 Reduction in Acupuncture induced decrease of MABP after withdrawing of the needle. 5. Pretreatment with methylene blue($10{\mu}g/kg$, i,v.) was decreased LR1 HT8 Reduction in Acupuncture induced increase of rCBF and PAD, but accelerated LR1 HT8 Reduction in Acupuncture induced decrease of MABP. Conclusions: I suggest that LR1 HT8 Reduction in Acupuncture has an anti-ischemic effect through the improvement of cerebral hemodynamics, and the mechanism is mediated by cyclooxygenase.