• 제목/요약/키워드: PZT-based

검색결과 296건 처리시간 0.025초

Ferroelectric Properties of PZT Heterolayered Thick Films

  • Lee, Sung-Gap;Shim, Young-Jae;Lee, Young-Hie;Bae, Seon-Gi
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
    • /
    • pp.200-201
    • /
    • 2005
  • PFerroelectric PZT heterolayered thick films were fabricated by the alkoxide-based sol-gel method. PZT(40/60) and PZT(60/40) paste were made and alternately screen-printed on the $Al_2O_3$ substrates. We have introduced a press-treatment to obtain a good densification of screen printed films. The porosity of the thick films were decreased with increasing the applied pressure and the thick films pressed at 0.6 ton/$cm^2$ showed the dense microstructure and thickness of about 76${\mu}m$. The remanent polarization and coercive field increased with increasing applied pressure and the values for the PZT thick films pressed at 0.6 ton/$cm^2$ were 17.04${\mu}Ccm^2$, 78.09 kV/cm, respectively.

  • PDF

메탈젯용 PZT 액츄에이터 제어기 성능향상에 관한 연구 (A Study on the Performance Improvement of PZT Actuator Controller for Metal Jet)

  • 윤소남;조정대;이택민
    • 연구논문집
    • /
    • 통권33호
    • /
    • pp.81-88
    • /
    • 2003
  • A metal jet printing system based on ink jet printing technique is one of the effective equipments for manufacturing elements of display devices, electrical devices, information processing systems, and so on. In order to develop an actuator of the metal jet printing system, bimorph type PZT actuator(length 25.2mm, width 7.2mm, thickness 0.5mm, shim thickness 0.2mm) and its controller(voltage range $\pm24v$, built-in fast recovery diode) were suggested and investigated. Performance tests and characteristic analysis, such as displacement, force, hysteresis and frequency, were carried out. The results show that the suggested actuator and controller are suitable for the metal jet printing system.

  • PDF

졸-겔법에 의한 PZT 합성과 박막제조 (Sol-Gel Processing and Properties of PZT Powders and Thin Films)

  • 오영제;정형진
    • 한국세라믹학회지
    • /
    • 제28권12호
    • /
    • pp.943-952
    • /
    • 1991
  • Lead zirconate titanate(PZT) powders and thin films were prepared from an alkoxide-based solution by sol-gel method. Gelation of synthesized complex solutions, pyrolysis and crystallization behaviors of the dried powder were studied in accordance with a water content and a catalyst. PZT thin films were formed by spin-casting method on silicon and platinum substrates, and characterized. Ester produced from the reactions was completely removed when drying of the gel was finished. Pyrolysis property of the dried PZT gels were changed in order water content, class of catalyst, and quantity of catalyst. Crystalline Pb phase was transiently formed near 250$^{\circ}C$. Basic catalyst is good additive for a formation of perovskite phase in the films, and acidic catalyst for a densified film structure. By the analysis of RBS, Pb element in the PZT films were diffused into silicon substrate, and the pores, may be produced due to local densification around some grains in the films, make an origin of fault in microstructure when holding time goes to be longer at 700$^{\circ}C$.

  • PDF

박막형 압전재료 3203HD의 재료 비선형성을 고려한 바이모프 보 작동기의 비선형 유한 요소해석 (Finite element analysis of the PZT 3203HD bimorph beam actuator based on material non-linear characteristics)

  • 장성훈;김영성;이상기;박훈철;윤광준
    • 한국항공우주학회지
    • /
    • 제32권4호
    • /
    • pp.18-23
    • /
    • 2004
  • 본 논문에서는 고 전압, 고 응력 하에 있는 압전 재료의 재료 비선형 거동을 실험적으로 밝히고, 수치적으로 모사하였다. 응력 하에서, 압전 재료의 비선형 거동을 표현 할 수 있는 실험식을 압전 변형율에서 만들어 내었다. 그 식은 재료 비선형 해석을 위하여, 증분 형태의 유한요소 식에 적용되었다. 압전 상수에 대한 새로운 정의와 증분 형태로 표현된 압전 변형율이 보다 나은 비선형 거동의 복원을 위하여 유한 요소 정식화과정에 적용되었다. 이것으로, 높은 전기장 영역에서도, 박판형 압전 재료의 비선형 거동을 정확하게 복원하였다. 일련의 수행된 실험과 연구 과정의 검증을 위하여, 압전재료 바이모프 보 작동기가 수치적으로와 실험적으로 사용되었다. 재료 비선형 유한요소해석으로 예측된 변위와 실험으로 구해진 변위가 잘 일치함을 확인하였다.

소결온도에 따른 $Pb(Zr_{x}Ti_{1-x})O_3$ 이종층 후막의 구조적.전기적 특성 (StructuralElectrtonic Properies of $Pb(Zr_{x}Ti_{1-x})O_3$ Heterolayerd Thick Films with Variation of Sintering Temperature)

  • 이성갑;이영희;남성필;배선기
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 2005년도 추계학술대회 논문집 전기물성,응용부문
    • /
    • pp.71-73
    • /
    • 2005
  • Ferroelectric PZT heterolayered thick films were fabricated by the alkoxide-based sol-gel method. PZT(20/80) and PZT(80/20) paste were made and alternately screen-printed on the alumina substrates. The coating and drying procedure was repeated 4 times to form the heterolayered thick films. The thickness of the PZT heterolayered thick films was approximately 60 mm. All PZT thick films showed the typical XRD patterns of a perovskite polycrystalline structure. The relative dielectric constant and the dielectric loss of the PZT thick films sintered at $1050^{\circ}C$ were 1382 and 1.90%, respectively. The remanent polarization and coercive field of the PZT thick films sintered at $1050^{\circ}C$ were $14.15{\mu}C/cm^2$ and 19.13kV/cm, respectively.

  • PDF

분포형 압전 필름 감지기와 압전 세라믹 작동기를 이용한 보의 진동 제어 (Vibration Control of Beam using Distributed PVDF sensor and PZT actuator)

  • 박근영;유정규;김승조
    • 한국소음진동공학회:학술대회논문집
    • /
    • 한국소음진동공학회 1997년도 춘계학술대회논문집; 경주코오롱호텔; 22-23 May 1997
    • /
    • pp.413-417
    • /
    • 1997
  • Distributed piezoelectric sensor and actuator have been designed for efficient vibration control of a cantilevered beam. Both PZT and PVDF are used in this study, the former as an actuator and the latter as a sensor for our integrated structure. For the PZT actuator, the position and size have been optimized. Optimal electrode shape of the PVDF sensor has been determined. For multi-mode vibration control, we have used two PZT actuators and a PVDF sensor. Electrode shading of PVDF is more powerful for modal force adjustment than the sizing and positioning of PZT. Finite element method is used to model the structure that includes the PZT actuator and the PVDF sensor. By deciding on or off of each PZT segment, the length and the location of the PZT actuator are optimize. Considering both of the host structure and the optimized actuators, it is designed that the active electrode width of PVDF sensor along the span of the beam. Actuator design is based on the criterion of minimizing the system energy in the control modes under a given initial condition. Sensor is designed to minimize the observation spill-over. Modal control forces for the residual(uncontrolled) modes have been minimized during the sensor design. Genetic algorithm, which is suitable for this kind of discrete problems, has been utilized for optimization. Discrete LQG control law has been applied to the integrated structure for real time vibration control. Performance of the sensor, the actuator, and the integrated smart structure has been demonstrated by experiments.

  • PDF

PZT 박막의 압전 특성 및 MEMS 기술로 제작된 PZT cantilever의 전기기계적 물성 평가 (Piezoelectric and electromechanical properties of PZT films and PZT microcantilever)

  • 이정훈;황교선;윤기현;김태송
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
    • /
    • pp.177-180
    • /
    • 2002
  • Thickness dependence of crystallographic orientation of diol based sol-gel derived PZT(52/48) films on dielectric and piezoelectric properties was investigated The thickness of each layer by one time spinning was about 0.2 $\mu\textrm{m}$, and crack-free films was successfully deposited on 4 inches Pt/Ti/SiO$_2$/Si substrates by 0.5 mol solutions in the range from 0.2 $\mu\textrm{m}$ to 3.8 $\mu\textrm{m}$. Excellent P-E hysteresis curves were achieved without pores or any defects between interlayers. As the thickness increased , the (111) preferred orientation disappeared from 1$\mu\textrm{m}$ to 3 $\mu\textrm{m}$ region, and the orientation of films became random above 3 $\mu\textrm{m}$. Dielectric constants and longitudinal piezoelectric coefficient d$\_$33/, measured by pneumatic method were saturated around the value of about 1400 and 300 pC/N respectively above the thickness of 0.8 7m. A micromachined piezoelectric cantilever have been fabricated using 0.8 $\mu\textrm{m}$ thickness PZT (52/48) films. PZT films were prepared on Si/SiN$\_$x/SiO$_2$/Ta/Pt substrate and fabricated unimorph cantilever consist of a 0.8 fm thick PZT layer on a SiNx elastic supporting layer, which becomes vibration when ac voltage is applied to the piezoelectric layer. The dielectric constant (at 100 kHz) and remanent polarization of PZT films were 1050 and 25 ${\mu}$C/$\textrm{cm}^2$, respectively. Electromechanical characteristics of the micromachined PZT cantilever in air with 200-600 $\mu\textrm{m}$ lengths are discussed in this presentation.

  • PDF

Compensation of temperature effect on impedance responses of PZT interface for prestress-loss monitoring in PSC girders

  • Huynh, Thanh-Canh;Kim, Jeong-Tae
    • Smart Structures and Systems
    • /
    • 제17권6호
    • /
    • pp.881-901
    • /
    • 2016
  • In this study, a method to compensate the effect of temperature variation on impedance responses which are used for prestress-loss monitoring in prestressed concrete (PSC) girders is presented. Firstly, an impedance-based technique using a mountable lead-zirconate-titanate (PZT) interface is presented for prestress-loss monitoring in the local tendon-anchorage member. Secondly, a cross-correlation-based algorithm to compensate the effect of temperature variation in the impedance signatures is outlined. Thirdly, lab-scale experiments are performed on a PSC girder instrumented with a mountable PZT interface at the tendon-anchorage. A series of temperature variation and prestress-loss events are simulated for the lab-scale PSC girder. Finally, the feasibility of the proposed method is experimentally verified for prestress-loss monitoring in the PSC girder under temperature-varying conditions and prestress-loss events.

PMN-PZT계 세라믹스의 압전특성에 미치는 MnO2의 영향 (Effects of MnO2on the Piezoelectric Properties of PMN-PZT-based Ceramics)

  • 김재창;황동연;이미영;유신욱;김영민;어순철;김일호
    • 한국재료학회지
    • /
    • 제14권5호
    • /
    • pp.334-337
    • /
    • 2004
  • Perovskite PMN-PZT-based ceramics were prepared and the$ MnO_2$ doping effects on their piezoelectric properties were investigated. Grain size decreased with increasing the $MnO_2$ content, and the pyrochlore phase was not identified in the sintered PMN-PZT ceramics with 0.01~1.0wt% $MnO_2$. Piezoelectric voltage and charge constants were reduced and mechanical quality factor increased with increasing the $MnO_2$ content. However, electromechanical coupling coefficient slightly decreased with increasing the MnO$_2$ content without regard to the grain size.

Pt와 $LaNiO_3$ 전극에 대한 PZT(53/47) sol-gel 막의 전기적 특성 (Electrical properties of PZT films on Pt and $LaNiO_3$ electrode by using sol-gel method)

  • 서병준;여기호;류지구;김강언;정수태
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
    • /
    • pp.641-643
    • /
    • 2003
  • The ferroelectric properties of PZT(53/47) thin film was investigated by methoxy enthanol solution based on sol-gel method. The thickness of each layer by spincoating 0.25M sol at one time was $0.1{\mu}m$ and crack-free film was formed. $LaNiO_3/Si(100)$ electrode and $Pt/Ti/SiO_2/Si(100)$ electrode was coated by PZT sol at several times. PZT orientation was confirmed as a method of XRD and coercive field(Ec) as well as remnant polarization(Pr) was investigated from hysterisis curve. As a result of XRD analysis, we can know that the orientation of on PZT/LNO/Si(100) is better than on $Pt/Ti/SiO_2/Si(100)$. The remnant polarization(Pr) in LNO electrode was $87.5{\mu}C/cm^2$ and $39.8{\mu}C/cm^2$ in Pt. From this figures, it is investigated that the Pr in LNO electrode was better than in Pt.

  • PDF