• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.11
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• pp.688-692
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• 2017

$Pb(Zr,\;Ti)O_3$ (PZT) is a piezoelectric material applied in a typical actuator and has been actively studied. However, in order to overcome the limitations of PZT, piezoelectric ceramics comprising mixed solid solutions of PZT with various relaxer electric materials have been studied. The $Pb(Zn_{1/3}Nb_{2/3})-Pb(Ni_{1/3}Nb_{2/3})-Pb(Zr,\;Ti)O_3$ (PZN-PNN-PZT) piezoelectric ceramic, known to have high piezoelectric constant and electromechanical coupling coefficient, was studied herein. The piezoelectric characteristics with various Zr contents (Zr/Ti ratios), PZN molar ratios, and sintering temperatures were compared. The piezoelectric properties of $d_{33}=580pC/N$ and $k_P=0.68$ were obtained with the $0.1PZN-0.2PNN-0.7PbZr_{0.46}Ti_{0.54}O_3$ composition sintered at $1,290^{\circ}C$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.32-33
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• 2006

In this study, in order to develop multilayer ceramic actuator for ultrasonic nozzle and ultrasonic vibrator, PMN-PNN-PZT ceramics were fabricated using $Li_2CO_3$. $Na_2CO_3$ and ZnO as sintering aids. And then, their piezoelectric and dielectric properties according to the amount of ZnO addition were investigated. The addition of ZnO improved density, dielectric constant, electromechanical coupling factor, mechanical quality factor and piezoelectric d constant of PMN-PNN-PZT ceramics due to the increase of sinterability and accepter doping effect. Electromechanical coupling factor and mechanical quality factor of PMN-PNN-PZT ceramics increased with ZnO amount up to 0.4wt% and then decreased. At the sintering temperature of $900^{\circ}C$ and 0.4wt% ZnO addition, density, dielectric constant, electromechanical coupling factor, mechanical quality factor and piezoelectric d constant showed the optimum value of 7.876g/$cm^2$, 1299, 0.612, 1151 and 369pC/N, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.212-213
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• 2005

In this study, in order to develop low temperature sintering piezoelectric actuator, $Pb_{0.985}Bi_{0.01}(Mg_{1/2}W_{1/2})_{0.03}(Ni_{1/3}Nb_{2/3})_{0.13}(Zr_{0.50},Ti_{0.50})_{0.84}$ (PMW-PNN-PZT) ceramic systems were fabricated using $CaCO_3-Li_2CO_3$, sintering aid through a post-annealing process. The sinterability of PMW-PNN-PZT ceranics was remarkably enhanced by liquid phase sintering of $CaCO_3$ and $Li_2CO_3$. But, it was confimed form the X-ray diffraction pattern that the secondary phase along grain boundaries, deteriorated the piezoelectric properties. The secondary phase along grain boundaries was significantly removed by annealing after sintering. The 0.2wt% $Li_2CO_3$-0.25wt% $CaCO_3$-added PMW-PNN-PZT ceramics post-annealed at 900$^{\circ}C$ for 90min exhibited the excellent electromechanical coupling factor($k_p$) of 63.3% and piezoelectric constant($d_{33}$) of 452pC/N, respectively, for multilayer piezoelectricactuatorapplication.

• Electrical & Electronic Materials
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• v.5 no.1
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• pp.14-27
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• 1992

핫프레스법으로 제작된 0.05Pb(M $n_{1}$3/N $b_{2}$3/) $O_{3}$+ 0.95Pb(Z $r_{0.47}$ $Ti_{0.53}$) $O_{3}$ 세라믹스에 있어서 C $r_{2}$ $O_{3}$의 첨가량이 그 시편의 구조적특성, 유전특성, 압전특성, 온도안정성 및 포아손비에 미치는 영향이 조사되었다. C $r_{2}$ $O_{3}$의 첨가량의 범위가 0.3~0/75[wt%]인 시편만이 포아손비가 1/3이상으로 주파수저하형 에너지포획소자의 기판으로 사용될 수 있으며 이 중에서 C $r_{2}$ $O_{3}$의 첨가량이 0.5[wt%]인 시편이 보다 우수한 압전특성과 안정된 주파수 온도특성을 갖고 있다. 있다.

• Journal of Power System Engineering
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• v.9 no.4
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• pp.162-167
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• 2005

The purpose of this paper is to improve the hysteresis characteristics of a stack type piezoelectric actuator using system identification and tracking control. Recently, several printing methods that are cost less and faster than previous semiconductor processes have been developed for the production of electric paper and RFID(Radio Frequency IDentification). The system proposed in this study prints by spraying the molten metal. And this system consist of a nozzle, heating furnace, operating actuator and an XYZ 3-axis stage. As an operating system, the piezoelectric(PZT) actuator is a very useful tool for position control of the metal printing system. However, the PZT actuator has a hysteresis nonlinearity due to the ferroelectric characteristics of the PZT element. This hysteresis causes problem position control characteristics in the system and deteriorates the performance of the system. In this study, an investigation was conducted to improve the hysteresis characteristics of the PZT actuator that has an output displacement for the input voltage. In order to reduce the hysteresis nonlinearity of the PZT actuator, this proposed a inverse hysteresis model and a mathematic modeling method that can express the geometric relationship between voltage and displacement. In addition, system identification and PID control methods were examined. Also, it was confirmed that the proposed control strategy gives good tracking performance.

• Proceedings of the KAIS Fall Conference
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• 2001.05a
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• pp.220-223
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• 2001

Pb가 10% 과잉되고 Zr : Ti = 52 : 48 조성을 갖는 PZT sol이 Pt(3500Å)/Ti(400Å)/SiO₂(3000Å)Si(525㎛)기판 위에 스핀 코팅법으로 반복 코팅된 후, 450℃에서 10분, 650℃에서 2분간 반복 열처리되었다. 이와 같이 다양한 두께로 적층된 박막은 각 시편에 대해 최종적으로 650℃ 30분 동안 어닐링 처리되었다. 제조된 PZT 박막의 두께는 4100Å에서 1.75㎛사이의 4종이었다. 이어서 스퍼터링법으로 Pt전극이 PZT 막 위에 증착되었다. 제조된 PZT 박막의 결정 구조 조사를 위해 XRD, 그리고 미세 구조 및 전기적 특성을 알아보기 위해 FESEM과 P-E 이력 곡선이 각각 관찰되었다. 4100Å에서 1.75㎛까지 두께 증가에 따른 장비상의 포화 이력 한계로 잔류 분극(Pr)값이 25μC/㎠에서 다소 감소되었다. 측정된 X선 회절 결과에서 최초 4회 코팅시 perovskite 결정 구조로 성장한 결정립은 (111)배향이 우세하었으나, 두께가 증가됨에 따라 (111)/(110)값이 감소되었으며, 이를 통해 두께 증가에 따른 (111)배향성이 다소 감소됨을 알 수 있었다. 이상의 결과로부터 제조된 PZT 박막은 큰 힘과 높은 내전압 특성을 갖는 마이크로 압전 액츄에이터에 적용될 수 있을 것으로 생각되었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.219-220
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• 2006

In this study, m order to develop multilayer ceramics vibrator for ultrasonic nozzle, PMN-PNN-PZT ceramics were fabricated using $Li_2CO_3-Na_2CO_3$ as sintering aids and their piezoelectric and dielectric characteristics were investigated according to the aomunt of PbO. With increasing PbO contents. secondary phases were increased and phase structure were changed from tetragonal structure to rhombohedral structure and also electromechanical coupling factor were linearly decreased. At the composition ceramics with the sintering temperature of $870^{\circ}C$ and 1 mol% excess PbO, density, electromechanical coupling factor, dielectric constant, piezoelectric d constant and mechanical quality factor showed the optimum value of $7.879g/cm^2$, 0.55, 1149, 328pC/N, 1224, respectively for multilayer ceramics vibrator application for ultrasonic nozzle.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.203-204
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• 2008

In this study, in order to develop the multilayer piezoelectric actuator and ultrasonic resonator, PMN-PNN-PZT ceramics were fabricated by the variations of ball size at sintering temperature of $900^{\circ}C$ and their piezoelectric and dielectric characteristics were investigated as a function of the variations of ball size. When the ball size was 3mm$\phi$, density, dielectric constant$({\varepsilon}r)$, electromechanical coupling factor(kp) and piezoelectric d constant$(d_{33})$ were increased. At the ball size of 3mm$\phi$, the specimen showed the optimum values of density=7.909g/$cm^3$, kp=0.592, Qm=1292, $d_{33}$=368pC/N, $\varepsioln_r$=1502, respectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.12
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• pp.1034-1038
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• 2007

In order to develop the composition ceramics capable of being sintered at low temperature with high piezoelectric properties for multilayer piezoelectric actuator application, PZW-PMN-PZT system ceramics were manufactured according to sintering aid $Li_2CO_3$ addition and their microstructural, dielectric and piezoelectric properties were investigated. The crystal structure of the specimens showed a perovskite phase and no pyrochlore or other second phase was detected. At the sintering temperature of $900\;^{\circ}C,\;0.2\;wt%Li_2CO_3$ added specimen showed a optimum values of kp = 0.562, $d_{33}\;=\;360\;pC/N$ and Qm = 1184, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.290-291
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• 2007

In this study, in order to develop low temperature sintering ceramics for multilayer piezoelectric actuator, sensers, transducers, PMN-PNN-PZT ceramics were manufacrtured with the sintering temperature, and their piezoelectric and dielectric properties were investigated. At the composition ceramics sintered at $900^{\circ}C$, desity, dielectric constant$({\varepsilon}_r)$, electromechanical coupling factor(kp), piezoelectric constant$(d_{33})$ and mechanical quality factor(Qm) showed the optimal value of $7.86g/cm^3$, 1417, 0.634, 410pC/N and 1138, respectively.