• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 춘계학술대회논문집
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• pp.1004-1008
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• 2003

Near-filed optical storage using cantilever aperture tip is a promising way fer next generation optical data storage. To enhance the speed of reading and writing data, gap between tip and media should be controlled fast and precisely within near field region. In this paper, several PZT actuators are analyzed far constructing dual servo control algorithm: coarse actuators(stact. PZT, bimorph PZI) for media surface inclination and One actuator(film PZT) for media surface roughness. Dynamic analysis of stack PZT, bimorph PZT, and film PZT are performed through the frequency response. Based on the frequency response and mathematical model, fast analog controller is designed.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.502-505
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• 2005

Researches about micro technology travel lively in these days. Such many researches are concentrated in the field of materials and a process field. But properties of micro materials should be known to give results of research developed into still more. In these various material properties, mechanical property such as tensile strength, elastic modulus, etc is the basic property. To measure mechanical properties in micro or nano scale, actuating must be very precise. PZT is a famous actuator which becomes a lot of use to measure very precise mechanical properties in micro research field. But PZT has a nonlinearity which is called as hysteresis. Not precision result is caused because of this hysteresis property in PZT actuator. Therefore feedback control method is used in many researches to prevent this hysteresis of PZT actuator. Feedback control method produce a good result in processing view, but cause a loss in a resolution view. In this paper, hysteresis is compensated by open loop control method. Hysteresis property is modeled in Mathematical function and compensated control input is constructed using inverse function of original data. Reliability of this control method can be confirmed by testing nickel thin film that is used in MEMS material broadly.

• 대한기계학회논문집A
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• 제30권4호
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• pp.409-419
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• 2006

The actuating performance of plate-type unimorph piezoelectric composite actuators having various stacking sequences was evaluated by three dimensional finite element analysis on the basis of thermal analogy model. Thermal residual stress distribution at each layer in an asymmetrically laminated plate with PZT ceramic layer and thermally induced dome height were predicted using classical laminated plate theory. Thermal analogy model was applied to a bimorph cantilever beam and LIPCA-C2 actuator in order to confirm its validity. Finite element analysis considering thermal residual deformation showed that the bending behavior of piezoelectric composite actuator subjected to electric loads was significantly different according to the stacking sequence, thickness of constituent PZT ceramic and boundary conditions. In particular, the increase of thickness of PZT ceramic led to the increase of the bending stiffness of piezoelectric composite actuator but it did not always lead to the decrease of actuation distance according to the stacking sequences of piezoelectric composite actuator. Therefore, it is noted that the actuating performance of unimorph piezoelectric composite actuator is rather affected by bending stiffness than actuation distance.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.744-749
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• 2005

In this paper, a lens actuator for mobile devices is proposed using stack type piezoelectric materials. In general, the deformation of PZT actuators is not enough for lens motion when the allowed voltage is applied. The small stroke problem can be solved by accumulating a lot of small displacements in high frequency. In this paper, a new inch-worm type model for focusing actuator is suggested based on the interaction of inertial and frictional forces. Theoretical analysis and simulation using ANSYS are performed to verify the feasibility of the inch-worm PZT actuator model. Various types of clamps are considered to determine the effect of frictional force on the motion, and appropriate clamp-actuator models are proposed. The proposed models are experimentally verified and the experimental results show high correspondence with theoretical and simulated values. The inch-worm type focusing actuator enable a large stroke with 7.79 mm/sec with 10kHz and 10V.

• Journal of Electrical Engineering and Technology
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• 제6권1호
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• pp.119-122
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• 2011

A new high speed AFM probe has been proposed and fabricated. The probe is integrated with PZT actuated cantilever realized in bulk silicon wafer using heavily boron doped silicon as an etch stop layer. The cantilever thickness can be accurately controlled by the boron diffusion process. Thick SCS cantilever and integrated PZT actuator make it possible to be operated at high speed for fast imaging. The resonant frequency of the fabricated probe is 92.9 kHz and the maximum deflection is 5.3 ${\mu}m$ at 3 V. The fabricated probe successfully measured the surface of standard sample in an AFM system at the scan speed of 600${\mu}m$/sec.

• 한국항공우주학회지
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• 제35권3호
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• pp.218-224
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• 2007

PZT와 같은 압전 재료는 능동 진동 억제 분야에서 널리 사용되고 있지만 단일 PZT의 경우 장착 과정에서의 손상, 전기 누전, 낮은 피로 성능과 같은 문제가 지적되고 있다. 이러한 문제를 해결하기 위하여 개발된 LIPCA 작동기는 여러 층의 복합재료와 PZT 층으로 구성되어 있다. 본 연구에서는 LIPCA 작동기를 끝단 질량이 부착된 알루미늄 외팔보의 진동을 억제하는데 적용하였다. 양변위 되먹임 제어 알고리듬을 사용하였으며, 필터 주파수를 대상 모드의 첫 번째 고유진동수에 맞추었다. 실험적으로 구한 알루미늄 보의 고유 진동수는 유한요소 해석의 결과와 잘 일치하였다. LIPCA 작동기를 능동 진동제어에 적용할 때 효율성을 시간과 주파수 영역에서 확인하고자 하였는데, 실험 결과 PPF제어를 사용한 LIPCA 작동기가 자유 진동의 안정화 시간과 강제 진동의 진폭을 효과적으로 제어할 수 있었다. 사례 연구로 다른 두께를 가지는 보의 강제 진동 제어를 수행하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.467-468
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• 2006

In this work, we present the comparison between $d_{31}\;and\;d_{33}$ mode characterization using the PZT micro-actuator for large displacement. The PZT micro-actuator consisted of Si, PZT, and Pt layer on SOI wafer. The electrode shapes were laminated and interdigitated for $d_{31}\;and\;d_{33}$ mode, respectively. In order to characterize the actuation mode, we measured the displacement using laser interferometer. The maximum displacement of d31 mode was $12.2{\mu}m$ at 10V, the actuation characterization of d31 was better than that of d33 mode. We estimated that displacement of d33 mode would be larger than that of d31 above 30V.

• 유공압시스템학회논문집
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• 제3권2호
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• pp.1-6
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• 2006

The pressure regulator which is used for controlling the reducing pressure in the piezoelectrically driven pneumatic valve has been studied. The pneumatic valve of this study object is 2-stage type and consists of a piezoelectric actuator, a controller, a poppet valve and a pressure regulator. Nominal flow of 50 lpm, maximum operating pressure of 0.9MPa and frequency characteristic of 10Hz and over are required in this pneumatic valve, but the pressure regulator is needed because piezoelectric actuator has no ability to control the pressure of 0.9MPa directly. In this study, bimorph type PZT actuator of $25.2mm(L){\times}7.2mm(W){\times}0.5mm(H)$ with constant of $-220{\times}10-12$ CN-1 was proposed and investigated. Maximum operating force of 0.052 N and maximum displacement of $63{\mu}m$ were gotten from the fabricated PZT actuator. From the analysis results, the orifice diameter of 0.6mm for a piezoelectric actuator was derived and then the pressure regulator which can be operated under 0.15 MPa easily was designed and manufactured. Performance and effects of design parameters were simulated by the Simulink of Matlab software, and it was confirmed that the performance characteristics of manufactured pressure regulator are superior in the common use pressure range of 0.5 MPa to 0.7 MPa. The results show that the proposed pressure regulator is suitable for the pneumatic valve with a PZT actuator.

• 한국전기전자재료학회논문지
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• 제21권12호
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• pp.1071-1076
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• 2008

This paper presents the self power generation from vibration using the piezoelectric bimorph actuator. The piezoelectric bimorph actuator was well developed with PZT-PNN-Fe piezoelectric ceramics. As the applied voltage was increased, a linear change of displacement was obtained with a relatively high ratio of 12.53 um/V for the bimorph actuator. Moreover, when the motor's rotational speed was 2000 rpm, the bimorph actuator, which has a resonance frequency of 68 Hz, exhibited the most efficient generation voltage of 10.4 V. This bimorph actuator could make the LED, emitting 60 mW, working successfully. Therefore, it is anticipated that the bimorph actuator will be useful as a power source for the next-generation electronic devices.

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2003년도 춘계총회 및 연구발표회 초록집
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• pp.104.2-104
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• 2003