• 소음진동
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• 제7권6호
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• pp.967-974
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• 1997

Distributed piezoeletric sensor and actuator have been designed for efficient vibration control of a cantilevered beam. Both PZT and PVDF have been used in this study, the former as an actuator and the latter as a sensor for the integrated structure. We have optimized the position and the size of the PZT actuator and the electrode shape of the PVDF sensor. Finite element method is used to model the structure and the optimized actuators, we have designed the active electrode width of the PVDF sensor along the span of the beam. Actuator design is based on the criterion of minimizing the system energy in the control modes under a given initial condition. Model control forces for the residual (uncontrolled) modes have been minimized during the sensor design to minimize the observation spill-over. Genetic algorithm and sequential quadratic programming technique have been utilized as an optimization scheme. Discrete LQG control law has been applied to the integrated structure for real time vibration control. Performance of the sensor, the actuator, and the integrated smart structure has been demonstrated by experiments.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 춘계학술대회논문집
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• pp.852-855
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• 2008

In this paper, we proposed a new type's PZT actuator using surface acoustic wave. This actuator uses Rayleigh wave as an operational traveling wave. For the development of the actuator, each components of surface acoustic wave motor like PZT substrate, slider and IDT was studied theoretically and fabricated. For the measurement of transfer function of PZT substrate and operation of surface acoustic wave motor, network analyzer and 13.56MHz RF generator were used. Also the model which expresses the driving characteristic best was suggested and simulation was executed for the suggested model. And the future research works for improvement of SAW actuator was suggested.

• 한국소음진동공학회논문집
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• 제15권1호
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• pp.12-19
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• 2005

This paper proposed a dual actuator using Bimorph PZT for information storage device based on prove array NSOM(near-field scanning optical microscopy). The gap between the media and the optical head should be maintained within the optical tolerance. Therefore, a new actuator having high sensitivity is required. Bimorph PZT, which has fast access time and high sensitivity characteristic, is suitable for this precise actuating system. This paper is focused on derivation of mathematical model of dual Bimorph PZT actuator and control algorithm. Hamilton's principle was used for mathematical model. The model is verified by FEA(finite element analysis), and compared with experimental results. Different control algorithms were used for two Bimorph PZT actuating same direction and opposite direction. The gap between recording media and optical head was controlled within 20nm in experiment.

• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2002년도 마이크로/바이오 가시화기술부문 학술강연회
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• pp.1-7
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• 2002

This papers describes the preparation and experimental results of a micro mass detection devices based on cantilever and a diffuser-type micro pump using screen printing thick-film technologies and Si micro-machining. PZT-PCW thick films were prepared by new hybrid method based on the screen printing. By applying these PZT-PCW piezoelectric thick films on actuator, a cantilever for mass detection sensor and a micropump for microfluidic element are successfully fabricated. Resonant frequency and displacement of PZT-PCW thick film actuator in air and in liquid are measured by laser vibrometer system as a function of actuator size. The resonant frequency of PZT-PCW thick film actuator in liquid decreases order of 1/2-1/4 due to damping effect. The sensitivity of cantilever is characterized by Au deposition method which has the mass loading effect such as adsorption of protein. The Sensitivity of PZT-0.12PCW thick film cantilever is proportional to detecting area.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 추계학술대회논문집
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• pp.247-252
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• 2008

This paper presents an active vibration control of cantilever beams under disturbances by a primary force. A direct velocity feedback control using a pair of PZT actuator and a velocity sensor is considered. Variation of the stability and performance with the locations of the sensor/actuator pair is investigated. It is found that the maximum gain varies with the locations of the sensor/actuator pair significantly. The maximum gain shows a symmetric distribution along the beam length with respect to the center point, although the boundary condition of the beam is unsymmetric. The control performance is affected by the location of the primary force as well as the location of the sensor/actuator pair. The active control system can more effectively reduce the vibration when the primary force is located close to the fixed boundary.

• 한국소음진동공학회논문집
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• 제18권12호
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• pp.1293-1300
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• 2008

This paper presents an active vibration control of cantilever beams under disturbances by a primary force. A direct velocity feedback control using a pair of PZT actuator and a velocity sensor is considered. Variation of the stability and performance with the locations of the sensor/actuator pair is investigated. It is found that the maximum gain varies with the locations of the sensor/actuator pair significantly. The maximum gain shows a symmetric distribution along the beam length with respect to the center point, although the boundary condition of the beam is unsymmetric. The control performance is affected by the location of the primary force as well as the location of the sensor/actuator pair. The active control system can more effectively reduce the vibration when the primary force is located close to the fixed boundary.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.524-529
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• 2004

Recently High precision positioning device is used in many kinds of manufacturing and scientific instruments. Piezoelectric transducer is applied to the positioning devive as actuator, PZT has a high resolution, however, moving range is short. Many researcher have developed the mechanism for increasing a motion range. The types of increasing motion range mechanism with PZT are inertial slider, friction driver, ultrasonic motor, etc. In this paper we discuss the review of the hish precision actuator mechanism with PZT. Many kinds of mechanism for high precision are shown and compared.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2008년도 춘계학술대회 논문집
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• pp.247-251
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• 2008

This paper presents a micro air pump actuated by PZT actuator (synthetic jet actuator) for air supply for micro fuel cells. The synthetic jet actuators are usually created by a traditional PZT-driven actuator, which consists of a small cylindrical cavity, in/outlet channel and PZT diaphragms. To design the micro air pump, a numerical analysis has been conducted for flow characteristics with respect to various geometries. A prototype of the micro air pump, with a size of $mm{\times}mm{\times}mm$, was fabricated by PDMS replication process and was conducted performance test. To control the PZT actuator, we used the SP4423 micro chips that can be amplified input voltage to reduce the controller size and the power consumption. With a voltage of 3V at 100Hz, the air pump's pumping pressure is 600pa and its power consumption is only 0.1mW.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 추계학술대회논문집
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• pp.488-491
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• 2006

In this paper, a slim type actuator is proposed rising a bimorph PZT and a circular rotor link. The bimorph contacts the circular rotor, and its displacement generates the rotational motion of the rotor. The rotor causes the linear motion of AF and zoom lens through gear and a motion guide. The proposed model enables the actuations of many lens groups for zoom module by extending the single lens model. The important design parameter is the contact force determined by the frictional coefficient and preload between the rotor and PZT bimorph. A prototype of the single actuator model is manufactured and experiments results using LDV and tachometer are compared to the theoretical and numerical predictions. Experiments show the linear bimorph actuator model meets the performance criteria of the lens actuation, and it can be applicable to various slim type actuators for AF and zoom motions in mobile cameras.

• 대한기계학회논문집A
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• 제31권8호
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• pp.870-879
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• 2007

In this study, various damage modes in bending unimorph piezoelectric composite actuators with a thin sandwiched PZT plate during bending fracture tests have been evaluated by monitoring acoustic emission (AE) signals in terms of waveform and peak frequency as well as AE parameters. Three kinds of actuator specimens consisting of woven fabric fiber skin layers and a PZT ceramic core layer are loaded with a roller and an AE activity from the specimen is monitored during the entire loading using an AE transducer mounted on the specimen. AE characteristics from a monolithic PZT ceramic with a thickness of $250{\mu}m$ are examined first in order to distinguish different AE signals from various possible damage modes in piezoelectric composite actuators. Post-failure observations and stress analyses in the respective layers of the specimens are conducted to identify particular features in the acoustic emission signal that correspond to specific types of damage modes. As a result, the signal classification based on waveform and peak frequency analyses successfully describes the failure process of the bending piezoelectric composite actuator exhibiting diverse failure mechanisms. Furthermore, it is elucidated that when the PZT ceramic embedded actuators are loaded mechanical bending loads, the failure process of actuator specimens with different lay-up configurations is almost same irrespective of their lay-up configurations.