• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.11a
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• pp.71-81
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• 2008

This paper proposes a spectral element which can represent dynamic responses in high frequency domain such as Lamb waves on a thin plate. A two layer beam model under 2-D plane strain condition is introduced to simulate high-frequency dynamic responses induced by piezoelectric layer (PZT layer) bonded on a base plate. In the two layer beam model, a PZT layer is assumed to be rigidly bonded on a base beam. Mindlin-Herrmann and Timoshenko beam theories are employed to represent the first symmetric and anti-symmetric Lamb wave modes on a base plate, respectively. The Bernoulli beam theory and 1-D linear piezoelectricity are used to model the electro-mechanical behavior of a PZT layer. The equations of motions of a two layer beam model are derived through Hamilton's principle. The necessary boundary conditions associated with electro mechanical properties of a PZT layer are formulated in the context of dual functions of a PZT layer as an actuator and a sensor. General spectral shape functions of response field and the associated boundary conditions are formulated through equations of motions converted into frequency domain. A detailed spectrum element formulation for composing the dynamic stiffness matrix of a two layer beam model is presented as well. The validity of the proposed spectral element is demonstrated through comparison results with the conventional 2-D FEM and the previously developed spectral elements.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.1
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• pp.35-39
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• 2006

In this study, in order to develop the multilayer piezoelectric actuator and ultrasonic resonator, PMN-PNN-PZT ceramics were fabricated by sintering with $Li_2CO_3-Na_2CO_3$ as sintering aids at $950^{\circ}C$ and their piezoelectric and dielectric characteristics were investigated as a function of PNN substitution. With increasing PNN substitution, dielectric constant(${\epsilon}_r$), electromechanical coupling factor(kp), and piezoelectric d constant($d_{33}$) were increased to $12 mol\%$ PNN substitution and then showed a tendency to decrease rapidly With increasing PNN substitution, crystal structure changed from tetragonal to rhombohedral at $12 mol\%$ PNN substitution and then secondary phase was appeared and its intensity was increased. At the $12 mol\%$ PNN substituted PMN-PZT composition ceramic sintered at $950^{\circ}C$, density, kp, $d_{33}$ and Qm showed the optimum value of $7.79 g/cm^3$, 0.599, 419 pC/N, and 894, respectively for multilayer piezoelectric actuator application.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.2
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• pp.126-130
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• 2008

In this study, in order to develop low loss multilayer piezoelectric actuator, PZN-PZT ceramics were fabricated using $Li_2CO_3,\;Bi_2O_3$, CuO and ZnO as sintering aids, their structural, piezoelectric and dielectric characteristics were investigated according to the amount of ZnO addition, At the sintering temperature of $870^{\circ}C$, the density, electromechanical coupling factor(kp), mechanical quality factor(Qm), dielectric constant(${\epsilon}_r$) and piezoelectric constant($d_{33}$) of 0.4 wt% ZnO added specimen (sintered at $870^{\circ}C$) showed the optimum value of $7.812g/cm^3$, 0.535, 916, 1399, 335 pC/N respectively. Taking into consideration above piezoelectric properties of the specimen sintered at low temperature, it was concluded that PZN-PZT ceramics using 0.4 wt% ZnO as additive showed the optimum characteristics as the composition ceramics for low loss multilayer piezoelectric actuator application.

• Smart Structures and Systems
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• v.26 no.3
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• pp.391-401
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• 2020

The present article reports the feasibility of the electrical energy generation from ambient low-frequency vibration using a piezoelectric material mounted on a bimorph cantilever beam actuator. A corresponding higher-order analytical model is developed using MATLAB in conjunction with finite element method under low-frequency with both damped and undamped conditions. An alternate model is also developed to check the material and dimensional viability of both piezoelectric materials (mainly focussed to PVDF and PZT) and the base material. Also, Genetic Algorithm is implemented to find the optimum dimensions which can produce the higher values of voltage at low-frequency frequencies (≤ 100 Hz). The delamination constraints are employed to avoid inter-laminar stresses and to increase the fracture toughness. The delamination has been done using a Teflon sheet sandwiched in between base plates and the piezo material is stuck to the base plate using adhesives. The analytical model is tested for both homogenous and isotropic material characteristics of the base material and extended to investigate the effect of the different geometrical parameters (base plate dimensions, piezo layer dimensions and placement, delamination thickness and placement, excitation frequency) on the model responses of the bimorph cantilever beam. It has been observed that when the base material characteristics are homogenous, the efficiency of the model remains higher when compared to the condition when it is of isotropic material. The necessary convergence behaviour of the current numerical model has been established and checked for the accuracy by comparing with available published results. Finally, using the results obtained from the model, a prototype is fabricated for the experimental validation via a suitable circuit considering Glass fibre and Aluminium as the bimorph material.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.30 no.5
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• pp.94-100
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• 2002

This paper is concerned with the development, and performance test of LIPCA (Lightweight Piezo-composite Curved Actuator) that is lighter than other conventional piezo-composite type actuators. LIPCA is composed of top fiber composite layers with a high modulus and low CTE (Coefficient of Thermal Expansion), a middle PZT cermaic wafer, and base layers with a high modulus and high CTE. The performance of each actuator was evaluated using an actuator test system consisting of an actuator supporting jig, a high voltage actuating power supplier, and a non-contact laser measuring system. The simply supported condition actuator was excited by the power supplier with 1.0Hz cycle and up to $100\sim400V_{pp}$. The displacement at the center point of actuator was measured with non-contact laser displacement measuring system, It has been shown that the LIPCA-C2 can 34% decrease in mass and 13% increase in displacement compared to THUNDER.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.5 s.248
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• pp.576-584
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• 2006

The actuating performance test of plate-type piezoelectric composite actuators having different lay-up sequences was experimentally carried out at simply supported and fixed-free boundary conditions. The actuating displacement of manufactured plate-type piezoelectric composite actuator (PCA) was measured using a non-contact laser displacement measurement system. Our results revealed that the actuating displacement with increasing applied electric field at a drive frequency of 1Hz increased non-linearly at the simply supported boundary condition whereas it almost linearly increased at the fixed-free boundary condition. On the other hand, the actuating displacement of piezoelectric composite actuator depended on the applied electric field in a drive frequency range from 1Hz to 10Hz, but its behavior was different in higher drive frequencies beyond 15Hz due to the occurrence of resonance. On the basis of the above experimental results, the bending characteristics of PCAs revealed different behavior depending on applied electric fields, drive frequencies as well as boundary conditions. Therefore, by investigating drive frequencies together with applied electric fields, actuating performance can be easily controlled and PCAs which were fabricated for this study will be sufficiently applied to pumping devices.

• Journal of the Semiconductor & Display Technology
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• v.3 no.3
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• pp.1-4
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• 2004

Fabrication and electrical and mechanical properties of piezoelectric micro bending actuators (PMBA) using sol-gel-multi-coated thick PZT films and MEMS processes were investigated. PMBA could be used for design and fabrication of micro fluidic devices, for example, micro-pumps, micro dispensers, and so on. PMBA were fabricated using 2 um thick PZT films on Pt (350 nm)/$SiO_2$ (500 nm)/Si ($300\mu\textrm{m}$) substrates and MEMS processes. 7 types of PMBA were fabricated with areas of silicon diaphragms, PZT films and top electrodes. When the sizes of silicon diaphragms, PZT films and Pt top electrodes were reduced from 3000$\times$$1389\mu\textrm{m}$, 4000$\times$$1000\mu\textrm{m}$ and 4000$\times$$900\mu\textrm{m}$ down to 14%, 14% and 11 % of them, respectively, the center displacements of PMBA were decreased from 0.68 um to 0.10 um at 5 Hz and 12 Vpp. So, PMBA with large areas showed larger displacements than PMBA with small areas and experimental results were also good agreement with the plate and shell theory.

• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.147-150
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• 2005

Low actuation voltage and no contact stiction are the important factors to apply MEMS RF switches to mobile devices. Conventional electrostatic MEMS RF switches require several tens of voltages for actuation. In this paper we propose PAS MEMS RF switch which adopt PZT actuators and seesaw cantilevers to meet the above requirements. The fundamental structures of PAS MEMS switch were designed, optimized, and fabricated. Through the developed processes PAS SPDT MEMS RF switches were successfully fabricated on 4" wafers and they showed good electrical properties. The driving voltage was less than 5 volts. And the insertion loss was -0.5dB and the isolation was 35dB at 5GHz. The switching speed was about 5kHz. So these MEMS RF switches can be applicable to mobile communication devices or wireless multi-media devices at lower than 6GHz.

• Journal of KSNVE
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• v.8 no.6
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• pp.1093-1102
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• 1998

The success of controllability of smart structures depends on the quality of the bonding along the interface between the main structure and the attached sensing and acuating elements. Generally, the analysis procedures neglect the effect of the interfacial bond layer or assume that this bond layer behaves like viscoelastic material. Three different bond layers. two modified epoxy adhesives, and one isocyanate adhesive were prepared for their toughness and moduli. Bond layer of the chosen adhesive provides an almost perfect bonding condition between the composite structure and the PZT while bended significantly like arrow-shape. The perfect bonding condition is tested by considering various material properties of the bond layers. and based on this perfect bonding condition, the effects of the interfacial bond layer on the dynamic behavior and controllability of the test structure is experimentally studied. Once the perfect bonding condition is achieved. dynamic effects of the bond layer itself on the dynamic characteristics of the main structure is negligible. but the contribution of the attached PZT elements on the stiffness of the multi-layered structure becomes significant when the thickness of the bond layer increased.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.204-204
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• 2010

A development of device with reduced size and improved sensitivity is highly impotant Pb(Zr,Ti)$O_3$ thin films are widely used both to make actuator and sensor due to their high sensitivity and low cost. In this study, the feasibility of a piezoelectric presssure sensors based on hybrid low-temperaute co-fired ceramic (LTCC) technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 4 green tapes which consist of alumina and glass particle in an organic binder. PZT thin films were successfully prepared on between top and bottom Au electrode with LTCC substrates using RF magnetron sputtering. In addition, The frequency response characteristics of the sensor under varing pressure has been analysed. by Network Analyser (HP-8722D). A frequency shift range has been obseved from 1.7GHz to 1.8GHz with a good linearity for applied pressure from 0 psi up to 25 psi.