• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.7 s.100
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• pp.871-877
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• 2005

This paper proposes a new modeling scheme to describe the hysteresis between input voltage and displacement of piezoelectric actuators in the inchworm. From the experimental analysis of Piezoelectric actuator behaviors. the hysteresis characteristics including residual displacement can be modeled by second order functions of a maximum Input voltage and preload. Various experiments are performed to demonstrate the effectiveness and validation of the proposed modeling scheme.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2003.04a
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• pp.87-90
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• 2003

In this paper, the electromechanical displacements of curved actuators such as THUNDER are calculated by finite element method to design the optimal configuration of curved actuators. To predict the pre-stress in the device due to the mismatch in coefficients of thermal expansion, the adhesive as well as metal and PZT ceramic is also numerically modeled by using hexahedral solid elements. Because the modeling of these thin layers causes the numbers of degree of freedom to increase, large-scale structural analyses are performed in a cluster system in this study. The curved shape and pre-stress in the actuator are obtained by the cured curvature analysis. The displacement under the piezoelectric force by an applied voltage is also calculated to compare the performance of curved actuator. The thickness of metal and adhesive, the number of metal layer are chosen as design factors.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.251-252
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• 2007

In this paper, in order to spray diesel fuel, multilayer actuator structured-ultrasonic nozzle and resonant inverter were manufactured. Multilayer actuator structured-ultrasonic nozzle as fabricated using PMN-PNN-PZT ceramics showing excellent piezoelectric characteristics. Its electrical and temperature properties were measured for investigating he applicability of stable ultrasonic nozle for spraying diesel fuel.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.734-739
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• 2003

Many types of smart materials and control laws are available to actively adjust the structure from various external disturbances. Usually, a certain type of control laws to activate a specific smart material is well established, but the effectiveness of the control scheme is limited by the choice of the smart materials and the responses of the structure. ER fluid is adequate to provide relatively large control force, on the other hand, the PZT patches are suitable to provide small but arbitrary control forces at any point along the structure. It was found that active vibration control mechanism using ER fluid failed to suppress the excitation off the resonant frequency with changed structural characteristics along the frequency response function of the closed loop of the control system. To compensate this additional peak of the closed loop system, PPF control using PZT as an actuator is added to construct a hybrid controller.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.12 no.1
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• pp.245-248
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• 2012

In this paper, the optimized growing conditions of PZT thin films on low temperature co-fired ceramics (LTCC) substrates are studied. The LTCC technology is an emerging one in the fields of mesoscale (from 10 um to several hundred um) sensor and actuator against silicon based technology due to low cost, high yield, easy manufacturing of 3 dimensional structure, etc. The LTCC substrates with thickness of 400 um are fabricated by laminating 100 um green sheets using commercial power (NEG, MLS 22C). The Pt/Ti bottom electrodes are deposited on the LTCC substrates, then the growing conditions of PZT thin films using rf magnetron sputtering method are studied. The growing conditions are tested under various rf power and gas ratio of oxygen to argon. And the crystallization and ingredient of PZT films are analyzed by X-ray diffraction method (XRD) and energy dispersive spectroscopy (EDS). The optimized growing conditions of PZT thin films are rf power of 125W, Ar/O2 gas ratio of 15:5.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1282-1285
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• 2004

The high voltage driving system with multi-phase shifter including piezoelectric actuators comprised a driving power unit for outputting the driving power by converting input alternate current into direct current, a frequency shifting unit for supplying the direct current power and shifting or generating a frequency, a high-voltage amplification unit for amplifying the input signal outputted from the driving power unit and the frequency shifting unit into a high-voltage signal, and a phase shifting unit for shifting the phase difference of the amplified signal applied to the high-voltage amplification unit and driving plural piezoelectric actuators sequentially. The results that the operating voltage was stable, the voltage loss ratio was low and the response velocity was fast could be obtained. An experiment on performance of the high voltage driving system with multi-phase shifter designed and manufactured as above described was conducted by using a piezoelectric pump having 3 sheets of round unimorph piezoelectric actuators laminated respectively in a rectangular case. It sucks any fluid by causing the first piezoelectric actuator to shift from the inlet porter side, the phase delay of 60$^{\circ}$ causes the second piezoelectric actuator to begin to shift, and the phase delay of 120$^{\circ}$ causes the third piezoelectric actuator to begin to shift. As a result of measuring each change in the outlet flow rate of the piezoelectric pump, it was shown that the frequency-flow rate characteristic, the voltage-flow characteristic, and the load pressure-flow rate characteristic were improved.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.10
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• pp.601-607
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• 2016

Piezoelectric thick films of soft $Pb(Zr,Ti)O_3$ (PZT) based commercial material (S55) were fabricated using a conventional tape casting method. Ag-Pd electrodes were printed on the piezoelectric film at room temperature and all 5 layered films with a dimension of $12mm{\times}16mm$ were successfully laminated for a multi-layered piezoelectric ceramic actuator. The laminated specimens were co-fired at $1,100^{\circ}C$ for 1 h. A flat layered and dense microstructure was obtained for the $112{\mu}m$ thick piezoelectric actuator after sintering process. Thereafter, a prototype piezoelectric speaker was fabricated using the multi-layered piezoelectric ceramic actuator which can operate as a bimorph. Its SPL (sound pressure level) characteristic was also evaluated for speaker application. Frequency response revealed that the output SPL with a root mean square voltage of 10 V increased gradually to the highest peak of 87.5 dB for 1.5 kHz and exhibited a relatively stable behavior over the measured frequency range (${\leq}20kHz$) at a distance of 10 cm, implying that the fabricated piezoelectric speaker is potential for speaker applications.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.203-204
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• 2008

In this study, in order to develop the multilayer piezoelectric actuator and ultrasonic resonator, PMN-PNN-PZT ceramics were fabricated by the variations of ball size at sintering temperature of $900^{\circ}C$ and their piezoelectric and dielectric characteristics were investigated as a function of the variations of ball size. When the ball size was 3mm$\phi$, density, dielectric constant$({\varepsilon}r)$, electromechanical coupling factor(kp) and piezoelectric d constant$(d_{33})$ were increased. At the ball size of 3mm$\phi$, the specimen showed the optimum values of density=7.909g/$cm^3$, kp=0.592, Qm=1292, $d_{33}$=368pC/N, $\varepsioln_r$=1502, respectively.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.06a
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• pp.1521-1527
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• 2000

A micromirror actuated by piezoelectric unimorph cantilevers is proposed as a tine-tracking device for high-density optical data storage. Bending motions of the metal/PZT/metal unimorphs translate an integrated micromirror along the out-of-plane vertical direction. The micromirror alters the optical path of the incident laser beam and linearly steers the reflected laser beam by its out-of-plane parallel actuation. Numerical analysis shows that the actuated micromirror can satisfy the tracking speed imposed by the requirement on the access time for the high-density optical data storage up to few tens Gbitlin2 owing to the light mass of the micromirror. In this paper, preliminary characteristics of the micro-machined PZT actuated micromirror (PAM) are reported. Only a 360 nm-thick PZT film deposited by sol-gel process shows both good electrical and mechanical characteristics for the fine-tracking actuator. The micromirror can be easily actuated up to several micrometers under low voltage operation condition well below 10 volts.

• Proceedings of the SAREK Conference
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• 2005.11a
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• pp.421-426
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• 2005

Optimal design of serial connected PZT driven micro compressor was investigated. Modeling equations were derived using energy equation and mass conservation equation. The results show that mass flow rate was increased as number of connected micro compresses is increased. As pressure difference between suction port and discharge port in compressor group is increased, connected compressors have much more mass flow rate than single compressor. Mass flow rate is also increased as driving frequency is increased. And optimal design scale is suggested for highest efficiency or highest mass flow rate.