• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1824-1827
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• 2005

For application to micro fluid control systems such as ${\mu}TAS$ (Micro Total Analysis Systems) and DDS (Drug Delivery Systems), it is very significant to handle precise and minute flow rates with low pressure pulsation. In this study, a novel valveless piezoelectric pump using peristaltic motion with three disk type PZT actuators is presented. The newly devised pump with an effective size of $70mm{\times}60mm{\times}55mm$ has three actuator layers connected in series from inlet to outlet. The PZT actuator has a maximum displacement of 240 ${\mu}m$ and a maximum force of 1.6 N. When the driving voltage for PZT actuators is sequentially applied with a certain phase shift, the pumping is performed by peristaltic motion of liquid volume. The working fluid is shut off without the driving voltage. Three methods for sequential driving are proposed and experimentally investigated. First and second methods utilize an intermittent sinusoidal waveform with phase shift of $90{\circ}\;and\;120^{\circ}$, respectively. Third method uses a rectangular waveform with phase shift of $90^{\circ}$. A controller with multi-phase shifter is designed and fabricated. Then, frequency and voltage-flow rate characteristics and load pressure-flow rate characteristics are experimentally investigated to verify the validity of the developed pump.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1997.04a
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• pp.434-439
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• 1997

This paper presents the active control of a flexible plate vibration. The plate was excited by white noise point force and the control was performed by one or two piezo ceramic actuator bonded to the surface of the plate. An adaptive controller based on filtered-x or multiple filtered-x LMS algorithm was used and the controller was defined by minimizing the square of the response of error sensor. In the experiment, PZT sensor was used as an error sensor while white noise was applied as a disturbance. In the case of multiple channel control, more than 22 dB of vibration reduction was achieved. Results indicate that the vibration of a flexible plate could be controlled effectively when the piezo ceramic actuator was used with multiple filtered-x LMS algorithm.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.734-739
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• 2003

Many types of smart materials and control laws are available to actively adjust the structure from various external disturbances. Usually, a certain type of control laws to activate a specific smart material is well established, but the effectiveness of the control scheme is limited by the choice of the smart materials and the responses of the structure. ER fluid is adequate to provide relatively large control force, on the other hand, the PZT patches are suitable to provide small but arbitrary control forces at any point along the structure. It was found that active vibration control mechanism using ER fluid failed to suppress the excitation off the resonant frequency with changed structural characteristics along the frequency response function of the closed loop of the control system. To compensate this additional peak of the closed loop system, PPF control using PZT as an actuator is added to construct a hybrid controller.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.382-385
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• 2003

In this paper, in order to improve the control performance of piezoelectric actuator, an integrated control structure is proposed. The control structure consists of inverse hysteresis model , to compensate the hysteresis nonlinearty problem, and feedforward - feedback controller to give a good tracking performance. The inverse hysteresis model and neural network are used as feed-forward controller, and PID controller is used as a feedback controller. From diverse experiments it is concluded that the proposed control scheme gives good tracking performance than the classical control does.

• Journal of Aerospace System Engineering
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• v.10 no.1
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• pp.86-94
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• 2016

In this paper, position control of focal plane compensation device using piezoelectric actuator is conducted. The forcal plane compensation device installed on earth observation satellite camera compensates micro-vibration from reaction wheels. In this study, four experimental models of the open-loop compensation device are derived using MATLAB system identification toolbox in the input range of 0~50Hz. Subsequently, the PID controller for each model is designed and the performance test of each controller is conducted through MATLAB/Simulink. According to frequency response analysis of the closed-loop compensation device system, the PID controller designed for 38~50Hz input range has enough tracking performance for the whole 0~50Hz input range. The maximum output error is about $1{\mu}m$ for the input range. The simulation results has been verified by the experimental method.

• Journal of Advanced Marine Engineering and Technology
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• v.33 no.6
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• pp.918-924
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• 2009

This paper deals with the experimental assessment of the vibration suppression of the smart structures. First, we have presented the paper about the new high-speed active control system that we have developed using the DSP320C6713 microprocessor and a peripheral system composed of a data acquisition system, A/D and D/A converters, piezoelectric (PZT) actuator/sensors, and drivers using PA95. Since fast data processing is very important in the active vibration control of the structures, we utilized the fast processing DSP320C6713 microprocessor as a main processor to the controller and fast peripheral devices for fast control loop. To realize a fast active vibration control, we have analyzed and tested the processing time of the peripheral devices and provided the corresponding test results. Especially, we have focused on achieving the fast signal amplification of the PA95 device since it takes most of loop times of the control system. Finally, we performed numerous experiments of active vibration control of the aluminum plate to validate the superior performance of the developed control system based on previous mode tests of the plate.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1282-1285
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• 2004

The high voltage driving system with multi-phase shifter including piezoelectric actuators comprised a driving power unit for outputting the driving power by converting input alternate current into direct current, a frequency shifting unit for supplying the direct current power and shifting or generating a frequency, a high-voltage amplification unit for amplifying the input signal outputted from the driving power unit and the frequency shifting unit into a high-voltage signal, and a phase shifting unit for shifting the phase difference of the amplified signal applied to the high-voltage amplification unit and driving plural piezoelectric actuators sequentially. The results that the operating voltage was stable, the voltage loss ratio was low and the response velocity was fast could be obtained. An experiment on performance of the high voltage driving system with multi-phase shifter designed and manufactured as above described was conducted by using a piezoelectric pump having 3 sheets of round unimorph piezoelectric actuators laminated respectively in a rectangular case. It sucks any fluid by causing the first piezoelectric actuator to shift from the inlet porter side, the phase delay of 60$^{\circ}$ causes the second piezoelectric actuator to begin to shift, and the phase delay of 120$^{\circ}$ causes the third piezoelectric actuator to begin to shift. As a result of measuring each change in the outlet flow rate of the piezoelectric pump, it was shown that the frequency-flow rate characteristic, the voltage-flow characteristic, and the load pressure-flow rate characteristic were improved.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.304-307
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• 2004

As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.877-880
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• 2001

This paper presents the new linear motion device so called "inch-worm" which gets large displacement by incrementally summing small displacements of PZT actuators. Dynamics stiffness of inch-worm is generally low compared to its driving condition due to the requirement of inch-worm like small size and light weight. This low stiffness may degenerate the positional precision of inch-worm. An inch-worm is realized using three PZT actuators, a monolithic moving device and a guide way frame. Driving input signal is shaped to reduce the residual vibration of inch-worm by LQG controller and cycloid step input. The practical feasibility of inch-worm is also examined by running test.ning test.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.382-387
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• 2003

Many type of smart materials and control laws are available to actively adjust the structure from various external disturbances. Usually, a certain type of control law to activate a specific smart material is tell established, but the effectiveness of the control scheme is limited by the choice of the smart materials and the responses of the structure. ER fluid is adequate to provide small but arbitrary control forces at any point along the structure. It was found that active vibration control of the structure embedded with ER fluids fluidly to suppress the vibration excited with broad band frequency due to the limited change of the structure characteristics. To compensate this limited effect of the control scheme with ER fluid alone, PPF control using PZT as an actuator is added to construct a hybrid controller.