• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.756-759
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• 2004

We present a piezoelectric actuator using stiffness control and stroke amplification mechanism in order to make large lateral displacement. In this work, we suggest stiffness control approach that generates lateral displacement by increasing the vertical stiffness and reducing the lateral stiffness using additional structure. In addition, an additional structure of a serpentine spring amplifies the lateral displacement like leverage structure. The suggested lateral PZT actuator (bellows actuator) consists of serpentine spring and PZT/electrode layer which is located at the edge of the serpentine spring. The edge of the serpentine spring prevents the vertical motion of PZT layer, while the other edge of the serpentine spring makes stroke amplification like leverage structure. We have determined dimensions of the bellows actuator using ANSYS simulation. Length, width and thickness of PZT layer are 135$\mu$m, 20$\mu$m and 0.4$\mu$m, respectively. Dimensions of the silicon serpentine spring are thickness of 25$\mu$m, length of 300$\mu$m, and width of 5$\mu$m. The bellows actuator has been fabricated by SOI wafer with 25$\mu$m-top silicon and 1$\mu$m-buried oxide layer. The bellows actuator shows the maximum 3.93$\pm$0.2$\mu$m lateral displacement at 16V with 1Hz sinusoidal voltage input. In the frequency response test, the fabricated bellows actuator showed consistent displacement from 1Hz to 1kHz at 10V. From experimental study, we found the bellows actuator using thin film PZT and silicon serpentine spring generated mainly laterally displacement not vertical displacement at 16V, and serpentine spring played role of stroke amplification.

• 한국기계가공학회지
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• 제7권1호
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• pp.75-80
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• 2008

This paper presents a new precision moving instrument for the displacement and direction control using the uni-morph type PZT actuator. The instrument is composed of the two-body and a link. The body has the uni-morph type PZT actuator, which make the vibration. Movement of simple moving instrument is generally analyzed by the theory of center-of-gravity moment. However the analysis of the instrument in this paper is focused the resonance of instrument. Resonance of the body is originated a uni-morph type PZT actuator that is vibrated by voltage and frequency. The basic performances of one body instrument are analyzed by the FEM analysis. And experiments are also performed to confirm the linear movement of the instrument and direction control. it is proper a voltage control than a frequency control for the direction changing. And Moving velocity is 0.032m/s.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 춘계학술대회논문집
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• pp.888-893
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• 2004

This paper proposed a dual actuator using bimorph PZT for information storage device based on prove array NSOM(Near-field Scanning Optical Microscopy). The gap between the media and the optical head should be maintained within the optical tolerance. Therefore, a new actuator having high sensitivity is required. Bimorph PZT, which has fast access time and high sensitivity characteristic, is suitable for this precise actuating system. This paper is focused on derivation of mathematical model of dual bimorph PZT actuator and control algorithm. Hamilton's principle was used for mathematical model. The model is verified by FEA(Finite Element Analysis), and compared with experimental results. Different control algorithms were used f3r two bimorph PZT actuating same direction and opposite direction. The gap between recording media and optical head was controlled within 20nm in experiment.

• 한국기계가공학회지
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• 제7권1호
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• pp.32-37
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• 2008

This paper presents a new precision stage by using the PZT actuator and stepping motor. The stage have the precision positioning mechanism that has been developed for generation displacements with nanometer accuracy and a millimeter dynamic range simulatneously. The stage is composed not of the mechanical elastic hinge but of the clamp, and only one PZT actuator. The displacement of stage is acquired by the control of the two clamp between the PZT actuator. The results of the FEM analysis in the contact part of the clamp and basic properties of the positioning system are also presented. Using the new stage proposed in this paper.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.223-224
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• 2006

In this study, we have investigated the micromachining of PZT to fabricate interdigitated electrodes of electro active material actuator using Nd:YAG laser We have observed groove shapes of PZT with changing beam power, scanning speed, gas, and so on to find optimum conditions of the laser processing for PZT grooves. As a result, this method has been applied to the laser micromachining for grooves in PZT surface, and we could have optimum parameters of Nd:YAG laser Finally it was shown that the laser micromachining of PZT can substitute fer bonding, etching and deposition processes in fabricating electro active material actuator embedded with interdigitated electrodes.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1231-1236
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• 2007

This study presents the static and dynamic actuating performances of a bending piezoelectric actuator with a thin sandwiched PZT plate under a static load. The stored elastic energy within the actuators which occurs during a curing process is obtained through a flexural bending test. An actuating performance is evaluated in terms of an actuating displacement at the simply supported condition. The results reveal that an actuator that consists of a top layer having a high elastic modulus and a low coefficient of thermal expansion exhibits a better performance than the rest of actuators due to the formation of the large stored elastic energy within the actuator system. When actuators are excited at the alternating current voltage, the effect of PZT ceramic softening results in a slight reduction in the resonance frequency of each actuator as the applied electric field increases. It is thus suggested that the static and dynamic actuating characteristics of bending piezoelectric actuators with a thin sandwiched PZT plate should be simultaneously considered in controlling their performances.

• 비파괴검사학회지
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• 제27권6호
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• pp.541-549
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• 2007

This work describes an investigation into the feasibility of using an acoustic emission (AE) technique to evaluate the integrity of a composite actuator with a PZT ceramic under electromechanical cyclic loading. AE characteristics have been analyzed in terms of the behavior of the AE count rate and signal waveform in association with the performance degradation of the composite actuator during the cyclic tests. The results showed that the fatigue cracking of the composite actuator with a PZT ceramic occurred only in the PZT ceramic layer, and that the performance degradation caused by the fatigue damage varied immensely depending on the existence of a protecting composite bottom layer. We confirmed the correlations between the fatigue damage mechanisms and AE signal types for the actuators that exhibited multiple modes of fatigue damage; transgranular micro damage, intergranular fatigue cracking, and breakdown by a short circuiting were related to a burst type signal showing a shortly rising and slowly decaying waveform with a comparably low voltage, a continuous type signal showing a gradual rising and slowly decaying waveform with a very high voltage and a burst and continuous type signal with a high voltage, respectively. Results from the present work showed that the evolution of fatigue damage in the composite actuator with a PZT ceramic can be nondestructively identified via in situ AE monitoring and microscopic observations.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1463-1468
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• 2007

This paper presents the possibility of the electric energy harvesting using piezoelectric actuator which is operated by geared motor. The geared motor consisting of oval shape cam and speed controller was operated in the range of 40${\sim}$172rpm. The PZT actuator of $36L{\times}13W{\times}0.6H$ was used for energy harvesting and the results of the theoretical model were verified by comparing it with the measured response of a experimental setup. Experimental study for obtaining the optimal operating conditions, such as displacement variation of the PZT actuator and motor speed variation, was achieved. A power of 0.02mW at the geared motor speed of 172rpm and the PZT actuator maximum displacement of $500{\mu}m$ was measured. In this study, it was confirmed that the wind power can be used for MEMS based sensor operating and windmill health monitoring one.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.531-536
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• 2005

The purpose of this paper is to improve the hysteresis characteristics of a stack type piezoelectric actuator using system identification and tracking control. Recently, several printing methods that cost less and are faster than previous semiconductor processes have been developed for the production of electric paper and RFID. The system proposed in this study prints by spraying the molten metal, and consists of a nozzle, heating furnace, operating actuator, and an XYZ 3-axis stage, As an operating system, the piezoelectric(PZT) method has very valuable uses. However, the PZT actuator has a very big hysteresis characteristic due to the ferroelectric characteristics of the PZT element. This causes problems in the system position control characteristics and deteriorates the performance of the system. In this study, an investigation was conducted to improve the hysteresis characteristics of the PZT actuator that has an output displacement for the input voltage. The study proposed a inverse hysteresis model, a mathematic modeling method that can express the geometric relationship between voltage and displacement, in order to reduce the hysteresis of the PZT actuator. In addition, system identification and PID control methods were examined. Also, it was confirmed that the proposed control strategy gives good precision position control performance.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.233-234
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• 2010