• Title/Summary/Keyword: PVD method

Search Result 164, Processing Time 0.025 seconds

Thermal Stability of W-C-N Diffusion Barrier Deposited by RF Magnetron Sputtering Method (RF Magnetron Sputtering 방식으로 증착된 W-C-N 확산방지막의 열적 안정성 분석)

  • Yoo, Sang-Chul;Kim, Soo-In;Lee, Chang-Woo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2008.06a
    • /
    • pp.156-157
    • /
    • 2008
  • 반도체 소자 회로의 집적도가 높아짐에 따라 선폭이 감소하였고 고온 공정이 필요하게 되었다. 기존의 반도체 회로 배선 재료인 Al을 사용할 경우 소자의 속도가 느려져서 소자의 신뢰도가 떨어지고 고온공정에서의 문제가 발생되어 이를 해결하기 위한 차세대 배선 물질로 비저항이 낮은 Cu의 사용이 요구되고 있다. 하지만 Cu는 Si와의 확산이 잘 일어나기 때문에 그 사이에서 확산을 막아주는 확산방지막에 대한 필요성이 제기되었고 연구가 활발히 진행되고 있다. 본 논문에서는 Cu와 Si사이의 확산을 방지하기 위한 W-C-N 확산방지막을 물리적 기상 증착법(PVD)중 하나인 RF Magnetron Sputtering 방식을 사용하여 증착하였다. 고온 공정에서의 안정성을 알아보기 위해 $600^{\circ}C$ 부터 $900^{\circ}C$ 까지 $100^{\circ}C$ 단위로 열처리를 하였고 4-point probe 장치를 사용하여 열처리 온도에 따른 비저항 측정을 통해 W-C-N 확산방지막의 특성을 분석하였다.

  • PDF

Machinability Evaluation of the Plastic Mould Steel using AlTiN Coated Tool (AlTiN코팅공구를 사용한 플라스틱금형강의 기계가공성 평가)

  • Lee, Seung-Chul;Cho, Gyu-Jae
    • Journal of the Korean Society of Manufacturing Technology Engineers
    • /
    • v.18 no.6
    • /
    • pp.629-635
    • /
    • 2009
  • In this research, KP-4, one of the plastic mold steels, was coated with the AlTiN from one layer to four layers by the PVD method in the $\Phi$ 8mm cemented carbide ball end mill. Coated KP-4 was processed with various conditions. For example, slope of $15^{\circ}$, $30^{\circ}$ and $45^{\circ}$ the spindle rotation speed was changed from 10,000rpm to 16,000rpm, the tool feeding speed was changed from 1,300mm/min to 1,700mm/min, the depth of cut was also changed from 0.3mm to 0.9mm, and etc. Cutting component force according to the coating layer number, and surface roughness were studied. The cutting component force showed a good agreement better the up ward direction than the down ward direction under all experimental conditions. In case of the condition per the material shape, it was lessen when the tool have larger angle because the average effective diameter of the tool is larger. The surface roughness showed good condition in case of the up ward than the down ward direction. And, in the 3rd layer of AlTiN coating, it showed the most suitable condition.

  • PDF

A Mechanism Study on Formation and Reduction of Residual Li of High Nickel Cathode for Lithium-ion Batteries (층상계 하이니켈 양극재의 잔류 리튬 생성 및 저감 메커니즘 연구)

  • MinWook, Pin;Beom Tak, Na;Tae Eun, Hong;Youngjin, Kim
    • Journal of Industrial Technology
    • /
    • v.42 no.1
    • /
    • pp.7-12
    • /
    • 2022
  • High nickel layered oxide cathodes are gaining increasing attention for lithium-ion batteries due to their higher energy density and lower cost compared to LiCoO2. However, they suffer from the formation of residual lithium on the surface in the form of LiOH and Li2CO3 on exposure to ambient air. The residual lithium causes notorious issues, such as slurry gelation during electrode preparation and gas evolution during cell cycling. In this review, we investigate the residual lithium issues through its impact on cathode slurry instability based on deformed polyvinylidene fluoride (PVdF) as well as its formation and reduction mechanism in terms of inherently off-stoichiometric synthesis of high nickel cathodes. Additionally, new analysis method with anhydrous methanol was introduced to exclude Li+/H+ exchange effect during sample preparation with distilled water. We hope that this review would contribute to encouraging the academic efforts to consider practical aspects and mitigation in global high-energy-density lithium-ion battery manufacturers.

Preparation of Si/C Anode with PVA Nanocomposite for Lithium-ion Battery Using Electrospinning Method

  • Choi, Sung Il;Lee, Ye Min;Jeong, Hui Cheol;Jung, Eun-Jin;Lee, Mi Sun;Kim, Jinyoung;Kim, Yong Ha;Won, Yong Sun
    • Korean Chemical Engineering Research
    • /
    • v.56 no.1
    • /
    • pp.139-142
    • /
    • 2018
  • Silicon (Si) is a promising anode material for next-generation lithium ion batteries (LIBs) because of its high capacity of 4,200 mAh/g ($Li_{4.4}Si$ phase). However, the large volume expansion of Si during lithiation leads to electrical failure of electrode and rapid capacity decrease. Generally, a binder is homogeneously mixed with active materials to maintain electrical contact, so that Si needs a particular binding system due to its large volume expansion. Polyvinyl alcohol (PVA) is known to form a hydrogen bond with partially hydrolyzed silicon oxide layer on Si nanoparticles. However, the decrease of its cohesiveness followed by the repeated volume change of Si still remains unsolved. To overcome this problem, we have introduced the electrospinning method to weave active materials in a stable nanofibrous PVA structure, where stresses from the large volume change of Si can be contained. We have confirmed that the capacity retention of Si-based LIBs using electrospun PVA matrix is higher compared to the conservative method (only dissolving in the slurry); the $25^{th}$ cycle capacity retention ratio based on the $2^{nd}$ cycle was 37% for the electrode with electrospun PVA matrix, compared to 27% and 8% for the electrodes with PVdF and PVA binders.

ANALYSIS OF THIN FILM POLYSILICON ON GLASS SYNTHESIZED BY MAGNETRON SPUTTERING

  • Min J. Jung;Yun M. Chung;Lee, Yong J.;Jeon G. Han
    • Proceedings of the Korean Institute of Surface Engineering Conference
    • /
    • 2001.11a
    • /
    • pp.68-68
    • /
    • 2001
  • Thin films of polycrystalline silicon (poly-Si) is a promising material for use in large-area electronic devices. Especially, the poly-Si can be used in high resolution and integrated active-matrix liquid-crystal displays (AMLCDs) and active matrix organic light-emitting diodes (AMOLEDs) because of its high mobility compared to hydrogenated _amorphous silicon (a-Si:H). A number of techniques have been proposed during the past several years to achieve poly-Si on large-area glass substrate. However, the conventional method for fabrication of poly-Si could not apply for glass instead of wafer or quartz substrate. Because the conventional method, low pressure chemical vapor deposition (LPCVD) has a high deposition temperature ($600^{\circ}C-1000^{\circ}C$) and solid phase crystallization (SPC) has a high annealing temperature ($600^{\circ}C-700^{\circ}C$). And also these are required time-consuming processes, which are too long to prevent the thermal damage of corning glass such as bending and fracture. The deposition of silicon thin films on low-cost foreign substrates has recently become a major objective in the search for processes having energy consumption and reaching a better cost evaluation. Hence, combining inexpensive deposition techniques with the growth of crystalline silicon seems to be a straightforward way of ensuring reduced production costs of large-area electronic devices. We have deposited crystalline poly-Si thin films on soda -lime glass and SiOz glass substrate as deposited by PVD at low substrate temperature using high power, magnetron sputtering method. The epitaxial orientation, microstructual characteristics and surface properties of the films were analyzed by TEM, XRD, and AFM. For the electrical characterization of these films, its properties were obtained from the Hall effect measurement by the Van der Pauw measurement.

  • PDF

The Antioxidant Effect of Vitamin C and Deferoxamine on Paraquat-induced Cytotoxicity in Cultured Lymphocytes (배양림프구에서 Paraquat의 세포독성에 대한 Vitamin C와 Deferoxamine의 항산화 효과)

  • Eo Eun-Kyung;Kim Kyung-Hee
    • Journal of The Korean Society of Clinical Toxicology
    • /
    • v.4 no.1
    • /
    • pp.7-16
    • /
    • 2006
  • Purpose: As basic information of antioxidant treatments for the patient with paraquat intoxication, in human peripheral lymphocytes, the cytotoxicity of paraquat was measured, and to evaluate the antioxidant effect of vitamin C and deferoxamine against this cytotoxicity, malondialdehyde (MDA), superoxide dismutase (SOD) activity and total antioxidant status (TAS) were measured. Methods: From 10 healthy adults, after obtaining a consent, 20ml peripheral blood was collected. Experimental groups were divided to (1) control group, the group treated with an identical amount of saline, (2) P group: the group treated with paraquat only, (3) PV group: the group treated with paraquat followed by vitamin C 30 minutes later, (4) PD group: the group treated with paraquat followed by deferoxamine 30 minutes later, (5) PVD group: the group treated with paraquat followed by vitamin C 30 minutes later and subsequently deferoxamine one hour later, and (6) PDV group: the group treated with paraquat followed by deferoxamine 30 minutes later and subsequently vitamin C 1 hour later, and thus to total 6 groups. In each group, 10 samples of peripheral blood was assigned and $100{\mu}M\;paraquat,\;100{\mu}M$ vitamin C, and $100{\mu}M$ deferoxamine were used as reagent. Lymphocytes were isolated, cultured, and cytotoxicity was measured by the Microculture Tetrazolium method (MTT assay), MDA and SOD activity, and TAS concentration were measured. Results: In regard to the cytotoxicity measured in each group, their cytotoxicity was decreased in the group treated with antioxidants, in comparison with the group treated with paraquat only. In the cases that the order of the treatment of these two antioxidants was altered, viability in the PDV group $(1.077{\pm}0.121)$ was increased more that the PVD group $(0.888{\pm}0.152)$ statistically significantly (p=0.018). Concerning the amount of MDA, in comparison with the P group $(6.78{\pm}0.93{\mu}mol/L)$, after the treatment of each antioxidant, the concentration of MDA was decreased statistically significantly (p<0.05). In the group treated with two antioxidants together, in comparison with the group treated only with one antioxidant, the amount of MDA was increased statistically significantly $(PV:\;3.96{\pm}0.98{\mu}mol/L,\;PD:\;4.92{\pm}1.50{\mu}mol/L,\;PVD:\;3.22{\pm}0.83{\mu}mol/L,\;and\;PDV:\;3.42{\pm}0.95{\mu}mol/L,\;p=0.007)$. The concentration of SOD measured in the blood in each group after the administration of paraquat, in comparison with the control group, a pattern of the elevation of SOD activity and subsequent decrease was detected, however, it was not statistically significant. In the comparison of the groups treated with antioxidants, in comparison with the P group $(1419.9{\pm}265.9{\mu}mol/L)$, SOD activity was decreased statistically significantly in only the PDV group $(1176.4{\pm}238.9{\mu}mol/L)$ (p=0.017). In regard to TAS measured in each group, in comparison with the P group $(0.87{\pm}0.05{\mu}mol/L)$, in all groups treated with the antioxidants, the PV group was $1.00{\pm}0.03{\mu}mol/L$ (p=0.005), the PD group was $9.01{\pm}0.24{\mu}mol/L$ was $4.64{\pm}3.98{\mu}mol/L$ (P=0.005), and the PDV group was $9.41{\pm}0.27{\mu}mol/La$ (p=0.005), and thus total antioxidant activity was increased statistically significantly In a multiple comparison test, the PDV group showed the highest total antioxidant activity (p<0.0001). Conclusion: The result of the assessment of the antioxidant effect of vitamin C and deferoxamine on paraquat-induced cytotoxicity showed that in regard to cytotoxicity, SOD activity and TAS measurement, the best result was observed in the PDV group. Therefore, it was found that vitamin C and deferoxamine were effective antioxidants for the paraquat-induced cytotoxicity, and it suggests that the administration of deferoxamine followed by vitamin C may improve their antioxidant effect more.

  • PDF

Development of Real-time Traffic Signal Control Strategy for Coordinated Signalized Intersections under V2I Communication Environment (V2I 통신환경을 활용한 연동교차로 교통신호 실시간 제어 연구)

  • Han, Eum;Yun, Ilsoo;Lee, Sang Soo;Jang, Kitae;Park, Byungkyu
    • The Journal of The Korea Institute of Intelligent Transport Systems
    • /
    • v.17 no.3
    • /
    • pp.59-71
    • /
    • 2018
  • This study was initiated to develop an optimal signal control algorithm for coordinated signalized intersections using individual vehicle's information which can be collected in a format of prove vehicle data (PVD) via V2I (Vehicle to Infrastructure) communication environment. For developing this signal optimization algorithm, three modules were developed for phase group length computation, split distribution, and phase sequence assignment. The simulation analysis using the microscopic simulation model, Vissim, was conducted for evaluating the effectiveness of the developed algorithm. The analysis result represented that the performance of the developed algorithm is far superior to that of the fixed coordinated signal control method which is the most common signal control method for coordinated signalized intersections in Korea.

The Multi-layer Fabrication and Characteristic Performance for Dark Current Reduction of Mercury Iodide (Hgl2의 누설전류 저감을 위한 다층구조 제작 및 특성 평가)

  • Kim, Kyung-Jin;Park, Ji-Koon;Kang, Sang-Sik;Cha, Byung-Youl;Cho, Sung-Ho;Kim, Jin-Yung;Mun, Chi-Ung;Nam, Sang-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2005.07a
    • /
    • pp.388-389
    • /
    • 2005
  • In this paper, the electric properties of mercury Iodide multi-layer samples has been investigated. We measured and analyzed their performance parameters such as the X-ray sensitivity and dark-current for a mercury Iodide multi-layer X-ray detector with a dielectric layer. The digital X-ray image detector can be constructed by integrating photoconduction multi-layer that dielectric layer has characteristics of low dark-current, high X-ray sensitivity. However this process has found to have complexity on the performance of the sample. We have investigate dielectric layer that it substitute dielectric layer for HgO(Mercury Oxide). We have employed two approaches for producing the mercury Iodide sample : 1) Physical Vapor Deposition(PVD) and 2) Particle-In-Binder(PIB). In this paper fabricated by PIB Method with thicknesses ranging from approximately 180um to 240um and we could produce high-quality samples for each technique particular application. As results, the dielectric materials such as HgO between the dielectric layer and the top electrode may reduce the dark-current of the samples. Mercury Iodide multi-layer having HgO has characteristics of low dark-current, high X-ray sensitivity and simple processing. So we can acquired a enhanced signal to noise ratio. In this paper offer the method can reduce the dark-current in the X-ray detector.

  • PDF

Effects of HA and TiN Coating on the Electrochemical Characteristics of Ti-6Al-4 V Alloys for Bone Plates

  • Oh, Jae-Wook;Choe, Han-Cheol;Ko, Yeong-Mu
    • Journal of the Korean institute of surface engineering
    • /
    • v.37 no.5
    • /
    • pp.249-252
    • /
    • 2004
  • Effects of HA and TiN coating on the electrochemical characteristics of Ti-6AI-4V alloys for bone plates were investigated using various test methods. Ti-6AI-4V alloys were fabricated by using a vacuum induction furnace and bone plates were made by laser cutting and polishing. HA was made of extracted tooth sintered and then tooth ash was used as HA coating target. The TiN and HA film coating on the surface were carried on using electron-beam physical vapor deposition (EB-PVD) method. The corrosion behaviors of the samples were examined through potentiodynamic method in 0.9% NaCI solutions at $36.5\pm$$1^{\circ}C$ and corrosion surface was observed using SEM and XPS. The surface roughness of TiN coated bone plates was lower than that of tooth ash coated plates. The structure of TiN coated layer showed the columnar structure and tooth ash coated layer showed equiaxed and anisotrophic structure. The corrosion potential of the TiN coated specimen is comparatively high. The active current density of TiN and tooth ash coated alloy showed the range of about $1.0xl0^{-5}$ $A\textrm{cm}^2$, whereas that of the non-coated alloy was$ 1.0xl0^{-4}$ $A\textrm{cm}^2$. The active current densities of HA and TiN coated bone plates were smaller than that of non-coated bone plates in 0.9% NaCl solution. The pitting potential of TiN and HA coated alloy is more drastically increased than that of the non-coated alloy. The pit number and pit size of TiN and HA coated alloy decreased in compared with those of non-coated alloy. For the coated samples, corrosion resistance increased in the order of TiN coated, tooth ash coated, and non-coated alloy.

An Improved Interpolation Method using Pixel Difference Values for Effective Reversible Data Hiding (효과적인 가역 정보은닉을 위한 픽셀의 차이 값을 이용한 개선된 보간법)

  • Kim, Pyung Han;Jung, Ki Hyun;Yoon, Eun-Jun;Ryu, Kwan-Woo
    • Journal of Korea Multimedia Society
    • /
    • v.24 no.6
    • /
    • pp.768-788
    • /
    • 2021
  • The reversible data hiding technique safely transmits secret data to the recipient from malicious attacks by third parties. In addition, this technique can completely restore the image used as a transmission medium for secret data. The reversible data hiding schemes have been proposed in various forms, and recently, the reversible data hiding schemes based on interpolation are actively researching. The reversible data hiding scheme based on the interpolation method expands the original image into the cover image and embed secret data. However, the existing interpolation-based reversible data hiding schemes did not embed secret data during the interpolation process. To improve this problem, this paper proposes embedding the first secret data during the image interpolation process and embedding the second secret data into the interpolated cover image. In the embedding process, the original image is divided into blocks without duplicates, and the maximum and minimum values are determined within each block. Three way searching based on the maximum value and two way searching based on the minimum value are performed. And, image interpolation is performed while embedding the first secret data using the PVD scheme. A stego image is created by embedding the second secret data using the maximum difference value and log function in the interpolated cover image. As a result, the proposed scheme embeds secret data twice. In particular, it is possible to embed secret data even during the interpolation process of an image that did not previously embed secret data. Experimental results show that the proposed scheme can transmit more secret data to the receiver while maintaining the image quality similar to other interpolation-based reversible data hiding schemes.