• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2012.05a
• /
• pp.595-596
• /
• 2012

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.20 no.1
• /
• pp.96-100
• /
• 2011

The hydrostatic bearings have a relatively small run-out comparing to its shape error by fluid film effect in hydrostatic state as like pneumatic bearing and have a high stiffness, load capacity and damping characteristics. As there is no maintenance and semipermanent in these bearing type, it has been usually adopted as main spindle bearing for grinding machine. In this thesis, to develop hydrostatic bearing for high speed spindle, the cooler setting temperature, bearing clearance and nozzle pressure of belt-driven hydrostatic bearing are investigated. The bearing temperature is decreased, as the cooler setting temperature is lower, nozzle pressure is higher and bearing clearance is wider. The front temperature of bearing is nearly $8^{\circ}C$ higher than the rear one up to 13,000 rpm of spindle revolution. The thermal deflection of X-axis is ${\pm}16\;{\mu}m$ in range of 12,000 rpm-13,000 rpm. Therefore, it is conformed that the built-in motor hydrostatic bearing can be used to high speed spindle.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2013.05a
• /
• pp.807-808
• /
• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.769-772
• /
• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.