• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.595-596
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• 2012

• 한국생산제조학회지
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• 제20권1호
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• pp.96-100
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• 2011

The hydrostatic bearings have a relatively small run-out comparing to its shape error by fluid film effect in hydrostatic state as like pneumatic bearing and have a high stiffness, load capacity and damping characteristics. As there is no maintenance and semipermanent in these bearing type, it has been usually adopted as main spindle bearing for grinding machine. In this thesis, to develop hydrostatic bearing for high speed spindle, the cooler setting temperature, bearing clearance and nozzle pressure of belt-driven hydrostatic bearing are investigated. The bearing temperature is decreased, as the cooler setting temperature is lower, nozzle pressure is higher and bearing clearance is wider. The front temperature of bearing is nearly $8^{\circ}C$ higher than the rear one up to 13,000 rpm of spindle revolution. The thermal deflection of X-axis is ${\pm}16\;{\mu}m$ in range of 12,000 rpm-13,000 rpm. Therefore, it is conformed that the built-in motor hydrostatic bearing can be used to high speed spindle.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.807-808
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• 2013

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.769-772
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• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.