• 제목/요약/키워드: PLASMA SURFACE TREATMENT

검색결과 989건 처리시간 0.033초

MEMS 적용을 위한 비정질 상 탄소박막의 나노 스케일 마찰력 특성연구 (A study on nano-scale friction of hydrogenated amorphous carbon for application in MEMS)

  • 고명균;박종완
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.1211-1214
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    • 2003
  • The film is prepared by electron cyclotron resonance chemical vapor deposition (ECRCVD) employing CH$_4$ and H$_2$ gases. It is deposited by the control of microwave plasma power, gas flow ratio, deposition pressure, and In-situ thermal treatment temperature. The structure of a-C:H (hydrogenated amorphous carbon) thin film is analysed by FT-IR spectroscopy. The fraction sp$^3$ versus sp$^2$ bonding is very important to clear up the surface and interrace of a-C:H film properties such as nano-scale friction behavior. The sp$^3$ versus sp$^2$ bonding of a-C:H thin film is dependent on the deposition conditions, therefore. nano-scale friction behavior is dependent on the deposition conditions.

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Oxide Etcher 용 E-Chuck의 기술개발 (Development of I-Chuck for Oxide Etcher)

  • 조남인;남형진;박순규
    • 한국산학기술학회논문지
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    • 제4권4호
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    • pp.361-365
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    • 2003
  • Oxide etcher장비에서 실리콘 웨이퍼를 잡고 공정을 수행할 수 있는 단극 (unipolar) 형태의 E-chuck을 제작하였다. 단극 형태의 E-chuck을 개발하기 위하여 핵심기술인 폴리이미드 박막의 코팅기술과 알미늄 표면의 양극처리기술을 개발하였다. E-chutk은 폴리이미드 재료를 표면 물질로 사용하여 플라스마에 의한 표면 손상을 최소화하였다. Oxide etcher 장비에 사용되는 핵심 부품인 E-chuck의 제조 과정을 살펴보고 히터 내장형 E-chuck을 위한 박막형 전열체 기술을 개발하였다.

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나노구조 용사코팅층의 형성에 관한 기초적 연구 (Fundamental Study on the Formation of Nanostructured Coating Layer)

  • 김영식
    • 동력기계공학회지
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    • 제9권4호
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    • pp.90-95
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    • 2005
  • The wire-arc process is a low-cost thermal spray method simply utilizes electrical energy to melt the feedstock wire. It is more userful for field applications, especially to coat large surface area. In this paper, a special Fe-based alloy coatings by using the wire-arc process were developed. Nanoscale composite coatings were achieved either during spraying or through a post heat treatment. As-sprayed Fe-based alloy coatings had been an amorphous matrix structure, after heating to $700^{\circ}C$ for 10 minutes a solid state transformation occurred in the some fraction of amorphous matrix which resulted in the formation of nanostructured recrystallized phase. Scanning electron microscopy (SEM) and field emotional scanning electron microscope(FE-SEM) were applied to analyze the microstructure of the coatings. Additionally hardness and bend resistance of the Fe-based alloy coatings were examined, and these results were compared with those of partially stabilized zirconia(PSZ) coatings by using the plasma spray process.

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플라즈마 표면처리에 의한 Silk/PLA 복합재료의 계면접착 (Interfacial Adhesion of Silk/PLA Composite by Plasma Surface Treatment)

  • 추보영;한철희;권미연;이승구;박원호;조동환
    • 한국섬유공학회:학술대회논문집
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    • 한국섬유공학회 2003년도 가을 학술발표회 논문집
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    • pp.189-190
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    • 2003
  • 섬유강화 복합재료의 사용이 점점 증가함에 따라 구조용 및 내장재 등으로 사용된 수명이 다한 섬유강화 복합재료의 사용후 폐기가 문제가 되고 있다. 특히, 자동차 부품, 건축자재 및 전기절연재 등으로 가장 많이 사용되는 유리섬유 복합재료의 폐기물이 급격히 증가하여 환경 오염문제가 심각해지고 있어서, 환경 친화적인 새로운 복합재료에 대한 필요성이 제기되어 왔다. 따라서 본 연구에서는 천연섬유를 이용한 천연섬유/생분해성 수지계 복합소재를 대상으로 환경적합성이 우수하고 자연환경에서 완전한 생분해성을 가지며, 유리 섬유복합재료를 대체할 물성이 우수한 새로운 Biocomposite를 개발하고자 하였다. (중략)

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전기영동법에의해 제작된 Pl 박막의 표면처리 조건이 감습 특성에 미치는 영향 (The effect of surface treatment of Pl Thin Film Prepared by Electrodporetic method on the characteristics of Humidity Sensing)

  • 정승용;김종석;박강식;한상옥;이덕출
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1997년도 하계학술대회 논문집 C
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    • pp.1531-1533
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    • 1997
  • We prepared polyimide film by electrophoretic deposition onto glass film as a sensing materials of humidity, and treated with plasma discharging as a function of discharging power to improve performance of the sensor. Then evaluated the characteristics of polyimide on humidity.

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Glucose Transporters and Insulin Action : Some Insights into Diabetes Management

  • Jung, Chan-Y.;Lee, Wan
    • Archives of Pharmacal Research
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    • 제22권4호
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    • pp.329-334
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    • 1999
  • Insulin stimulates glucose uptake in muscle and adipose cells primarily by recruiting GLUT4 from an intracellular storage pool to the plasma membrane. Dysfunction of this process known as insulin resistance causes hyperglycemia, a hallmark of diabetes and obesity. Thus the understanding of the mechanisms underlying this process at the molecular level may give an insight into the prevention and treatment of these health problems. GLUT4 in rat adipocytes, for example, constantly recycles between the cells surface and an intracellular pool by endocytosis and exocytosis, each of which is regulated by an insulin-sensitive and GLUT4-selective sorting mechanism. Our working hypothesis has been that this sorting mechanism includes a specific interaction of a cytosolic protein with the GLUT4 cytoplasmic domain. Indeed, a synthetic peptide of the C-terminal cytoplasmic domain of GLUT4 induces an insulin-like GLUT4 recruitment when introduced in rat adipocytes. Relevance of these observations to a novel euglycemic drug design is discussed.

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대기압 플라즈마 처리에 의한 표면 특성 변화 (Surface Characteristics by Atmospheric Pressure Plasma Treatment)

  • 이창호;이현철;송현직;전병준;이광식
    • 한국조명전기설비학회:학술대회논문집
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    • 한국조명전기설비학회 2008년도 추계학술대회 논문집
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    • pp.265-268
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    • 2008
  • 본 연구에서는 대기압 플라즈마의 처리 조건에 따른 Tri-acteyl-cellulose (TAC) 필름의 접착력 향상을 위한 접촉각 및 표면에너지의 변화를 관찰하였다. 대기압 플라즈마의 처리 변수로는 처리 속도, 방전 전력, 시료와 플라즈마 헤드 사이의 간격 및 $N_2$ 가스 유속이며, 각각의 처리 변수가 TAC 필름의 표면 특성 변화에 미치는 영향을 조사하였다. 실험결과 방전전력 및 $N_2$ 유량이 증가할수록 접촉각은 낮아지고 표면에너지는 증가하였다. 그리고 시료와 플라즈마 헤드 사이의 방전 간격은 2[mm]에서 접촉각이 낮고 표면에너지가 높게 나타나 TAC 필름의 접착력 향상을 위한 친수성 물질로 표면 개질됨을 확인할 수 있었다.

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Routes to Improving Performance of Solution-Processed Organic Thin Film Transistors

  • Li, Flora M.;Hsieh, Gen-Wen;Nathan, Arokia;Beecher, Paul;Wu, Yiliang;Ong, Beng S.;Milne, William I.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.1051-1054
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    • 2009
  • This paper investigates approaches for improving effective mobility of organic thin film transistors (OTFTs). We consider gate dielectric optimization, whereby we demonstrated >2x increase in mobility by using a silicon-rich silicon nitride ($SiN_x$) gate dielectric for polythiophene-based (PQT) OTFTs. We also engineer the dielectric-semiconductor ($SiN_x$-PQT) interface to attain a 27x increase in mobility (up to 0.22 $cm^2$/V-s) using an optimized combination of oxygen plasma and OTS SAM treatments. Augmentative material systems by combining 1-D nanomaterials (e.g., carbon nanotubes, zinc oxide nanowires) in an organic matrix for nanocomposite OTFTs provided a further boost in device performance.

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Fabrication of Micro Wall with High Aspect Ratio using Iterative Screen Printing

  • Yoon, Seong-Man;Jo, Jeong-Dai;Yu, Jong-Su;Yu, Ha-Il;Kim, Dong-Soo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.1486-1489
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    • 2009
  • Micro wall is fabricated using iterative screen printing that it is able to fabricate the pattern as low cost, simple process, formation of pattern at large area on the various substrates. In the process of micro wall fabrication using screen printing, the printing result with pressure change in process and improvement of surface roughness using hydrophillic plasma treatment are included. Height of micro wall increase linearly and precision of iteration is very high. Error rate of printed pattern width is very high, but change rate of width is under 10 %. Fabricated micro pattern have minimum width $48.75{\mu}m$ and maximum height $75.45{\mu}m$ with aspect ratio 1.55.

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Preparation and characterization of high transmittance and low resistance index matched transparent conducting oxide coated glass for liquid crystal on silicon panel

  • Jang, Chang-Young;Paik, Woo-Sung;Choi, Bum-Ho;Kim, Young-Back;Lee, Jong-Ho
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.1415-1417
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    • 2009
  • High transmittance and low resistance index matched transparent conducting oxide (IMTCO) coated glass was prepared and characterized. IMTCO was deposited by RF magnetron sputtering with the thickness of 15nm and 90nm thick anti-reflection layer was evaporated. To modify surface to hydrophilic, in-situ plasma treatment was also performed. IMTCO coated glass exhibited 96.6% of transmittance in the wavelength range of 400~700nm which is relatively high value compared to commercially available IMTCO glass. The sheet resistance uniformity was measured to be 1.53%.

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