Characterization of the Crystallized ITO Thin Films Grown at Different Temperatures by Off-axis RF Magnetron Sputtering (유연성 기판 위에 증착된 ITO 박막의 공정 온도에 따른 전기적·광학적 특성 평가)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.26 no.5
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- pp.397-400
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- 2013