• Title/Summary/Keyword: PE film

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Development of Space Divided PE-ALD System and Process Design for Gap-Fill Process in Advanced Memory Devices (차세대 메모리 디바이스Gap-Fill 공정 위한 공간 분할 PE-ALD개발 및 공정 설계)

  • Lee, Baek-Ju;Hwang, Jae-Soon;Seo, Dong-Won;Choi, Jae-Wook
    • Journal of the Korean institute of surface engineering
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    • v.53 no.3
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    • pp.124-129
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    • 2020
  • This study is for the development of high temperature ALD SiO2 film process, optimized for gap-fill process in manufacturing memory products, using a space-divided PE-ALD system equipped with an independent control dual plasma system and orbital moving unit. Space divided PE-ALD System has high productivity, and various applications can be applied according to Top Lid Design. But space divided ALD system has a limitation to realize concentric deposition map due to process influence due to disk rotation. In order to solve this problem, we developed an orbit rotation moving unit in which disk and wafer. Also we used Independent dual plasma system to enhance thin film properties. Improve productivity and film density for gap-fill process by having deposition and surface treatment in one cycle. Optimize deposition process for gap-fill patterns with different depths by utilizing our independently controlled dual plasma system to insert N2and/or He plasma during surface treatment, Provide void-free gap-fill process for high aspect ratio gap-fill patterns (up to 50:1) with convex curvature by adjusting deposition and surface treatment recipe in a cycle.

Storage of Rice Cake made of Black Rice and Brown Rice using Flexible Packaging Materials (유연성 플라스틱 포장재를 이용한 흑미 쌀 과자의 저장)

  • 이진철;김종대;은종방
    • Food Science and Preservation
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    • v.6 no.3
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    • pp.281-285
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    • 1999
  • Physical and chemical changes of black rice cake were investigated to determine its packaging material during storage. Black rice cake was packaged with polyethylene(PE) or polypropylene(PP) film and stored in RH 65% at 20$^{\circ}C$ for 5 months. There were no differences between PP and PE films for color, hardness and rancidity during storage, while weight change and water activity were slightly different between two films. Weight and water activity of black rice cakes packaged with PE or PP were increased during storage. Weight change and water activity of PE were slightly higher than those of PP. In conclusion, quality changes of black rice cake packaged with flexible packaging materials were little different between PP and PE during storage.

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Efficacy Test of Mating Disruptors Against Peach Fruit Moth, Grapholita molesta, using Polypropylene Dispenser Containing Ester Wax (에스테르 왁스가 함유된 폴리프로필렌 방출기 제조와 복숭아순나방 교미교란 효과 검정)

  • Yoon, Ji Young;Kim, Da Eun;Im, Yu Na;Lee, Ji Sung;Yang, Chang Yeol;Kim, Jong-Duk
    • Korean journal of applied entomology
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    • v.54 no.4
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    • pp.369-374
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    • 2015
  • Grapholita molesta (GM) has been considered as a major problem to apple and peach orchards. Mating disrupters have been applied to control the pest over the world as an Integrated Pest Management [IPM] tool. Various types of dispensers releasing mating disrupters have been developed with different formulation of wax, polyethylene tube and aerosol. In this study, the dispensers that were composed of ester waxes and polypropylene (PP) film were used as dispenser materials to analyze release pattern of GM pheromone compared with paraffin wax and polyethylene (PE) film. The release pattern in PP film group was consistent with time while PE film group irregular. Based on these results, Japan wax_PP film dispenser (Japan_PP) was manufactured and showed the mating disruption effect of 98% during 5months in peach orchard.

Low Temperature Plasma-Enhanced Atomic Layer Deposition Cobalt

  • Kim, Jae-Min;Kim, Hyeong-Jun
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.11a
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    • pp.28.2-28.2
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    • 2009
  • Cobalt thin film was fabricated by a novel NH3-based plasma-enhanced atomic layer deposition(PE-ALD) using Co(CpAMD) precursor and $NH_3$ plasma. The PE-ALD Co thin films were produced well on both thermally grown oxide (100 nm) $SiO_2$ and Si(001) substrates. Chemical bonding states and compositions of PE-ALD Co films were analyzed by XPS and discussed in terms of resistivity and impurity level. Especially, we successfully developed PE-ALD Code position at very low growth temperature condition as low as $T_s=100^{\circ}C$, which enabled the fabrication of Co patterns through lift-off method after the deposition on PR patterned substrate without any thermal degradation.

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Effect of Packaging Methods and Temperatures on the Shelf-life of Korean Yam(Dioscorea opposita Thumb.) during Marketing (포장방법 및 온도가 유통중 마의 품질에 미치는 영향)

  • 김찬용;서영진
    • Food Science and Preservation
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    • v.4 no.2
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    • pp.139-146
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    • 1997
  • The influence of packaging methods(0.03mmPE, 0.05mmPE, 0.1mmPVC, VACUUM) and marketing temperatures(2$0^{\circ}C$, 1$0^{\circ}C$) on the shelf-life and quality were investigated in yam(Dioscorea). Respiration, weight-loss and rotting-rate was reduced in polyethylene film packaging in the order of VACUUM, 0.1mmPVC, 0.05mmPE, 0.03mmPE and the effect was more outstanding at 1$0^{\circ}C$ than 2$0^{\circ}C$. The ethylene concentration of PVC packaging group was higher than that of other packaging methods, which was related with sprouting. firmness was higher in low-temperature than in room-temperature. PPO activity was lower in vacuum than in other packaging methods, which was associated with browning. The shelf-life of yam was the longest in vacuum Packaging, 3 weeks at 2$0^{\circ}C$ and more than 4 weeks at 1$0^{\circ}C$.

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Surface energy change and hydrophilic formation of PE, PS and PTFE films modification by hydrogen ion assisted reaction

  • Jung Cho;Ki Hyun;Koh, Seok-Keun
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.202-202
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    • 1999
  • The Polyethylene (PE), Polystyrene (PS) and Polytetrafluoroethylene (PTFE) surface modification was investigated by hydrogen io assisted reaction (H-IAR) in oxygen environment. The IAR is a kind of surface modification techniques using ion beam irradiation in reactive gas environment. The energy of hydrogen ion beam was fixed at 1keV, io dose was varied from 5$\times$1014 to 1$\times$1017 ions/$\textrm{cm}^2$, and amount of oxygen blowing gas was fixed 4ml/min. Wettability was measured by water contact angles measurement, and the surface functionality was analyzed by x-ray photoelectron spectroscopy. The contact angle of water on PE modified by argon ion beam only decrease from 95$^{\circ}$ to 52$^{\circ}$, and surface energy was not changed significantly. But, the contact angle using hydrogen ion beam with flowing 4ml/min oxygen stiffly decreased to 8$^{\circ}$ and surface energy to 65 ergs/cm. In case of PS, the contact angle and surface energy changes were similar results of PE, but the contact angle of PTEE samples decreased with ion dose up to 1$\times$1015 ions/$\textrm{cm}^2$, increased at higher dose, and finally increased to the extent that no wetting was appeared at 1$\times$1017 ions/$\textrm{cm}^2$. These results must be due to the hydrogen ion beam that cleans the surface removing the impurities on polymer surfaces, then hydrogen ion beam was activated with C-H bonding to make some functional groups in order to react with the oxygen gases. Finally, unstable polymer surface can be changed from hydrophobic to hydrophilic formation such as C-O and C=O that were confirmed by the XPS analysis, conclusionally, the ion assisted reaction is very effective tools to attach reactive ion species to form functional groups on C-C bond chains of PE, PS and PTFE.

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Cold Storage, Packing and Salting Treatments Affecting the Quality Characteristics of Winter Chinese Cabbages (월동 배추의 저온 저장 방법별 포장 및 염장 처리에 따른 품질 특성)

  • Lee, Jung-Soo;Choi, Ji-Won;Chung, Dae-Sung;Lim, Chai-Il;Park, Su-Hyung;Lee, Youn-Suk;Lim, Sang-Chul;Chun, Chang-Hoo
    • Food Science and Preservation
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    • v.14 no.1
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    • pp.24-29
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    • 2007
  • Quality changes in winter Chinese cabbages were evaluated during low temperature storage. Flesh and salt-treated Chinese cabbages were put into (a) polyethylene (PE) film sacks (size: $40cm{\times}60cm$, thickness: 0.03 mm, with four perforations each 8 mm in diameter), (b) plastic containers or (c) polypropylene (PP) nets and stored at $0^{\circ}C$. Also, Cabbages were also wrapped in newspapers and stored underground where the average temperature was $2.7^{\circ}C$. The weight loss rates of Chinese cabbages stored in PP nets and plastic containers were greater than those of cabbages stored with PE or wrapped in newspaper. Chinese cabbages wrapped in newspaper and stored underground needed much greater trimming compared to cabbages stored in other ways. The firmness and the soluble solid contents of Chinese cabbages were not affected by the various storage treatments. A better appearance was retained when Chinese cabbages were stored in PE film sacks. Chinese cabbages in PE film sacks stored at $0^{\circ}C$ showed delayed weight loss, less trimming loss, and less change in appearance. The quality changes in salted Chinese cabbages (desalting losses, pH changes, osmolarities, and crude fiber content) were not significantly different after the various treatments. No storage treatment was effective in maintaining a high quality of salted winter Chinese cabbage.

Preparation of Antioxidative Polyethylene Film and Its Effects on the Lipid Oxidation of Semi-dried Squid during Storage (항산화 성분을 함유한 PE 필름이 반건오징어 저장 중 지질산화에 미치는 영향)

  • Kim Young-Myung;Park Hyung-Woo;Byun Jee-Young;Kim Kwang-Ho
    • The Korean Journal of Food And Nutrition
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    • v.18 no.1
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    • pp.19-27
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    • 2005
  • Antioxidative polyethylene films for food packaging were experimentally prepared by fortification of TBHQ(tertiary butylhydroquinone) and dl-a-tocopherol at the weight ratio of 0.05, 0.2 and 0.5%, respectively and laminated with nylon. TBHQ and tocopherol contents in the PE/nylon film were analyzed and the antioxidative effects of film were investigated on the lipid oxidation of semi-dried squid during storage at 5℃ and l5℃. TBHQ contents of TAP 1(TBHQ 0.05%), TAP 2(TBHQ 0.2%) and TAP 3(0.5%) were 38, 146 and 365 mg/100g, respectively. Tocopherol contents of DAP l(tocopherol 0.05%), DAP 2(tocopherol 0.2%) and DAP 3(tocopherol 0.5%) were 33, 139 and 356 mg/l00g, respectively. TBA value and POV during storage of semi-drid squid were affected both by storage temperatures and packaging films. Lipid oxidation during storage was retarded by anti-oxidative films, as TBA value of TAP 3 and DAP 3 revealed about 50% of control after storage at 5℃ for 20 days and similer effects in POV were also observed.