• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.703-704
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• 2010

• 전기학회논문지
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• 제63권5호
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• pp.671-675
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• 2014

This paper presents a fabrication of hydrophilic Poly(dimethylsiloxane) (PDMS) with periodic wrinkling surface. The proposed periodic wrinkling surface was fabricated using the sequential processes of typical curing process of PDMS, cutting process, platinum deposition process, and wrinkling transfer process. The surface morphology of the fabricated wrinkling surface was observed by using optical and dynamic atomic force microscopy and discussed. The measured period and amplitude of wrinkling was about $2.2{\mu}m$ and $0.31{\mu}m$, respectively. And, the contact angles of water droplets on the wrinkled surface were measured in order to understand effect of the wrinkling surface on surface modification of hydrophobic PDMS. Our new finding was that the proposed wrinkling surface was hydrophilic and the measured contact angle was about $62^{\circ}$. Moreover, it was found out from the simple cell culture test that the fabricated wrinkling surface was more effective for cell spreading and adhesion than the case of native PDMS substrate.

• 한국생산제조학회지
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• 제22권5호
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• pp.831-836
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• 2013

This study demonstrates the process of fabricating patterns using tribonanolithography (TNL),with laboratory-made micro polycrystalline diamond (PCD) tools that are attached to an atomic force microscope (AFM). The various patterns are easily fabricated using mechanical scratching, under various normal loads, using the PCD tool on single crystal silicon, which is the master mold for replication in this study. Then, polydimethylsiloxane (PDMS) replica molds are fabricated using precise pattern transfer processes. The transferred patterns show high dimensional accuracy as compared with those of TNL-processed silicon micro molds. TNL can reduce the need for high cost and complicated apparatuses required for conventional lithography methods. TNL shows great potential in that it allows for the rapid fabrication of duplicated patterns through simple mechanical micromachining on brittle sample surfaces.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2017년도 춘계학술대회 논문집
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• pp.142-142
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• 2017

High Flory-Huggins interaction parameter (${\chi}$)를 가지는 polystyrene-block-dimethylsiloxane (PS-b-PDMS)는 초미세 패턴 제작과 우수한 defect density, 우수한 edge roughness 특성으로 향상된 패턴을 제공한다는 점에서 반도체 분야에서 많은 연구가 되고 있다. 하지만, PS와 PDMS 사이에 존재하는 큰 surface tension의 차이로 인해 PDMS는 PS와 air 사이에서 segregate되기 때문에 수직배향에 불리하여 high aspect ratio (HAR)을 가지는 cylinder, lamellar 패턴 제작에 있어 큰 어려움을 가진다. 본 연구에서는 이러한 문제를 해결하기 위해, PS-b-PDMS BCP 패턴과 하부 실리콘 기판 사이에 amorphous carbon layer (ACL)를 삽입하여 효과적으로 pattern transfer하는 공정을 연구하였다. 플라즈마를 이용하여 무한대에 가까운 etch selectivity를 가지는 식각 공정을 개발함으로써 낮은 aspect ratio를 가지는 PS-b-PDMS BCP 패턴의 한계점을 극복하였다. Large-x value를 가지는 BCPs를 이용하여도 매우 높은 aspect ratio를 가지면서 동시에 pattern quality를 향상시킬 수 있는 plasma process를 제시하였다.

• 접착 및 계면
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• 제20권1호
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• pp.23-28
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• 2019

본 연구에서는 마이크로 또는 나노 입자 형상을 폴리디메틸실록산 (PDMS)에 전사시켜 건식접착제를 제조하고 특성에 대하여 고찰하였다. 20 nm, 40 nm, 70 nm의 직경을 가지는 구리 나노 입자형상과 $5{\mu}m$의 직경을 가지는 폴리메틸메타아크릴레이트 (PMMA) 마이크로 입자 형상을 전사시켜 PDMS 건식 접착제를 제조하였다. 입자의 종류 및 크기가 변화함에 따라 건식 접착제의 기계적 특성, 인장 접착강도, 표면 형상, 접촉각, 광학적 성질에 미치는 영향을 조사하였다. 20 nm 직경을 가지는 구리 나노 입자를 전사시켜 얻은 건식 접착제는 bare PDMS 필름에 비하여 300% 이상 향상된 인장 접착강도를 가졌다. 나노 입자를 전사시켜 얻은 큰 표면적 건식 접착제 구조가 높은 인장 접착강도를 부여하는 원인으로 추정된다. 본 연구결과는 나노 입자를 전사시키는 방법이 PDMS 건식 접착제의 제조에 있어 쉽고 효과적임을 시사한다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.87-87
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• 2010

We report a new patterning technique of inorganic materials by using thin-film transfer printing (TFTP) with atomic layer deposition. This method consists of the atomic layer deposition (ALD) of inorganic thin film and a nanotransfer printing (nTP) that is based on a water-mediated transfer process. In the TFTP method, the Al2O3 ALD growth occurs on FTS-coated PDMS stamp without specific chemical species, such as hydroxyl group. The CF3-terminated alkylsiloxane monolayer, which is coated on PDMS stamp, provides a weak adhesion between the deposited Al2O3 and stamp, and promotes the easy and complete release of Al2O3 film from the stamp. And also, the water layer serves as an adhesion layer to provide good conformal contact and form strong covalent bonding between the Al2O3 layer and Si substrate. Thus, the TFTP technique is potentially useful for making nanochannels of various inorganic materials.

• 전기학회논문지
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• 제56권8호
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• pp.1424-1429
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• 2007

This paper presents a simple and reliable one-touch type multi-immunosensing lab-on-a-chip (LOC) detecting antibodies as multi-disease markers using electrochemical method suitable for a portable point-of-care system (POCS). The multi-stacked LOC consists of a PDMS space layer for liquids loading, a PDMS valve layer with 50 im in height for the membrane, a PDMS channel layer for the fluid paths, and a glass layer for multi electrodes. For the disposable immunoassay which needs sequential flow control of sample and buffer liquids according to the designed strategies, reliable and easy-controlled on-chip operation mechanisms without any electric power are necessary. The driving forces of sequential liquids transfer are the capillary attraction force and the pneumatic pressure generated by air bladder push. These passive fluid transport mechanisms are suitable for single-use LOC module. Prior to the application of detection of the antibody as a disease marker, the model experiments were performed with anti-DNP antibody and anti-biotin antibody as target analytes. The flow test results demonstrate that we can control the fluid flow easily by using the capillary stop valve and the PDMS check valves. By the model tests, we confirmed that the proposed LOC is easily applicable to the bioanalytic immunosensors using bioelectrocatalysis.

• 한국진공학회지
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• 제22권4호
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• pp.198-203
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• 2013

에너지 수확은 우리주변에 존재하는 버려지는 에너지를 유용한 전기에너지로 변환하는 기술이다. 마찰전기 소자는 접촉을 통한 정전기를 유도하는 원리로 동력학적 에너지를 전기에너지로 전환하는 소자이다. 본 연구에서는 소프트 식각 기술을 활용하여 제작 단계를 최소화한 마찰전기 에너지 수확소자를 개발하고, 그 전기적 특성을 측정하였다. 마찰전기를 통한 발전은 마이크로패턴을 통해 마이크로 거칠기를 가진 알루미늄 층과 PDMS 층 사이에서 발생한다. 이때 PDMS 층의 마이크로 패턴은 마스크리스 식각을 통해 만들어진 알루미늄 층의 마이크로 패턴을 소프트 식각법으로 바로 본뜨는 방식으로 제작되었다. 본 소자는 2 V와 20 nA의 발전 성능을 나타낸다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.297.2-297.2
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• 2016

Photoacoustic generation of ultrasound is an effective approach for development of high-frequency and high-amplitude ultrasound transmitters. This requires an efficient energy converter from optical input to acoustic output. For such photoacoustic conversion, various light-absorbing materials have been used such as metallic coating, dye-doped polymer composite, and nanostructure composite. These transmitters absorb laser pulses with 5-10 ns widths for generation of tens-of-MHz frequency ultrasound. The short optical pulse leads to rapid heating of the irradiated region and therefore fast thermal expansion before significant heat diffusion occurs to the surrounding. In this purpose, nanocomposite thin films containing gold nanoparticles, carbon nanotubes (CNTs), or carbon nanofibers have been recently proposed for high optical absorption, efficient thermoacosutic transfer, and mechanical robustness. These properties are necessary to produce a high-amplitude ultrasonic output under a low-energy optical input. Here, we investigate carbon nanotube (CNT)-polydimethylsiloxane (PDMS) composite transmitters and their nanostructure-originated characteristics enabling extraordinary energy conversion. We explain a thermoelastic energy conversion mechanism within the nanocomposite and examine nanostructures by using a scanning electron microscopy. Then, we measure laser-induced damage threshold of the transmitters against pulsed laser ablation. Particularly, laser-induced damage threshold has been largely overlooked so far in the development of photoacoustic transmitters. Higher damage threshold means that transmitters can withstand optical irradiation with higher laser energy and produce higher pressure output proportional to such optical input. We discuss an optimal design of CNT-PDMS composite transmitter for high-amplitude pressure generation (e.g. focused ultrasound transmitter) useful for therapeutic applications. It is fabricated using a focal structure (spherically concave substrate) that is coated with a CNT-PDMS composite layer. We also introduce some application examples of the high-amplitude focused transmitter based on the CNT-PDMS composite film.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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• pp.155-158
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• 2007

Printed organic thin-film transistor(OTFT) to use as a switching device for an organic light emitting diode(OLED) were fabricated in the microcontact printing and direct printing processes at room temperature. The gate electrodes($5{\mu}m$, $10{\mu}m$, and $20{\mu}m$) of OTFT was fabricated using microcontact printing process, and source/drain electrodes ($W/L=500{\mu}m/5{\mu}m$, $500{\mu}m/10{\mu}m$, and $500{\mu}m/20{\mu}m$) was fabricated using direct printing process with hard poly(dimethylsiloxane)(h-PDMS) stamp. Printed OTFT with dielectric layer was formed using special coating system and organic semiconductor layer was ink-jet printing process. Microcontact printing and direct printing processes using h-PDMS stamp made it possible to fabricate printed OTFT with channel lengths down to $5{\mu}m$, and reduced the process by 20 steps compared with photolithography. As results of measuring he transfer characteristics and output characteristics of OTFT fabricated with the printing process, the field effect characteristic was verified.